TWI344398B - - Google Patents
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- TWI344398B TWI344398B TW93103883A TW93103883A TWI344398B TW I344398 B TWI344398 B TW I344398B TW 93103883 A TW93103883 A TW 93103883A TW 93103883 A TW93103883 A TW 93103883A TW I344398 B TWI344398 B TW I344398B
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- plate
- sheet
- fluid
- cleaning
- pressure liquid
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- 239000007788 liquid Substances 0.000 claims description 156
- 238000004140 cleaning Methods 0.000 claims description 145
- 239000012530 fluid Substances 0.000 claims description 134
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 126
- 239000007921 spray Substances 0.000 claims description 99
- 239000005357 flat glass Substances 0.000 claims description 84
- 238000005406 washing Methods 0.000 claims description 48
- 239000003599 detergent Substances 0.000 claims description 37
- 238000011144 upstream manufacturing Methods 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 29
- 239000012459 cleaning agent Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 1
- 235000017491 Bambusa tulda Nutrition 0.000 claims 1
- 241001330002 Bambuseae Species 0.000 claims 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 1
- 239000011425 bamboo Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 29
- 239000000428 dust Substances 0.000 description 13
- 239000003595 mist Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 8
- 238000000638 solvent extraction Methods 0.000 description 6
- 206010036790 Productive cough Diseases 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 210000003802 sputum Anatomy 0.000 description 5
- 208000024794 sputum Diseases 0.000 description 5
- 238000011143 downstream manufacturing Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 239000004519 grease Substances 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000006063 cullet Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
Description
1344398 玖、發明說明: [發明所屬之技術領域] 本發明係有關板材之洗淨設備。尤其,係有關一種板 材之洗淨設備,其以清潔劑洗淨稀有金屬、矽、平面型顯 示器用玻璃等板材之表面,以高壓液體之喷霧來洗淨板材 之表面’並從洗淨後之板材表面除去水份。 [先前技術] 過去,平板玻璃使用於各種領域。特別是使用於液晶 顯示器或電漿顯示器等之平板玻璃(亦稱玻璃基板)是非常 ^ 薄的玻璃。例如,大多生產厚度約〇.7mm、大小約55〇mm X 650mm之平板玻璃。此種玻璃基板之修整、分割等加工 ,一般將平板玻璃以水平狀態(橫向狀態),藉帶式輸送機 搬送,於各裝置以水平狀態來進行。即使是加工後之平板 玻璃之洗淨,仍以水平狀態進行(例如參照日本特開平 44877號公報及日本特許第269991 1號公報)。又,以水平 狀態洗淨之裝置中’有一種具備用來更提高洗淨效果之超 音波洗淨裝置的洗淨裝置(例如參照日本特開+ 9·ΐ9667冑 ^ 另有一種裝f ’係將平板玻璃以登靠於滾子列之姿 搬送,於此豎靠狀態下研磨平板玻璃之各端邊(例如參 本特許第2623476號公報卜 ' 另一方面,近年來,於玻璃基板等之 生產性,希望將複數個玻璃基板之原板、即母玻璃之:高 大型化,以增加良率,對應更大型之顯示 — 寸 寻。右加大母 8 “44398 破璃之尺寸,自一片母玻璃能取出之破璃基板片數即增多 :從而提高良率。更且,亦可製造大型顯示器用玻璃基板 此外Φ希望進-步薄化玻璃基板,以提高顯示器等之 性能,而有母玻璃更薄型化之趨勢。而且,對玻璃基板品 質之要求逐年趨嚴,亦有低成本化之要求。 [發明内容] 然而,以如前述之水平狀態將平板玻璃搬送並洗淨之 技術以及以g靠於特定構件之狀態搬送之技術巾,於對大 .薄3L化之平板玻璃加工之情形下,有可能因玻璃本 重量引起之彎曲等而造成破裂,亦有可能因來自支撐平 板玻璃面之構件的反作用力而造成破裂。當然,在洗淨平 :玻璃之情形下’亦發生相同問題。χ,在平板玻璃接觸 、。構物之狀態了,接觸部分之洗淨有困難。此外,要求比 超音波洗淨所得之潔淨度更高之程度。 發明之_壬 本發明是用來解決上述問題之技術,其目的在於提供 種板材之洗淨②備’其所進行之洗淨處理能防止包含大 型化溥型化之平板玻璃之板材受到破裂等損傷,而能進 一步提高板材品質。 本發明之此種板材之清潔劑洗淨裝置,係具備: 支撐裝置,用來支撐豎立狀態下之板材下端; 流體導件,用來對板村側面施加流體壓力,將板材以 豎立狀態、非接觸式來支樓;及 洗淨液供應部,用來對登立狀態下之板材供應洗淨液 1344398 :且 該洗淨液供應部包含流體導件之至少一部分,該至少 一部分之流體導件能將洗淨液之流體供應至板材之側面。 藉此構造,可不受板材本身重量之影響、來自結構物 之大反作用力,以清潔劑洗遍板材之兩面、周緣。因此, 不限於塵埃,甚至於可除去油脂部分。 較佳的清潔劑洗淨裝置是構成該洗淨液供應部之該流 體導件,係具有沿水平方向延伸之上下複數段第丨流體喷 出。P,並於該第1流體噴出部排列有複數個洗淨液噴嘴而 構成。其原因在於可藉重力將清潔劑供應至板材整面。此 種作用可藉簡易構造來達成。 較佳的清潔劑洗淨裝置是構成該洗淨液供應部之該流 體導件,係進一步具有沿水平方向相互間留有間隔配設成 之沿上下方向延伸之第2流體喷出部,並於該第2流體喷 出部排列有複數個洗淨液喷嘴而構成。其原因在於,於搬 送板材之裝置之情形下,即使搬送速度上昇,仍可供應洗 淨液至整個板材面。 又’較佳的清潔劑洗淨裝置是該支撐裝置,係具有將 板材在豎立狀態下沿水平方向搬送的搬送部,該流體導件 ,係沿搬送部之搬送路徑配置,其原因在於,藉此搬送部 及流體導件’可在豎立狀態下將板材搬入並搬出。 再者’較佳的清潔劑洗淨裝置是於該洗淨液供應部之 板材搬送方向之上游端側及下游端側,沿豎立狀態下之板 材之上下方向配設有空氣幕部,該空氣幕部具有沿上下方 1344398 向排列之複數個空氣噴嘴◦其原因在於,藉上述空氣幕部 可防止水份朝上游及下游之製程移動,或防止水份自上游 及下游之製程流入。藉此’亦可極力抑制例如洗淨液之濃 度變動。 本發明之高壓液體喷霧洗淨裝置,係具備: 支榜裝置’用來支撑豐立狀態下之板材之下端; 流體導件,用來對板材側面施加流體壓力,將板材以 登立狀態、非接觸式來支撐;及 高壓液體喷霧部,用來對豎立狀態下之板材,分別自 板材之兩面側喷吹霧狀高壓液體。 自結構物 面。因此 板材之破 去自板材 ,係具有 流體導件 此搬送部 高壓液體 藉此構造,可不受板材本身重量之影響、來 之大反作用力,藉霧狀高壓液體來洗淨板材之兩 ,可高品質地洗淨,不致於發生大型化、薄型化 裂等損傷。又’亦可藉來自流體導件之流體來除 面剝離而浮遊於水中之塵埃等。 較佳的高壓液體噴霧洗淨裝置是該支撐裝置 將板材以賢立狀態沿水平方向搬送的搬送部,該 ,係沿搬送部之搬送路徑配置。其原因在於,藉 及流體導件’可在t立狀態下將板材搬入並搬出 喷霧洗淨裝置。 再者,較佳的高壓液體噴霧洗淨裝置是該高壓液體嘴 霧部,係具有可沿卜T A> 下方向移動之咼壓液體喷霧嘴,配置 於板材兩面側之高壓液體喷霧嘴彼此隔著板材支撐位置而 對向°其原因在於’由於邊藉上述搬送部將板材在豎立狀 1344398 態下搬送’邊自兩面喷吹霖壯古 貝人務狀局壓液體,故只要沿上下方 向移動高壓液體噴霧嘴,即可泱 先卓板材整面,此外,由於 使兩側之高壓液體噴霧嘴袖舲射人 宵被·此對向’故能防止高壓液體所 造成之板材之損傷。 或者,較佳的尚壓液魏哈您·、*、_« 夜體嚷霧洗淨裝置是該高壓液體噴 霧。P係具U下方向排列之複數個高壓液體喷霧嘴, 配置於板材兩面侧之高壓液體喷霧嘴隔著㈣支樓位置而 對向。其原因在於,由於邊μ、+. a 敗仏遭精上述搬送部將板材在豎立狀 態下搬送,邊自兩面喷吹霧狀高壓液體,纟只要事先沿上 下方向排列複數個高壓液體喷霧嘴,即可洗淨板材整面。 較佳的间£液體喷霧洗淨裝置,是該高壓液體嗔霧嘴 ,係能繞實質上垂直於作為洗淨對象之板材之面的旋轉軸 心旋轉。其原因在於可洗淨更大範圍之板材面。1344398 玖, invention description: [Technical field to which the invention pertains] The present invention relates to a cleaning apparatus for a sheet material. In particular, it relates to a cleaning apparatus for a board which cleans the surface of a sheet of a rare metal, a crucible, a glass for a flat display, and the like by a detergent, and washes the surface of the sheet with a spray of a high-pressure liquid' and after washing The surface of the board is free of moisture. [Prior Art] In the past, flat glass was used in various fields. In particular, flat glass (also referred to as a glass substrate) used for a liquid crystal display or a plasma display is a very thin glass. For example, most of the flat glass having a thickness of about 77 mm and a size of about 55 〇mm X 650 mm is produced. In the processing such as trimming and dividing of the glass substrate, the flat glass is generally conveyed by a belt conveyor in a horizontal state (lateral state), and is carried out in a horizontal state in each apparatus. Even if the flat glass after the processing is washed, it is carried out in a horizontal state (for example, refer to Japanese Patent Laid-Open No. Hei 44877 and Japanese Patent No. 269991 No. 1). Further, in the apparatus which is washed in a horizontal state, there is a cleaning apparatus including an ultrasonic cleaning apparatus for improving the cleaning effect (for example, refer to Japanese Patent Laid-Open No. 9 ΐ 9667 胄 ^ another type of f ' The flat glass is conveyed in the position of the roller row, and the respective end faces of the flat glass are ground in the vertical state (for example, Japanese Patent No. 2623476). On the other hand, in recent years, on a glass substrate or the like Productive, it is hoped that the original plate of a plurality of glass substrates, that is, the mother glass: will be increased in size to increase the yield, corresponding to a larger display - inch search. Right up the mother 8 "44398 size of the broken glass, from a mother The number of glass substrates that can be taken out of the glass is increased: the yield is improved, and the glass substrate for large displays can be manufactured. In addition, it is desirable to further thin the glass substrate to improve the performance of the display and the like. In addition, the demand for the quality of the glass substrate has been tightened year by year, and there is also a demand for cost reduction. [Explanation] However, the technique of conveying and washing the flat glass in the horizontal state as described above And