TWI344398B - - Google Patents

Download PDF

Info

Publication number
TWI344398B
TWI344398B TW93103883A TW93103883A TWI344398B TW I344398 B TWI344398 B TW I344398B TW 93103883 A TW93103883 A TW 93103883A TW 93103883 A TW93103883 A TW 93103883A TW I344398 B TWI344398 B TW I344398B
Authority
TW
Taiwan
Prior art keywords
plate
sheet
fluid
cleaning
pressure liquid
Prior art date
Application number
TW93103883A
Other languages
English (en)
Chinese (zh)
Other versions
TW200528202A (en
Inventor
Yoshiaki Aoki
Keiji Tsujita
Morimasa Kuge
Takaaki Yokoyama
Takashi Sakurai
Hideki Inaba
Hiroyuki Kamei
Original Assignee
Kawasaki Heavy Ind Ltd
Corning Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Ind Ltd, Corning Japan filed Critical Kawasaki Heavy Ind Ltd
Publication of TW200528202A publication Critical patent/TW200528202A/zh
Application granted granted Critical
Publication of TWI344398B publication Critical patent/TWI344398B/zh

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Surface Treatment Of Glass (AREA)
TW93103883A 2002-11-25 2004-02-18 Sheet material washing equipment TW200528202A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002340764A JP2004174308A (ja) 2002-11-25 2002-11-25 板材の洗浄設備

Publications (2)

Publication Number Publication Date
TW200528202A TW200528202A (en) 2005-09-01
TWI344398B true TWI344398B (ja) 2011-07-01

Family

ID=32703300

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93103883A TW200528202A (en) 2002-11-25 2004-02-18 Sheet material washing equipment

Country Status (2)

Country Link
JP (1) JP2004174308A (ja)
TW (1) TW200528202A (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4669760B2 (ja) * 2004-09-14 2011-04-13 芝浦メカトロニクス株式会社 基板の処理装置及び処理方法
KR101284681B1 (ko) 2007-02-15 2013-07-16 주식회사 케이씨텍 기판 세정장치 및 방법
KR101577850B1 (ko) * 2008-07-31 2015-12-15 코닝 인코포레이티드 유리의 수직형 처리를 위한 장치
JP5717526B2 (ja) * 2011-04-26 2015-05-13 化研テック株式会社 部分洗浄装置および部分洗浄方法
JP5720954B2 (ja) * 2012-03-06 2015-05-20 株式会社ダイフク 天井搬送車の清掃装置
KR102521603B1 (ko) * 2015-08-21 2023-04-13 코닝 인코포레이티드 유리 웹 가공 방법
JP7187551B2 (ja) * 2017-10-06 2022-12-12 コーニング インコーポレイテッド ガラスシート処理装置及び方法
CN108372147B (zh) * 2018-04-24 2023-11-28 江苏金鼎建设集团有限公司 一种高效的墙板清洗装置
CN113070265A (zh) * 2021-04-06 2021-07-06 安徽新佰德新型材料有限公司 一种彩晶玻璃高压清洗设备及清洗方法
CN113770143B (zh) * 2021-08-30 2022-07-12 蚌埠高华电子股份有限公司 一种液晶玻璃基板研磨残留清洗装置及方法
CN115285696B (zh) * 2022-10-09 2022-12-09 山东阅航环保科技有限公司 一种中空玻璃双面清洗线

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589670Y2 (ja) * 1978-09-20 1983-02-22 日立造船株式会社 管板洗浄装置
JPS6028385B2 (ja) * 1980-04-26 1985-07-04 呉船産業株式会社 洗浄乾燥装置
JPH10118583A (ja) * 1996-10-24 1998-05-12 Nippon Electric Glass Co Ltd 板状物の洗浄装置
JP2000044287A (ja) * 1998-07-28 2000-02-15 Shirai Tekkosho:Kk 洗滌板ガラスの水切り装置
JP2001213517A (ja) * 1999-11-24 2001-08-07 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置
DE10130999A1 (de) * 2000-06-29 2002-04-18 D M S Co Multifunktions-Reinigungsmodul einer Herstellungseinrichtung für Flachbildschirme und Reinigungsgerät mit Verwendung desselben
JP2002308423A (ja) * 2001-04-18 2002-10-23 Corning Japan Kk 板材搬送方法および板材搬送装置

Also Published As

Publication number Publication date
TW200528202A (en) 2005-09-01
JP2004174308A (ja) 2004-06-24

Similar Documents

Publication Publication Date Title
CN100446190C (zh) 基板附着物除去方法及基板干燥方法、以及使用该方法的基板附着物除去装置及基板干燥装置
KR101118394B1 (ko) 판재의 세정설비
TWI641032B (zh) Substrate cleaning device
TWI344398B (ja)
JP2007165554A (ja) 基板処理装置及び基板処理方法
KR101720349B1 (ko) 유체 도포기와 유리 세정 공정
TWI327132B (ja)
TWI227035B (en) Substrate processing device of transporting type
JP2004221244A5 (ja)
JP2006148144A (ja) 板材の洗浄設備およびその水切り装置
JP4620573B2 (ja) 板材の洗浄設備およびその高圧液スプレー洗浄装置
KR100764683B1 (ko) 기판처리장치
JP6060140B2 (ja) 乾式指紋洗浄装置
JP3901635B2 (ja) 板材の酸処理設備
WO2020019438A1 (zh) 一种转印板清洗装置
TWI559432B (zh) Substrate processing device
CN202217649U (zh) 基板洗净装置
JP4606498B2 (ja) 板材の洗浄設備およびその高圧液スプレー洗浄装置
JP4365192B2 (ja) 搬送式基板処理装置
JP4753920B2 (ja) 基板用除塵装置
TWI345260B (en) Resist elimination device
JP2009198676A (ja) ガラス基板の乾燥方法および乾燥装置
CN211045383U (zh) 玻璃基板的制造装置
JP5298083B2 (ja) 塗布装置及びノズルのプライミング処理方法
KR101388505B1 (ko) 대면적 기판용 세정장치

Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent