JP5717526B2 - Partial cleaning apparatus and partial cleaning method - Google Patents

Description

The present invention relates to a partial cleaning apparatus and a partial cleaning method using the same.
In particular, even if the shape of the part to be cleaned in the object to be cleaned is complex, it can be effectively cleaned by using ultrasonic vibration, and only the part to be cleaned in the object to be cleaned is selectively selected. The present invention relates to a partial cleaning apparatus that can be cleaned and a partial cleaning method using the same.

Conventionally, in the manufacture of various substrates such as semiconductor wafers, optical and magneto-optical disk substrates, and glass substrates for liquid crystal display devices and plasma display devices, as a final process, solder flux remaining on the substrate is removed. A cleaning process is being carried out.
In particular, when the form of the portion to be cleaned in the substrate is complicated, the cleaning liquid is applied while applying ultrasonic vibration to the substrate from the viewpoint of efficiently removing the solder flux remaining in the inner portion. A cleaning method for contacting is performed (for example, Patent Document 1).
That is, in Patent Document 1, as shown in FIG. 17, a substrate processing apparatus 100 that processes at least the lower surface of a substrate W held almost horizontally with a processing liquid, and is provided so as to face the lower surface of the substrate W. And a processing liquid supply means for supplying a processing liquid between the opposing member 112 and the lower surface of the substrate W and forming a liquid layer of the processing liquid between the opposing member 112 and the lower surface of the substrate W. 115 and an ultrasonic vibration plate 114 that is provided on the upper surface of the opposing member 112 and applies ultrasonic vibrations to the substrate W via a liquid layer is disclosed.

JP 2002-75943 A (Claims)

However, when the substrate cleaning apparatus of Patent Document 1 is used, the residual flux can be removed to some extent by using ultrasonic vibration, but only a small part of the whole has a portion to be cleaned. The following problems were observed when trying to partially wash the washed product.
(1) The used cleaning liquid adheres to the periphery of the portion to be cleaned.
(2) The amount of cleaning liquid used is increased.
(3) It takes time to dry after washing.
(4) The object to be cleaned is corroded by remaining used cleaning liquid.

Therefore, as a result of intensive studies, the present inventors, as long as it is a partial cleaning apparatus provided with an ultrasonic cleaning tank, an air blowing nozzle, a housing having a predetermined opening, and a predetermined elastic masking member, are described above. It has been found that the above problems can be solved, and the present invention has been completed.
That is, an object of the present invention is to form a liquid formed by overflow by bringing the cleaning liquid overflowed from below into contact with the cleaning target part even when the form of the cleaning target part in the object to be cleaned is complicated. It is an object of the present invention to provide a partial cleaning apparatus and a partial cleaning method using the same, which can be cleaned effectively by applying ultrasonic vibration through a layer.
In addition, a partial cleaning apparatus and a partial cleaning method using the partial cleaning apparatus that can effectively prevent the used cleaning liquid from adhering to the periphery of the cleaning target portion and efficiently clean only the cleaning target portion. It is to provide.
Furthermore, an object of the present invention is to provide a partial cleaning apparatus capable of suppressing the amount of cleaning liquid used, reducing the drying time after cleaning, and preventing the object to be cleaned from corroding due to remaining used cleaning liquid. It is to provide a partial cleaning method using the same.

According to the present invention, a partial cleaning apparatus for partially cleaning an object to be cleaned from below, a housing having an ultrasonic cleaning tank and an air blowing nozzle inside, and a first opening on the top And an elastic masking member that has a second opening for forming an opening communicating with the first opening in the housing and is detachably fixed to the housing. The component member is provided with a tray member that has an opening and is detachable from the housing, and the opening of the tray member is defined as a first opening, and is partially formed by an elastic masking member above the housing. While applying ultrasonic vibration to the object to be cleaned placed in a masked state, the object to be cleaned is opened above the ultrasonic cleaning tank. A partial cleaning apparatus is provided, characterized in that after cleaning is performed by contacting the cleaning liquid that has overflowed through the first and second openings, air is blown by an air blowing nozzle. The problem can be solved.
That is, in the partial cleaning apparatus of the present invention, ultrasonic vibration is applied only to a portion to be cleaned that is exposed to the inside of the housing through the first and second openings that communicate with each other. In addition, the cleaning liquid can be brought into contact.
Therefore, even when the shape of the part to be cleaned is complicated, ultrasonic vibration is applied through the liquid layer formed by the overflow by bringing the cleaning liquid overflowed from below into contact with the part to be cleaned. Can be cleaned effectively.
Moreover, it can suppress effectively that the used washing | cleaning liquid adheres to the periphery of the washing | cleaning target part, and can wash | clean only a washing | cleaning target part efficiently.
Moreover, the usage-amount of a washing | cleaning liquid can be suppressed by wash | cleaning only the cleaning object part efficiently.
Further, in the partial cleaning apparatus of the present invention, the air spray nozzle only applies air to the portion to be cleaned that is exposed to the inside of the housing through the first and second openings communicated with each other. The remaining used cleaning liquid can be forcibly removed.
Therefore, the drying time after cleaning can be shortened, and furthermore, corrosion of the object to be cleaned due to remaining used cleaning liquid can be prevented.
Furthermore, if it is the partial washing | cleaning apparatus of this invention, since it is the structure mentioned above, as shown to Fig.1 (a)-(b), it can contribute remarkably to space saving of an apparatus.

Further, in configuring the partial cleaning apparatus of the present invention, the height of the liquid level of the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank is 8 to 8 on the basis of the opening surface above the ultrasonic cleaning tank. A value within the range of 100 mm is preferable.
By configuring in this way, ultrasonic vibration can be more efficiently applied to the portion to be cleaned, so that even if the shape of the portion to be cleaned is complex, cleaning can be performed more effectively. Can do.

Moreover, when configuring the partial cleaning apparatus of the present invention, it is preferable to include a moving means for moving the ultrasonic cleaning tank in the vertical direction.
By comprising in this way, the distance between the washing | cleaning object part and an ultrasonic transducer | vibrator can be adjusted easily.

Further, in configuring the partial cleaning apparatus of the present invention, the air blowing nozzle is a slit type air nozzle, and the rotating means for rotating the slit type air nozzle around the axis parallel to the longitudinal direction as the central axis It is preferable to provide.
By comprising in this way, air can be sprayed on the part to be cleaned while rotating the slit type air nozzle, and the remaining used cleaning liquid can be forcibly removed more efficiently.

Further, in configuring the partial cleaning apparatus of the present invention, it is preferable to set the air flow rate in the slit type air nozzle to a value within the range of 80 to 300 m / sec.
By configuring in this way, the remaining used cleaning liquid can be forcibly removed more efficiently even when the area of the portion to be cleaned is relatively large.

Further, in configuring the partial cleaning apparatus of the present invention, the ultrasonic cleaning tank and the air blowing nozzle are provided in a common parallel moving carriage, and the other moves in parallel with one parallel movement. It is preferable.
With this configuration, by moving the parallel carriage, the ultrasonic cleaning tank approaches and the air blowing nozzle moves away from the object to be cleaned, and the ultrasonic cleaning tank moves away from the object and the air. The approach of the spray nozzle can be performed simultaneously and easily.

Another aspect of the present invention is a partial cleaning method using the above-described partial cleaning apparatus, which includes the following steps (a) to (d).
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned with the elastic masking member. (C) pressing the object to be cleaned in a masked state against the housing; (c) applying ultrasonic vibration from below to the object to be cleaned in the pressed object to be cleaned; A step of contacting the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank and cleaning the object to be cleaned (d) from the air spray nozzle to the portion to be cleaned in the pressed object to be cleaned The step of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air, that is, the partial cleaning method of the present invention can be applied to the object to be cleaned. Even if the shape of the part to be cleaned is complicated, it can be effectively cleaned by using ultrasonic vibration, and the used cleaning liquid can adhere to the periphery of the part to be cleaned. It can suppress effectively and can wash | clean only the part for washing | cleaning efficiently.
Further, the amount of the cleaning liquid used can be suppressed, the drying time after cleaning can be shortened, and the object to be cleaned can be prevented from corroding due to the remaining cleaning liquid remaining.

In carrying out the partial cleaning method of the present invention, in the step (c), it is preferable to move the ultrasonic cleaning tank upward so that the portion to be cleaned in the object to be cleaned is brought into contact with the cleaning liquid.
By carrying out in this way, the distance between the portion to be cleaned and the ultrasonic transducer can be easily adjusted.

In carrying out the partial cleaning method of the present invention, in the step (d), after moving the ultrasonic cleaning tank downward, a slit type air nozzle as an air blowing nozzle is formed on the opening surface of the first opening. It is preferable that air is blown while the slit-type air nozzle is rotated about an axis parallel to the longitudinal direction as a central axis.
By carrying out in this way, the remaining used cleaning liquid can be forcibly removed more efficiently.