the technical towel that is transported in the state of the specific member, in the case of processing the large and thin 3L flat glass, there is a possibility that the glass may be broken due to bending due to the weight of the glass, or may be caused by the support plate. The reaction force of the member of the glass surface causes cracking. Of course, in the case of washing flat: glass, the same problem occurs. χ, in the contact of the flat glass, the state of the structure, the cleaning of the contact portion is difficult. In addition, the degree of cleanliness of the ultrasonic cleaning is required to be higher. The invention is a technique for solving the above problems, and the object of the invention is to provide a cleaning method for the seed board. The treatment can prevent damage to the sheet material of the flat glass containing the large-sized enamel, and can further improve the quality of the sheet. The cleaning device for the cleaning of the sheet of the present invention is provided with: a supporting device for supporting the erect state The lower end of the lower plate; the fluid guide for applying fluid pressure to the side of the plate, the plate is erected, non-contact to support the floor; and the cleaning liquid is supplied a portion for supplying a cleaning liquid 1344398 to the plate in the erected state: and the cleaning liquid supply portion includes at least a portion of the fluid guiding member, the at least one portion of the fluid guiding member capable of supplying the fluid of the cleaning liquid to the side of the plate With this configuration, it is possible to wash the two sides and the periphery of the sheet with a cleaning agent without being affected by the weight of the sheet itself and from the large reaction force of the structure. Therefore, it is not limited to dust, and even the grease portion can be removed. The cleaning device is a fluid guide constituting the cleaning liquid supply unit, and has a plurality of second-stage fluid discharges extending in the horizontal direction, and a plurality of cleaning liquids are arranged in the first fluid discharge portion. The nozzle is constructed by the fact that the cleaning agent can be supplied to the entire surface of the sheet by gravity. This effect can be achieved by a simple configuration. A preferred detergent cleaning device is the fluid guide constituting the cleaning liquid supply portion. Further, the second fluid ejecting portion extending in the vertical direction is disposed at intervals in the horizontal direction, and a plurality of washings are arranged in the second fluid ejecting portion. Nozzle configuration. The reason for this is that in the case of a device for conveying a sheet material, the cleaning liquid can be supplied to the entire sheet surface even if the conveying speed is increased. Further, a preferred cleaning agent cleaning device is a supporting device that has a conveying portion that conveys a sheet material in a horizontal direction in an upright state, and the fluid guiding member is disposed along a conveying path of the conveying portion, because the borrowing is The conveying portion and the fluid guide ' can carry in and carry out the sheet material in an upright state. Further, the preferred cleaning agent cleaning device is disposed on the upstream end side and the downstream end side of the sheet conveying direction of the cleaning liquid supply portion, and is provided with an air curtain portion in the up-down direction of the sheet material in the erect state, the air The curtain has a plurality of air nozzles arranged along the upper and lower sides 1344398. The reason is that the air curtain can prevent the water from moving toward the upstream and downstream processes, or prevent the water from flowing from the upstream and downstream processes. Thereby, it is also possible to suppress, for example, the concentration fluctuation of the washing liquid as much as possible. The high-pressure liquid spray cleaning device of the present invention comprises: a support device for supporting a lower end of a plate in a state of abundance; a fluid guide for applying a fluid pressure to a side of the plate, and the plate is in a standing state, The contact type is used for supporting; and the high-pressure liquid spray part is used for spraying the high-pressure liquid of the mist from the two sides of the plate to the plate in the erect state. Self-constructed surface. Therefore, the plate is broken from the plate, and has a fluid guide member. The high-pressure liquid of the conveying portion is constructed by the high-pressure liquid of the conveying portion, and can be prevented from being affected by the weight of the plate itself, and the reaction force is large, and the two plates can be washed by the high-pressure liquid with a mist. Washed with quality, it will not cause damage such as large-scale, thin cracking. Further, it is also possible to remove dust and the like floating in the water by the fluid from the fluid guide. A preferred high-pressure liquid spray cleaning device is a conveying unit that conveys the sheet material in a horizontal direction in a sturdy state, and is disposed along a conveying path of the conveying unit. The reason for this is that the fluid guide can be carried in and out of the spray cleaning device by the fluid guide. Furthermore, a preferred high-pressure liquid spray cleaning device is the high-pressure liquid nozzle mist portion, which is a pressurized liquid spray nozzle that can be moved in the downward direction, and is disposed on both sides of the plate. The reason for the opposite direction of the support position of the plate is that the 'transport of the plate in the vertical state of 1344398 by the above-mentioned conveying part' is sprayed from both sides of the liquid, so it is only required to go up and down. Moving the high-pressure liquid spray nozzle in the direction can make the entire surface of the plate, and in addition, the high-pressure liquid spray nozzle sleeves on both sides can be prevented from being damaged by the high-pressure liquid. Alternatively, the preferred pressurized liquid Weiha You·,*,_« night body mist cleaning device is the high pressure liquid spray. The P system has a plurality of high-pressure liquid spray nozzles arranged in the U direction, and the high-pressure liquid spray nozzles disposed on both sides of the plate are opposed to each other by the position of the (four) branch. The reason is that, because the edge μ, the +. a is defeated, the conveying unit conveys the sheet material in an upright state, and sprays the mist-like high-pressure liquid from both sides, so that a plurality of high-pressure liquid spray nozzles are arranged in advance in the vertical direction. , you can wash the entire surface of the board. Preferably, the liquid spray cleaning device is a high pressure liquid mist nozzle which is rotatable about a rotation axis substantially perpendicular to a surface of the sheet to be cleaned. The reason for this is that a wider range of panels can be washed.
