JP5587731B2 - Partial cleaning apparatus and partial cleaning method - Google Patents

Description

  The present invention relates to a partial cleaning apparatus and a partial cleaning method using the same. In particular, the present invention relates to a partial cleaning apparatus and a partial cleaning method using the same, which can prevent the used cleaning liquid from scattering and adhering to the periphery of the portion to be cleaned and efficiently clean the portion to be cleaned.

Conventionally, a cleaning apparatus that discharges high-pressure cleaning liquid to a substrate such as a semiconductor wafer, a glass substrate for a liquid crystal display panel, or a mask substrate for semiconductor manufacturing, and effectively removes solder flux and the like without damaging the substrate. Is used (for example, Patent Document 1).
That is, in Patent Document 1, as shown in FIG. 16, the substrate holding means 124 that rotates around the vertical axis 123 while holding the substrate W in a horizontal posture, and the substrate W that is rotated by being held by the substrate holding means 124. A cleaning liquid discharge nozzle 113 for discharging a cleaning liquid to the cleaning liquid, a cleaning liquid supply means for supplying a cleaning liquid pressurized to the cleaning liquid discharge nozzle 113, and a substrate W that is held by the substrate holding means 124 from the cleaning liquid discharge nozzle 113 and rotates. And a moving means 115 for moving the cleaning liquid discharge nozzle 113 so that the supply position of the supplied cleaning liquid passes through at least the rotation center C of the rotating substrate W held by the substrate holding means 124 and the periphery of the substrate W. In the substrate cleaning apparatus 100, the cleaning liquid discharge nozzles 113 are respectively provided on the surface of the rotating substrate W held by the substrate holding means 124. Substrate cleaning apparatus 100 provided with a plurality of discharge holes for discharging the cleaning liquid to a plurality of positions comprising is disclosed.

JP-A-11-204481 (Claims)

However, when the substrate cleaning apparatus of Patent Document 1 is used, damage to the substrate can be suppressed, but when an object to be cleaned that has only a portion to be cleaned is cleaned as a whole, The following problems were observed.
(1) The used cleaning liquid scatters and adheres easily to the periphery of the portion to be cleaned.
(2) The amount of cleaning liquid used is increased.
(3) It takes time to dry after washing.
(4) The object to be cleaned is eroded by the used cleaning liquid.

Therefore, as a result of intensive studies, the present inventors have found that the above-described problem is achieved if the cleaning liquid discharge nozzle, the air blowing nozzle, a housing having a predetermined opening, and a predetermined elastic masking member are provided. And the present invention has been completed.
That is, the object of the present invention is to effectively suppress the used cleaning liquid from being scattered and attached to the periphery of the portion to be cleaned, and not only the portion to be cleaned can be efficiently cleaned, To provide a partial cleaning apparatus capable of suppressing the amount of cleaning liquid used, shortening the drying time after cleaning, and preventing an object to be cleaned from being eroded by the used cleaning liquid, and a partial cleaning method using the same. It is in.

According to the present invention, there is provided a partial cleaning apparatus for partially cleaning an object to be cleaned, which has a cleaning liquid discharge nozzle and an air blowing nozzle inside, and has a first opening on an upper or side wall surface. And a resilient masking member having a second opening for forming an opening communicating with the first opening in the housing and detachably fixed to the housing. As a constituent member to be configured, an opening is provided, a tray member that is removable from the housing is provided, and the opening of the tray member is defined as a first opening, and on the upper side or side of the housing. The cleaning liquid discharge nozzle passes through the first and second openings to the object to be cleaned that is partially masked by the elastic masking member. Then, after the cleaning liquid is discharged, a partial cleaning apparatus is provided that forcibly removes the cleaning liquid adhering to the object to be cleaned by blowing air with an air blowing nozzle, and can solve the above-described problems. .
That is, in the partial cleaning apparatus of the present invention, the cleaning liquid discharge nozzle passes through the first and second openings communicated with the object to be cleaned that is partially masked by the elastic masking member. The cleaning liquid can be discharged. Therefore, it is possible to effectively prevent the used cleaning liquid from scattering and adhering to the periphery of the portion to be cleaned, and to efficiently clean the portion to be cleaned, as well as to reduce the amount of cleaning liquid used. be able to.
In addition, air can be blown by an air blowing nozzle through the first and second openings that are in communication with the object to be cleaned that is partially masked by the elastic masking member. Therefore, the drying time after cleaning can be shortened, and further, erosion of the object to be cleaned by the used cleaning liquid can be prevented.
Further, since the object to be cleaned is placed on the upper side or the side of the housing, the discharged cleaning liquid can be easily collected at the lower part of the housing.
Furthermore, since it is the structure mentioned above if it is the partial washing | cleaning apparatus of this invention, as shown to Fig.1 (a)-(b), it can also contribute to the space-saving of an apparatus.
Moreover, by comprising in this way, it can confirm easily that the washing | cleaning target part of a to-be-cleaned object is exposed through the 1st and 2nd opening part which communicated in the housing side of the tray member. . Therefore, it is possible to more reliably suppress the used cleaning liquid from being scattered and attached to the periphery of the portion to be cleaned.
Moreover, the shape of the first opening can be easily changed by replacing the tray member.

In configuring the partial cleaning apparatus of the present invention, it is preferable that the housing has a convex pressed portion around the first opening on the side where the elastic masking member is in close contact.
By comprising in this way, the adhesiveness between the to-be-cleaned object and the elastic masking member in the peripheral part of the 1st opening part, and the adhesiveness between an elastic masking member and a housing can be improved partially. Therefore, it is possible to more effectively suppress the used cleaning liquid from being scattered and attached to the periphery of the portion to be cleaned.

Further, in configuring the partial cleaning apparatus of the present invention, it is preferable that the inner wall of the first opening has an inclined portion so that the first opening in the housing expands toward the inside of the housing.
By comprising in this way, discharge of a cleaning liquid and forced removal of the adhering cleaning liquid can be performed more easily. Therefore, the drying time after washing can be further shortened.

Further, in configuring the partial cleaning apparatus of the present invention, it is preferable to include a pressing means for pressing an object to be cleaned that is partially masked by the elastic masking member against the housing.
By comprising in this way, unevenness of pressing force can be suppressed and it can suppress more effectively that used cleaning fluid scatters and adheres to the circumference of the part to be washed.

In constituting the partial cleaning apparatus of the present invention, the main raw materials of the elastic masking member are natural rubber, ethylene propylene diene rubber, urethane rubber, silicone rubber, acrylic rubber, acrylonitrile butadiene rubber, ethylene propylene rubber, isoprene rubber, epichlorohydrin. It is preferably at least one selected from rubber, chloroprene rubber, styrene butadiene rubber, butadiene rubber, fluororubber and polyisobutylene.
With this configuration, not only can the elasticity of the elastic masking member be easily adjusted, but also processing of a three-dimensional shape on the contact surface with the object to be cleaned can be easily performed.

In configuring the partial cleaning apparatus of the present invention, it is preferable that the cleaning liquid discharge nozzle is a wide-angle nozzle, and the wide-angle nozzle is movable in parallel along the opening surface of the first opening.
With such a configuration, even when the area of the cleaning target portion is relatively large, the cleaning liquid can be efficiently discharged onto the entire surface of the cleaning target portion.

In configuring the partial cleaning apparatus of the present invention, it is preferable to provide an air discharge port in a part of the housing.
With this configuration, the air blown by the air blowing nozzle can be stably discharged out of the housing as it is.

In configuring the partial cleaning apparatus of the present invention, it is preferable to set the cross-sectional area of the air discharge port to a value within the range of 1 to ²⁰⁰ cm ² .
By comprising in this way, the air sprayed by the air spray nozzle can be discharged | emitted more stably out of a housing, and also the drying time after washing | cleaning can be shortened more stably.

Further, in configuring the partial cleaning device of the present invention, the air blowing nozzle is a slit type air nozzle, and the slit type air nozzle can be translated along the opening surface of the first opening, Moreover, it is preferable that a U-shaped suction nozzle is provided at a position facing the slit type air nozzle through the first opening.
By configuring in this way, even when the area of the cleaning target portion is relatively wide, the used cleaning liquid discharged to the cleaning target portion is efficiently and forcibly removed while the blown air is It can be discharged out of the housing stably.

Further, in configuring the partial cleaning apparatus of the present invention, it is preferable to set the air flow rate in the slit type air nozzle to a value within the range of 80 to 300 m / sec.
With such a configuration, even when the area of the cleaning target portion is relatively large, the used cleaning liquid discharged to the cleaning target portion can be forcibly removed more efficiently.

Another aspect of the present invention is a partial cleaning method using the above-described partial cleaning apparatus, which includes the following steps (a) to (d).
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned by the elastic masking member.
(B) A step of pressing the object to be cleaned, which is partially masked by the elastic masking member, against the housing.
(C) A step of discharging the cleaning liquid from the cleaning liquid discharge nozzle to the object to be cleaned in the pressed object to be cleaned to clean the object to be cleaned.
(D) A step of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air from the air blowing nozzle to the portion to be cleaned in the pressed object to be cleaned.
That is, if it is a partial cleaning method including these steps, it is possible to effectively prevent the used cleaning liquid from scattering and adhering to the periphery of the portion to be cleaned, and to efficiently clean the portion to be cleaned. In addition, the amount of cleaning liquid used can be suppressed, and the drying time after cleaning can be shortened.

Moreover, when implementing the partial cleaning method of this invention, it is preferable to perform the following process (a ') after a process (a) .
(A ′) A step of confirming that the portion to be cleaned of the object to be cleaned is exposed through the first and second openings on the housing side of the tray member.
By carrying out in this way, even when the partial cleaning method is performed manually, it is possible to more stably clean only a predetermined portion to be cleaned.

Drawing 1 (a)-(b) is a figure offered in order to explain a partial cleaning device of a 1st embodiment. Drawing 2 is a figure offered in order to explain a housing in a partial washing device of a 1st embodiment. Drawing 3 is a figure offered in order to explain a loading form of a thing to be washed. FIGS. 4A to 4B are views for explaining a cleaning mode of an object to be cleaned by the partial cleaning apparatus according to the first embodiment. FIG. 5A to FIG. 5C are diagrams provided for explaining the object to be cleaned. FIGS. 6A to 6B are diagrams provided to explain the form of the first opening. FIG. 7 is a diagram provided to explain a placement form of an object to be cleaned when a tray member is used. FIG. 8 is a diagram for explaining a portion to be cleaned exposed through the first and second openings. FIG. 9 is a diagram provided to explain the relationship between the spray distance, the discharge pressure of the cleaning liquid, and the cleaning time. FIGS. 10A and 10B are views for explaining a mode of fixing the elastic masking member. Fig.11 (a)-(b) is a figure provided in order to demonstrate a press member. FIGS. 12A to 12B are views provided for explaining the large area partial cleaning apparatus. FIGS. 13A to 13C are diagrams for explaining a wide-angle nozzle, a slit-type air nozzle, and a flat air nozzle. FIGS. 14A to 14B are diagrams provided to explain the general-purpose partial cleaning apparatus. FIGS. 15A to 15C are diagrams provided to explain the paste cup partial cleaning device. FIG. 16 is a diagram for explaining a conventional substrate cleaning apparatus.

[First Embodiment]
The first embodiment is a partial cleaning apparatus for partially cleaning an object to be cleaned, and has a cleaning liquid discharge nozzle 3 and an air blowing nozzle 4 inside as shown in FIGS. A housing 2 having a first opening 13 on the upper or side wall surface, and a second opening 31 for forming an opening communicating with the first opening 13 in the housing 2. And an elastic masking member 30 that is detachably fixed to the housing , and has an opening as a constituent member constituting the housing, a tray member that is removable from the housing, and an opening that the tray member has the part, a first opening, and, in the upper or lateral side of the housing 2, the placed in a state of being partially masked by the elastic masking member 30 After the cleaning liquid is discharged from the cleaning liquid discharge nozzle 3 to the purified product 20 through the first and second openings 13 and 31, the air is blown from the nozzle 4, and the cleaning liquid adhered to the object to be cleaned 20. The partial cleaning apparatus 1 is characterized by forcibly removing.
FIG. 1 is a diagram for explaining the partial cleaning apparatus 1 according to the first embodiment of the present invention. FIG. 2 shows the housing 2 in the partial cleaning apparatus 1 together with the object 20 to be cleaned. FIG. 3 is a diagram specifically used for explanation.
Hereinafter, the partial cleaning apparatus as the first embodiment will be specifically described for each component.

1. Outline of Partial Cleaning First, an outline of partial cleaning performed using the partial cleaning apparatus of the first embodiment will be described.
That is, as shown in FIGS. 2 and 3, the partial cleaning apparatus according to the first embodiment is covered in a state where it is partially masked by the elastic masking member 30 in the upper (or side) position of the housing 2. The cleaning object 20 is configured to be placed.
FIG. 2 shows that the object to be cleaned 20 is placed via the elastic masking member 30 and is pressed in the direction indicated by the arrow A to be brought into close contact with a predetermined place.
FIG. 3 shows that the object to be cleaned 20 is placed at a predetermined position via the elastic masking member 30 while being reversed as indicated by an arrow A.
Therefore, as shown in FIGS. 4A to 4B, only the predetermined cleaning target portion 21 of the object to be cleaned 20 is removed from the cleaning liquid discharge nozzle 3 through the first and second openings 13 and 31 communicated with each other. And the air blowing nozzle 4 can be exposed.
As a result, as shown in FIG. 4A, only the cleaning target portion 21 can be cleaned with the cleaning liquid discharged from the cleaning liquid discharge nozzle 3.
Further, as shown in FIG. 4B, the cleaning liquid adhering to the cleaning target portion 21 can be forcibly removed and dried by the air sprayed from the air spray nozzle 4.
Therefore, with the partial cleaning apparatus 1 of the first embodiment, it is possible to effectively suppress the used cleaning liquid from splashing and adhering to the periphery of the cleaning target portion, and efficiently cleaning the cleaning target portion. In addition, the amount of cleaning liquid used can be suppressed, and the drying time after cleaning can be shortened.

2. Object to be cleaned The object to be cleaned to be cleaned by the partial cleaning apparatus of the first embodiment is not particularly limited, but may be a member having only a specific part of the object to be cleaned as a part to be cleaned. preferable.
For example, in the case of home appliance parts, automobile parts, or other industrial parts that have a circuit board part only in a part of the member, it is necessary to clean the solder flux remaining on the circuit board part Therefore, it is suitable as an object to be cleaned in the present invention.
As such objects to be cleaned, more specifically, circuit boards for personal computers, TV circuit boards, video circuit boards, refrigerator circuit boards, washing machine circuit boards, and vacuum cleaner circuits that require partial cleaning. Circuit boards for mobile phones, circuit boards for copiers, circuit boards for air conditioners, circuit boards for switchboards, strain generators contained in load cells, bases for hard disks, circuit boards for automotive electronic control, circuit boards for vehicles, and ship control A circuit board, an airplane control circuit board, etc. are mentioned.
In addition, even if the object to be cleaned is entirely composed of a circuit board, only the part that is retrofitted may be partially cleaned. Therefore, such an object to be cleaned is also suitable as an object to be cleaned in the present invention. is there.
Furthermore, even if the member does not have a circuit board portion, for example, if it is a used cup (paste cup) of a paste used for surface mounting of a substrate, the paste remaining inside the cup When cleaning and removing, there is a merit in partially cleaning only the inside of the container. Therefore, it is suitable as an object to be cleaned in the present invention.

Next, the strain generating body included in the load cell as an example of the cleaning target 20 will be described with reference to FIGS.
Here, Fig.5 (a) is a side view of a strain body, FIG.5 (b) is a front view, FIG.5 (c) is a perspective view.
That is, the strain generating body 20 shown in FIGS. 5A to 5C is provided with a circuit board portion 21 (21a, 21b, 21c) to which a strain gauge is soldered, from which a strain amplifier or indicator is provided. Electrical wiring and terminals are arranged so that they can be connected to the terminal.
Therefore, when such a strain generating body 20 is cleaned by the partial cleaning apparatus of the present invention, only the circuit board portion 21 (21a, 21b, 21c) in the strain generating body 20 is selectively selected as a portion to be cleaned. Will be washed.

3. Housing The housing of the partial cleaning apparatus of the present invention has a first opening, a cleaning liquid discharge nozzle, and an air blowing nozzle, as will be described below.
In addition, it is preferable to use stainless steel as a constituent material of the housing in consideration of corrosion due to cleaning liquid, mechanical strength, and the like.
The capacity of the housing depends on the size of the object to be cleaned, the cleaning conditions, etc., but generally it is preferably a value within the range of 5 to 50 liters, and within the range of 10 to 20 liters. A value is more preferable.

(1) 1st opening part The housing 2 in this invention has the 1st opening part 13 in the upper or side wall surface 29, as shown in FIG.
This is because the object 2 to be cleaned 20 placed in a state where the housing 2 is partially masked by an elastic masking member 30 described later by having the first opening 13 in the upper or side wall surface 29. On the other hand, the cleaning liquid can be discharged from the cleaning liquid discharge nozzle 3 through the first opening 13 and the second opening 31 provided in the elastic masking member 30.
As a result, it is possible to effectively prevent the used cleaning liquid from scattering and adhering to the portions other than the openings 13 and 31, that is, the periphery of the cleaning target portion 21, thereby efficiently cleaning the cleaning target portion 21. This is because the amount of the cleaning liquid used can be suppressed.
Also, air is blown by the air blowing nozzle 4 through the first and second openings 13 and 31 communicated to the object 20 to be cleaned that is partially masked by the elastic masking member 30. This is because the drying time after washing can be shortened.
Further, since the object to be cleaned 20 is placed on the upper side or the side of the housing 2, the discharged cleaning liquid can be easily collected at the lower part of the housing 2.
Note that the shape of the first opening is only required to be formed corresponding to the shape of the portion to be cleaned, and is not limited to an indefinite shape, a rectangle, a triangle, a circle, or the like as shown in FIG. Absent.
Further, FIG. 2 shows only the form in which the first opening 13 is provided above the housing 2, but even when the first opening 13 is provided on the side of the housing 2, Effectively suppresses the used cleaning liquid from splashing and adhering to the periphery of the part to be cleaned, effectively cleaning the part to be cleaned, reducing the amount of cleaning liquid used, and The drying time after washing can be shortened.

Moreover, as shown to Fig.6 (a), it is preferable to provide the convex pressed part 13a around the 1st opening part 13 in the side to which the elastic masking member 30 is fixed.
The reason for this is that by providing the pressed portion 13a, the adhesion between the object to be cleaned and the elastic masking member in the peripheral portion of the first opening 13 and the adhesion between the elastic masking member and the housing are partially improved. This is because it can be improved.
As a result, it is possible to more effectively suppress the used cleaning liquid from scattering and adhering to the periphery of the portion to be cleaned 21.
The area S2 of the pressed portion 13a, depending on the pressing against the object to be cleaned, for example, preferably to a value within an area of 1 cm ² per 1 to 10 cm ² of the first opening, 2 A value in the range of 5 cm ² is more preferable.
In particular, regardless of the shape of the first opening, by making the area of the pressed part constant, it is easy to adjust the pressing force on the pressed part to a constant level regardless of the type of the object to be cleaned. become.
Moreover, as a height of the to-be-pressed part 13a, it is preferable to set it as the value within the range of 1-5 mm, and it is more preferable to set it as the value within the range of 2-3 mm.

In addition, as shown in FIG. 6B, it is preferable to provide an inclined portion 13b on the inner wall of the first opening 13 so that the first opening 13 expands toward the inside of the housing.
This is because by providing the inclined portion 13b, it is possible to more easily discharge the cleaning liquid and forcibly remove the attached cleaning liquid, so that the drying time after cleaning can be further shortened. .
That is, in FIG. 6B, by providing an inclined portion represented by an inclination angle (θ), the discharge direction of the discharged cleaning liquid can be easily concentrated on the portion to be cleaned, and it has adhered. This is because the cleaning liquid can be easily scattered by the blown air.
The inclined portion may be flat or curved, and the inclination angle θ is preferably set to a value within a range of 1 to 60 °, and within a range of 10 to 30 °. A value is more preferable.

Further, as shown in FIG. 3, it is preferable to provide a positioning member 12 for stably positioning the elastic masking member 30 and the object to be cleaned 20 around the first opening 13.
This is because by providing the positioning member 12, the portion to be cleaned can be reliably exposed to the housing side through the first and second openings that communicate with each other.
In addition, it is preferable to provide at least one vertical and horizontal positioning member for each of the positioning members, and it is also preferable to provide a total of three positioning members as shown in FIG.

(2) Tray Member As shown in FIG. 7, as a constituent member constituting the housing 2, the tray member 40 includes an opening and a tray member 40 that is removable from the housing 2, and the tray member 40 has an opening. the parts, characterized in that the first opening 13.
That is, a portion for releasably securing the elastic masking member 30 in the housing 2, characterized in that a removable tray member 40 from the housing body 2.
The reason for this is that by providing such a tray member, as shown in FIG. 8, on the housing side of the tray member 40, the portion to be cleaned 21 of the object to be cleaned passes through the first and second openings 13 and 31 communicated with each other. This is because it can be easily confirmed that is exposed.
Thereby, it can suppress more reliably that the used washing | cleaning liquid disperses and adheres to the circumference | surroundings of the washing | cleaning target part 21. FIG.
Further, the shape of the first opening 13 can be easily changed by replacing the tray member 40.
That is, for example, as shown in FIG. 3, when the tray member is not provided, it is difficult to directly check whether or not the portion to be cleaned is exposed on the housing side.
On the other hand, when the tray member 40 is provided, as shown in FIG. 7, the whole object is reversed with the cleaning target object 20 partially masked by the elastic masking member 30 placed on the tray member 40. Thus, as shown in FIG. 8, it can be easily confirmed that the portion 21 to be cleaned is exposed.

(3) Cleaning Liquid Discharge Nozzle In addition, the housing in the present invention is characterized by having a cleaning liquid discharge nozzle 3 inside as shown in FIG.
The reason for this is that by providing the cleaning liquid discharge nozzle 3 inside the housing 2, only the exposed cleaning target portion 21 passes through the first and second openings 13 and 31 communicated from the inside of the housing 2 to the cleaning liquid. This is because it can be washed.

The cleaning liquid discharge nozzle is not particularly limited. For example, as shown in FIG. 1, the cleaning liquid pumping pipe 10a and the cleaning liquid supply pipe 10b are used by a cleaning liquid supply means 8 such as an air-driven diaphragm pump. The cleaning liquid supplied from the cleaning liquid supply container 11a is a spray nozzle capable of obtaining a discharge speed (flow rate) within a range of 0.1 to 24 liters / minute under the condition of a pressure of 0.1 to 0.5 MPa. Is preferred.
In addition, as the spray nozzle, a sector, a cone, a pyramid, a straight nozzle, or the like can be appropriately used depending on the object to be cleaned.
Moreover, although the quantity of the washing | cleaning liquid used by one washing | cleaning is based also on the size of the washing | cleaning object part, it is generally preferable to set it as the value within the range of 1-720,000 milliliters, and 1-240,000 milliliters. It is more preferable to set the value within the range.
Moreover, it is preferable to provide the cleaning liquid discharge nozzle 3 so as to be positioned in front of the first opening 13 as shown in FIG.
This is because by providing in this way, contaminants such as solder flux in the portion to be cleaned can be stably cleaned without unevenness.
And it is preferable to make the distance of the 1st opening part 13 and the washing | cleaning liquid discharge nozzle 3 into the value within the range of -200-200 mm, and it is more preferable to set it as the value within the range of -60-60 mm. .
The case where the distance between the first opening and the cleaning liquid discharge nozzle is a negative value is, for example, a case where the thickness of the elastic masking member is very large, or a general-purpose partial cleaning device and a paste which will be described later In the case of the cup partial cleaning device, the case where the tip of the cleaning liquid discharge nozzle is located outside the housing with respect to the first opening is applicable.

Next, a relationship between the distance between the first opening and the cleaning liquid discharge nozzle (hereinafter referred to as a cleaning distance), the discharge pressure of the cleaning liquid, and the cleaning time will be described with reference to FIG.
That is, FIG. 9 shows characteristic curves A to C in which the horizontal axis represents the cleaning distance (mm) and the vertical axis represents the cleaning time (seconds).
Here, the characteristic curves A to C are characteristic curves when the discharge pressure of the cleaning liquid is 0.1, 0.3, and 0.5 MPa, respectively.
Note that the cleaning time is required until there is no residual resin when the degree of removal of the solder flux in the substrate portion of the strain generating body contained in the load cell as the object to be cleaned is confirmed using an optical microscope. Means cleaning time (seconds).

As can be understood from the characteristic curves A to C, if the cleaning distance is 0 to 60 mm, partial cleaning can be performed efficiently in a cleaning time of 20 seconds or less regardless of the discharge pressure.
On the other hand, when the cleaning distance exceeds 60 mm, the influence of the discharge pressure on the cleaning time gradually increases.
More specifically, it is understood that if the cleaning distance is set to 90 mm and a cleaning time within 20 seconds is to be secured, the discharge pressure must be 0.3 MPa or more.
Therefore, it is understood that in the partial cleaning apparatus of the present invention, excellent cleaning performance can be stably obtained regardless of the discharge pressure by adjusting the cleaning distance within the range of 0 to 60 mm.
On the other hand, even when the cleaning distance is relatively large in the range of 60 to 200 mm, it is understood that the desired cleaning performance can be maintained by increasing the discharge pressure.

(4) Air blowing nozzle The housing in the present invention has an air blowing nozzle 4 inside as shown in FIG.
This is because by providing the air blowing nozzle 4 inside the housing 2, the cleaning liquid adhering to the cleaning target portion 21 can be forcibly scattered and removed.
Therefore, by providing such an air blowing nozzle, not only the drying time after cleaning can be shortened, but also the erosion of the object to be cleaned by the used cleaning liquid can be effectively suppressed.

Here, the mode of the air blowing nozzle is not particularly limited, and is connected to a compressor or the like via the air supply pipe 9a, and is 100 to 1,500 under the condition of 0.1 to 0.8 MPa. A wide air nozzle or a concentrated air nozzle may be used as long as it can obtain a spraying speed (flow rate) within a range of liters / minute (0 ° C., 1 atm).
In addition, the amount of air sprayed at one time depends on the size of the portion to be cleaned, but generally it is preferably a value within the range of 0.1 to 45,000 liters, and 1 to 15,000 liters. It is more preferable to set the value within the range.
Moreover, it is preferable to provide the air blowing nozzle 4 so that it may be located in the diagonal direction of the 1st opening part 13, as shown in FIG.
This is because the cleaning liquid adhering to the portion to be cleaned can be more easily scattered and removed by providing in this way.
The distance between the first opening 13 and the air blowing nozzle 4 is preferably a value in the range of −200 to 200 mm, and more preferably a value in the range of −60 to 60 mm. .
Also, the air supply timing and supply amount from the compressor supplied to the air blowing nozzle and the air-driven diaphragm pump can be controlled by the air control device 14 according to the optimum program as shown in FIG. preferable.

(5) Air outlet As shown in FIG. 2, the housing in the present invention preferably includes an air outlet 5 in a part of the housing.
The reason for this is that by providing the air discharge port 5, the air blown from the air blowing nozzle 4 can be stably discharged to the outside of the housing 2 through the air discharge pipe 6 as it is. This is because the drying time after washing can be shortened more stably.

Moreover, it is preferable to make cross-sectional area S1 of this air discharge port 5 into the value within the range of 1-200 cm < ² >.
This is because the air blown by the air blowing nozzle 4 can be discharged to the outside of the housing 2 more stably by setting the cross-sectional area S1 of the air discharge port to a value within this range. is there.
Therefore, the cross-sectional area of the air discharge port is more preferably set to a value within the range of 3 to 180 cm ² , and further preferably set to a value within the range of 5 to 80 cm ² .

(6) Cleaning liquid recovery port Moreover, as shown in FIG.1 and FIG.2, it is preferable to provide the cleaning liquid recovery port 7 in the lower part of the housing 2. FIG.
This is because the used cleaning liquid discharged from the cleaning liquid discharge nozzle 3 can be easily transported out of the housing 2 via the recovered cleaning liquid transport pipe 15 and recovered in the cleaning liquid recovery container 11b. is there.

4). Elastic Masking Member As shown in FIG. 2, the partial cleaning apparatus of the present invention includes an elastic masking member 30 that is detachably fixed to the housing 2.
The reason for this is that, as shown in FIGS. 4A to 4B, by providing the elastic masking member 30, the adhesion between the housing 2 and the elastic masking member 30, the object to be cleaned 20, and the elastic masking member 30. This is because the adhesiveness between the two can be effectively improved.
Accordingly, it is possible to effectively prevent the cleaning liquid from entering between the housing 2 and the object to be cleaned 20 and the elastic masking member 30. As a result, the cleaning liquid can be applied to portions other than the portion to be cleaned 21. Adhesion can be effectively suppressed.

  In addition, such an elastic masking member 30 is excellent in adhesion to the object 20 to be cleaned, but also excellent in peelability. Therefore, the partially cleaned object 20 can be easily removed and the following It is possible to shift to partial cleaning of the article 20 to be cleaned.

  In addition, since the elastic masking member 30 is appropriately deformed by pressurization and the deformation is plastic, even when a plurality of objects to be cleaned 20 are continuously partially cleaned. The above-described excellent adhesion and peelability can be exhibited repeatedly and stably.

  Furthermore, since the elastic masking member 30 described above is appropriately deformed by pressurization, even when the object to be cleaned 20 is pressed during partial cleaning, damage to the object to be cleaned 20 is effectively suppressed. be able to.

(1) Second Opening As shown in FIG. 3, the elastic masking member 30 has a second opening 31 for forming an opening communicating with the first opening 13 in the housing 2. It is characterized by that.
However, as long as the second opening 31 is formed so as to correspond to the shape of the first opening 13 in the housing 21, other conditions are not particularly limited.

(2) Material The main raw materials for the elastic masking member are natural rubber, ethylene propylene diene rubber, urethane rubber, silicone rubber, acrylic rubber, acrylonitrile butadiene rubber, ethylene propylene rubber, isoprene rubber, epichlorohydrin rubber, chloroprene rubber, styrene butadiene. It is preferably at least one selected from rubber, butadiene rubber, fluororubber and polyisobutylene.
This is because, with these resin compositions, the elasticity of the elastic masking member can be easily adjusted, and the processing of the three-dimensional shape on the contact surface with the object to be cleaned, which will be described later, can be easily performed. It is because it can do.
In particular, urethane rubber is more preferable because it has high solvent resistance even if its elastic modulus is low.
As a measure of the elasticity of the elastic masking member, the Young's modulus is preferably set to a value within the range of 100 to 5,000 kPa, and more preferably set to a value within the range of 150 to 3,000 kPa.

(3) Shape In addition, it is preferable that the three-dimensional shape on the contact surface of the elastic masking member with the object to be cleaned is formed so as to be fitted to the object to be cleaned except for the second opening.
The reason for this is that by forming the elastic masking member in this way, the object can be easily aligned when the object to be cleaned is masked by the elastic masking member.
As a result, it is possible to more reliably suppress the used cleaning liquid from being scattered and attached to the periphery of the portion to be cleaned.
That is, this configuration is because the cleaning target portion and the second opening can be easily aligned.

Moreover, it is preferable to make the thickness of an elastic masking member into the value within the range of 3-20 mm.
This is because if the thickness of the elastic masking member is less than 3 mm, it may be difficult to obtain sufficient adhesion even when the object to be cleaned is pressed to the housing side. . On the other hand, if the thickness of the elastic masking member exceeds 20 mm, the second opening may be excessively easily deformed by pressing.
Therefore, the thickness of the elastic masking member is more preferably set to a value within the range of 4 to 18 mm, and further preferably set to a value within the range of 5 to 15 mm.

(4) Fixing The method of fixing the elastic masking member to the housing in a removable manner is not particularly limited, but it is preferable to fix the elastic masking member with a screw, a nut or the like.
In this case, since it is a member that is in direct contact with the object to be cleaned, the screw or nut cannot be exposed to the object to be cleaned. Therefore, as shown in FIGS. 34 is preferably fitted in the recess 32 provided in the elastic masking member 30 and further covered with a resin 35 having the same degree of elasticity as that of the elastic masking member 30.