Drawing 1 (a)-(b) is a figure offered in order to explain a partial cleaning device of a 1st embodiment. Drawing 2 is a figure offered in order to explain a housing in a partial washing device of a 1st embodiment. Drawing 3 is a figure offered in order to explain a loading form of a thing to be washed. FIGS. 4A and 4B are views for explaining a cleaning form of an object to be cleaned by the partial cleaning apparatus of the first embodiment. FIGS. 5A to 5B are diagrams provided to explain the form of the first opening. FIG. 6 is a diagram provided to explain a placement form of an object to be cleaned when a tray member is used. FIG. 7 is a diagram for explaining the portion to be cleaned exposed through the first and second openings. FIGS. 8A to 8B are views provided to explain the aspect of the casing that constitutes the ultrasonic cleaning tank. FIGS. 9A to 9B are diagrams provided to explain the parallel moving carriage. FIGS. 10A to 10B are diagrams for explaining a slit type air nozzle and a flat air nozzle. FIGS. 11A and 11B are views for explaining the rotation mechanism of the slit type air nozzle. 12 (a) to 12 (b) are diagrams provided to explain a mode of fixing the elastic masking member. Drawing 13 (a)-(b) is a figure offered in order to explain a press member. FIGS. 14A to 14B are diagrams provided to explain the general-purpose partial cleaning apparatus. FIGS. 15A to 15C are diagrams provided to explain the paste cup partial cleaning device. FIGS. 16A to 16C are diagrams provided for explaining the object to be cleaned. FIG. 17 is a diagram for explaining a conventional substrate cleaning apparatus.

[First Embodiment]
The first embodiment is a partial cleaning apparatus for partially cleaning an object to be cleaned from below, having an ultrasonic cleaning tank and an air blowing nozzle inside, and having a first opening above. A housing, and an elastic masking member that has a second opening for forming an opening communicating with the first opening in the housing and is detachably fixed to the housing. The component member to be configured includes an opening portion and a tray member that is removable from the housing, and the opening portion of the tray member is defined as a first opening portion that is partially above the housing by an elastic masking member. While applying ultrasonic vibration to the object to be cleaned placed in a masked state, the object to be cleaned is opened above the ultrasonic cleaning tank. For a greater overflow is allowed cleaning solution, washed by contacting through the first and second openings, a partial cleaning apparatus characterized by blowing air with an air blowing nozzle.
FIG. 1 is a diagram for explaining the partial cleaning apparatus 1 according to the first embodiment of the present invention. FIG. 2 shows the housing 2 in the partial cleaning apparatus 1 together with the object 20 to be cleaned. FIG. 3 is a diagram specifically used for explanation.
Further, FIG. 3 is a diagram for specifically explaining that the object 20 to be cleaned is placed at a predetermined position via the elastic masking member 30 while being inverted as indicated by an arrow A. FIG. 4 is a diagram for specifically explaining the cleaning by the ultrasonic cleaning tank 90 and the air blowing by the air blowing nozzle 70.
Hereinafter, the first embodiment will be specifically described for each configuration requirement.

1. Housing The housing of the partial cleaning apparatus of the present invention is characterized by having a first opening, an ultrasonic cleaning tank, and an air blowing nozzle, as will be described below.
In addition, it is preferable to use stainless steel as a constituent material of the housing in consideration of corrosion due to cleaning liquid, mechanical strength, and the like.
The capacity of the housing depends on the size of the object to be cleaned, the cleaning conditions, etc., but generally it is preferably a value in the range of 20 to 200 liters, and in the range of 40 to 170 liters. A value is more preferable.

(1) 1st opening part The housing 2 in this invention has the 1st opening part 13 in an upper wall surface, as shown in FIG.
This is because the housing 2 has the first opening 13 on the upper wall surface, so that the object to be cleaned 20 placed in a state where it is partially masked by the elastic masking member 30 described later, Only the portion to be cleaned 21 exposed inside the housing 2 through the first opening 13 and the second opening 31 provided in the elastic masking member 30 is subjected to ultrasonic vibration in the ultrasonic cleaning tank 90. This is because the cleaning liquid can be brought into contact.
Further, the cleaning object 20 placed in a state partially masked by the elastic masking member 30 is exposed to the inside of the housing 2 through the first and second openings 13 and 31 communicated with each other. This is because only the target portion 21 can be blown with the air blowing nozzle 70 to forcibly remove the remaining used cleaning liquid.
Therefore, the drying time after washing can be shortened, and further, corrosion of the article 20 to be washed due to remaining used washing liquid can be prevented.
The area of the first opening is preferably set to a value within the range of 1～900Cm ^2, and more preferably a value within a range of 25~250cm ^2.
Further, the shape of the first opening only needs to be formed corresponding to the shape of the portion to be cleaned, and is not limited to a rectangle as shown in FIG. 3, or a triangle, a circle, an indefinite shape, or the like. is not.

Further, as shown in FIG. 5A, it is preferable to provide a convex pressed portion 13a around the first opening 13 on the side where the elastic masking member 30 is fixed.
The reason for this is that by providing the pressed portion 13a, the adhesion between the object to be cleaned and the elastic masking member in the peripheral portion of the first opening 13 and the adhesion between the elastic masking member and the housing are partially improved. This is because it can be improved.
As a result, it is possible to more effectively suppress the used cleaning liquid from adhering to the periphery of the portion to be cleaned 21.
The area S2 of the pressed portion 13a, depending on the pressing against the object to be cleaned, for example, preferably to a value within an area of 1 cm ² per 0.03～10Cm ² of the first opening, A value in the range of 0.04 to ⁵ cm ² is more preferable.
In particular, regardless of the shape of the first opening, by making the area of the pressed part constant, it is easy to adjust the pressing force on the pressed part to a constant level regardless of the type of the object to be cleaned. become.
In addition, as a height of the to-be-pressed part 13a, it is preferable to set it as the value within the range of 0.1-5 mm, and it is more preferable to set it as the value within the range of 1-3 mm.

In addition, as shown in FIG. 5B, it is preferable to provide an inclined portion 13b on the inner wall of the first opening 13 so that the first opening 13 expands toward the inside of the housing.
The reason for this is that by providing the inclined portion 13b, the cleaning liquid can be easily contacted with the cleaning target portion and the attached cleaning liquid can be forcibly removed, so that the drying time after cleaning can be further shortened. This is because it can.
That is, in FIG. 5B, by providing the inclined portion represented by the inclination angle θ1, not only the cleaning liquid can be easily concentrated on the portion to be cleaned, but also the attached cleaning liquid is also blown by the blown air. This is because it can be easily scattered.
The inclined portion may be flat or curved, and the inclination angle θ1 is preferably set to a value within the range of 1 to 60 °, and within the range of 10 to 30 °. A value is more preferable.

Further, as shown in FIG. 3, it is preferable to provide a positioning member 12 for stably positioning the elastic masking member 30 and the object to be cleaned 20 around the first opening 13.
The reason for this is that by providing the positioning member 12, the portion to be cleaned can be reliably exposed to the inside of the housing through the first and second openings that communicate with each other.
In addition, it is preferable to provide at least one vertical and horizontal positioning member for each of the positioning members, and it is also preferable to provide a total of three positioning members as shown in FIG.

(2) Tray Member As shown in FIG. 6, as a constituent member constituting the housing 2, the tray member 40 includes an opening and a tray member 40 that can be detached from the housing 2, and the tray member 40 has an opening. The part is preferably the first opening 13.
That is, it is preferable that the portion of the housing 2 where the elastic masking member 30 is detachably fixed is the tray member 40 that is removable from the housing body 2.
The reason for this is that, by providing such a tray member, as shown in FIG. 7, the object to be cleaned is washed through the first and second openings 13 and 31 communicated with each other inside the housing of the tray member 40. This is because it can be easily confirmed that the target portion 21 is exposed.
Thereby, it can suppress more reliably that used washing | cleaning liquid adheres to the circumference | surroundings of the part 21 to be cleaned.
Further, the shape of the first opening 13 can be easily changed by replacing the tray member 40.
That is, for example, as shown in FIG. 3, when the tray member is not provided, it is difficult to directly check whether or not the portion to be cleaned is exposed inside the housing.
On the other hand, when the tray member 40 is provided, the whole object is reversed with the object 20 to be cleaned partially masked by the elastic masking member 30 placed on the tray member 40 as shown in FIG. Thus, as shown in FIG. 7, it can be easily confirmed that the portion 21 to be cleaned is exposed.

(3) Ultrasonic cleaning tank Moreover, the housing in this invention has the ultrasonic cleaning tank 90 inside, as shown in FIG.
This is because the ultrasonic cleaning tank 90 is provided inside the housing 2 so that only the portion 21 to be cleaned exposed to the inside of the housing 2 through the first and second openings 13 and 31 communicated with each other. This is because the cleaning liquid can be brought into contact while applying ultrasonic vibration.