J 又’較佳的高壓液體噴霧洗淨裝置是能與高壓液體喷 霧嘴-起沿上下方向移動之移動式流體導件,係配設成鄰 接於兩壓液體噴霧嘴。其原因在於,水流以較高壓力對板 材喷吹,會在相鄰接之移動式流體導件之作用下,使霧狀 兩壓液體所造成之板材振動等衰減。 或者,較佳的高壓液體喷霧洗淨裝置是於板材搬送方 向之上游端側,沿豎立狀態下之板材之上下方向配設有水 洗部,該水洗部具有沿上下方向排列之複數個水喷嘴。其 原因在於’可藉由水洗部將上游製程之附著物,例如洗淨 液等洗掉。 本發明之板材之除水裝置,係具備: 12 ^44398 搬送裝置,用來將豎立狀態下之板材之下端加以支撐 ,並沿水平方向搬送; 流體導件’用來對板材之側面施加流體壓力,將板材 以豎立狀態、非接觸式來支撐;及 除水部,分別在豎立狀態下之板材兩面側以對應於板 材上方至下方的方式設置,用來朝板材喷出膜狀氣流。 由於藉此構造,可邊藉此搬送部及流體導件將板材於 ^立狀態搬送,邊將膜狀氣流喷吹於板材之外面,故可藉 此吹掉水份’有效地自板材兩面、周緣除去水份,不受板 材本身重量之影響、來自結構物之大反作用力。可以說, 可成乾燥狀態。 較佳的除水裝置是於該兩除水部之上游側、且於豎立 狀態下之板材兩面側,沿上下方向配設有水洗部,該水洗 部具有沿上下方向排列之複數個水喷嘴。其原因在於可防 止塵埃等之再附著。 係配設成往板材 能對沿搬送方向 係配設成往板材 可向下及上游方 或者’較佳的除水裝置是該水洗部, 搬送方向之上游方向傾斜。其原因在於, 移動之板材表面全部,供應新的水。 或者,較佳的除水裝置是該除水部, 搬送方向之上游方向傾斜。其原因在於, 向吹掉板材表面之水份。 本發明之板材之洗淨裝置,係具備: 搬送裝置,用來將賢立狀態下之板材之下端支撑並搬 送; 13 1344398 、流體導件,用來對板材之側面施加流體麼力,將板材 以立狀態、非接觸式來支擇; 清潔劑洗淨裝置,配設於搬送裝置之搬送路徑的前述 劑洗淨裝置中任一裝置; <高塵液體喷霧洗淨裝置,配設於搬送路徑之清潔劑洗 淨裝置之下游側的前述高麼液體嗔霧洗淨褒置中任置 ,及 、 =水裝置,配設於搬送路徑之高塵液體嘴霧洗淨裝置 <下游側的前述除水裝置中任一裝置。 藉此構造,可將板材高效率地洗淨、除水,不受板材 本身重量之影響、來自結構物之大反作用力,。 並且’較佳的洗淨設備是於該高壓液體喷霧洗淨裝置 與该除水裝置之間配設有最終洗 无淨δ又備,该最終洗淨設備 體褒置兩側具有流體導件。其原因在於,於高壓液 體嘴霧洗淨裝置中自板材遊離而浮遊於水中之塵埃等藉來 自上述流體導件之流體被洗掉。J. A preferred high-pressure liquid spray cleaning device is a movable fluid guide that can move up and down with a high-pressure liquid spray nozzle, and is disposed adjacent to the two-pressure liquid spray nozzle. The reason is that the water flow is blown at a relatively high pressure on the sheet material, and the vibration of the sheet caused by the mist-like two-pressure liquid is attenuated by the action of the adjacent movable fluid guide. Alternatively, a preferred high-pressure liquid spray cleaning device is disposed on the upstream end side of the sheet conveying direction, and is provided with a water washing portion having a plurality of water nozzles arranged in the vertical direction in the up-down direction of the sheet material in the upright state. . The reason for this is that the attachment of the upstream process, such as a washing liquid, etc., can be washed away by the water washing section. The water removing device for a plate of the present invention comprises: 12 ^ 44398 conveying device for supporting the lower end of the plate in an upright state and conveying in a horizontal direction; the fluid guiding member is for applying a fluid pressure to the side of the plate The plate is supported in an upright state and a non-contact type; and the water removing portion is respectively disposed on both sides of the plate in an upright state so as to correspond to the upper side to the lower side of the plate, for spraying the film-like airflow toward the plate. With this configuration, the conveying material and the fluid guide can be used to convey the sheet material in the upright state, and the film-like airflow can be blown onto the outer surface of the sheet, so that the water can be blown off effectively [on both sides of the sheet, The water is removed from the periphery and is not affected by the weight of the board itself, but also from the large reaction force of the structure. It can be said that it can be in a dry state. A preferred water removal device is provided with a water washing portion having a plurality of water nozzles arranged in the vertical direction in the vertical direction on both sides of the sheet material in the upright state on the upstream side of the two water removing portions. The reason for this is to prevent re-adhesion of dust and the like. It is possible to arrange a pair of sheets to be disposed in the direction of conveyance. The sheet can be placed downward and upstream. Alternatively, the preferred water removal device is the water washing unit, and the upstream direction of the conveying direction is inclined. The reason for this is that all the surfaces of the moving sheets are supplied with new water. Alternatively, a preferred water removal device is the water removal portion, and is inclined in the upstream direction of the conveying direction. The reason is that the water on the surface of the sheet is blown off. The plate cleaning device of the present invention comprises: a conveying device for supporting and conveying the lower end of the plate in the sturdy state; 13 1344398, a fluid guiding member for applying a fluid force to the side of the plate, the plate The cleaning agent cleaning device is disposed in any one of the above-mentioned agent cleaning devices disposed in the conveying path of the conveying device; <High dust liquid spray cleaning device is disposed in The high-liquid liquid mist cleaning device on the downstream side of the detergent cleaning device of the transport path, and the water device, the high-dust liquid mist cleaning device disposed on the transport path, and the downstream side Any of the foregoing water removal devices. With this configuration, the sheet can be efficiently washed and dewatered without being affected by the weight of the sheet itself, and a large reaction force from the structure. And the preferred cleaning device is provided with a final cleaning and no δ between the high-pressure liquid spray cleaning device and the water-removing device, and the final cleaning device has fluid guiding members on both sides of the device. . The reason for this is that the fluid from the fluid guide member is washed away by dust which is released from the sheet material and floats in the water in the high-pressure liquid mist cleaning device.
J 及、®用下彡參圖式邊說明本發明板材之洗淨設備以 及適用於此洗淨設備之清潔劑洗淨裝置、高壓液體噴霧洗 淨裝置和除水裝置之實施形態。 [實施方式] 於圖1及圖2所示洗淨設備i配設有帶式輸送機2, 用來於矩形平板玻璃G暨立之狀態下,將該玻璃之底邊支 掉並沿水平方向搬送。不限於帶式輸送機,可採用例如輥 道輸送機4周知輸送機。用來沿帶式輸送機2之搬送方向 14 亦即沿平板玻璃之通 過綠L以μ各劑洗淨平板玻璃G表面 之清潔劑洗淨裝置3 '用夾 用來以霧狀向壓液體(亦稱水喷柱) 洗淨平板玻璃G表面之古厥 _ 曲之冋壓液體噴霧洗淨裝置4、用來將 藉馬壓液體噴霧洗淨裝置4自 衣置4目+板玻璃G脫離而浮游於水 中之塵埃等洗掉之最線哞、.备貼坦r y. 取、,、洗/爭裝置5以及用來將水份自洗淨 後之平板玻璃G表&丄+ ^ & 牙、去之除水裝置6,自上游依此順序 -置J_本實施形態之除水裝置6,係在除水動作之前 又進行最終洗淨。不過,不限於此。 8 如帶式輸送機2之搬送方向(通過線L·),於其兩 側立設有用來以非接觸式支撐平板玻璃G之面的流體導件 。流體導件8沿搬送方向分成上述裝置3、4、5、6各 部分。如後述’除水裝i 6與其他裝4 3、4、5,流體導 件之構故是不同的,故以符^ 27標示除水裝置之流體導 件。J and , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Embodiment] The washing apparatus i shown in Fig. 1 and Fig. 2 is provided with a belt conveyor 2 for supporting the bottom edge of the glass and horizontally in a state in which the rectangular flat glass G is erected. Transfer. It is not limited to a belt conveyor, and a conveyor such as a roller conveyor 4 can be used. The cleaning device 3 for cleaning the surface of the flat glass G along the conveying direction 14 of the belt conveyor 2, that is, the green glass L along the flat glass, is used for the pressure liquid in the form of a mist. Also known as water jet column) Wash the surface of the flat glass G. _ 曲 冋 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体The most cleanliness of the dust that floats in the water, such as the sputum, the sputum, the sputum, the sputum, the squeaking device, the slab, the slab, the slab, the slab, the slab The tooth removal device is removed from the upstream, and the water removal device 6 of the present embodiment is subjected to final cleaning before the water removal operation. However, it is not limited to this. 8 If the conveying direction of the belt conveyor 2 (through the line L·), a fluid guide for supporting the surface of the sheet glass G in a non-contact manner is provided on both sides thereof. The fluid guide 8 is divided into the above-mentioned portions of the devices 3, 4, 5, 6 in the conveying direction. As will be described later, the water removal device i 6 and the other devices 4 3, 4, and 5 have different fluid guide configurations, so the fluid guide of the water removal device is indicated by the symbol 27 .