5. Pressing member In the partial cleaning apparatus of the present invention, as shown in FIGS. 4A to 4B, the object to be cleaned 20 partially masked by the elastic masking member 30 with respect to the housing 2 is operated. When a person presses directly with a hand, leakage of the cleaning liquid can be sufficiently suppressed.
On the other hand, it is also preferable to perform such pressing using a pressing member.
This is because the unevenness of the pressing force can be suppressed and leakage of the discharged cleaning liquid can be more effectively suppressed.
More specifically, a pressing member using a toggle clamp, a hydraulic cylinder, a pneumatic cylinder, or the like can be used.
In particular, the toggle clamp 50 as shown in FIGS. 11A to 11B is suitable because it can be easily handled manually and the unevenness of the pressing force can be effectively suppressed. It is.
At this time, in order not to damage the surface of the object to be cleaned by pressing, as shown in FIGS. 11A to 11B, the pressing portion of the toggle clamp 50 has an elastic body made of, for example, urethane resin. It is preferable to provide the layer 51.
In addition, as a pressing force with respect to a to-be-cleaned object, it is preferable to set it as the value within the range of 10-1,200 kPa, and it is more preferable to set it as the value within the range of 30-800 kPa.
Further, when a press gauge is installed on the pressing member, the deterioration degree of the elastic masking member can be quantitatively confirmed, and it can be used as a guideline for replacing the elastic masking member.
Note that when the object to be cleaned 20 is a thin circuit board or the like, it may be difficult to collect the object to be cleaned 20 after cleaning from the elastic masking member 30. It is also preferable to attach the mechanical chuck to the partial cleaning device.

6). Other Embodiments In the above, a partial cleaning apparatus specialized in partial cleaning of a specific object to be cleaned, which mainly has a circuit board part only in a part of the member and the area of the part to be cleaned is relatively small (Hereinafter, it may be referred to as a small area partial cleaning apparatus.) Has been described as an example, but the partial cleaning apparatus of the present invention is not limited to such an embodiment.
Hereinafter, as an example of another aspect, a large area partial cleaning device, a general-purpose partial cleaning device, and a paste cup partial cleaning device, which are targeted for an object to be cleaned having a relatively large area to be cleaned, will be described.

(1) Large area partial cleaning apparatus As shown in FIGS. 12A to 12B, the basic configuration of the large area partial cleaning apparatus 1a includes the small area partial cleaning apparatus 1 shown in FIG. Although not changed, the object 20 to be cleaned is largely different in that the object 20a to be cleaned has a relatively large area 21 to be cleaned.
That is, the large area partial cleaning apparatus 1a is, for example, a circuit board in which a plurality of semiconductor chips are soldered over a relatively large area, more specifically, in a range of 1 to 1000 cm ^2. Is characterized in that partial cleaning can be performed efficiently.
Therefore, the area of the first opening 13 in a large area for partial cleaning device 1a is more preferably set to a value within the range of 50～600Cm ^2, further to a value within the range of 90～200Cm ² preferable.

Further, as shown in FIG. 13A, the cleaning liquid discharge nozzle in the large area partial cleaning apparatus is preferably a wide-angle nozzle 3 a, and the wide-angle nozzle 3 a is an opening surface of the first opening 13. It is preferable that it can be translated along.
The reason for this is that with this configuration, even when the area of the cleaning target portion 21d is relatively large, the cleaning liquid can be efficiently discharged onto the entire surface of the cleaning target portion 21d. is there.
That is, as shown in FIG. 13A, for example, a wide-angle nozzle 3a having an injection angle θ3 of 80 to 150 ° is parallel to the direction of the arrow A as shown in FIG. By moving, even when the cleaning target portion 21d of the article 20a to be cleaned is relatively wide, the cleaning liquid can be efficiently discharged onto the entire surface of the cleaning target portion 21d.
Therefore, the injection angle θ3 of the wide-angle nozzle 3a is more preferably set to a value within the range of 10 to 120 °, and further preferably set to a value within the range of 90 to 110 °.
The mode of the wide-angle nozzle 3a is not particularly limited as long as it has a predetermined injection angle and can discharge the cleaning liquid to the entire surface of the cleaning target portion 21d, and is not limited to a fan shape, a cone, a pyramid, A straight nozzle or the like can be appropriately used.

In addition, the moving speed of the wide-angle nozzle depends on the object to be cleaned, but is usually preferably a value in the range of 1 to 30 cm / second, more preferably a value in the range of 10 to 20 cm / second.
In addition, from the viewpoint of sequentially cleaning a plurality of objects to be cleaned, it is preferable that the wide-angle nozzle can be reciprocated, and the discharge of the cleaning liquid at this time can be performed only in the past or both in the reciprocation. It is preferable to adjust as appropriate.
As a method for moving the wide-angle nozzle, for example, as shown in FIG. 12B, rail members 63 (63 a and 63 b) provided along the traveling direction of the wide-angle nozzle 3 a with respect to the inner wall of the housing 2. It is preferable to use a wide-angle nozzle moving member 64 that is movably fixed to the rail member 63.
This is because, with such a moving method, the wide-angle nozzle 3a can be stably moved in a direction parallel to the opening surface of the first opening portion 13.
In addition, as a specific aspect for moving the wide-angle nozzle moving member to which the wide-angle nozzle is fixed, for example, a rod-type piston or the like in which a rotary motion of a motor or the like is converted into a reciprocating motion can be cited.
The pipe for supplying the cleaning liquid to the wide-angle nozzle 3a is preferably a flexible pipe 62 for supplying the cleaning liquid so that the cleaning liquid can be discharged while the wide-angle nozzle 3a moves.
In addition, the discharge conditions of the cleaning liquid other than those described above in the large area partial cleaning apparatus can be the same as the conditions in the small area partial cleaning apparatus already described.

Further, the air blowing nozzle in the large area partial cleaning apparatus is preferably a slit type air nozzle 4a as shown in FIGS. 12A and 12B, and further, the slit type air nozzle 4a is the first type. It is preferable that translation is possible along the opening surface of one opening 13.
The reason for this is that, even when the area of the portion to be cleaned is relatively large, the used cleaning liquid discharged to the portion to be cleaned is sprayed while efficiently forcibly removing it. This is because the air can be stably discharged out of the housing.
That is, the object to be cleaned in the object to be cleaned 20a is moved by moving the slit type air nozzle 4a in the direction of arrow B as shown in FIG. Even when 21d is relatively wide, the used cleaning liquid discharged to the cleaning target portion 21d can be efficiently and forcibly removed.
Also, by providing the U-shaped suction nozzle 5a at a position facing the slit type air nozzle 4a through the first opening 13, a large amount of air blown from the slit type air nozzle 4a is positively applied. Therefore, it is possible to prevent the internal pressure of the housing 2 from rising excessively.
Note that the slit type air nozzle is an air nozzle having a slit-like air blowing portion, and is an air that can form a so-called air knife by blowing air having a linear cross-sectional shape against an object to be cleaned. Means a nozzle.

The slit type air nozzle is preferably a long nozzle 4a as shown in FIG.
This is because air needs to be blown over the entire surface of the portion to be cleaned 21d. Therefore, the length L1 of the slit type air nozzle 4a is equal to or larger than the width of the portion to be cleaned 21d. It is necessary to do.
Therefore, although it depends on the width of the portion 21d to be cleaned, it is usually preferable to set the length L1 of the slit type air nozzle 4a within a range of 5 to 150 cm, and more preferably within a range of 2 to 30 cm. preferable.
Moreover, it is preferable that the width | variety of an air blowing part, ie, slit width L3, shall be a value within the range of 0.1-3 mm.
This is because the used cleaning liquid discharged to the cleaning target portion can be forcibly removed more efficiently by adjusting the air flow rate in the slit type air nozzle to a value within a predetermined range.
Therefore, the width L3 of the air blowing portion is more preferably set to a value within the range of 50 to 1,500 mm, and further preferably set to a value within the range of 20 to 300 mm.
In addition, although it does not restrict | limit especially as air blowing angle (theta) 1, It is preferable to set it as the value within the range of 1-90 degrees, and it is more preferable to set it as the value within the range of 45-90 degrees.

Further, as shown in FIG. 13B, the slit type air nozzle body 70 has a rectangular cross section, and further, an air blowing portion 74 provided in the longitudinal direction extends in the direction in which the object to be cleaned exists. It is preferable that the flat plate extending jig 71 and the L-shaped extending jig 72 are provided.
The reason is that by making the cross section of the slit type air nozzle 4a rectangular, the flat extending jig 71 and the L-shaped extending jig 72 can be easily fixed to the outer surface thereof with screws 73 or the like. This is because it can.
In addition, by providing a flat plate extending jig and an L-shaped extending jig, the position of the air blowing section can be adjusted or the air blowing section and the object to be cleaned can be finely adjusted or replaced. This is because the distance from the object can be easily adjusted.