(3) -1 Ultrasonic Vibrator Further, as shown in FIG. 2, the ultrasonic cleaning tank 90 preferably includes an ultrasonic vibrator 92 inside the housing 91.
Such an ultrasonic vibrator is not particularly limited as long as it can generate ultrasonic waves by connecting to an ultrasonic oscillator, and may be a magnetostrictive ultrasonic vibrator such as a ferrite vibrator. It may be an electrostrictive ultrasonic vibrator such as a BL (bolt-clamped Langevin) vibrator or a PZT (lead zirconate titanate) vibrator.
A particularly preferred ultrasonic transducer is a BL transducer.
This is because a BL resonator is excellent in durability, so that stable oscillation is possible even when the environmental temperature changes or a load is applied.
Further, since the ultrasonic vibrator 92 is immersed in the cleaning liquid, it is preferably installed inside the casing 91 in a state of being accommodated in a sealed ultrasonic vibrator case. It is preferable to accommodate the ultrasonic transducer 92 in a state of contacting the ceiling surface of the ultrasonic transducer case.
In FIG. 2 and the like, the ultrasonic transducer 92 is shown in the state accommodated in the ultrasonic transducer case.
Further, as a method of fixing the ultrasonic transducer 92 to the casing 91, although not shown, a mounting method in which the ultrasonic transducer 92 is fixed to the bottom surface of the casing 91 via a mounting base may be used. It may be a suspension system that hangs from the bottom.

Moreover, it is preferable to make the frequency (frequency) of the piezoelectric element mentioned above into the value within the range of 10-20,000 kHz.
This is because by setting the frequency of the piezoelectric element to a value within such a range, even if the shape of the portion to be cleaned is complicated, it can be cleaned more effectively.
That is, if the frequency of the piezoelectric element is less than 10 kHz, the object to be cleaned may be easily destroyed or it may be difficult to remove fine dirt. On the other hand, when the frequency of the piezoelectric element exceeds 20,000 kHz, the cleaning power may be excessively reduced.
Therefore, the frequency of the piezoelectric element is more preferably set to a value within the range of 15 to 50 kHz, and further preferably set to a value within the range of 20 to 30 kHz.

(3) -2 Case Moreover, the case of the ultrasonic cleaning tank has an opening above it for overflowing the cleaning liquid.
The planar shape of the opening is not particularly limited, but from the viewpoint of efficiently bringing the cleaning liquid into contact with the portion to be cleaned, a shape that matches the shape of the first and second openings is used. Is preferred.
Moreover, it is preferable to make the area of an opening part into the value within the range of 120-1,500cm < ² >.
This is because if the area of the opening is less than 120 cm ² , the overflow path of the cleaning liquid becomes excessively narrow, and the overflow amount of the cleaning liquid may be excessively reduced. On the other hand, when the area of the opening exceeds 900 cm ² , the used dirty cleaning liquid tends to stay in the housing and the cleaning power may be insufficient.
Therefore, the area of the opening is more preferably set to a value within the range of 130 to 900 cm ² , and further preferably set to a value within the range of 140 to 700 cm ² .

As shown in FIG. 2, the casing 91 of the ultrasonic cleaning tank 90 preferably has a cleaning liquid supply port 9b for supplying a cleaning liquid on the bottom surface or side surface thereof.
The reason for this is that the cleaning liquid supplied can be stably overflowed from the opening by providing such a cleaning liquid supply port on the bottom surface or side surface thereof.
Moreover, it is preferable that the diameter of this washing | cleaning liquid supply port is a value within the range of 0.1-30 cm < ² > normally, and it is more preferable that it is a value within the range of 0.2-10 cm < ² >.

Moreover, it is preferable to use stainless steel as a constituent material of the housing in consideration of corrosion due to cleaning liquid, mechanical strength, and the like.
Further, as the capacity of the housing, although it depends on the size of the object to be cleaned, the size of the ultrasonic vibrator to be accommodated, etc., it is generally preferable to set the value within a range of 1 to 30 liters, A value in the range of 2 to 10 liters is preferred.

Further, the shape of the casing of the ultrasonic cleaning tank is narrowed toward the opening so that the opening is narrower than the bottom, as shown in FIGS. It is preferable to do.
This is because, with such a shape, it is easy to concentrate the overflowing cleaning liquid on the portion to be cleaned, so that it can be efficiently cleaned with a smaller amount of cleaning liquid.
That is, with such a shape, even if it is a part to be cleaned in a complicated form, the cleaning liquid easily enters, and the cleaning effect by ultrasonic vibration can be more efficiently exhibited.

Moreover, as shown in FIG. 2, it is preferable to provide the guide member 93 for dropping the overflowing cleaning agent around the casing 91 of the ultrasonic cleaning tank 90 while following it.
This is because, when the cleaning liquid overflowed from the ultrasonic cleaning tank is dropped as it is, the overflowed cleaning liquid collides unevenly with the liquid surface of the used cleaning agent stored in the bottom of the housing. This is because the liquid splash may easily occur excessively.

(3) -3 Moving Means Also, as shown in FIG. 4A, it is preferable to include moving means 63 for moving the ultrasonic cleaning tank 90 in the vertical direction.
This is because the distance between the cleaning target portion 21 and the ultrasonic transducer 92 can be easily adjusted by allowing the ultrasonic cleaning tank 90 to move in the vertical direction.
That is, as shown in FIG. 4A, when the cleaning target portion 21 is cleaned by overflowing the cleaning liquid from the ultrasonic cleaning bath 90, the ultrasonic cleaning tank 90 is brought close to the cleaning target portion 21. By moving the cleaning tank 90 upward (arrow A), the distance between the cleaning target portion 21 and the ultrasonic transducer 92 can be easily adjusted.
Further, since the ultrasonic cleaning tank 90 is moved upward, it is not necessary to make the liquid level of the cleaning liquid overflowing from the opening above the ultrasonic cleaning tank 90 excessively, so that the amount of the cleaning liquid used is suppressed. be able to.
The ultrasonic cleaning tank moving means 63 for moving the ultrasonic cleaning tank 90 in the vertical direction includes, for example, a rod type piston that converts a rotary motion of a motor or the like into a reciprocating motion, an air cylinder, or the like. It is done.

Moreover, as shown to Fig.4 (a) etc., it is preferable to provide the moving means (60, 65) for moving the ultrasonic cleaning tank 90 in a horizontal direction.
This is because the ultrasonic cleaning tank 90 can be moved in parallel, thereby facilitating replacement of the arrangement with the air blowing nozzle 70 described later.
That is, as shown in FIG. 4A, when the cleaning target portion 21 is cleaned by overflowing the cleaning liquid from the ultrasonic cleaning bath 90, the ultrasonic cleaning tank 90 is brought close to the cleaning target portion 21. The cleaning tank 90 is translated to below the cleaning target portion 21.
On the other hand, as shown in FIG. 4B, when the cleaning of the cleaning target portion 21 is completed and the remaining used cleaning liquid is forcibly removed by the air from the air spray nozzle 70, the air spray nozzle 70 is cleaned. The air blowing nozzle 70 is translated (arrow B) to below the cleaning target portion 21 so as to approach the portion 21.

Further, at this time, as shown in the cross-sectional view 9 (b) seen from the direction of the arrow in the broken line A in FIGS. 9A and 9A, the ultrasonic cleaning tank 90 and the air blowing nozzle 70 are: It is provided in the common parallel movement trolley | bogie 60, and it is preferable that the other translates in synchronization with one translation.
The reason for this is that by moving the parallel moving carriage, the ultrasonic cleaning tank approaches and the air blowing nozzle is separated from the portion to be cleaned, and the ultrasonic cleaning tank and the air blowing nozzle are separated from the portion to be cleaned. This is because they can be performed simultaneously and easily.
Further, as shown in FIGS. 9A to 9B, the parallel moving carriage 60 includes two rails provided inside the housing 2 by rotatable roller members 61 (61 a and 61 b) and 62. It is preferable to be movably mounted on the member 7 (7a, 7b).
Examples of the translation carriage moving means 65 for translating the translation carriage 60 in the horizontal direction include, for example, a rod-type piston that converts a rotary motion of a motor or the like into a reciprocating motion, an air cylinder, and the like. .

(3) -4 Cleaning conditions Further, when the object to be cleaned is brought into contact with the cleaning liquid, the distance between the lower end of the object to be cleaned and the upper end of the ultrasonic transducer is a value within the range of 18 to 200 mm. It is preferable to do.
The reason for this is that the ultrasonic vibration is applied to the object to be cleaned by setting the distance between the lower end of the object to be cleaned, that is, the lower end of the object to be cleaned and the upper end of the ultrasonic transducer within such a range. It is because it can provide more efficiently. Therefore, even if the shape of the portion to be cleaned is complicated, it can be cleaned more effectively.
That is, when the distance is less than 18 mm, bubbles generated from the cleaning liquid due to vibration accumulate between the ultrasonic vibrator and the portion to be cleaned, so that the ultrasonic vibrator is exposed to the air. This is because the ultrasonic transducer may be damaged. On the other hand, when the distance exceeds 200 mm, the cleaning performance of the portion to be cleaned may be excessively reduced due to attenuation of ultrasonic vibration.
Therefore, when the object to be cleaned is brought into contact with the cleaning liquid, the distance between the lower end of the object to be cleaned and the upper end of the ultrasonic transducer is more preferably set to a value in the range of 20 to 150 mm. More preferably, the value is within a range of ˜100 mm.

