TWI367611B - Euv light source mirror and method for fabricating the same, euv light source mirror assembly and method for fabricating and aligning a light source collector mirror - Google Patents

Euv light source mirror and method for fabricating the same, euv light source mirror assembly and method for fabricating and aligning a light source collector mirror

Info

Publication number
TWI367611B
TWI367611B TW096127084A TW96127084A TWI367611B TW I367611 B TWI367611 B TW I367611B TW 096127084 A TW096127084 A TW 096127084A TW 96127084 A TW96127084 A TW 96127084A TW I367611 B TWI367611 B TW I367611B
Authority
TW
Taiwan
Prior art keywords
light source
fabricating
mirror
euv light
aligning
Prior art date
Application number
TW096127084A
Other languages
English (en)
Chinese (zh)
Other versions
TW200820526A (en
Inventor
Norbert R Bowering
Igor V Fomenkov
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of TW200820526A publication Critical patent/TW200820526A/zh
Application granted granted Critical
Publication of TWI367611B publication Critical patent/TWI367611B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4998—Combined manufacture including applying or shaping of fluent material
    • Y10T29/49982—Coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
TW096127084A 2006-08-16 2007-07-25 Euv light source mirror and method for fabricating the same, euv light source mirror assembly and method for fabricating and aligning a light source collector mirror TWI367611B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/505,177 US7843632B2 (en) 2006-08-16 2006-08-16 EUV optics

Publications (2)

Publication Number Publication Date
TW200820526A TW200820526A (en) 2008-05-01
TWI367611B true TWI367611B (en) 2012-07-01

Family

ID=39082516

Family Applications (2)

Application Number Title Priority Date Filing Date
TW096127084A TWI367611B (en) 2006-08-16 2007-07-25 Euv light source mirror and method for fabricating the same, euv light source mirror assembly and method for fabricating and aligning a light source collector mirror
TW100131687A TWI489155B (zh) 2006-08-16 2007-07-25 極遠紫外光光學部件

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW100131687A TWI489155B (zh) 2006-08-16 2007-07-25 極遠紫外光光學部件

Country Status (5)

Country Link
US (3) US7843632B2 (enExample)
JP (2) JP2010500776A (enExample)
KR (2) KR20130119012A (enExample)
TW (2) TWI367611B (enExample)
WO (1) WO2008020965A2 (enExample)

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US20140176926A1 (en) 2014-06-26
JP2010500776A (ja) 2010-01-07
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KR20090040434A (ko) 2009-04-24
US20110075253A1 (en) 2011-03-31
US8598549B2 (en) 2013-12-03
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US8907310B2 (en) 2014-12-09
TW201213892A (en) 2012-04-01

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