TWI345815B - - Google Patents
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- TWI345815B TWI345815B TW096101555A TW96101555A TWI345815B TW I345815 B TWI345815 B TW I345815B TW 096101555 A TW096101555 A TW 096101555A TW 96101555 A TW96101555 A TW 96101555A TW I345815 B TWI345815 B TW I345815B
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- TW
- Taiwan
- Prior art keywords
- epoxy resin
- agent
- group
- circuit substrate
- solution
- Prior art date
Links
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 45
- 150000002894 organic compounds Chemical class 0.000 claims abstract description 16
- 230000003405 preventing effect Effects 0.000 claims abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 239000004593 Epoxy Substances 0.000 claims abstract description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 8
- 239000011737 fluorine Substances 0.000 claims abstract description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 5
- 239000003822 epoxy resin Substances 0.000 claims description 49
- 229920000647 polyepoxide Polymers 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 27
- 230000002265 prevention Effects 0.000 claims description 23
- 238000002845 discoloration Methods 0.000 claims description 13
- 230000003449 preventive effect Effects 0.000 claims description 10
- -1 nitrogen-containing heterocyclic compound Chemical class 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000003112 inhibitor Substances 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 125000003277 amino group Chemical group 0.000 claims description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical group FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 230000000740 bleeding effect Effects 0.000 claims description 2
- 210000003296 saliva Anatomy 0.000 claims description 2
- 239000000243 solution Substances 0.000 claims 4
- 235000015429 Mirabilis expansa Nutrition 0.000 claims 1
- 244000294411 Mirabilis expansa Species 0.000 claims 1
- 244000044283 Toxicodendron succedaneum Species 0.000 claims 1
- 239000007853 buffer solution Substances 0.000 claims 1
- 230000007123 defense Effects 0.000 claims 1
- 150000002118 epoxides Chemical class 0.000 claims 1