Moreover, it is preferable to make the height of the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank a value within the range of 8 to 100 mm with reference to the opening surface above the ultrasonic cleaning tank. .
The reason for this is that ultrasonic vibration can be more efficiently applied to the portion to be cleaned by setting the height of the cleaning liquid overflowed from the opening to a value within this range. . Therefore, even if the shape of the portion to be cleaned is complicated, it can be cleaned more effectively.
That is, when the height of the cleaning liquid overflowed from the opening becomes a value of less than 8 mm, the ultrasonic cleaning tank easily comes into contact with the top plate of the housing. In this case, it is difficult to overflow the cleaning liquid. This is because there may be cases. Moreover, it is because it may become excessively difficult to adjust the liquid level of the cleaning liquid when overflowing. On the other hand, when the height of the cleaning liquid overflowed from the opening reaches a value exceeding 100 mm, the cleaning performance of the cleaning target portion may be excessively reduced due to attenuation of ultrasonic vibration.
Therefore, it is more preferable to set the height of the cleaning liquid overflowed from the opening above the ultrasonic vibration tank to a value in the range of 10 to 50 mm with reference to the opening surface above the ultrasonic cleaning tank. Preferably, the value is in the range of 12 to 30 mm.

The flow rate of the cleaning liquid supplied to the ultrasonic cleaning tank is preferably set to a value within the range of 20 to 320 liters / minute.
This is because the liquid level of the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank is adjusted by setting the flow rate of the cleaning liquid supplied to the ultrasonic cleaning tank to a value within this range. This is because the portion to be cleaned can be cleaned more effectively by the flow of the cleaning liquid itself.
That is, if the flow rate of the supplied cleaning liquid is less than 20 liters / minute, the height of the overflowed cleaning liquid may be insufficient, and it may be difficult to effectively clean the portion to be cleaned. is there. On the other hand, when the flow rate of the supplied cleaning liquid exceeds 320 liters / minute, the height of the overflowed cleaning liquid becomes excessively high, and the cleaning performance of the portion to be cleaned becomes excessive due to attenuation of ultrasonic vibration. This is because it may decrease.
Therefore, the flow rate of the cleaning liquid supplied to the ultrasonic cleaning tank is more preferably set to a value within the range of 25 to 300 liters / minute, and further preferably set to a value within the range of 30 to 200 liters / minute.

In particular, when the area of the opening in the housing of the ultrasonic cleaning tank is a value within a range of less than 120 to 500 cm ² , the flow rate of the cleaning liquid is a value within a range of less than 20 to 170 liters / minute. Preferably, when the area of the opening in the casing of the ultrasonic cleaning tank is a value within the range of 500 to 900 cm ² , the flow rate of the cleaning liquid is set to a value within the range of 170 to 320 liters / minute. It is preferable.
Moreover, although it depends on the object to be cleaned, the cleaning time is usually preferably a value within the range of 1 to 120 seconds, more preferably within the range of 10 to 100 seconds, and more preferably 20 to 20 seconds. More preferably, the value is within the range of 60 seconds.

As shown in FIG. 1B, it is preferable to use an air-driven diaphragm pump or a motor-type pump as the cleaning liquid supply device 9 that supplies the cleaning liquid to the ultrasonic cleaning tank 90.
This is because a sufficient amount of cleaning liquid can be continuously supplied with an air-driven diaphragm pump or a motor-type pump.
Moreover, it is preferable to control the supply timing and supply amount of the cleaning liquid from the diaphragm pump and the motor-type pump according to the optimal program by the cleaning liquid and air control device 14 as shown in FIG.

The supply and recovery of the cleaning liquid will be described. As shown in FIG. 1B, the cleaning liquid passes through the cleaning liquid inlet 9a from the cleaning liquid supply device 9 via a flexible pipe and the like and enters the inside of the housing 2. .
Next, the liquid is supplied to the cleaning liquid supply port 9 b through a flexible pipe or the like, and overflows from the opening of the ultrasonic vibration tank 90.
Next, the cleaning liquid stored at the bottom of the housing 2 passes through the cleaning liquid recovery port 9 c, exits the housing 2, is recovered by the cleaning liquid supply device 9, passes through the cleaning liquid inlet 9 a again, and enters the inside of the housing 2. become.

(4) Air blowing nozzle The housing in the present invention has an air blowing nozzle 70 inside as shown in FIG.
This is because by providing the air blowing nozzle 70 inside the housing 2, the cleaning liquid adhering to the cleaning target portion 21 can be forcibly scattered and removed.

(4) -1 Type The type of air spray nozzle is not particularly limited, but is preferably a slit type air nozzle.
The reason for this is that if the slit type air nozzle is used, the used cleaning liquid remaining in the cleaning target portion can be efficiently and forcibly removed even when the shape of the cleaning target portion is complicated. .
The slit-type air nozzle is an air nozzle having a slit-shaped air blowing portion, and means an air nozzle having a linear cross-sectional shape, that is, an air nozzle capable of forming a so-called air knife.

The slit type air nozzle is preferably a long slit type air nozzle 70a as shown in FIG.
The reason for this is that air needs to be blown over the entire surface of the portion to be cleaned 21, so that the length L1 of the slit type air nozzle 70a is approximately equal to or larger than the width of the portion to be cleaned 21. It is necessary to do.
Therefore, normally, the length L1 of the slit type air nozzle 70a is preferably set to a value within the range of 2 to 150 cm, and more preferably set to a value within the range of 5 to 30 cm.
The width of the air blowing portion 75, that is, the slit width L2, is preferably set to a value in the range of 0.1 to 5 mm.
This is because the used cleaning liquid remaining in the portion to be cleaned can be forcibly removed more efficiently by adjusting the air flow rate in the slit type air nozzle to a value within a predetermined range.
Therefore, the width L2 of the air blowing portion is more preferably set to a value within the range of 0.5 to 4 mm, and further preferably set to a value within the range of 1 to 3 mm.

As shown in FIG. 10A, the slit-type air nozzle body 71 has a rectangular cross-sectional shape, and an air blowing portion 75 provided in the longitudinal direction extends in the direction in which the portion to be cleaned exists. It is preferable to provide an extending member 72 composed of a pair of lip-shaped jigs 72a and 72b.
This is because the slit-shaped air nozzle 70a has a rectangular cross-sectional shape so that the pair of lip-shaped jigs 72a and 72b can be easily fixed to the outer peripheral surface with screws 74 or the like. is there.
In addition, by providing the extending member 72 composed of a pair of lip-shaped jigs 72a and 72b, the lip-shaped jigs 72a and 72b can be replaced or the positions of the air blowing parts 75 can be finely adjusted. This is because the width and the distance between the air blowing part 75 and the portion to be cleaned can be easily adjusted.

(4) -2 Rotating means It is preferable to provide a rotating means for rotating the slit type air nozzle around the axis parallel to the longitudinal direction as a central axis.
The reason is that by making the slit type air nozzle rotatable, air can be blown against the part to be cleaned while rotating the slit type air nozzle, and the remaining used cleaning liquid is forced more efficiently. This is because it can be removed.
That is, FIG. 11A shows a slit type air nozzle 70 at a stage before air is blown, and FIG. 11B shows a slit type air nozzle 70 at a stage after air is blown. is there.
Here, the slit type air nozzle 70 rotates in the direction of the arrow A while blowing air against the portion to be cleaned from the position of the angle θ2 before air blowing to the position of the angle θ3 after air blowing. .
Therefore, the used cleaning liquid can be efficiently and forcibly removed by sweeping with air.

Further, the rotation mechanism will be described. The slit type air nozzle main body 71 has an end in the long axis direction fixed to the upper end of the arm member 76, and the lower end of the arm member 76 is the upper end of the moving member 77. The portion is engaged with the portion by a fastening member 78 so as to be bent.
Further, the center point 79 of the slit-type air nozzle body 71 in the major axis direction can be rotated with respect to a member whose position does not vary due to the operation of the slit-type air nozzle driving means 64 such as a parallel carriage 60. Is engaged.
Therefore, the slit type air nozzle 70 can be rotated about the center point 79 by driving the slit type air nozzle rotating means 64.
Further, as shown in FIG. 11A, the slit type air nozzle is preferably rotated once in the direction of arrow A while blowing air. However, when it is difficult to remove the used cleaning liquid, the arrow A The forward rotation in the direction of and the reverse rotation in the direction of arrow B may be repeated a plurality of times.
In addition, when performing forward rotation and reverse rotation, it is preferable to blow air at both the forward rotation and the reverse rotation, but from the viewpoint of efficiently recovering the used cleaning liquid that has been forcibly removed from one direction, It is also preferable to blow air only during rotation.
Examples of the slit type air nozzle driving means 64 include an air cylinder and a rod type piston that converts a rotary motion of a motor or the like into a reciprocating motion.