J 如一併參照清潔劑洗淨裝置3之侧視圖即圖4可知, 流體導件8具備框構件9及安裝於此框構件9之導板1〇。 於構成導板10之平面配設有用來朝平板玻璃G面施加支 撑用流體壓力之流體噴出部1 1。 流體喷出部11可調節成全體與平板玻璃G面平行。 在流體噴出部Π上,以彼此間留有間隔之方式排列有朝 平板玻璃G面喷出流體之流體喷嘴丨lc。 由於流體導件8設置於通過線L之左右兩側,並由於 自平板玻璃之兩面作用之流體壓力獲得平衡,故平板玻璃 15 1344398 可不接觸結構部件,维持大致垂直之狀態。於本實施形態 中,使用水作為支律用流體。由於使用水作為支律用流體 ’故可有效自平板玻璃除去玻璃屑之粒子、其他塵埃。此 水依需要選擇自來水、純水、清潔劑水溶液等。 又,亦可使用多孔質材料來設置使液體滲出於導面之 多孔質流體導件,而不排列多個流體喷出部11。藉此多孔 質流體導件,可㈣㈣用液體之表面張力,α不接觸結 構部件之方式以豎立狀態支撐平板玻璃。 产支撲用流體不限於液體,亦可例如為潔淨氣體。在使 用氣體作為支撐用流體之流體導件僅配設於通過線L之單 側時’是使平板玻璃G略微向此流體導件側傾斜,利用平 板玻璃本身重量之橫向分量及所喷出氣體之壓力之力量之 平胬+藉机體導件以非接觸式支撐。不過由於平板玻璃之 淨藉液體進行’故較佳的是支揮用流體亦同樣為液體。 邊參照圖3至圖5,邊說明清潔劑洗淨裝置3。於清潔 劑洗淨裝置3中’對應清潔劑洗淨裝置3之部分的帶式輸 送機之機能是作為清潔劑洗淨裝Ϊ 3之平板玻璃支撐裝置 )之引視圖,為求容易理解,表示除去前側之流體 導件8之狀態。 ^絮劑洗淨裝置3中’配設有第1流體喷出部1 la及J. Referring to FIG. 4 which is a side view of the detergent cleaning device 3, the fluid guide 8 includes a frame member 9 and a guide plate 1 attached to the frame member 9. A fluid ejecting portion 1 1 for applying a supporting fluid pressure to the flat glass G surface is disposed on a plane constituting the guide plate 10. The fluid ejecting portion 11 can be adjusted so that the entire portion is parallel to the G surface of the flat glass. On the fluid ejecting portion, a fluid nozzle 丨lc that ejects a fluid toward the surface of the flat glass G is arranged with a space therebetween. Since the fluid guides 8 are disposed on the left and right sides of the passing line L and are balanced by the fluid pressure acting on both sides of the flat glass, the flat glass 15 1344398 can be maintained in a substantially vertical state without contacting the structural members. In the present embodiment, water is used as the fluid for the branch. Since water is used as the fluid for the law, particles of glass cullet and other dust can be effectively removed from the flat glass. This water is selected from tap water, pure water, aqueous detergent solution, etc. Further, a porous material may be used to provide a porous fluid guide for allowing liquid to permeate the guide surface without arranging the plurality of fluid discharge portions 11. With this porous fluid guide, the flat glass can be supported in an upright state by the surface tension of the liquid and the manner in which α does not contact the structural member. The fluid for production and production is not limited to a liquid, and may be, for example, a clean gas. When the fluid guide using the gas as the supporting fluid is disposed only on one side of the passing line L, 'the flat glass G is slightly inclined toward the side of the fluid guide, and the lateral component of the weight of the flat glass itself and the gas to be ejected are utilized. The force of the pressure of the flat + through the body guides in a non-contact support. However, since the flat glass is made of a liquid, it is preferable that the fluid for dispensing is also a liquid. The detergent cleaning device 3 will be described with reference to Figs. 3 to 5 . In the detergent cleaning device 3, the function of the belt conveyor corresponding to the portion of the detergent cleaning device 3 is a guide view of the flat glass support device as a cleaning agent cleaning device 3, which is easy to understand and indicates The state of the fluid guide 8 on the front side is removed. ^The floc cleaning device 3 is provided with a first fluid ejecting portion 1 la and
2机體噴出部i lb來當作流體噴出部i i。第】流體喷出 部 1 1 a 沿;7欠 Φ Htr P 設有複數& : ’並以彼此上下留有間隔之方式配 , 第2流體噴出部lib以沿平板玻璃之搬 送方向留右pq B鬲之方式沿上下方向配設有複數支。於各流 1344398 體喷出部ila’ llb,以彼此留有間隔之方式排列有朝平板 破璃面嗔出流體之流體嗔嘴iIc。這些流體噴出部】u、 Ub可調節成全體平行於平板玻璃6面。 清潔劑洗淨裝置3,係自圓略清潔劑供應源將清潔劑 麼送至流料件8,並自鍾料⑴喷出清㈣水溶液( 洗淨液)。藉此構造,清潔劑洗淨裝置3以洗淨液洗淨平板 玻璃之整面,甚至自平板玻璃面除去油脂部分。當缺,配The body discharge portion i lb is used as the fluid discharge portion i i . The first fluid ejecting portion lib is provided with a space between the upper and lower sides of the flat glass, and the second fluid ejecting portion lib is left in the direction of the flat glass. The B鬲 method is provided with a plurality of branches in the up and down direction. In each of the streams 1344398, the body ejecting portions ila' llb are arranged with a fluid nozzle iIc for discharging a fluid toward the flat glass surface. These fluid ejecting portions u and Ub can be adjusted so as to be entirely parallel to the surface of the flat glass. The detergent cleaning device 3 supplies the cleaning agent to the flow material 8 from the source of the round detergent, and ejects the clear (four) aqueous solution (washing liquid) from the bell (1). With this configuration, the detergent cleaning device 3 washes the entire surface of the flat glass with the cleaning liquid, and even removes the grease portion from the flat glass surface. When missing
置於下游側之其他裝置4、5、6可使用純水等代替洗淨液 作為用於流體導件之流體β χ,即使是清潔劑洗淨裝置3 之流體導# 8,亦不須將全部導件作成用以喷射洗淨液之 構成,可自流體導# 8之—部分嘴射洗淨液。再者,藉由 昇高洗淨液之溫度(例如約80t),進一步提高油脂部分之 除去效果。 如圖3及圖5所示’於此清潔劑洗淨裝置3,與搬送 而來之平板玻璃G上邊對應之位置(沿平板玻璃g上邊之 位置)起稍往流體導件相反側移位之位置延設有清㈣供應The other devices 4, 5, 6 placed on the downstream side may use pure water or the like instead of the cleaning liquid as the fluid β χ for the fluid guide, even if it is the fluid guide #8 of the detergent cleaning device 3 All the guides are formed to spray the washing liquid, and the washing liquid can be sprayed from the part of the fluid guide #8. Further, by increasing the temperature of the cleaning liquid (e.g., about 80 t), the effect of removing the oil portion is further enhanced. As shown in FIG. 3 and FIG. 5, the detergent cleaning device 3 is slightly displaced to the opposite side of the fluid guide from the position corresponding to the upper side of the flat glass G (the position along the upper side of the flat glass g). The location is extended to provide (4) supply
管12。於此清潔劑供應管12排列有多個清潔劑噴嘴13, J 用來對平板玻璃G之單面從上邊霧化噴吹清潔劑。對清潔 劑仏應管12 ’自圖略清潔劑供應源壓送清潔劑。清潔劑供 應管可按照作為洗淨對象之平板玻璃之上下尺寸而上 下運動。 藉此多個清潔劑喷嘴13,將所有清潔劑供應至平板玻 璃單面之上邊。此清潔劑藉由重力,全部供應至平板玻璃 之該單面之整面,將該單面洗淨。本清潔劑洗淨裝置3雖 17 1344398 然具備單一清潔劑供應管12 ,不過,本發明不限於此構造 。例如,若上下隔開,具備複數支清潔劑供應管丨2,即使 平板玻璃之搬送速度加快,仍可使清潔劑充分遍及平板玻 璃之表面。 雖然如前述,清潔劑洗淨裝置3於通過線 設喷出洗淨液之流體導件8,不過,在具備上述清潔劑供 應管12之情形下,流體導件8可隔著通過線L,僅設在清 潔劑供應f 12之相反側。由於支撐流體為液體,故即使 流體導件8僅設置在通過線L之單側,平板玻璃g仍藉充 滿於其表面與流體嘴出吾"1之間隙的液體之表面張力而 被吸m以不接觸、維持大致垂直狀態予以搬送。不 過由於考慮m體導件之洗淨效果較上述構造之清潔劑供 應管12還高’故最好具備將洗淨液喷出至通過線[兩側 之流體導件8。 藉由/月潔劑洗淨裝置3之清潔劑洗淨,可使塵埃、油 月曰口 f5刀自平板玻璃表面遊離出來。 於此清潔劑洗淨裝置3之上游端及下游端,分別沿上 下方向延設有空氣幕構件14。如圖5所示,此空氣幕構件 具備供氣& 15,於通過線L之兩側相互對向並沿上 下方向延設,用來供應潔淨空氣;及多個空氣喷嘴(亦稱除 :喷:)16’沿此供氣管15緊密排列,用來朝平板玻璃面 喷队^氣。潔淨空氣是經過“等去除塵埃等之空氣 。對上述供氣管15,自圖略供氣源壓送潔淨空氣。自上游 端及下游端之各空氣幕構件14㈣淨空氣對所搬送之平 18 1344398 板玻璃噴出潔淨空氣,形成空氣幕。因此’防止水份等自 上游製程或下游製程進入清潔劑洗淨裝置3。因 淨液之濃度變動。又防止洗淨液移往上游製程或下游製程 輪送r/(b)及圖5中’符號17標示之構件是配設於帶式 2 、 下方之接水管道◦又,符號18標示之構件是 …承接之液體並回收於下方洗淨液二 送至古壓液之集水管。清潔劑洗淨完成之平板玻璃接著被搬 至阿壓液體噴霧洗淨裝置4(圖1)。 -厭邊參照圖6至圖9邊說明高壓液體噴霧洗淨裝置4。 :廡霧洗淨裝置4中’與高壓液體噴霧洗淨裝置4 二p分之帶式輸送@ 2,係當作高壓液體噴霧洗淨裝 喷霧洗淨之Λ板4玻中璃支Γ裝置來使用。如前述,於高壓液體 中,机體導件8設置於通過線L之兩側。 ’於搬送方向之流體尊杜8Tube 12. The detergent supply pipe 12 is arranged with a plurality of detergent nozzles 13, J for atomizing the cleaning agent from the upper side of the single side of the flat glass G. The cleaning agent is supplied to the cleaning agent 12' from the source of the cleaning agent. The detergent supply tube can be moved up and down in accordance with the upper and lower dimensions of the flat glass as the object to be cleaned. With this plurality of detergent nozzles 13, all of the cleaning agent is supplied to the upper side of the flat glass. The cleaning agent is supplied to the entire surface of the single side of the flat glass by gravity, and the single side is washed. The detergent cleaning device 3 has a single detergent supply tube 12 although it is 17 1344398, however, the present invention is not limited to this configuration. For example, if the upper and lower partitions are provided with a plurality of detergent supply tubes 2, even if the conveying speed of the flat glass is increased, the detergent can be sufficiently spread over the surface of the flat glass. Although the detergent cleaning device 3 is configured to eject the fluid guide 8 of the cleaning liquid through the wire as described above, the fluid guide 8 may be passed through the line L in the case where the detergent supply pipe 12 is provided. It is only provided on the opposite side of the detergent supply f 12 . Since the supporting fluid is a liquid, even if the fluid guiding member 8 is disposed only on one side of the passing line L, the flat glass g is sucked by the surface tension of the liquid filled in the gap between the surface and the fluid nozzle. It is transported without contact and maintaining a substantially vertical state. However, since it is considered that the cleaning effect of the m-body guide is higher than that of the detergent supply pipe 12 of the above configuration, it is preferable to discharge the cleaning liquid to the passing line [the fluid guide 8 on both sides. The cleaning of the cleaning agent of the /month cleaning agent 3 allows the dust and oil to be released from the surface of the flat glass. At the upstream end and the downstream end of the detergent cleaning device 3, air curtain members 14 are respectively extended in the up-down direction. As shown in FIG. 5, the air curtain member is provided with a supply air & 15, which is opposite to each other through the two sides of the line L and extends in the up and down direction for supplying clean air; and a plurality of air nozzles (also called: The spray:) 16' is closely arranged along the air supply pipe 15 for spraying against the flat glass surface. The clean air is air that has been "removed by dust, etc.. For the above air supply pipe 15, the clean air is pumped from the air supply source. The air curtain members 14 (four) from the upstream end and the downstream end are transported by the air pair 18 1344398 The plate glass emits clean air to form an air curtain. Therefore, 'preventing moisture and the like from the upstream process or the downstream process into the detergent cleaning device 3. The concentration of the cleaning liquid changes, and the washing liquid is prevented from moving to the upstream process or the downstream process wheel. The r/(b) and the components indicated by the symbol 17 in Fig. 5 are disposed in the water pipe of the belt type 2 and below, and the component indicated by the symbol 18 is the liquid received and recovered in the lower cleaning liquid. The flat glass that has been sent to the ancient pressure liquid is cleaned and the flat glass is then transferred to the pressure liquid spray cleaning device 4 (Fig. 1). - The high side liquid spray cleaning is described with reference to Figs. 6 to 9 Device 4. : 庑 mist cleaning device 4 'with high-pressure liquid spray cleaning device 4 two-pig belt conveyor @ 2, is used as a high-pressure liquid spray cleaning spray spray cleaning plate 4 glass in glass Use the support device. As mentioned above, in high pressure liquid The body guide 8 is disposed on both sides of the passing line L. 'The fluid in the direction of the transport
J 霧構件…圖6為求容易理解:壓::配:有高壓液體喷 流體導件8局部做出缺:易理解J液體噴霧構件19,將 有喷=有:過:Lr兩高壓液趙喷霧構件19分別具 古壓 η ;此喷觜支架41安裝有上下分開之一對 ㈣2G。並且,此上下之分開距離可變更。自 =液體喷霧嘴20喷射高遷水流(水喷柱)。中央夹有通過 、=之兩高壓液时㈣2G彼此對向。這是為了使來自 喷霧嘴20之高壓水所造成之屢力於平板玻璃兩 側形成達到平衡。 19 1344398 ^如圖6及圖7所示,上述喷嘴支架41藉沿上下方向鋪 · 又之線性導弓I機構21能於高壓液體喷霧構件19之底架42 上下移動。結果,高壓液體喷霧嘴20相對於平板玻璃上 下運動。又,喷嘴支架41中之喷嘴支撐部4U透過鉸鏈安 裝成可相對於喷嘴支架41之基部41b向外旋動。藉由噴 嘴支撐部4la之旋動,能使高壓液體喷霧嘴2〇移動至與平 j玻璃面對向之作用位置以及退避至外侧之非作用位置。 高麼液體噴霧嘴2G在非作用位置進行維修等。符號43所 不構件是用來將喷嘴支撐部41a固定於底架42並分離的固 j 定具之旋鈕。 高壓液體喷霧嘴20,能繞與平板玻璃成直角之旋轉軸 轉照圖7及圖8)旋轉。藉此,各喷嘴2〇能邊旋轉,邊 上下運動,故即便是少數喷嘴2〇亦能洗淨大範圍之平板 玻璃表Φ。符^ 20b ~標示之構件是用來穩定高壓液體噴 霧嘴2 0之旋轉的平衡配重。 又配設與此高壓液體喷霧嘴2〇一起上下運動之移動式 流體導件22。其用途在於防止來自高壓液體喷霧嘴之 j 高壓水流所造成平板玻璃之振動.此移動式流體導件Μ 亦隔著通過線L對向。圖示之移動式流體導件22雖然僅 配設於高慶液體喷霧嘴20之上方或下方中任一方,不過 ,卻不特別限定於此構造。例如,亦可配置於上下兩方、 左右兩方、上下左右四方等。 於此高壓液體喷霧構# 19之搬送方向兩W,配設有上 下鄰接排列之複數個上下流體導# 23β由於以如此特別密 20 1344398 合於高壓液體噴霧構件19兩侧之方 〜万式配設上下流體導件 23,故可更有效防止高壓液體噴霧 薄所造成之平板玻璃之 振動。J fog components... Figure 6 is easy to understand: pressure:: with: high pressure liquid spray fluid guide 8 partial defects: easy to understand J liquid spray member 19, there will be spray = have: over: Lr two high pressure liquid Zhao The spray members 19 respectively have an ancient pressure η; the sneeze support 41 is mounted with a pair of upper and lower sides (four) 2G. Moreover, the separation distance between the upper and lower sides can be changed. The liquid spray nozzle 20 injects a high water flow (water spray column). When the center has a high pressure liquid passing through and = (4) 2G is opposite to each other. This is to achieve a balance between the two sides of the flat glass caused by the high-pressure water from the spray nozzle 20. 19 1344398 ^ As shown in FIGS. 6 and 7, the nozzle holder 41 can be moved up and down by the chassis 42 of the high-pressure liquid spray member 19 by means of the linear guide arch mechanism 21. As a result, the high pressure liquid spray nozzle 20 moves up and down with respect to the flat glass. Further, the nozzle supporting portion 4U of the nozzle holder 41 is mounted to be outwardly rotatable relative to the base portion 41b of the nozzle holder 41 via a hinge. By the rotation of the nozzle supporting portion 4la, the high-pressure liquid spray nozzle 2'' can be moved to a position facing the flat glass and an inactive position retracted to the outside. The high liquid spray nozzle 2G is repaired in an inactive position. The non-member of the symbol 43 is a knob for fixing the nozzle support portion 41a to the chassis 42 and separating it. The high-pressure liquid spray nozzle 20 is rotatable about a rotating shaft at right angles to the flat glass, as shown in Figs. 7 and 8). As a result, each of the nozzles 2 can be rotated up and down, so that even a small number of nozzles 2 can wash a wide range of flat glass sheets Φ. The member of the symbol ^ 20b ~ is a balance weight for stabilizing the rotation of the high-pressure liquid spray nozzle 20 . Further, a movable fluid guide 22 that moves up and down together with the high-pressure liquid spray nozzle 2 is disposed. Its purpose is to prevent the vibration of the flat glass caused by the high pressure water flow from the high pressure liquid spray nozzle. The mobile fluid guide Μ is also opposed to the line L. The illustrated mobile fluid guide 22 is disposed only above or below the Gaoqing liquid spray nozzle 20, but is not particularly limited to this configuration. For example, it may be arranged on the upper and lower sides, the left and right sides, the upper, lower, left and right sides, and the like. In the direction of transport of the high-pressure liquid spray structure #19, two upper and lower fluid guides are arranged adjacent to each other, and the upper and lower fluid guides are arranged in such a way that they are so dense 20 1344398 that they are combined with the sides of the high-pressure liquid spray member 19 The upper and lower fluid guiding members 23 are disposed, so that the vibration of the flat glass caused by the high-pressure liquid spray thin can be more effectively prevented.