- 235000013536 miso Nutrition 0.000 claims 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid group Chemical group C(CCCCCCC\C=C/CCCCCCCC)(=O)O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims 1
- 150000007979 thiazole derivatives Chemical class 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 21
- 229920005989 resin Polymers 0.000 abstract description 21
- 239000011347 resin Substances 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 11
- 231100000989 no adverse effect Toxicity 0.000 abstract description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 12
- 238000011156 evaluation Methods 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 125000000623 heterocyclic group Chemical group 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004649 discoloration prevention Methods 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 3
- 125000002883 imidazolyl group Chemical group 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 125000003831 tetrazolyl group Chemical group 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 125000002720 diazolyl group Chemical group 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- GSGDTSDELPUTKU-UHFFFAOYSA-N nonoxybenzene Chemical compound CCCCCCCCCOC1=CC=CC=C1 GSGDTSDELPUTKU-UHFFFAOYSA-N 0.000 description 2
- 150000002923 oximes Chemical class 0.000 description 2
- 239000006174 pH buffer Substances 0.000 description 2
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 2
- 125000001425 triazolyl group Chemical group 0.000 description 2
- PFCHFHIRKBAQGU-UHFFFAOYSA-N 3-hexanone Chemical compound CCCC(=O)CC PFCHFHIRKBAQGU-UHFFFAOYSA-N 0.000 description 1
- LLQHSBBZNDXTIV-UHFFFAOYSA-N 6-[5-[[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]methyl]-4,5-dihydro-1,2-oxazol-3-yl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC1CC(=NO1)C1=CC2=C(NC(O2)=O)C=C1 LLQHSBBZNDXTIV-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 241000237858 Gastropoda Species 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical group C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- JLYBUUAWDKGJRC-UHFFFAOYSA-N copper tetramer Chemical compound [Cu].[Cu].[Cu].[Cu] JLYBUUAWDKGJRC-UHFFFAOYSA-N 0.000 description 1
- 229920006038 crystalline resin Polymers 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- BQZUWRFWNUWCTC-UHFFFAOYSA-M fluoroantimony Chemical compound [Sb]F BQZUWRFWNUWCTC-UHFFFAOYSA-M 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003204 osmotic effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/12—Materials for stopping leaks, e.g. in radiators, in tanks
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D233/00—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings
- C07D233/54—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members
- C07D233/56—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members with only hydrogen atoms or radicals containing only hydrogen and carbon atoms, attached to ring carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D249/00—Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms
- C07D249/02—Heterocyclic compounds containing five-membered rings having three nitrogen atoms as the only ring hetero atoms not condensed with other rings
- C07D249/04—1,2,3-Triazoles; Hydrogenated 1,2,3-triazoles
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D257/00—Heterocyclic compounds containing rings having four nitrogen atoms as the only ring hetero atoms
- C07D257/02—Heterocyclic compounds containing rings having four nitrogen atoms as the only ring hetero atoms not condensed with other rings
- C07D257/04—Five-membered rings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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Description
1345815 九、發明說明: 【發明所屬之技術領域】 本發明是有關一種藉由環氧樹脂將導線架(L _ 二_)或印刷電路板等半導體電路基材與ic㉟片予 著固定之黏晶步驟中之環氧樹脂滲出防止劑及防止參出方 法。 【先前技術】 在藉由環氧樹脂將導線架(Lead Frame)或印 中半導,電路基材與IC晶片予以接著以之黏晶步驟 面(通常實施有金、銀、銅、免等之電鍍)之 表面粗链度(surface rough職)過大,表面一經 劑、封孔處理財有機物污㈣, ,或添加劑渗出(環氧樹脂參出)之現二= =吏ΓΓ度下降,也會成為後續的線接合步驟變成 •:接著面之Γ主’為了防止如此之環氧樹脂的滲出,而 …接者面之表面粗糙度,或抑制 面除去污染物。然而m夕再絲 強戶^且八… 接者面之表面粗糙度’會影響黏晶 ς,且:機(assembly machine)之影像辨識能力 =問::清洗表面會有損及變色防止處理或封孔處理 而在=決專利文獻1中載有將基㈣ 不將變色防!基材面之表面粗縫度,還有 覆膜或封减㈣覆料洗娜,又,因 318904 5 1345815 為所吸附之有機被覆膜極薄,所以對於線接合性、模塑性 .· (Molding)等之組裝特性不會帶來不良效果,而可防止環氧 樹脂摩出。 ,然而,隨著最近半導體元件的大型化或半導體封裳之 薄里化$ 了改善趣曲之問題等,低應力、低彈性、低枯 度之黏晶樹脂(以下,稱為低應力型之黏晶樹脂)之使用越 來越增加,然此等樹脂多含有易滲出成分之情形,結果, 鲁=環氧樹脂變得容㈣生滲出。在上述專利文獻!之技 :在使用低應力型之黏晶樹脂時,因無法進行因應而 ^生=氧樹脂的參出。因此,在低應力型之黏晶樹脂方面, 亦/月王迠開發出因應之環氧樹脂滲出防止劑。 r專利文獻1 :曰本特開平11-195662號公報。 【發明内容】 (發明所要解決之課題) ·$藉二!