Further, as the rotation angle of the slit type air nozzle at this time, as shown in FIGS. 11A to 11B, the angle θ2 before spraying is set to a value within the range of 5 to 60 °, and after the spraying Is preferably set to a value in the range of 5 to 60 °.
This is because if the angle θ2 before spraying is less than 5 °, the used cleaning liquid remaining on the portion to be cleaned cannot be sufficiently removed and may remain. On the other hand, when the angle θ2 before spraying is a value exceeding 60 °, the movable range becomes excessively wide, and air may be sprayed unnecessarily on portions other than the portion to be cleaned. .
The reason why it is preferable to set the angle θ3 after spraying to 5 to 60 ° is the same as in the case of the angle θ2 before spraying.
Therefore, the angle θ2 before blowing of the slit type air nozzle and the angle θ3 after blowing are more preferably values in the range of 10 to 50 °, and values in the range of 20 to 45 °. Further preferred.

Further, the rotation speed of the slit type air nozzle is preferably set to a value within the range of 1 to 60 rpm.
This is because when the rotational speed is less than 1 rpm, the remaining cleaning liquid evaporates before it is forcibly removed by air, and stains may easily remain in the portion to be cleaned. On the other hand, when the rotation speed exceeds 60 rpm, the rotation speed is too high, and conversely, the cleaning liquid may easily remain in the portion to be cleaned.
Therefore, the rotation speed of the slit type air nozzle is more preferably set to a value within the range of 2 to 50 rpm, and further preferably set to a value within the range of 3 to 40 rpm.

(4) -3 Movement Moreover, it is preferable that the slit type air nozzle can be translated in the horizontal direction.
This is because the slit-type air nozzle can be moved in parallel, thereby facilitating replacement of the arrangement with the ultrasonic cleaning tank.
In addition, when the slit type air nozzle can be translated in the horizontal direction, it is also preferable to blow air while moving the slit type air nozzle in parallel.
This is because, when the area of the portion to be cleaned becomes large, the remaining cleaning liquid can be forcibly removed more efficiently by blowing air in this way.
In addition, since the specific content about this parallel movement was already demonstrated in the term of the ultrasonic cleaning tank, it abbreviate | omits.

(4) -4 Spraying condition Moreover, it is preferable to make the distance of the lower end part of a washing | cleaning object part and the air blowing part of a slit type | mold air nozzle into the value within the range of 8-50 mm.
The reason for this is that when the distance is less than 8 mm, the air blowing portion of the slit type air nozzle is likely to come into contact with the top plate of the housing, and it may be difficult to translate and rotate the slit type air nozzle. Because there is. On the other hand, when the distance exceeds 50 mm, the momentum of the air is excessively weakened, and it may be difficult to stably remove the used cleaning liquid adhering to the portion to be cleaned.
Therefore, the distance between the lower end of the portion to be cleaned and the air blowing portion of the slit type air nozzle is more preferably set to a value within the range of 10 to 40 mm, and more preferably set to a value within the range of 15 to 30 mm. preferable.

Moreover, it is preferable to make the air flow rate in a slit type air nozzle into the value within the range of 80-300 m / sec.
The reason for this is that by setting the air flow rate in the slit type air nozzle to a value within this range, even if the area of the object to be cleaned is relatively large, the remaining used cleaning liquid is forced more efficiently. This is because it can be removed.
That is, when the air flow rate is less than 80 m / sec, when the form of the portion to be cleaned is excessively complicated, it is difficult to forcibly remove the used cleaning liquid remaining on the portion to be cleaned by sufficiently blowing it off. This is because it may become. On the other hand, if the value of the air flow rate exceeds 300 m / sec, it may be difficult to control the pressure in the housing, or the soldered semiconductor chip or the like in the portion to be cleaned may fall off or be damaged. Because there is.
Therefore, the air flow rate in the slit type air nozzle is more preferably set to a value within the range of 90 to 200 m / sec, and further preferably set to a value within the range of 100 to 150 m / sec.
The air blowing time is usually preferably a value in the range of 0.5 to 100 seconds, more preferably in the range of 2 to 50 seconds, although it depends on the object to be cleaned. More preferably, the value is in the range of 5 to 20 seconds.

Moreover, as shown in FIG.1 (b), it is preferable to use a high pressure blower as the air supply apparatus 8 which supplies air with respect to the slit type air nozzle 70. As shown in FIG.
This is because a high-pressure blower can continuously supply a sufficient amount of air as compared with a compressor or the like.
Also, in the case of a high-pressure blower, by connecting a U-shaped suction nozzle, which will be described later, to the intake port, it is possible to perform air blowing on the portion to be cleaned and air suction in the housing at the same time. is there.
Moreover, it is preferable that the air supply timing and supply amount from the high-pressure blower are controlled in accordance with an optimum program by the cleaning liquid and the air control device 14 as shown in FIG.

Moreover, as shown in FIG.4 (b), it is preferable to provide the U-shaped suction nozzle 5 ahead of the direction which blows air with the slit type air nozzle 70a.
The reason for this is that the U-shaped suction nozzle 5 can be disposed to efficiently suck the air diffused by hitting the portion to be cleaned 21 as it is.
From the viewpoint of more efficiently sucking the diffused air, the length of the U-shaped suction nozzle is preferably set to a value larger than the length of the slit-type air nozzle.
Therefore, although depending on the length of the slit type air nozzle, it is usually preferable to set the length of the U-shaped suction nozzle to a value in the range of 1 to 30 cm, and to a value in the range of 10 to 20 cm. It is more preferable.
In addition, from the viewpoint of more efficiently sucking the diffused air hitting the portion to be cleaned, the vertical opening width of the U-shaped suction nozzle is preferably set to a value within the range of 1 to 10 cm, A value within the range is more preferable.
Although the slit type air nozzle has been mainly described as the air blowing nozzle, for example, a flat air nozzle 70b as shown in FIG. It is also preferable to do.

Further, the air supply and recovery will be described. As shown in FIG. 1B, the air enters the inside of the housing 2 through the air supply port 8a through the flexible pipe or the like from the air supply device.
Next, the air is supplied to the air blowing nozzle 70 through a flexible pipe or the like and blown against the portion to be cleaned, and then passes through the air collection port 8b provided in the U-shaped suction nozzle 5 and passes through the air recovery port 8b. It goes outside and is collected by the air supply device 8 and again passes through the air inlet 8a and enters the inside of the housing 2.

2. Elastic Masking Member As shown in FIG. 2, the partial cleaning apparatus of the present invention includes an elastic masking member 30 that is detachably fixed to the housing 2.
The reason for this is that, as shown in FIGS. 4A and 4B, by providing the elastic masking member 30, the adhesion between the housing 2 and the elastic masking member 30, the object to be cleaned 20, and the elastic masking member 30. This is because the adhesiveness between the two can be effectively improved.
Therefore, it is possible to effectively prevent the cleaning liquid from entering between the housing 2 and the object to be cleaned 20 and the elastic masking member 30. As a result, the cleaning liquid can be applied to portions other than the portion to be cleaned 21. Adhesion can be effectively suppressed.

In addition, such an elastic masking member 30 is excellent in adhesion to the object 20 to be cleaned and also excellent in peelability. Therefore, the object 20 to be cleaned after partial cleaning can be easily removed and the following It is possible to shift to partial cleaning of the article 20 to be cleaned.
In addition, since the elastic masking member 30 is appropriately deformed by pressurization and the deformation is plastic, even when a plurality of objects to be cleaned 20 are continuously partially cleaned. The excellent adhesion and peelability described above can be exhibited repeatedly and stably.
Furthermore, since the elastic masking member 30 described above is appropriately deformed by pressurization, even when the object to be cleaned 20 is pressed during partial cleaning, damage to the object to be cleaned 20 is effectively suppressed. be able to.

(1) Second Opening As shown in FIG. 3, the elastic masking member 30 has a second opening 31 for forming an opening communicating with the first opening 13 in the housing 2. It is characterized by that.
However, as long as the second opening 31 is formed so as to correspond to the shape of the first opening 13 in the housing 21, other conditions are not particularly limited.

(2) Material The main raw materials for the elastic masking member are natural rubber, ethylene propylene diene rubber, urethane rubber, silicone rubber, acrylic rubber, acrylonitrile butadiene rubber, ethylene propylene rubber, isoprene rubber, epichlorohydrin rubber, chloroprene rubber, styrene butadiene. It is preferably at least one selected from rubber, butadiene rubber, fluororubber and polyisobutylene.
This is because, with these resin compositions, the elasticity of the elastic masking member can be easily adjusted, and the processing of the three-dimensional shape on the contact surface with the object to be cleaned, which will be described later, can be easily performed. It is because it can do.
In particular, urethane rubber is more preferable because it has high solvent resistance even if its elastic modulus is low.
As a measure of the elasticity of the elastic masking member, the Young's modulus is preferably set to a value within the range of 100 to 100,000 kPa, and more preferably set to a value within the range of 150 to 10,000 kPa.