於此高壓液體喷霧洗淨裝置4之上游端沿上下方向延 設有水洗構件24。如圖9所示,此水洗構件^具備:用 來供應純水之供水管25,其隔通過線l,於兩職此對向 ’並沿上下方向延設;及多個水嘴嘴26,其沿此供水管 25配設1來朝平板玻璃G之面嗔吹水。水自圖略供水源 壓送至上述供水管25。由於上游端之水洗構件Μ 於所搬送之平板玻璃,故水均依序流至平板玻璃之兩面整 面。平板玻璃,藉上游端之水洗構件24、冲洗可能於前_ 製程附著之洗淨液。並且,#由表面乾燥,防止塵埃等附 著0 於高壓液體喷霧洗淨裝置4之下游端,沿上下方向延 設有與在前述清潔劑洗淨裝f 3中所說明相同之空氣幕構At the upstream end of the high-pressure liquid spray cleaning device 4, a water washing member 24 is extended in the vertical direction. As shown in FIG. 9, the water washing member 2 is provided with: a water supply pipe 25 for supplying pure water, which is separated from the line 1 by a line l, and is extended in the up and down direction; and a plurality of nozzles 26, A water supply pipe 25 is disposed along the water supply pipe 25 to blow water toward the surface of the flat glass G. The water is sent to the water supply pipe 25 as shown in the figure. Since the water-washing member at the upstream end is placed on the flat glass to be conveyed, the water flows sequentially to both sides of the flat glass. The flat glass is washed with a water-washing member 24 at the upstream end to rinse the cleaning liquid which may be attached to the front-process. Further, # is dried by the surface, and dust is prevented from adhering to the downstream end of the high-pressure liquid spray cleaning device 4, and the air curtain structure similar to that described in the above-described detergent cleaning device f 3 is extended in the up-and-down direction.
J 件14(圖6)。由於此構造之設置目的亦與前述相同,故省 略其說明。 本高壓液體喷霧洗淨裝置4雖然隔通過線L於兩側各 配置一南壓液體噴霧構件丨9,不過,本發明不限於此構造 亦可於通過線L兩側分別配置複數個高壓液體嘴霧構件 19 °藉此’即使平板玻璃之搬送速度上昇,仍可充分洗淨 。又’亦可依需要增減配設於各高壓液體喷霧構件19之 尚壓液體噴霧嘴20之個數。藉由增加高壓喷霧嘴之個數 ’特別是,無須使高壓噴嘴上下運動,藉由高壓液體噴濃 21 別沿上下方向緊 藉由此高壓液體噴霧洗淨,遠較 刷洗淨等更提高洗淨效果^ α超音波洗淨、擦 板破璃接著被搬送至最終洗淨\置=體喷霧洗淨之平 設置圖10所示最終洗淨 5 沖洗於清潔劑洗淨裝置3、古愿”广乂藉循環純水仔細 平板玻璃游離出之油脂部分 净裝置4中自J piece 14 (Figure 6). Since the setting purpose of this configuration is also the same as described above, the description thereof will be omitted. The present high-pressure liquid spray cleaning device 4 is provided with a south-pressure liquid spray member 丨9 on both sides of the line L. However, the present invention is not limited to this configuration, and a plurality of high-pressure liquids may be disposed on both sides of the line L. The mouth mist member 19° can be sufficiently washed even if the conveying speed of the flat glass is increased. Further, the number of the pressurized liquid spray nozzles 20 disposed in the respective high-pressure liquid spray members 19 may be increased or decreased as needed. By increasing the number of high-pressure spray nozzles, in particular, it is not necessary to move the high-pressure nozzle up and down, and the high-pressure liquid spray 21 is used to wash the high-pressure liquid spray in the up-and-down direction, which is much higher than the brush cleaning. Washing effect ^ α Ultrasonic cleaning, wipe the glass and then transferred to the final wash \ Set = body spray wash flat set Figure 10 shows the final wash 5 rinse in the detergent cleaning device 3, ancient I hope that the vast amount of oil will be removed from the flat glass by the circulating pure water.
J 置5只要於通過線L之^、因此,最終洗淨裝 1姑 之兩侧配設流體導件8,便益項另冰 叹置特別裝置。其原因在於 冑無屑另外 應至其表面之水洗淨Π 璃藉自流體導件8供 此最終洗淨^二 洗淨設備1中亦可不使用 至除水裝置6(圖6)。、终m成之平板玻璃接著被搬送 中,U至圖Μ邊說明除水裝置6。除水裝置6 為除水^置6應之部分之帶式輸送機2機能上是作 中:、4L 板玻璃支撲裝置。如前述,除水裝置6 中机體導件8設置於通過線L之兩侧。 又如H U、圓13及圖14所示,於通過 =方…體導件27之中間部,自上游依序“; 。'平仃地配設有2個水洗構件28、29及除水構 v 、3〇_。並且,上述流體導件27與前述流體導件8不同, f述隔離板35之上游側部分2乃使用水作為支撐用流體, =離板35 <下游侧部& 27b使用超潔淨空氣作為支樓用 超潔淨空氣是藉網目較前述潔淨空氣更細之過濾器 22 ^44398 等淨化處理過之空氣。 如圖13所示,兩水洗構件28、29同時具有自垂直方 向略微朝上游側傾斜延設之供水管31以及沿此供水管3ι 之長邊方向排列之多個水噴嘴32。純水自圖略供水源壓送 至供水管31 ’各水喷嘴32朝平板玻璃G面噴射純水。上 述水洗構件28、29是用來藉由反覆進行與最終洗淨裝置$ 之洗淨相同之洗淨,進一步仔細自平板玻璃表面沖洗油脂 部分、塵埃等之構件。此水洗構件28、29不使用循環純 水^使用純水-次即丟棄(可以說是使用拋棄式純水), 以提高平板玻璃之潔淨度。 ;除水構件30由平行於供水管31、且從垂直方向略微 ·=傾斜延設之供氣管(亦稱氣刀架)33構成。 二自圖略供氣源壓送至供氣管33。又,如圖12及圖Μ 丁此供虱官33形成用來朝平板玻璃面嘴吹空J is set to 5 as long as it passes through the line L. Therefore, the fluid guides 8 are disposed on both sides of the final cleaning device, and the special device is slid. The reason for this is that the water is washed from the surface of the fluid guide 8 for the final cleaning. The cleaning device 1 may not be used in the water removal device 6 (Fig. 6). The final glass is then transported, and the water removal device 6 is illustrated by the U to the figure. The water removal device 6 is a function of the belt conveyor 2 which is part of the water removal device 6, and is a 4L plate glass baffle device. As described above, the body guide 8 of the water removing device 6 is disposed on both sides of the passing line L. Further, as shown in the HU, the circle 13 and the figure 14, in the middle portion of the body guide member 27, the two water-washing members 28, 29 and the water-removing structure are arranged in the order from the upstream. v, 3〇_. Moreover, the fluid guide 27 is different from the fluid guide 8 described above, and the upstream side portion 2 of the partition plate 35 uses water as a supporting fluid, = off-plate 35 < downstream side & 27b uses ultra-clean air as the branch building. The ultra-clean air is purified by the filter 22 ^ 44398 which is finer than the clean air. As shown in Figure 13, the two water-washing members 28, 29 have the same vertical The water supply pipe 31 which is slightly inclined toward the upstream side and the plurality of water nozzles 32 arranged along the longitudinal direction of the water supply pipe 3i. The pure water is pumped from the water supply source to the water supply pipe 31' each water nozzle 32 toward the flat plate The water-washing members 28 and 29 are used for washing the same washings as the final cleaning device, and further carefully washing the grease portion, the dust, and the like from the surface of the flat glass. Water-washing members 28, 29 do not use recycled pure water ^ use pure water - times That is, it is discarded (it can be said that disposable pure water is used) to improve the cleanliness of the flat glass. The water removing member 30 is provided by an air supply pipe (also called gas) which is parallel to the water supply pipe 31 and which is slightly inclined from the vertical direction. The tool holder 33 is formed. The second supply of the air supply is sent to the air supply pipe 33. Further, as shown in Fig. 12 and Fig. 12, the supply of the sergeant 33 is formed to blow the air to the flat glass surface.