Moreover, it is preferable to set the air blowing speed in the slit type air nozzle, that is, the air flow rate to a value within the range of 80 to 300 m / sec.
The reason is that by setting the air flow rate to a value within a predetermined range, the used cleaning liquid discharged to the cleaning target portion can be more efficiently discharged even when the area of the cleaning target portion is relatively wide. This is because it can be forcibly removed.
That is, when the air flow rate is less than 80 m / second, when the area of the cleaning target portion is relatively large, the used cleaning liquid discharged to the cleaning target portion may be sufficiently blown off and forcibly removed. This is because it may be difficult. On the other hand, when the air flow rate exceeds 300 m / sec, it may be difficult to control the pressure in the housing, or the soldered semiconductor chip or the like in the portion to be cleaned may fall off or be damaged. Because.
Therefore, the air flow rate in the slit type air nozzle is more preferably set to a value within the range of 90 to 200 m / sec, and further preferably set to a value within the range of 100 to 150 m / sec.

Moreover, it is preferable to use a high-pressure blower as an air supply device for supplying air to the slit type air nozzle.
This is because in the large area partial cleaning device, the area of the cleaning target portion is relatively large, so the amount of air blown from the slit type air nozzle is large, and as in the small area partial cleaning device, the air supply device This is because if a compressor or the like is used, it may be difficult to continuously supply a sufficient amount of air.
Also, in the case of a high-pressure blower, by connecting a U-shaped suction nozzle, which will be described later, to the intake port, it is possible to perform air blowing on the object to be cleaned and air suction in the housing at the same time. is there.

The moving speed of the slit type air nozzle depends on the type of the object to be cleaned, but is usually preferably in the range of 1 to 30 cm / second, and preferably in the range of 1 to 10 cm / second. Is more preferable.
In addition, from the viewpoint of sequentially cleaning a plurality of objects to be cleaned, it is preferable that the slit-type air nozzle can be reciprocated. The blowing of air at this time can be performed only in the past or both during the reciprocation. It is preferable to adjust appropriately according to the washed product.
Further, as the moving method of the slit type air nozzle 4a, the rail member provided along the traveling direction of the slit type air nozzle 4a with respect to the inner wall of the housing 2, as in the moving method of the wide angle nozzle 3a, and the rail A method using a slit type air nozzle moving member 65 fixed to be movable with respect to the member is preferable.
The details of the moving method of the slit type air nozzle are omitted because they overlap with the moving method of the wide angle nozzle.
The pipe for supplying air to the slit type air nozzle 4a is preferably the air supply flexible pipe 61 so that the cleaning liquid can be discharged while the slit type air nozzle 4a moves.
In addition, the air blowing conditions other than those described above in the large area partial cleaning apparatus can be the same as the conditions in the small area partial cleaning apparatus already described.

In addition, it is preferable that a U-shaped suction nozzle 5 a is provided at a position facing the slit-type air nozzle 4 a through the first opening 13.
This is because by arranging the U-shaped suction nozzle 5a in this way, the air bounced off against the cleaning target portion 21d can be sucked as it is.
Further, since it is necessary to efficiently suck the diffused air, the length L2 of the U-shaped air nozzle 5a is preferably larger than the length L1 of the slit-type air nozzle 4a.
Therefore, although depending on the length L1 of the slit type air nozzle 4a, it is usually preferable to set the length L2 of the U-shaped suction nozzle 5a to a value within the range of 1 to 30 cm, preferably within the range of 10 to 20 cm. More preferably, the value of
Further, in order to suck most of the air bounced off against the portion to be cleaned 21d, the opening width L4 of the U-shaped suction nozzle 5a is preferably set to a value in the range of 1 to 10 cm, and in the range of 1 to 5 cm. It is more preferable to set the value within the range.
Further, from the same viewpoint, the mounting angle θ2 of the U-shaped suction nozzle 5a is preferably set to a value within the range of 0 to 80 °, and more preferably set to a value within the range of 20 to 45 °.

In addition, although the slit type air nozzle has been mainly described as the air blowing nozzle in the large area partial cleaning apparatus, it is also preferable to use another air blowing nozzle as appropriate in accordance with the area of the portion to be cleaned.
More specifically, when the width of the portion to be cleaned is a value within a range of 1 to 20 mm, it is preferable to use a wide-angle nozzle.
Such a wide-angle nozzle can be configured similarly to the wide-angle nozzle 3a shown in FIG. 13A as a cleaning liquid discharge nozzle.
When the width of the portion to be cleaned is a value within the range of 20 to 50 mm, a so-called flat air nozzle (for example, 1 / 4M TF manufactured by Ikeuchi Co., Ltd.) as shown in FIG. -F50-16-012 S304) 4b is preferably used.
And finally, when the width of the portion to be cleaned is a value of 50 mm or more, as described above, it is preferable to use the slit type air nozzle 4a as shown in FIG.
When a wide-angle nozzle or a flat type air nozzle is used as the air blowing nozzle, an air discharge port may be used as a means for discharging air from the housing, or a U-shaped suction nozzle may be used.

Further, as described in the section of the slit-type air nozzle, it is preferable to use a high-pressure blower as the air suction device that forms the negative pressure in the U-shaped suction nozzle.
The reason for this is that if a high-pressure blower is connected, a U-shaped suction nozzle is connected to the intake port, so that the air blown from the slit-type air nozzle is sucked as it is and the air to the object to be cleaned is This is because spraying and air suction in the housing can be performed simultaneously.

(2) General-purpose partial cleaning apparatus As shown in FIGS. 14A to 14B, the general-purpose partial cleaning apparatus 1 b includes various objects to be cleaned 20 b, 20 c, and 20 d without specifying the object to be cleaned 20. It is the partial washing | cleaning apparatus of the aspect which can wash | clean.
That is, the general-purpose partial cleaning apparatus 1b is basically the same as the small-area partial cleaning apparatus 1 shown in FIG. 3, but without changing the elastic masking member 30 in accordance with the object 20 to be cleaned. The circuit board, the member including the circuit board, and the like can be partially cleaned.
Therefore, from the viewpoint of being adaptable to various objects to be cleaned, as shown in FIG. 14B, the planar shapes of the first opening 13 and the second opening 31 are versatile such as a circle and a rectangle. It is preferable to use a high shape.
Moreover, it is preferable that the areas of the first opening 13 and the second opening 31 are relatively large so that they can be applied to various cleaning parts.
Specifically, a value within the range of 1 to 100 cm ² is preferable, and a value within the range of 7 to 40 cm ² is more preferable.

Moreover, as an elastic masking member in such a general-purpose partial cleaning apparatus, as shown in FIGS. 14A to 14B, an object to be cleaned so as to surround the peripheral portion in the first opening portion 13. It is preferable that a standing portion 30a that protrudes on the side of 20b, 20c, and 20d is provided.
The reason for this is that by forming the elastic masking member in this way, the cleaning portions of various objects to be cleaned can be easily accommodated in the openings.
Moreover, it is because a washing | cleaning part can be easily accommodated in an opening part irrespective of the three-dimensional shape in areas other than the washing | cleaning part in a to-be-cleaned object.
In addition, it is preferable that the shape of the top portion 30a ′ of the standing portion 30a in the elastic masking member 30 is inclined so that the horizontal or inner side is higher.
The reason for this is to increase the pressure applied between the object to be cleaned and the elastic masking member by making the shape of the top of the standing part in such a shape, and to effectively improve the adhesion between them. It is because it can do.
In addition, the width L1 of the standing portion 30a is preferably a value within the range of 5 to 30 mm, and the height L2 is preferably a value within the range of 30 to 100 mm.

The method for fixing the elastic masking member to the housing is not particularly limited. For example, as shown in FIGS. 14A to 14B, the elastic masking member may be fixed to the standing portion 30 a and the housing 2. It is preferable that the masking member 30 having the planar portion 30b serving as a sandwich is sandwiched and fixed between the housing 2 by the fixing member 36, the nut 34, the bolt 33, and the like.
This is because by fixing the predetermined elastic masking member in this manner, even an elastic masking member having a three-dimensional shape that is relatively difficult to fix can be stably fixed to the housing. .
Further, even if the elastic body in the elastic masking member is deteriorated, it can be easily removed and replaced.
In addition, about the discharge conditions of the washing | cleaning liquid in a general purpose partial cleaning apparatus, and the blowing conditions of air, it can be made to be the same as that of the conditions in the partial cleaning apparatus for small areas already described.

(3) Paste Cup Partial Cleaning Device As shown in FIGS. 15A to 15C, the paste cup partial cleaning device 1c removes the residue in the container (paste cup) 20e that uses up the solder paste as the contents. This is a partial cleaning device for cleaning and removing.
That is, the paste remaining in the used container 20e can be washed and removed by partially cleaning only the inside of the container.