目的係提供一種環氧樹脂滲出防止劑,其係 脂將導線架或印刷電路板等半導體電路基材 力型之曰曰黏曰樹=者固定之黏晶步驟中,即使使用上述低應 影塑,亦不會對黏晶強度或組裝特性有壞的 止發生環氧樹脂的滲出。 -理效果,而可防 (解決課題之手段) 本發明人等經專心研究之結 樹脂滲出阶七現猎由在含有環氧 /出防止劑之溶液中浸潰基材, 有機被覆膜,從而防止環氧樹脂滲出之;:面吸附 /贝 < 步驟,即使對於比 318904 6 以往更低應力型之黏晶樹脂亦有防止滲出效果的一群有機 化。物。亦即,藉由上述文獻記载之羧酸、硫醇化合物等 發現環氧樹脂滲出防止效果高的化合物遂而完成本發明。 本發明係如以下所述。 (1)種%氧樹脂滲出防止劑,使用於黏晶步驟,其特徵 為3有具碳原子數3個以上24個以下之氟烴基 CxHyFz- (x=3 至 24、y=〇 至 48、ζ=ι 至 49、y+z$ 2州) 與極性基R—之含氟有機化合物。 2)如刖述⑴之環氧樹脂滲出防止劑,其中,極性基R一 為:有硫⑻、氮(N)、磷(p)、氧(〇)中任一種之極性基。 (3)如述(2)之環氧樹脂渗出防止劑,其中,極性基& — 二气瓜基胺基、含氮雜環基、填酸醋基、幾基中之 (4) 之環氧樹脂滲出防止劑,其中,含氮雜環基 钰Ί 土、二唑基、四唑基、以及此等之衍生物中之 任一種。 (5) 如前述(1)至(4)巾 中,含有變2止二環氧樹脂渗出防止劑,其 巴防止劑或封孔處理劑。 (6) 如前述(5)之環氧 為含有含氮雜::合渗:防止劑’其中’變色防止劑 ()如則述(6)之%氧樹脂參出防止劑,其中 化合物為味唾衍生乳雜衣狀 唑衍生物中之任一種。何生物、四唾衍生物、嗟 (8) —種環氧樹脂滲 ',其特徵為:將電路基材 318904 7 l345815 浸潰在含有前述⑴至⑺項 滲出防止劑之溶液中,或β人項所述之環氧樹脂 止劑之溶液散布、塗布到;環氧樹脂滲出防 )種電路基材,其特徵為: 有前述⑴至⑺射任4基材浸潰在含 溶液中’或是將含有該環氧旨參出防止劑之 布、塗布到電路基材上而進行;;【:止劑之溶液散 理者。 了衣氧hf脂滲出防止處 (10) -種電路基材,其特徵為 ⑴至⑺項t任—項^ f路基#表面吸附前述 m、%氧樹財出防止剩。 ()種半導體封裝件,盆特 電路基材。 ^ Μ為·使用前述⑼或⑽之 (發明效果) 使用本發明之環氧樹脂渗出防止劑而使導線 電路板等半導體電路其## ' β右心卜从 吸附環氧樹脂滲出防止機能 進行環氧樹脂渗出防止處理,藉此,即使 …力i之黏晶樹脂,亦不會損及變色防止效果或封孔 處理效果,在#晶步驟中即可防止環氧樹脂的渗出。又, 對於線接合特性或模塑特性(Molding)等之組合特性亦不 會帶來不良效果。 【實施方式】 - 本發明之%氧樹脂滲出防止劑包含具有碳原子數3個 乂上24個以下之氟垣基CxHyFz — (χ=3至、尸〇至“、 z 1至49、y+z$2x+i)與極性基R_之含氟有機化合物。 318904 =述氟煙基可列舉如氟燒基、含雙鍵之氣婦基、含3 鍵之氟炔基等,以敦院基為較佳。又,此等之氣煙基,只 要是氟烴基之總碳原子數為3個至24個者即可,可為直鍵 狀者,亦可具有支鏈。氟烴基之碳數乂為3至24,而以5 至12為特佳。妷數太少時環氧樹脂滲出防止效果低,而太 夕時,鑄_性(鑄模樹脂之密著性)降低。又,m越多 則%氧樹脂⑨出防止效果越冑,而在碳數較多之長分子 時’由於氟數過多時亦會有導致鑄模性降低之情形,所以 氟數z以11至25為宜。 前述氣煙基,宜使用 F(CF2)6—、F(CF2h_、f(CF2)iq F(CF2)6(CH2)2- > F(CF2)8(CH2)2- . F(CF2)10(CH2)2-等。 又,前述極性基R—,係含有硫(S)、氮(N)、磷(p)、 氧(Ο)中任一種之極性基,例如,可以使用氫硫基、胺基、 含氮雜環基、磷酸酯基、羧基中之任一種,而含氮雜環基, #彳如,可以使用咪唑基、三唑基、四唑基、以及此等之衍 生物。 刖述極性基為磷酸酯基之情形,可以使用單酯(— ορ(ο)(οη)2)、雙酿((一 0)2Ρ(0)(0Η))、三醋((_ 0)3Ρ(0))。 關於乃含氮雜環基之咪唑基、三唑基、四唑基,雖存 在有異構體,但在本發明中,亦可使用異構體之任一者, 又,混合物亦無妨。在合成之情形,以含氮環狀化合物之 氮直接與氟烴基鍵結者為易於取得,而可適用。又,咪唑 基、二唑基、四唑基之衍生物方面,可列舉如具有烷基或 318904 9 130815 苯基作為取代基之者等。 因此,本發明之環氧樹腊渗出防止劑,較佳的含 機化合物係將前述氧煙基CxHyFz—以a_表示時,例如可 :::A-SH、a_NH2、A_〇p(〇)(〇H)2、(a_ (A 叫 P(Q)、A•⑽h、a_n2c3H3(1•㈣)、A_N3C2H2l2)3 三唑-1-基)、A-N4CH(1-四唑)等。 (,, =發:之環氧樹脂滲出防止劑溶解在水、有 忖以❹作為環氧樹脂滲出防止劑溶液。前述防止 诏洛液中之上述有機化合物 較佳是Η)啦至10g/L。的,辰度疋〇.lmg/U1〇_, :上述有機化合物之濃度過低,則無環氧 止效果,又即使濃度過高, 冷出防. 有更佳之效果,故不佳。4果已達飽和’而無法期待 則因=1水料㈣,在上述有機化合物難溶於水時, 則因應必要而添加醇、酮等有機溶劑。