J 除水構件30,係使自通過線L兩側喷= 喷:平板玻璃兩面對應之部位。細縫㈣ 。無論如何,:d口壓或留有-點點間隔斷續形成 板玻璃03嘴吹。此氣流以接近音# 之速度嘴射。稱此氣流為氣刀Ν。 近曰速 轴旋所:,供氣管33,係能繞其長邊方向之中心J The water removing member 30 is sprayed from both sides of the passing line L = spray: the portion corresponding to both sides of the flat glass. Slit (4). In any case, :d port pressure or left-point interval intermittently formed plate glass 03 mouth blowing. This airflow is emitted at a speed close to the sound #. This airflow is called an air knife. Near idle shaft shaft: the air supply pipe 33 is able to wrap around the center of its long side
平板玻二 刀Ν之方向能改變。例如,可垂直朝A 十板玻螭表面,亦 旦朗向 氣管33自垂直略二朝向上游側或下游侧。又由於供 祕朝上游側傾斜,故旋轉氣刀N,使氣刀 23 丄J44观 N之方向略微朝。t n上游側,氣刀N便可朝上游,將平板玻 璃表面之水份往τ ^ 下方《人掉。結果,將水份自氣刀架33往 上游側下方吹揸,# 於下游侧水份不移動。自通過氣刀Ν之 平板玻璃之全郁矣二λ 卩表面除去水份等,使其成乾燥狀態。 .由於水洗構件28、29自垂直略微朝上游側傾斜,故 ^搬送之平板㈣上部往上下方向之任-部分均獲得新的 欠之供應’可進行高品質之洗淨。又,此水洗構件28、29 亦如同上述供氣管33,能繞其長邊方向之中心軸旋轉。結 果純水之噴射方向能改變。 如圖12所示,將隔離板35配設成接近通過線[兩側 之除水構件30。此隔離板35係用來防止水自除水構件3〇 移動至下游側。各隔離板35自除水構件30,沿與含有通 過線L之紹直面(實質上是平板玻璃面)垂直之方向向外突 出。又’隔離板35平行於供氣管33及水洗構件28、29, 並自錯直方向朝上游側傾斜延設。結果,無論於此上游側 嘴出之水如何飛濺,均藉此隔離板35防止其移往下游側 尤除水構件30。此隔離板35除了設在接近上述除水構件 3〇之仇置外,亦可設置成例如接近下游側之水洗構件29 之下游側。 如前述,上述流體導件27於此隔離板3 5之上游側使 用純水作為支撐流體,於隔離板3 5之下游側使用超潔淨 足氣作為支撐流體。因此’自氣刀架33至下游完全不使 $水’平板玻璃成乾燥狀態。 又’雖然未圖示,不過,可將洗淨設備1之各裴置3 24 1344398 、4、5、6中作為支撐裝置之帶式輸送機2之部分構成能 移動’用來使所支撐平板玻璃掉落至下方。例如,若可沿 與搬送方向成直角之方向移動,帶式輸送機上之平板玻璃 即掉落至下方。或者,亦可藉由傾斜作動皮帶部,使皮帶 退離平板玻璃之通過線L,令平板玻璃掉落。藉此構造, 即使在例如因洗淨時損傷而無法達到製品化之情形下,搬 送作業線、洗淨設備仍不會被玻璃碎片弄髒, 可容易除去損傷之玻璃。 由於流體導件8、27設在通過線 依據此洗淨設備 L之單側或兩側,故㈣導件與平板玻璃之間㈣支撐用 液體之表面張力形成一定厚度之液體層,可在不接觸结構 物之狀態下,支撐平板玻璃並予以搬送。又,藉由使用°液 體作為導引用流體,可更有效地自平板玻璃除去玻璃屬、 其他塵埃。The direction of the flat glass can change. For example, it may be perpendicular to the surface of the A-plate glass, and the air tube 33 may be slightly perpendicular to the upstream side or the downstream side. Since the supply is tilted toward the upstream side, the air knife N is rotated so that the direction of the air knife 23 丄 J44 is slightly inclined. On the upstream side of t n , the air knife N can be moved upstream, and the water on the surface of the flat glass is lowered to the bottom of τ ^. As a result, the water is blown from the air knife holder 33 to the lower side, and the water does not move on the downstream side. The water is removed from the surface of the whole sputum λ 卩 of the flat glass of the air knife to make it dry. Since the water-washing members 28 and 29 are slightly inclined from the vertical direction toward the upstream side, the upper portion of the upper portion of the flat plate (four) which is transported in the upper and lower directions is obtained with a new supply of low quality, and high-quality washing can be performed. Further, the water washing members 28, 29 are also rotatable about the central axis of the longitudinal direction thereof as the above-described air supply pipe 33. As a result, the direction in which pure water is sprayed can be changed. As shown in Fig. 12, the partitioning plate 35 is disposed close to the passing line [the water removing members 30 on both sides. This partitioning plate 35 serves to prevent water from moving from the water removing member 3'' to the downstream side. Each of the partitioning plates 35 protrudes outward from the water removing member 30 in a direction perpendicular to a straight surface (substantially a flat glass surface) including the passing line L. Further, the partition plate 35 is parallel to the air supply pipe 33 and the water washing members 28 and 29, and is inclined from the straight line toward the upstream side. As a result, regardless of how the water from the upstream side is splashed, the partition plate 35 is prevented from moving to the downstream side water removing member 30. The partitioning plate 35 may be provided, for example, close to the downstream side of the water-washing member 29 on the downstream side, in addition to being placed close to the water-removing member 3''. As described above, the fluid guide 27 uses pure water as a supporting fluid on the upstream side of the partitioning plate 35, and super clean foot gas as a supporting fluid on the downstream side of the partitioning plate 35. Therefore, the 'water' flat glass is not dried from the air knife holder 33 to the downstream. Further, although not shown, the portion of the belt conveyor 2 as a supporting device in each of the mounting devices 3, 24,344,398, 4, 5, and 6 can be moved to "support the supporting plate". The glass drops to the bottom. For example, if it is movable at a right angle to the conveying direction, the flat glass on the belt conveyor falls to the lower side. Alternatively, the flat glass may be dropped by tilting the belt portion to retract the belt from the flat glass through the line L. According to this configuration, even in the case where the product cannot be obtained due to damage during washing, the conveyance line and the cleaning device are not stained by the glass shards, and the damaged glass can be easily removed. Since the fluid guiding members 8, 27 are disposed on one side or both sides of the cleaning device L through the wire, (4) a liquid layer of a certain thickness is formed between the guiding member and the flat glass (4) by the surface tension of the supporting liquid, which may be In the state of contacting the structure, the flat glass is supported and transported. Further, by using the liquid as the guiding fluid, it is possible to more effectively remove the glass genus and other dust from the flat glass.