(3) Shape In addition, it is preferable that the three-dimensional shape on the contact surface of the elastic masking member with the object to be cleaned is formed so as to be fitted to the object to be cleaned except for the second opening.
The reason for this is that by forming the elastic masking member in this way, the object can be easily aligned when the object to be cleaned is masked by the elastic masking member.
As a result, it is possible to further reliably prevent the used cleaning liquid from adhering to the periphery of the portion to be cleaned.

Moreover, it is preferable to make the thickness of an elastic masking member into the value within the range of 3-20 mm.
This is because if the thickness of the elastic masking member is less than 3 mm, it may be difficult to obtain sufficient adhesion even when the object to be cleaned is pressed to the housing side. . On the other hand, when the thickness of the elastic masking member exceeds 20 mm, the second opening may be easily deformed excessively by pressing.
Therefore, the thickness of the elastic masking member is more preferably set to a value within the range of 4 to 18 mm, and further preferably set to a value within the range of 5 to 15 mm.

(4) Fixing method The method of fixing the elastic masking member to the housing in a detachable manner is not particularly limited, but it is preferable to fix the elastic masking member with screws, nuts, or the like.
In this case, since the member is in direct contact with the object to be cleaned, the screw or nut cannot be exposed to the object to be cleaned. Therefore, as shown in FIGS. 34 is preferably fitted in the recess 32 provided in the elastic masking member 30 and further covered with a resin 35 having the same degree of elasticity as that of the elastic masking member 30.

3. Pressing member In the partial cleaning apparatus of the present invention, as shown in FIGS. 4A to 4B, the object to be cleaned 20 partially masked by the elastic masking member 30 with respect to the housing 2 is operated. When a person presses directly with a hand, leakage of the cleaning liquid can be sufficiently suppressed.
On the other hand, it is also preferable to perform such pressing using a pressing member.
This is because the unevenness of the pressing force can be suppressed, and the leakage of the cleaning liquid to portions other than the portion to be cleaned in the object to be cleaned can be further effectively suppressed.
More specifically, a pressing member using a toggle clamp, a hydraulic cylinder, a pneumatic cylinder, or the like can be used.
In particular, the toggle clamp 50 as shown in FIGS. 13A to 13B is suitable because it can be easily handled manually and the unevenness of the pressing force can be effectively suppressed. It is.
At this time, in order not to damage the surface of the object to be cleaned by pressing, an elastic body made of, for example, urethane resin is provided at the pressing portion of the toggle clamp 50 as shown in FIGS. It is preferable to provide the layer 51.
In addition, as a pressing force with respect to a to-be-cleaned object, it is preferable to set it as the value within the range of 10-1,200 kPa, and it is more preferable to set it as the value within the range of 30-800 kPa.
Further, when a press gauge is installed on the pressing member, the deterioration degree of the elastic masking member can be quantitatively confirmed, and it can be used as a guideline for replacing the elastic masking member.
Note that when the object to be cleaned 20 is a thin circuit board or the like, it may be difficult to collect the object to be cleaned 20 after cleaning from the elastic masking member 30. It is also preferable to attach the mechanical chuck to the partial cleaning device.

4). In the following, a general-purpose partial cleaning device and a paste cup partial cleaning device will be described as modified examples of the partial cleaning device of the present invention.

(1) General-purpose partial cleaning apparatus As shown in FIGS. 14A to 14B, the general-purpose partial cleaning apparatus 1 b can specify various objects to be cleaned 20 b, 20 c, 20 d without specifying the object to be cleaned 20. It is a partial cleaning apparatus of the aspect which can perform partial cleaning.
That is, the general-purpose partial cleaning apparatus 1b is basically the same as the normal partial cleaning apparatus 1 shown in FIGS. 1 and 2 and the like, but without replacing the elastic masking member 30 with the object 20 to be cleaned. It is characterized in that various circuit boards and members including the same can be partially cleaned.
Therefore, from the viewpoint of being adaptable to various objects to be cleaned, as shown in FIG. 14 (b), the planar shapes of the first opening 13 and the second opening 31 are versatile such as a circle or a rectangle. It is preferable to use a high shape.
Moreover, it is preferable that the area of the 1st opening part 13 and the 2nd opening part 31 shall be comparatively large so that it can adapt to various washing | cleaning object parts.
Specifically, preferably a value within the range of 1～1,200Cm ^2, and more preferably a value within a range of 7~500cm ^2.

Moreover, as an elastic masking member in such a general-purpose partial cleaning apparatus, as shown in FIGS. 14A to 14B, an object to be cleaned so as to surround the peripheral portion in the first opening portion 13. It is preferable that a standing portion 30a that protrudes on the side of 20b, 20c, and 20d is provided.
The reason for this is that by forming the elastic masking member in this way, it is possible to easily accommodate the portions to be cleaned in various objects to be cleaned within the openings.
Further, this is because the portion to be cleaned can be easily accommodated in the opening regardless of the form in the region other than the portion to be cleaned in the object to be cleaned.
In addition, it is preferable that the shape of the top portion 30a ′ of the standing portion 30a in the elastic masking member 30 is inclined so that the horizontal or inner side is higher.
The reason for this is to increase the pressure applied between the object to be cleaned and the elastic masking member by making the shape of the top of the standing part in such a shape, and to effectively improve the adhesion between them. It is because it can do.
In addition, the width L1 of the standing portion 30a is preferably a value within the range of 5 to 30 mm, and the height L2 is preferably a value within the range of 30 to 100 mm.

The method for fixing the elastic masking member to the housing is not particularly limited. For example, as shown in FIGS. 14A to 14B, the elastic masking member may be fixed to the standing portion 30 a and the housing 2. It is preferable that the masking member 30 having the planar portion 30b serving as a sandwiching member is sandwiched and fixed between the housing 2 by the fixing member 36, the nut 34, the bolt 33, and the like.
This is because by fixing the predetermined elastic masking member in this manner, even an elastic masking member having a three-dimensional shape that is relatively difficult to fix can be stably fixed to the housing. .
Further, even if the elastic body in the elastic masking member is deteriorated, it can be easily removed and replaced.
The overflow condition of the cleaning liquid and the air blowing condition in the general-purpose partial cleaning apparatus can be the same as the conditions in the normal partial cleaning apparatus already described.

(2) Paste Cup Partial Cleaning Device As shown in FIGS. 15A to 15C, the paste cup partial cleaning device 1c removes the residue in the container (paste cup) 20e that uses up the solder paste as the contents. This is a partial cleaning device for cleaning and removing.
That is, the paste remaining in the used container 20e can be washed and removed by partially cleaning only the inside of the container.

The paste cup partial cleaning device 1c is basically different from the normal partial cleaning device 1 shown in FIGS. 1 and 2 and the like, but is specialized in partially cleaning the inside of the container 20e. The elastic masking member 30 for masking the container 20e is characterized.
That is, as shown in FIGS. 15 (a) to 15 (c), in the mouth portion of the container 20e, with respect to the screw portion 25 carved on the outer peripheral surface of the container 20e for external fitting by screwing with the lid, It is preferable that the groove part 30c is formed in the inner wall part so that the elastic masking member 30 may be externally fitted by screwing.
This is because by forming such a groove 30c in the elastic masking member 30, it is possible to effectively mask the outer peripheral surface of the container 20e that is not to be cleaned.
Moreover, it is because the container 20e which is a to-be-cleaned object can be easily fixed by screwing, and can be easily removed after cleaning.
In addition, the area of the 1st opening part 13 and the 2nd opening part 31 in the partial washing | cleaning apparatus 1c for paste cups becomes an area according to the area of the opening | mouth part in the container 20e which is a to-be-cleaned object inevitably.

The method for fixing the elastic masking member to the housing is not particularly limited. For example, as shown in FIGS. 15 (a) to 15 (c), a groove for directly contacting the object to be cleaned. An elastic masking member 30 having an inner wall portion having 30c and a flat portion 30d that contributes to fixing to the housing 2 is sandwiched and fixed between the housing 2 by a fixing member 36, a nut 34, a bolt 33, and the like. Is preferred.
This is because the elastic masking member can be stably fixed to the housing by fixing the predetermined elastic masking member in this manner.
Moreover, it is because the contact | adherence degree of the inner wall part in an elastic masking member and a to-be-cleaned object can be adjusted suitably by changing the pinching strength by a fixing member.
That is, by increasing the pinching strength by the fixing member, the inner wall portion of the elastic masking member can be pushed out toward the object to be cleaned, and the adhesion can be increased. Conversely, by reducing the pinching strength by the fixing member , Such adhesion can be reduced.