所添加之量雖^ 參上述有機化合物能溶於水所必要之濃度即可/常為、 ’較佳為lg/“50g/L,如-= =性低’又過多時,上述有機化合物之溶解效果不僅1 有改=且使上述有機化合物H變得過稀,故不佳Γ U "上述有機化合物難溶於水時’可因應必要而添 加…/L至1〇g/L(較佳為…g/LiLig/L)之陰離4 陽離子系、非離子系界面活 ” 物。 釗干之任一種或此等之混合 又,防止劑溶液中,可因應必要而添加01g/L至 318904 10 1345815 jOOg/L(#乂仓為lg/L至5〇g/L)之磷酸系、硼酸系、有機酸 系之PH緩衝劑。過少時則pH緩衝效果低,過多時效果已 達飽和’多加無益。 又,防止劑溶液中如有溶出金屬之情形,可因應必要 而添加Ug/L至20〇g/L(較佳為lg/L至5〇g/L)之胺系、胺 ,幾酉夂系緩酸系之錯合劑(⑶刪^吨叫㈣作為金屬遮 (metal shleldlng agent)。過少時金屬經錯合反應後遮 _敝效果少,而過多時效果已達飽和,多加無益。 #環氧樹脂滲出防止劑溶液之pH無_別限定,但通 ^在pH為1至14之間處理,而以在pH為2至^之間處
Si果::此範圍時,素材之損害較大,環氧樹脂渗出 又,環氧樹脂渗出防止劑溶液之溫度,能在水 者即可,但通常是5至啊,較佳是1〇 _果已達二 Γ環氧樹脂渗出防止效果低,而過高時 眚點已達飽和,只會使作業性變差,而並無提高溫度之優 使用有機溶劑作為溶劑時,有機溶 乙異丙醇等醇類’丙…基乙基酮等 甲: 有機洛劑之際,環氧樹脂滲出 使用 佳。 W,合履之,皿度以室溫為 要在在環氧樹脂滲出防止劑溶液中之處理時間,口 慮到作業之再現性與效率時 如考 則以1秒以上120秒以下較 318904 1345815 .•二=時’則環氧樹脂渗出防止效果 / ”性:過長時效果已達飽和’且作業效率變:業 飯氧樹脂滲出防止方法 _ . 氧樹月旨滲出防止·液中,= =基材浸潰在環 防止劑溶液藉由喷淋、嗔土/料氧樹脂滲出 塗布器等而進行塗佈算錨& 戍疋錯由%轉 丁㈣4使接觸後,經水洗、乾燥即可。 又’在環氧樹脂滲出防止射,藉由同時含有乃 上述含氟有機化合物中、與電鍍皮膜或金屬素材等 孟屬表面之變色防止劑或封孔處理劑,即可 防止效果、封减㈣果及滲出μ絲。叫予文色 如此之變色防止劑或封孔處理劑’可分別使用習知 者。例如,變色防止劑宜使用喃唾衍生物、三唾衍生物、 四心于生物、—衍生物等含氮雜環狀化合物。 藉由進行如上述環氧樹腊滲出防止處理,在電路基材 表面之電鍍面上吸附上述含氟有機化合物,而形成由:至 參刀子左右厚度之含氣有機化合物所成之被覆膜,因此, 增加電錢面與環氧樹脂之接觸角,即可抑制環氧樹脂之渗 出。同時,由於所吸附之含氟有機化合物之被覆膜為極二 而不會對線接合性.、鑄模性等組合特性帶來不良影響。並 且,亦不會損及變色防止效果或是封孔處理效果。本發明 亦包含藉由上述方法實施環氧樹脂滲出防止處理之電路基 材’及使用該電路基材的半導體封裝。 (實施例) 以下根據實施例說明本發明’但本發明並不侷限於此 318904 12 1345815 • •等之實施例。 -實施例1至10 為了提高在銅合金(Cu: 97.7%—Sn : 2〇〇/ —P:〇.G3%)製導線架的基材之密著性而進行❹二〇.2% ⑼咖咖㈣)後,在導線架全面進行鍵金,鍵二f打底 之任一種電鍍,之後藉由浸潰將表丨 —、又銅中 出防止劑中進行處理。 之&氧樹脂滲 同時,實施例8,9,1〇使用之環裊满 ¥ 基一一^ —三唑—1 —基、1—四唑基。 基、1,2,3 該等之基材,進行黏晶、並對耐環氧樹脂渗出性⑽ B B 〇 ^# ^ (W/B } ^ ^ ^ ^ ^ ^ ^ 將其L果示於表1。表1中,浴組成中之「〜 坪 加之意,評估中之「-」是表示不為評估對象ΐ表示未添 耐環氧樹脂滲出性之評估係以下述方法進行 鲁將市售之低應力黏晶用環氧樹脂⑽咖: ABLESTIK公司製)以注射器塗佈 , 處理之錢面上之後,在大氣中熱壓,二 = 防止劑 化後’以金屬顯微鏡⑽倍)觀察環氧樹:二 ^第1圖所示黏晶用環氧樹脂之周圍所見到 樹= 出(第〗圖中,黏晶用環氧樹脂渗出是以黑圓二^ =之周圍可見到稍微淡薄之寬度狹窄部分表示 月: ΓΡΐ^夕出h取厭重之環氧樹脂之珠出旦 (EB〇量),並使用以下基準評估。 > 出里 3I8904 13 1345815 -〇:未滿1 〇 # m △ : lOym以上未滿ΙΟΟ/zm X : 100 // m 以上 線接合性之評估是以下述方法進行。 使用25 # m之金線,並以超音波併熱壓接方式(溫度: 200°C、荷重:50g、時間:10ms)進行線接合,以PULL TESTER(拉伸測定器),測定拉伸強度,並使用以下基準評 估。 : 10gf 以上 X :未滿10gf 鑄模特性之評估是以下述方法進行。 將市售之鑄模用環氧樹脂(SUMITOMO BAKELITE製 ΕΜΕ - 6300)塗佈於經環氧樹脂滲出防止劑處理之鍍面上 之後,於175°C經加熱5小時硬化後,測定剪切強度,並 使用以下基準評估。 : 10kgf/cm2 以上 X :未滿 10 kgf/cm2 變色防止效果之評估是以下述方法進行。 在40°C、濕度90%下加濕96小時後,觀察外觀並使 用以下基準評估。 