TWI349163B - - Google Patents

Info

Publication number
TWI349163B
TWI349163B TW095120076A TW95120076A TWI349163B TW I349163 B TWI349163 B TW I349163B TW 095120076 A TW095120076 A TW 095120076A TW 95120076 A TW95120076 A TW 95120076A TW I349163 B TWI349163 B TW I349163B
Authority
TW
Taiwan
Application number
TW095120076A
Other languages
Chinese (zh)
Other versions
TW200719082A (en
Inventor
Teruhiro Uematsu
Toru Takahashi
Koji Saito
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200719082A publication Critical patent/TW200719082A/zh
Application granted granted Critical
Publication of TWI349163B publication Critical patent/TWI349163B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW095120076A 2005-06-20 2006-06-06 Photoresist film roll and method for producing the same TW200719082A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005179813A JP2006350245A (ja) 2005-06-20 2005-06-20 フォトレジストフィルムロール、およびその製造方法

Publications (2)

Publication Number Publication Date
TW200719082A TW200719082A (en) 2007-05-16
TWI349163B true TWI349163B (ja) 2011-09-21

Family

ID=37570277

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095120076A TW200719082A (en) 2005-06-20 2006-06-06 Photoresist film roll and method for producing the same

Country Status (5)

Country Link
JP (1) JP2006350245A (ja)
KR (1) KR20080016941A (ja)
CN (1) CN101203807B (ja)
TW (1) TW200719082A (ja)
WO (1) WO2006137243A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5109606B2 (ja) * 2007-11-15 2012-12-26 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンス素子の製造方法と保護フィルム
CN103792788A (zh) * 2008-04-28 2014-05-14 日立化成工业株式会社 感光性树脂组合物、感光性元件、抗蚀图形的形成方法及印刷电路板的制造方法
CN105676593B (zh) * 2016-01-19 2019-07-16 杭州福斯特应用材料股份有限公司 一种储存稳定的感光干膜及其制备方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246901U (ja) * 1975-09-30 1977-04-02
JPS5611407Y2 (ja) * 1976-10-02 1981-03-14
JPS61279847A (ja) * 1985-06-05 1986-12-10 Nitto Electric Ind Co Ltd 画像形成材料
JPH0810790B2 (ja) * 1988-04-27 1996-01-31 ソマール株式会社 プリント基板カバーレイフィルム押圧用シート
JP2730630B2 (ja) * 1988-08-19 1998-03-25 日立化成工業 株式会社 積層体エレメントおよびその滲み出しの防止方法
JPH05267831A (ja) * 1992-03-17 1993-10-15 Matsushita Electric Ind Co Ltd プリント配線板の製造方法およびプリント配線板用ドライフィルムの製造方法
KR970009975B1 (en) * 1993-12-31 1997-06-19 Hyundai Electronics Ind Patterning method of photoresist for charge storage electrode in the semiconductor device
KR100399444B1 (ko) * 1995-06-30 2004-04-29 주식회사 하이닉스반도체 에지강조형위상반전마스크및그제조방법
JPH10115912A (ja) * 1996-10-09 1998-05-06 Dainippon Printing Co Ltd 感光性ドライフィルムレジストのラミネート方法
JPH1124251A (ja) * 1997-06-30 1999-01-29 Dainippon Printing Co Ltd ドライフィルム及びその製造方法並びにドライフィルムの転写方法と転写装置
JP2000058506A (ja) * 1998-08-06 2000-02-25 Mitsubishi Electric Corp 半導体装置の製造方法及び半導体装置
JP2002099079A (ja) * 2000-09-22 2002-04-05 Hitachi Chem Co Ltd 梱包物、感光性エレメントの梱包法、感光性エレメントのエッジフュージョン防止法及び感光性エレメントの巻きずれ防止法
JP2004034439A (ja) * 2002-07-02 2004-02-05 Nec Kagoshima Ltd ラミネ−タ装置

Also Published As

Publication number Publication date
CN101203807A (zh) 2008-06-18
JP2006350245A (ja) 2006-12-28
TW200719082A (en) 2007-05-16
CN101203807B (zh) 2011-09-14
WO2006137243A1 (ja) 2006-12-28
KR20080016941A (ko) 2008-02-22

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