[Second Embodiment]
The second embodiment is a partial cleaning method using the partial cleaning apparatus as the first embodiment, and includes the following steps (a) to (d).
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned with the elastic masking member. (C) pressing the object to be cleaned in a masked state against the housing; (c) applying ultrasonic vibration from below to the object to be cleaned in the pressed object to be cleaned; A step of contacting the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank and cleaning the object to be cleaned (d) from the air spray nozzle to the portion to be cleaned in the pressed object to be cleaned The step of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air, that is, the partial cleaning method of the present invention can be applied to the object to be cleaned. Even if the shape of the part to be cleaned is complicated, it can be effectively cleaned by using ultrasonic vibration, and the used cleaning liquid scatters and adheres to the periphery of the part to be cleaned. This can be effectively suppressed, and only the portion to be cleaned can be efficiently cleaned.
Further, the amount of the cleaning liquid used can be suppressed, the drying time after cleaning can be shortened, and the object to be cleaned can be prevented from corroding due to the remaining cleaning liquid remaining.
In addition, about the specific content in these each process, since it overlaps with the content demonstrated in 1st Embodiment, it abbreviate | omits and demonstrates only a to-be-cleaned object and a washing | cleaning liquid.

1. Object to be cleaned The object to be cleaned is not particularly limited, but is preferably a member having only a specific part of the object to be cleaned as a part to be cleaned, particularly a member having a complicated form of the part to be cleaned. More preferably.
For example, in the case of home appliance parts, automobile parts, or other industrial parts that have a circuit board part only in a part of the member, it is necessary to clean the solder flux remaining on the circuit board part Therefore, it is suitable as an object to be cleaned in the present invention.
As such objects to be cleaned, more specifically, circuit boards for personal computers, TV circuit boards, video circuit boards, refrigerator circuit boards, washing machine circuit boards, and vacuum cleaner circuits that require partial cleaning. Circuit boards for mobile phones, circuit boards for copiers, circuit boards for air conditioners, circuit boards for switchboards, strain generators contained in load cells, bases for hard disks, circuit boards for automotive electronic control, circuit boards for vehicles, and ship control A circuit board, an airplane control circuit board, etc. are mentioned.
In addition, even if the object to be cleaned is entirely composed of a circuit board, only the part that is retrofitted may be partially cleaned. Therefore, such an object to be cleaned is also suitable as an object to be cleaned in the present invention. is there.
Furthermore, even if the member does not have a circuit board portion, for example, if it is a used cup (paste cup) of a paste used for surface mounting of a substrate, the paste remaining inside the cup When cleaning and removing, there is a merit in partially cleaning only the inside of the container. Therefore, it is suitable as an object to be cleaned in the present invention.

Next, a strain generating body included in a load cell as an example of the article to be cleaned 20 will be described with reference to FIGS.
Here, Fig.16 (a) is a side view of a strain body, FIG.16 (b) is a front view, FIG.16 (c) is a perspective view.
That is, the strain generating body 20 shown in FIGS. 16A to 16C is provided with a circuit board portion 21 (21a, 21b, 21c) to which a strain gauge is soldered, from which a strain amplifier or indicator is provided. Electrical wiring and terminals are arranged so that they can be connected to the terminal.
Therefore, when such a strain generating body 20 is cleaned by the partial cleaning apparatus of the present invention, only the circuit board portion 21 (21a, 21b, 21c) in the strain generating body 20 is selectively selected as a portion to be cleaned. Will be washed.

2. Type of cleaning liquid (1) The type of cleaning liquid to be used is not particularly limited. For example, it is selected from the group consisting of glycol ether compounds, glycol ester compounds, aromatic hydrocarbon compounds and pyrrolidone compounds. Preferably, it is at least one compound.
This is because such a cleaning liquid is inexpensive and can clean an object to be cleaned quickly and sufficiently with a relatively small amount.

  Here, preferred glycol compounds include ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, ethylene glycol monoisobutyl ether, diethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monopentyl ether, triethylene glycol Ethylene glycol monomethyl ether, triethylene glycol monoethyl ether, triethylene glycol monopropyl ether, triethylene glycol monobutyl ether, triethylene glycol monopentyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene Glycol monopropyl ether, propylene glycol monobutyl ether, propylene glycol monopentyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether, dipropylene glycol monopentyl ether, Tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, tripropylene glycol monopropyl ether, tripropylene glycol monobutyl ether, tripropylene glycol monopentyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, triethylene glycol dimethyl ether , Triethylene glycol diethyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, tripropylene glycol dimethyl ether, tripropylene glycol diethyl ether, 3-methoxybutanol, 3-methoxy-3- One kind alone or a combination of two or more kinds such as methyl-1-butanol may be mentioned.

  In addition, as glycol ester compounds, methoxybutyl acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, One kind alone or a combination of two or more kinds such as 3-methoxy-3-methyl-1-butyl acetate and 3-methoxybutyl acetate may be mentioned.

  Examples of aromatic hydrocarbon compounds include 1,2,4-trimethylbenzene (pseudocumene), 1,2,3-trimethylbenzene, 1,3,5-trimethylbenzene, methylisopropylbenzene, dipentene (limonene), and the like. These may be used alone or in combination of two or more.

  Moreover, as a pyrrolidone type compound, 1 type individual, such as N-methylpyrrolidone, or 2 or more types of combinations is mentioned.

In particular, mixed solvents of aromatic hydrocarbon compounds such as 1,2,4-trimethylbenzene and glycol compounds such as propylene glycol monomethyl ether acetate and diethylene glycol diethyl ether, and aromatics such as 1,2,4-trimethylbenzene A mixed solvent of an aromatic hydrocarbon compound and a glycol ester compound such as 3-methoxy-3-methyl-1-butyl acetate is preferred.
This is because such a combination is not only excellent in cleanability but also can be suppressed to a predetermined chargeability, and is relatively inexpensive.
In addition, when comprising such a mixed solvent, the addition amount of a glycol compound or a glycol ester-type compound shall be a value within the range of 10-200 weight part with respect to 100 weight part of aromatic hydrocarbon-type compounds. Is preferable, and a value within the range of 20 to 70 parts by weight is more preferable.

A mixed solvent of a glycol compound such as propylene glycol monomethyl ether or 3-methoxy-3-methyl-1-butanol and a glycol ester compound such as propylene glycol monomethyl ether acetate or 3-methoxybutyl acetate is also preferable.
In addition, when comprising such a mixed solvent, it is preferable to make the addition amount of a glycol ester type compound into the value within the range of 10-900 weight part with respect to 100 weight part of glycol compounds, and 100-500 weight More preferably, the value is within the range of parts.
Furthermore, it is also preferable to add an aromatic hydrocarbon compound such as dipentene at a value in the range of 5 to 18 parts by weight with respect to 100 parts by weight of the glycol compound.

(2) Additive Further, it is preferable that the cleaning liquid to be used further contains an amine compound and an alkylammonium hydroxide compound, or any one of the compounds.
The reason for this is that the chemical removal of the flux residue is further promoted, and the flux residue can be removed more efficiently.

  Here, as preferred amine compounds, monoethanolamine, monopropanolamine, monobutanolamine, diethanolamine, dipropanolamine, dibutanolamine, trimethanolamine, triethanolamine, tripropanolamine, tributanolamine, N-methylethanol Amine, N-methyldiethanolamine, N-ethylethanolamine, N-ethyldiethanolamine, N-propylethanolamine, N-propyldiethanolamine, N-butylethanolamine, N-butyldiethanolamine, N-cyclohexiethanolamine, N, N-dimethyl Ethanolamine, N, N-diethylethanolamine, N, N-dipropylethanolamine, N, N-dibutylethanolamine, etc. Species alone, or a combination of two or more.

In addition, when adding the amine compound mentioned above, it is preferable to make the addition amount into the value within the range of 0.1-20 weight part with respect to 100 weight part of cleaning ingredients.
The reason for this is that when the amount of the amine compound added is less than 0.1 parts by weight, the effect of addition may not be manifested. On the other hand, when the value exceeds 20 parts by weight, the flux is removed. This is because the efficiency may decrease.
Therefore, it is more preferable to set the addition amount of the amine compound to a value within the range of 1 to 20 parts by weight with respect to 100 parts by weight of the main component of the cleaning liquid, and to a value within the range of 2 to 10 parts by weight. Is more preferable.

(3) Flash point Moreover, it is preferable to make the flash point of a cleaning liquid into the value of 30 degreeC or more.
This is because the object to be cleaned can be cleaned quickly and safely by configuring in this way.
However, if the flash point of the cleaning liquid becomes excessively high, the cleaning performance of the object to be cleaned may be significantly reduced.
Therefore, the flash point of the cleaning liquid is more preferably set to a value within the range of 40 to 160 ° C, and further preferably set to a value within the range of 50 to 80 ° C.
By setting the flash point of the cleaning liquid to a value of 40 ° C. or higher, there is no legal restriction on explosion-proof equipment, so there is an advantage that the cleaning device can be further downsized.