The paste cup partial cleaning device 1c is basically the same as the small area partial cleaning device 1 shown in FIG. 3, but specializes in partially cleaning the inside of the container 20e. The elastic masking member 30 for masking 20e is characterized.
That is, as shown in FIGS. 15 (a) to 15 (c), in the mouth portion of the container 20e, with respect to the screw portion 25 carved on the outer peripheral surface of the container 20e for external fitting by screwing with the lid, It is preferable that the groove part 30c is formed in the inner wall part so that the elastic masking member 30 may be externally fitted by screwing.
This is because by forming such a groove 30c in the elastic masking member 30, it is possible to effectively mask the outer peripheral surface of the container 20e that is not to be cleaned.
Moreover, it is because the container 20e which is a to-be-cleaned object can be easily fixed by screwing, and can be easily removed after cleaning.
In addition, the area of the 1st opening part 13 and the 2nd opening part 31 in the partial cleaning apparatus 1c for paste cups becomes an area according to the area of the opening | mouth part in the container 20e which is a to-be-cleaned object inevitably.

The method for fixing the elastic masking member to the housing is not particularly limited. For example, as shown in FIGS. 15 (a) to 15 (c), a groove for directly contacting the object to be cleaned. An elastic masking member 30 having an inner wall portion having 30c and a flat portion 30d that contributes to fixing to the housing 2 is sandwiched and fixed between the housing 2 by a fixing member 36, a nut 34, a bolt 33, and the like. Is preferred.
This is because the elastic masking member can be stably fixed to the housing by fixing the predetermined elastic masking member in this manner.
Moreover, it is because the contact | adherence degree of the inner wall part in an elastic masking member and a to-be-cleaned object can be adjusted suitably by changing the pinching strength by a fixing member.
That is, by increasing the pinching strength by the fixing member, the inner wall portion of the elastic masking member can be pushed out toward the object to be cleaned, and the adhesion can be increased. Conversely, by reducing the pinching strength by the fixing member , Such adhesion can be reduced.

In addition, as a cleaning liquid discharge nozzle in the paste cup partial cleaning apparatus, since the surface area of the cleaning portion is relatively large, a stronger cleaning power is required, so that the pressure is 0.1 to 0.6 MPa. It is preferable to use a conical spray nozzle that can obtain a discharge speed in the range of 10 to 30 liters / minute.
Further, the amount of the cleaning liquid used in one cleaning is preferably set to a value within the range of 10,000 to 900,000 milliliters, and preferably within a range of 20,000 to 450,000 milliliters. More preferred.
The distance between the first opening and the cleaning liquid discharge nozzle is preferably a value within the range of −200 to 200 mm, and more preferably a value within the range of −60 to 60 mm.

In addition, from the viewpoint of more reliably cleaning the inside of the paste cup, it is preferable that the cleaning liquid discharge nozzle is capable of reciprocating in the vertical direction. It is preferable to adjust appropriately according to the mode of the paste cup.
In addition, as a method for moving the cleaning liquid discharge nozzle, a rail member provided along the traveling direction of the cleaning object discharge nozzle with respect to the inner wall of the housing, similarly to the method for moving the wide angle nozzle in the large area partial cleaning device, A method using a cleaning liquid discharge nozzle moving member fixed to be movable with respect to the rail member is preferable.
In addition, as a specific mode of moving the cleaning liquid discharge nozzle moving member to which the cleaning liquid discharge nozzle is fixed, for example, a rod-type piston or the like in which a rotary motion of a motor or the like is converted into a reciprocating motion can be cited.
In addition, it is preferable that the air spray nozzle described later can be moved in the vertical direction as in the case of the cleaning agent discharge nozzle.

Also, the air spray nozzle requires a relatively strong spray as well as the cleaning liquid discharge nozzle. Therefore, the pressure is 100 to 1500 liters / minute (0 ° C., 1 atm) under the pressure of 0.1 to 0.8 MPa. It is preferable to use a spray nozzle capable of obtaining a spraying speed in the range of
Moreover, it is preferable to set it as the value within the range of 0.1-45,000 liters also as a single air blowing amount, and it is more preferable to set it as the value within the range of 1-15,000 liters.
The distance between the first opening and the air blowing nozzle is preferably a value in the range of −200 to 200 mm, and more preferably a value in the range of −60 to 60 mm.

7). Type of cleaning liquid (1) The type of cleaning liquid to be used is not particularly limited. For example, it is selected from the group consisting of glycol ether compounds, glycol ester compounds, aromatic hydrocarbon compounds and pyrrolidone compounds. Preferably, it is at least one compound.
This is because such a cleaning liquid is inexpensive and can clean an object to be cleaned quickly and sufficiently with a relatively small amount.

  Here, preferred glycol compounds include ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, ethylene glycol monoisobutyl ether, diethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether, diethylene glycol monopentyl ether, triethylene glycol Ethylene glycol monomethyl ether, triethylene glycol monoethyl ether, triethylene glycol monopropyl ether, triethylene glycol monobutyl ether, triethylene glycol monopentyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene Glycol monopropyl ether, propylene glycol monobutyl ether, propylene glycol monopentyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether, dipropylene glycol monopentyl ether, Tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, tripropylene glycol monopropyl ether, tripropylene glycol monobutyl ether, tripropylene glycol monopentyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, triethylene glycol dimethyl ether , Triethylene glycol diethyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, tripropylene glycol dimethyl ether, tripropylene glycol diethyl ether, 3-methoxybutanol, 3-methoxy-3- One kind alone or a combination of two or more kinds such as methyl-1-butanol may be mentioned.

  In addition, as glycol ester compounds, methoxybutyl acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, One kind alone or a combination of two or more kinds such as 3-methoxy-3-methyl-1-butyl acetate and 3-methoxybutyl acetate may be mentioned.

  Examples of aromatic hydrocarbon compounds include 1,2,4-trimethylbenzene (pseudocumene), 1,2,3-trimethylbenzene, 1,3,5-trimethylbenzene, methylisopropylbenzene, dipentene (limonene), and the like. These may be used alone or in combination of two or more.

  Moreover, as a pyrrolidone type compound, 1 type individual, such as N-methylpyrrolidone, or 2 or more types of combinations is mentioned.

In particular, mixed solvents of aromatic hydrocarbon compounds such as 1,2,4-trimethylbenzene and glycol compounds such as propylene glycol monomethyl ether acetate and diethylene glycol diethyl ether, and aromatics such as 1,2,4-trimethylbenzene A mixed solvent of an aromatic hydrocarbon compound and a glycol ester compound such as 3-methoxy-3-methyl-1-butyl acetate is preferred.
This is because such a combination is not only excellent in cleanability but also can be suppressed to a predetermined chargeability, and is relatively inexpensive.
In addition, when comprising such a mixed solvent, the addition amount of a glycol compound or a glycol ester-type compound shall be a value within the range of 10-200 weight part with respect to 100 weight part of aromatic hydrocarbon-type compounds. Is preferable, and a value within the range of 20 to 70 parts by weight is more preferable.

A mixed solvent of a glycol compound such as propylene glycol monomethyl ether or 3-methoxy-3-methyl-1-butanol and a glycol ester compound such as propylene glycol monomethyl ether acetate or 3-methoxybutyl acetate is also preferable.
In addition, when comprising such a mixed solvent, it is preferable to make the addition amount of a glycol ester type compound into the value within the range of 10-900 weight part with respect to 100 weight part of glycol compounds, and 100-500 weight More preferably, the value is within the range of parts.
Furthermore, it is also preferable to add an aromatic hydrocarbon compound such as dipentene at a value in the range of 5 to 18 parts by weight with respect to 100 parts by weight of the glycol compound.

(2) Additive Further, it is preferable that the cleaning liquid to be used further contains an amine compound and an alkylammonium hydroxide compound, or any one of the compounds.
The reason for this is that the chemical removal of the flux residue is further promoted, and the flux residue can be removed more efficiently.

  Here, as preferred amine compounds, monoethanolamine, monopropanolamine, monobutanolamine, diethanolamine, dipropanolamine, dibutanolamine, trimethanolamine, triethanolamine, tripropanolamine, tributanolamine, N-methylethanol Amine, N-methyldiethanolamine, N-ethylethanolamine, N-ethyldiethanolamine, N-propylethanolamine, N-propyldiethanolamine, N-butylethanolamine, N-butyldiethanolamine, N-cyclohexiethanolamine, N, N-dimethyl Ethanolamine, N, N-diethylethanolamine, N, N-dipropylethanolamine, N, N-dibutylethanolamine, etc. Species alone, or a combination of two or more.