J 又,上述實施形態雖然就處理對象例示平板玻璃,^ 過,本發明不限於平板玻璃。例如,稀有金屬 '石夕製之* 材、平面型顯示器用玻璃等各種板材可成為處理對象。 又,於以上所說明之洗淨設備中雖然以—直線配置另 潔劑洗淨裝置3、高壓液體喷霧洗淨裝置4、最終洗淨身 置5及除水裝置6, +過,本發明不限於此構造。例如 搬送作業線可自中途正交配置,又可平行配置。 :發明雖然如此參照特定例加以說明,不過,這些令 子只是用來說明’而不是用來限定本發明,對本領域; 般知識者可在不超出本發明之精神及範圍下,對本文所杰 25 1344398 不之實施例進行變更、追加或消除。 依據本發明’可對含有大型化、薄型化之平板玻璃之 板材進步提尚其品質,可進行迅速且有效之洗淨處理。 【圖式簡單說明】 (一)圖式部分 圖1係表示本發明洗淨設備之一實施形態之前視圖。 圖2係囷1之洗淨設備之俯視圖。 圖3U)係表示圖丨洗淨設備之清潔劑洗淨裝置之一實 施形態之俯視囷。 囷3(b)係圖3(a)之前視圖,為求容易理解,表示除去 前側流體導件之狀態。 圖4係圖3(a)之IV-IV線之剖面圖。 圖5係圖3之清潔劑洗淨裝置之側視圖,且係圖叩) 之V - V線視圖。 圖6係表示圖i洗淨裝置之高壓液體喷霧洗淨裝置之 實施形態之局部有缺口之前視圖。 圖7係圖6之高壓液體噴霧洗淨裴置之俯視圖。 圖8(a)係表示圖6高壓液體噴霧洗淨裝置之一高壓液 體喷嘴例子之前視圖。 圖8(b)係圖8(a)之\1-\1線之剖面圓。 圖9係表示圖6高壓液體喷霧洗淨裝置之一水洗構件 例子之側視圖,且係相當於圖6之汉線視圖。 圖10係表不圖1洗淨裝置之一最終洗淨裝置例子之前 26 1344398 視圖。 囷11係表示圖1洗淨裝置之一除水裝置實施形態之前 視圖。 圓12係圖U之除水裝置之俯視圖。 圖13係表示圖n除水裝置中之水洗構件之側視圖 且係相當於圖U中沿11〇〇11線視圖。 圖Μ⑷係表示目u㉟水裝置之除水 且係相當於圖U之ΧΙν·χιν線视圖。 彳視圖Further, in the above embodiment, the flat glass is exemplified as the object to be processed, and the present invention is not limited to the flat glass. For example, various materials such as rare metals, such as Shihashi* and flat-panel display glass, can be treated. Moreover, in the cleaning apparatus described above, the cleaning device 3, the high-pressure liquid spray cleaning device 4, the final cleaning body 5, and the water removal device 6 are disposed in a straight line, and the present invention is used. Not limited to this configuration. For example, the transfer line can be configured orthogonally from the middle or in parallel. The invention is described with reference to the specific examples, which are intended to be illustrative only, and are not intended to limit the scope of the invention. 1344398 No change, addition or elimination of the embodiment. According to the present invention, it is possible to improve the quality of a sheet material containing a large-sized and thinned flat glass, and to perform a rapid and effective cleaning treatment. BRIEF DESCRIPTION OF THE DRAWINGS (1) Schematic Part FIG. 1 is a front view showing an embodiment of a washing apparatus of the present invention. Figure 2 is a plan view of the cleaning apparatus of the crucible 1. Fig. 3U) is a plan view showing an embodiment of the detergent cleaning device of the cleaning apparatus of the figure.囷3(b) is a front view of Fig. 3(a), showing the state of removing the front side fluid guide for easy understanding. Figure 4 is a cross-sectional view taken along line IV-IV of Figure 3(a). Figure 5 is a side view of the detergent cleaning device of Figure 3, and is a view of the V-V line of Figure 叩). Fig. 6 is a partially broken front view showing an embodiment of the high pressure liquid spray cleaning apparatus of the cleaning apparatus of Fig. i. Figure 7 is a top plan view of the high pressure liquid spray cleaning apparatus of Figure 6. Fig. 8 (a) is a front view showing an example of a high pressure liquid nozzle of the high pressure liquid spray cleaning device of Fig. 6. Fig. 8(b) is a cross-sectional circle of the line \1-\1 of Fig. 8(a). Fig. 9 is a side view showing an example of a water-washing member of the high-pressure liquid spray cleaning device of Fig. 6, which corresponds to the Han line view of Fig. 6. Figure 10 is a view of one of the cleaning devices of Figure 1 before the final cleaning device example 26 1344398 view.囷11 is a front view showing an embodiment of the water removing device of one of the washing devices of Fig. 1. A top view of the water removal device of the circle 12 series U. Fig. 13 is a side view showing the water-washing member in the water removing device of Fig. n and corresponds to a line view along line 11〇〇11 in Fig. U. Figure Μ(4) shows the water removal of the U35 water device and corresponds to the ΧΙν·χιν line view of Figure U.彳 view
圖14(b)係圖14(a)之俯視圖。 (二)元件代表符號Fig. 14 (b) is a plan view of Fig. 14 (a). (2) Component symbol
1 洗淨設備 2 帶式輸送機 3 清潔劑洗淨裝置 4 高壓液體噴霧洗淨裝 5 最終洗淨裝置 6 除水裝置 8 流體導件 9 框構件 10 導板 11 流體噴出部 11a 第1流體喷出部 lib 第2流體喷出部 11c 流體喷嘴 12 清潔劑供應管 27 1344398 13 清潔劑喷嘴 14 空氣幕構件 15 供氣管 16 空氣喷嘴 17 接水管道 18 集水管 19 高壓液體喷霧構件 20 高壓液體喷霧嘴 20a 旋轉轴 20b 平衡配重 21 線性導引機構 22 移動式流體導件 23 上下流體導件 24 水洗構件 25 供水管 26 水噴嘴 27 流體導件 27a 上游側部分 27b 下游側部分 28 ' 29 水洗構件 30 除水構件 31 供水管 32 水噴嘴 33 供氣管1 Washing equipment 2 Belt conveyor 3 Cleaner cleaning device 4 High-pressure liquid spray cleaning device 5 Final cleaning device 6 Water removal device 8 Fluid guide 9 Frame member 10 Guide plate 11 Fluid ejection portion 11a First fluid spray Out lib second fluid ejection portion 11c fluid nozzle 12 detergent supply tube 27 1344398 13 detergent nozzle 14 air curtain member 15 air supply tube 16 air nozzle 17 water supply pipe 18 water collection pipe 19 high pressure liquid spray member 20 high pressure liquid spray Mist nozzle 20a Rotary shaft 20b Balance weight 21 Linear guide mechanism Mobile fluid guide 23 Upper and lower fluid guide 24 Washing member 25 Water supply pipe 26 Water nozzle 27 Fluid guide 27a Upstream side portion 27b Downstream side portion 28 ' 29 Washing Member 30 water removal member 31 water supply pipe 32 water nozzle 33 air supply pipe
28 1344398 34 細縫 35 隔離板 41 喷嘴支架 41a 喷嘴支撐部 41b 基部 42 底架 43 旋在丑 G 平板玻璃 L 平板玻璃之通過線 N 膜狀氣流(氣刀)28 1344398 34 Slit 35 Separator 41 Nozzle holder 41a Nozzle support 41b Base 42 Chassis 43 Rotating in ugly G Flat glass L Flat glass passing line N Membrane air flow (air knife)
J 29J 29
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2002340764A JP2004174308A (en) | 2002-11-25 | 2002-11-25 | Sheet material washing equipment |
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TW200528202A TW200528202A (en) | 2005-09-01 |
TWI344398B true TWI344398B (en) | 2011-07-01 |
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Application Number | Title | Priority Date | Filing Date |
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TW93103883A TW200528202A (en) | 2002-11-25 | 2004-02-18 | Sheet material washing equipment |
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JP (1) | JP2004174308A (en) |
TW (1) | TW200528202A (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4669760B2 (en) * | 2004-09-14 | 2011-04-13 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and processing method |
KR101284681B1 (en) | 2007-02-15 | 2013-07-16 | 주식회사 케이씨텍 | Cleaning device for substrate and method thereof |
JP5681628B2 (en) * | 2008-07-31 | 2015-03-11 | コーニング インコーポレイテッド | Glass vertical processing equipment |
JP5717526B2 (en) * | 2011-04-26 | 2015-05-13 | 化研テック株式会社 | Partial cleaning apparatus and partial cleaning method |
JP5720954B2 (en) * | 2012-03-06 | 2015-05-20 | 株式会社ダイフク | Cleaning device for overhead conveyor |
WO2017034978A1 (en) * | 2015-08-21 | 2017-03-02 | Corning Incorporated | Methods of processing a glass web |
KR102640254B1 (en) * | 2017-10-06 | 2024-02-27 | 코닝 인코포레이티드 | Apparatus and method for processing glass sheets |
CN108372147B (en) * | 2018-04-24 | 2023-11-28 | 江苏金鼎建设集团有限公司 | Efficient wallboard belt cleaning device |
CN113070265A (en) * | 2021-04-06 | 2021-07-06 | 安徽新佰德新型材料有限公司 | High-pressure cleaning equipment and method for colored crystal glass |
CN113770143B (en) * | 2021-08-30 | 2022-07-12 | 蚌埠高华电子股份有限公司 | Device and method for cleaning grinding residues of liquid crystal glass substrate |
CN115285696B (en) * | 2022-10-09 | 2022-12-09 | 山东阅航环保科技有限公司 | Two-sided cleaning line of cavity glass |
Family Cites Families (7)
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JPS589670Y2 (en) * | 1978-09-20 | 1983-02-22 | 日立造船株式会社 | Tube sheet cleaning equipment |
JPS6028385B2 (en) * | 1980-04-26 | 1985-07-04 | 呉船産業株式会社 | washing drying equipment |
JPH10118583A (en) * | 1996-10-24 | 1998-05-12 | Nippon Electric Glass Co Ltd | Cleaning device for planar matter |
JP2000044287A (en) * | 1998-07-28 | 2000-02-15 | Shirai Tekkosho:Kk | Draining device for washing sheet glass |
JP2001213517A (en) * | 1999-11-24 | 2001-08-07 | Daiichi Shisetsu Kogyo Kk | Conveying device for plate member |
DE10130999A1 (en) * | 2000-06-29 | 2002-04-18 | D M S Co | Multifunction cleaning module of a manufacturing device for flat screens and cleaning device using the same |
JP2002308423A (en) * | 2001-04-18 | 2002-10-23 | Corning Japan Kk | Plate material carrying method and plate material carrying device |
-
2002
- 2002-11-25 JP JP2002340764A patent/JP2004174308A/en active Pending
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TW200528202A (en) | 2005-09-01 |
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