(4) Operating temperature The operating temperature (liquid temperature) of the cleaning liquid is preferably determined in consideration of the cleaning effect on the object to be cleaned, the degree of oxidative deterioration of the cleaning liquid, and the like. It is preferable to set the value within the range.
This is because when the temperature of the cleaning liquid is less than 5 ° C., the cleaning effect on the object to be cleaned may be significantly reduced. On the other hand, if the temperature exceeds 70 ° C., the cleaning liquid may be significantly deteriorated by oxidation or the object to be cleaned may be damaged.
Accordingly, the temperature of the cleaning liquid is more preferably set to a value within the range of 20 to 70 ° C, and further preferably set to a value within the range of 30 to 60 ° C.
In determining the use temperature of the cleaning liquid, it is more preferable to consider the flash point of the cleaning liquid. That is, it is preferable that the relationship of T1 <T2 is satisfied when the use temperature of the cleaning liquid is T1 (° C.) and the flash point of the cleaning liquid is T2 (° C.).

  Hereinafter, based on an Example, this invention is demonstrated in detail.

1. Implementation of Partial Cleaning Method Using the partial cleaning apparatus shown in FIGS. 1 and 6, the strain generating body of the load cell shown in FIG. 16 in a state where the solder flux (rosin-based flux) is adhered to the substrate portion was partially cleaned.
That is, a cleaning agent A (flash point: 43 ° C.) having a composition of propylene glycol monomethyl ether / propylene glycol monomethyl ether acetate (weight ratio 10/90) as a cleaning liquid is placed in the casing (opening portion) of the ultrasonic vibration tank. For an area of 196 cm ² and a volume of 2.5 liters).
At this time, the height of the overflowed cleaning liquid was 8 mm on the basis of the opening surface of the ultrasonic cleaning tank.
Next, while the ultrasonic vibrator (manufactured by Nippon Alex Co., Ltd.) housed in the casing is vibrated at a frequency of 28 kHz, the casing is moved upward, and the overflowed liquid level is 30 relative to the portion to be cleaned. Touch for 2 seconds.
At this time, the distance between the lower end of the portion to be cleaned and the upper end of the ultrasonic transducer was 20 mm.

Moreover, the operator pressed the strain generating body manually. The pressing force at this time was about 400,000 Pa.
As the elastic masking member, a 3 mm thick plate made of urethane rubber having a Young's modulus of 1,700 kPa was used.
Further, as shown in FIG. 5, the first opening in the housing has a configuration in which a pressed portion having an area of 2 cm ² and a height of 1 mm is provided in the periphery and an inclined portion having an inclination angle θ1 of 30 °.

  Next, in a state where the strain generating body is pressed, a slit-type air spray nozzle is used to clean the portion to be cleaned under the conditions of an air flow rate of 120 m / second, a spray time of 10 seconds, and a spray distance of 1 cm. ) To (b), air was blown while rotating at a rotational speed of 7 rpm so that the angle θ2 before spraying was 50 ° and the angle θ3 after spraying was 50 °.

2. Evaluation (1) Evaluation of detergency The degree of removal of the solder flux in the substrate portion was confirmed using an optical microscope and evaluated according to the following criteria. The obtained results are shown in Table 1.
A: There is no resin residue.
○: There is almost no resin residue.
Δ: Resin residue is slightly observed.
X: Resin residue is recognized remarkably.

(2) Evaluation of contamination property It was confirmed using an optical microscope whether the cleaning liquid leaked around the substrate portion covered with the elastic masking member, and the contamination was evaluated, and evaluated according to the following criteria. The obtained results are shown in Table 1.
A: There is no surface stain.
○: There is almost no surface stain.
Δ: Slight surface stains are observed.
X: Surface stains are noticeable.

[Examples 2 to 6]
In Examples 2 to 6, the partial cleaning method was performed and evaluated in the same manner as in Example 1 except that the cleaning conditions and the air blowing conditions were changed as shown in Table 1, respectively. The obtained results are shown in Table 1.

According to the partial cleaning apparatus and the partial cleaning method using the same according to the present invention, by including an ultrasonic cleaning tank, an air blowing nozzle, a housing having a predetermined opening, and a predetermined elastic masking member, It became possible to solve the problem.
That is, even when the form of the part to be cleaned in the object to be cleaned is complicated, the ultrasonic wave is passed through the liquid layer formed by the overflow by bringing the cleaning liquid overflowed from below into contact with the part to be cleaned. Vibration can be applied and cleaning can be performed effectively.
In addition, it is possible to effectively prevent the used cleaning liquid from adhering to the periphery of the portion to be cleaned, and to efficiently clean only the portion to be cleaned.
Furthermore, the amount of the cleaning liquid used can be reduced, the drying time after cleaning can be shortened, and the object to be cleaned can be prevented from corroding due to remaining used cleaning liquid.
Therefore, the partial cleaning apparatus and the partial cleaning method using the same according to the present invention are expected to contribute significantly to the improvement of efficiency and cost reduction in the operation of cleaning a member including a substrate and the like.

1: partial cleaning device, 1b: general-purpose partial cleaning device, 1c: partial cleaning device for paste cup, 2: housing, 5: U-shaped suction nozzle, 7: rail member, 8: air supply device, 8a: air introduction 8b: Air recovery port, 9: Cleaning liquid supply device, 9a: Cleaning liquid introduction port, 9b: Cleaning liquid supply port, 9c: Cleaning liquid recovery port, 12: Positioning member, 13: First opening, 13a: Pressed part , 13b: Inclined part, 14: Cleaning liquid and air control device, 20: Object to be cleaned, 21: Part to be cleaned, 30: Elastic masking member, 30a: Standing part, 30a ': Head part, 30b: Plane part, 30c : Groove part, 30d: flat part, 31: second opening part, 32: recessed part, 33: screw, 34: nut, 35: resin, 36: fixing member, 40: tray member, 50: toggle clamp, 60: parallel Moving platform 61: roller member, 62: roller member, 63: moving means for ultrasonic cleaning tank, 64: rotating means for slit type air nozzle, 65: moving means for parallel moving carriage, 70: air blowing nozzle, 70a: slit type Air nozzle, 70b: Flat type air nozzle, 71: Slit type air nozzle body, 72: Extension member, 72a: Lip-shaped jig, 72b: Lip-shaped jig, 74: Screw, 75: Air blowing part, 80: Injection hole , 81: air suction hole, 82: groove portion, 83: air supply port, 90: ultrasonic cleaning tank, 91: casing of ultrasonic cleaning tank, 92: ultrasonic vibrator, 93: guide member

Claims (9)

A partial cleaning apparatus for partially cleaning an object to be cleaned from below,
A housing having an ultrasonic cleaning tank and an air blowing nozzle inside, and having a first opening above;
An elastic masking member having a second opening for forming an opening communicating with the first opening in the housing, and removably fixed to the housing;
With
Further, as a constituent member constituting the housing, the first opening is provided with a tray member that has an opening and is removable from the housing, and the opening of the tray member is the first opening,
An opening above the ultrasonic cleaning tank is provided while applying ultrasonic vibration to an object to be cleaned that is partially masked by the elastic masking member above the housing. A partial cleaning apparatus, wherein after cleaning is performed by contacting the cleaning liquid overflowed from the section through the first and second openings, air is blown by the air blowing nozzle.   The height of the liquid level of the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank is set to a value in the range of 8 to 100 mm with reference to the opening surface above the ultrasonic cleaning tank. The partial cleaning apparatus according to claim 1.   The partial cleaning apparatus according to claim 1, further comprising moving means for moving the ultrasonic cleaning tank in the vertical direction.   The air blowing nozzle is a slit type air nozzle, and further comprises a rotating means for rotating the slit type air nozzle around an axis parallel to the longitudinal direction thereof. The partial cleaning apparatus as described in any one of these. The partial cleaning apparatus according to claim 4 , wherein an air flow rate in the slit type air nozzle is set to a value within a range of 80 to 300 m / sec.   6. The ultrasonic cleaning tank and the air blowing nozzle are provided in a common parallel carriage, and the other moves in parallel with one parallel movement. The partial cleaning apparatus according to claim 1. A partial cleaning method using the partial cleaning apparatus according to claim 1,
A partial cleaning method comprising the following steps (a) to (d):
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned by the elastic masking member (b) the elastic masking (C) pressing the object to be cleaned partially masked by the member against the housing (c) while applying ultrasonic vibration from below to the object to be cleaned in the pressed object to be cleaned; (D) cleaning the object to be cleaned in a pressed state by bringing the object to be cleaned into contact with the cleaning liquid overflowed from the opening above the ultrasonic cleaning tank and cleaning the object to be cleaned On the other hand, the process of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air from an air blowing nozzle   The partial cleaning method according to claim 7, wherein in the step (c), the cleaning target portion of the object to be cleaned is brought into contact with the cleaning liquid by moving the ultrasonic cleaning tank upward.   In the step (d), after moving the ultrasonic cleaning tank downward, a slit type air nozzle as the air spray nozzle is moved along the opening surface of the first opening to be cleaned in the object to be cleaned. 9. The partial cleaning method according to claim 7, wherein air is blown while the slit type air nozzle is rotated about an axis parallel to the longitudinal direction as a central axis.

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