〇:不變色 X :有變色 比較例1 除了使用以羧酸作為主成分,進行在表1所記載之環 14 318904 1345815 •氧樹脂滲出防止劑處理之外,其餘與實施例1同樣進行環 •氧樹脂滲出防止劑處理,與實施例1同樣評估。並將其結 果示於表1。 比較例2 除了使用表1記載之基板,而不進行環氧樹脂滲出防 止劑處理之外,其餘與實施例1同樣進行,與實施例1同 樣評估。並將其結杲示於表1。 [4 1-1] II 實> 跑例 1 2 3 4 基材、或電鍍表 面 金 金 銀 銀 主成分 F(CF2)g-COO Η : 0.1g/L F(CF2)8-SH : 0.1g/L F(CF2)8-SH : 0.1g/L F(CF2)8-NH2 : 0.1 g/L 溶劑 異丙醇:lg/L — — 異丙醇:lg/L 浴 pH缓衝劑 焦磷酸鉀: 1S/L — 四氟酸鉀:1 R/L — 組 錯合劑 — — — — 成 界面活性劑 聚環氧乙烷壬 基苯基醚:1 mg/L — 聚環氧乙烷壬 基苯基醚:1 mg/L — 變色防止劑 — — 硫醇苯并噻 唑:0.1g/L — ,處 pH 9.0 9.0 9.0 9.0 理 條 處理溫度 (°C) 25 25 25 25 件 處理時間(s) 30 30 30 30 評 耐EBO性 Δ 〇 Δ 〇 估 W/B性 〇 〇 〇 〇 結 鎮模性 〇 〇 〇 〇 果 財變色性 〇 〇 〇 〇 15 318904 1345815 .[表.1_2]
1 '施例 5 6 7 8 基材、或電鍍 表面 金 銀 銅 銅 浴 組 成 主成分 F(CF2)g(CH2)2-OP 0(0H)2 : 0.1g/L F(CF2)6(CH2)2-OP 0(0¾ : 0.1 g/L F(CF2)8(CH2)2-OPOOH F(CF2)6(CH2)2-0, : 0.1g/L F(CF2)8(CH2)2-N2C3H3:0.1 g/L 溶劑 — — 異丙醇:1 g/L — PH 緩衝劑 焦磷酸鉀:1 g/L — 焦鱗酸鉀:1 g/L — 錯合劑 — — 乙二胺4醋酸4鈉:1 g/L — 界面 活性劑 — — — — 變色 防止劑 — — 笨并三唑O.lg/L — 1處 ’理 條 件 pH 9.0 9.0 9.0 9.0 處理溫度 CC) 25 25 25 25 處理時間 (S) 30 30 30 30 評 估 結 果 财EBO性 〇 〇 〇 〇 W/Β性 〇 〇 — — 鑄模性 〇 〇 〇 〇 耐變色 性 〇 〇 〇 〇 16 318904 1345815 [表 1-3]
實施例 比較例 9 10 1 2 基材、或電鐘 表面 銅 銅 金 銅 浴 组 成 主成分 f(cf2)8-n3c2 H2 : 0.1g/L F(CF2)8(CH2)2-N4 CH : 0.1g/L H(CH2)g-COOH 未處理 溶劑 異丙醇:lg/L — 異丙醇:1 g/L — pH緩衝劑 四棚酸鉀: lg/L — 焦磷酸鉀:lg/L — 錯合劑 乙二胺4醋酸 4 鈉:1 g/L 乙二胺4醋酸4鈉: 1 g/L 乙二胺4醋酸4 鋼:1 g/L ~ 界面活性劑 — — — — 變色防止劑 — — — — 處 理 條 件 pH 9.0 9.0 9.0 — 處理溫度 CC). 25 25 25 — 處理時間 (S) 30 30 30 — 評 估 结 果 而十EBO性 〇 〇 X X W/Β性 — — 〇 — 模镑性 〇 〇 〇 〇 耐變色性 〇 〇 〇 X 【圖式簡單說明】 第1圖表示在實施例之耐環氧樹脂滲出性評估中環氧 脂滲出量之測定方法圖。 17 318904
Claims (1)
- 丄:) 第96101555號專利申請案 (99年3月10曰) 十、申請專利範圍: fu 1 v~,r—7 -種環氧樹脂滲出防止劑,特 徵為:含有具碳原子數3個以上24個以下之氟烴基 CJxHyFz-(x=3 至 24、y=〇 至 48、ζ=ι 至 49 y¥2x+i) 與選自氫硫基、胺基、碟酸醋基、緩基、味嗤基、三哇 基所成群組之極性基尺―的含氟有機化合物。 2.如申凊專利範圍第1項之環氧樹脂渗出防止劑,其中, 係含有變色防止劑或封孔處理劑。 ,其中, 其中, 四唾衍 請專㈣圍第2項之環氧樹轉出防止劑 父色防止劑為含有含氮雜環狀化合物。 4·:申請專利範圍第3項之環氧樹脂滲出防止劑 3氮雜環狀化合物為味唾衍生物、三唾衍生物 生物、噻唑衍生物中之任一種。 5.==出防…,其特徵為··將電路基材浸 /貝於3有申凊專利範圍第1至4項中杯一 TS s 滲出防止劑之溶液中,1 θ 、 員之裱氧樹脂 劑之溶液::::將含有該環氧樹脂滲出防止 %之,合液散布、塗布到電路基材。 6. 一種電路基材,其特徵為: 申請專利範圍第!至4項中H 潰於含有 劍之溶液中,或是將含縣樹月旨渗出防止 散布、塗布到電路基材而二環氧曰:二=劑之溶液 者。 J衣乳树月日滲出防止處理 路基材’其龍為:在表面吸 第I至4項中任一瑁所、+ T叫專利乾圍 、处之環氧樹脂滲出防止劑。 318904修正版 18 1345815 第96101555號專利申請案 (99年3月10日) • 8. —種半導體封裝件,其特徵為:使用申請專利範圍第6 • 或第7項之電路基材。19 318904修正版
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