In addition, when adding the amine compound mentioned above, it is preferable to make the addition amount into the value within the range of 0.1-20 weight part with respect to 100 weight part of cleaning ingredients.
The reason for this is that when the amount of the amine compound added is less than 0.1 parts by weight, the effect of addition may not be manifested. On the other hand, when the value exceeds 20 parts by weight, the flux is removed. This is because the efficiency may decrease.
Therefore, it is more preferable to set the addition amount of the amine compound to a value within the range of 1 to 20 parts by weight with respect to 100 parts by weight of the main component of the cleaning liquid, and to a value within the range of 2 to 10 parts by weight. Is more preferable.

(3) Flash point Moreover, it is preferable to make the flash point of a cleaning liquid into the value of 30 degreeC or more.
This is because the object to be cleaned can be cleaned quickly and safely by configuring in this way.
However, if the flash point of the cleaning liquid becomes excessively high, the cleaning performance of the object to be cleaned may be significantly reduced.
Therefore, the flash point of the cleaning liquid is more preferably set to a value within the range of 40 to 160 ° C, and further preferably set to a value within the range of 50 to 80 ° C.
By setting the flash point of the cleaning liquid to a value of 40 ° C. or higher, there is no legal restriction on explosion-proof equipment, so there is an advantage that the cleaning device can be further downsized.

(4) Operating temperature The operating temperature (liquid temperature) of the cleaning liquid is preferably determined in consideration of the cleaning effect on the object to be cleaned, the degree of oxidative deterioration of the cleaning liquid, and the like. It is preferable to set the value within the range.
This is because when the temperature of the cleaning liquid is less than 5 ° C., the cleaning effect on the object to be cleaned may be significantly reduced. On the other hand, when the temperature exceeds 70 ° C., the oxidative deterioration of the cleaning liquid becomes significant, and not only the extra flux but also the object to be cleaned may be damaged.
Accordingly, the temperature of the cleaning liquid is more preferably set to a value within the range of 20 to 70 ° C, and further preferably set to a value within the range of 30 to 60 ° C.
In determining the use temperature of the cleaning liquid, it is more preferable to consider the flash point of the cleaning liquid. That is, it is preferable that the relationship of T1 <T2 is satisfied when the use temperature of the cleaning liquid is T1 (° C.) and the flash point of the cleaning liquid is T2 (° C.).

[Second Embodiment]
The second embodiment is a partial cleaning method using the partial cleaning apparatus as the first embodiment, and includes the following steps (a) to (d).
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned by the elastic masking member.
(B) A step of pressing the object to be cleaned, which is partially masked by the elastic masking member, against the housing.
(C) A step of discharging the cleaning liquid from the cleaning liquid discharge nozzle to the object to be cleaned in the pressed object to be cleaned to clean the object to be cleaned.
(D) A step of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air from the air blowing nozzle to the portion to be cleaned in the pressed object to be cleaned.
That is, if the partial cleaning method includes these steps, the cleaning target part can be efficiently cleaned without adhering the cleaning liquid to the peripheral part, and the amount of the cleaning liquid used can be suppressed, and after cleaning. Drying time can be shortened.
In addition, about description of the specific content in each of these processes, since it overlaps with the content demonstrated in 1st Embodiment, it abbreviate | omits.

In carrying out the partial cleaning method of the present invention, as shown in FIG. 7, the partial cleaning apparatus 1 includes a tray member 40 having an opening as a member constituting the housing 2 and removable from the housing 2. In addition, it is preferable to include the tray member 40 having the opening portion of the tray member 40 as the first opening portion 13 and to perform the following step (a ′) after the step (a).
(A ′) As shown in FIG. 8, the portion 21 to be cleaned of the object to be cleaned is exposed through the first and second openings 13 and 31 communicated with each other on the housing 2 side of the tray member 40. The process of confirming.
The reason for this is that, after the step (a), the following step (a ′) is performed so that only the portion to be cleaned can be more stably cleaned even when the partial cleaning method is manually performed. This is because it can.

  Hereinafter, based on an Example, this invention is demonstrated in detail.

1. Implementation of Partial Cleaning Method Using the partial cleaning apparatus shown in FIGS. 1 and 7, the strain generating body of the load cell shown in FIG. 5 in a state where the solder flux (rosin-based flux) is adhered to the substrate portion was partially cleaned.
That is, as a cleaning liquid, a cleaning agent A (flash point: 43 ° C.) having a composition of propylene glycol monomethyl ether / propylene glycol monomethyl ether acetate (weight ratio: 10/90) is used. It discharged from the front of the board | substrate part on the conditions of discharge speed 0.3 liter / min, discharge time 2 second (total discharge amount 10 ml), discharge pressure 0.3 MPa, and discharge distance 1 cm.
Moreover, the operator pressed the strain generating body manually. The pressing force at this time was about 400,000 Pa.
As the elastic masking member, a plate having a thickness of 8 mm made of urethane rubber having a Young's modulus of 1,700 kPa was used.
Further, as shown in FIG. 6, the first opening in the housing is provided with a pressed part having an area of 2 cm ² and a height of 3 mm in the periphery, and an inclined part having an inclination angle (θ) of 30 °. did.
Furthermore, the cross-sectional area of the air discharge port was 80 cm ² .

  Next, in a state where the strain generating body is pressed, air is sprayed at a spraying speed of 180 liters / minute (0 ° C., 1 atm) using a centralized air nozzle, spraying time is 2 seconds (total spraying amount is 6 liters) It sprayed from the angle of 30 degrees diagonally with respect to the board | substrate part on the conditions of spraying pressure 0.3MPa and spraying distance 2cm.

2. Evaluation (1) Evaluation of detergency The degree of removal of the solder flux in the substrate portion was confirmed using an optical microscope and evaluated according to the following criteria. The obtained results are shown in Table 1.
A: There is no resin residue.
○: There is almost no resin residue.
Δ: Resin residue is slightly observed.
X: Resin residue is recognized remarkably.

(2) Evaluation of contamination property It was confirmed using an optical microscope whether the cleaning liquid leaked around the substrate portion covered with the elastic masking member, and the contamination was evaluated, and evaluated according to the following criteria. The obtained results are shown in Table 1.
A: There is no surface stain.
○: There is almost no surface stain.
Δ: Slight surface stains are observed.
X: Surface stains are noticeable.

[Examples 2 to 7]
In Examples 2 to 7, a partial cleaning method was performed and evaluated in the same manner as in Example 1 except that the cleaning liquid supply conditions and the air supply conditions were changed as shown in Table 1, respectively. The obtained results are shown in Table 1.

[Examples 8 to 28]
In Examples 8 to 28, the partial cleaning method was performed and evaluated in the same manner as in Example 1 except that the types of cleaning liquids were changed as shown in Table 2. The obtained results are shown in Table 2.

[Examples 29 to 30]
In Examples 29 to 30, the type of cleaning liquid was changed as shown in Table 2, and the part of the solder flux as the cleaning target was changed to a water-soluble flux. A cleaning method was implemented and evaluated. The obtained results are shown in Table 2.

According to the partial cleaning apparatus and the partial cleaning method using the same according to the present invention, a housing having a cleaning liquid discharge nozzle, an air blowing nozzle and a predetermined opening, and an opening communicating with the opening of the housing are formed. By providing an elastic masking member having a predetermined opening, the conventional problem can be solved.
In other words, the cleaning target part can be efficiently cleaned without adhering the cleaning liquid to the peripheral part, the amount of the cleaning liquid used can be suppressed, the drying time after cleaning can be shortened, and the used cleaning liquid As a result, the object to be cleaned can be prevented from being eroded.
Therefore, the partial cleaning apparatus and the partial cleaning method using the same according to the present invention are expected to significantly contribute to the improvement of the quality of members including the substrate and the like, the efficiency of the work in the cleaning process and the reduction of the cost. The

1: partial cleaning device, 1b: general-purpose partial cleaning device, 1c: partial cleaning device for paste cup, 2: housing, 3: cleaning liquid discharge nozzle, 3a: wide-angle nozzle, 4: air spray nozzle, 4a: slit type air nozzle, 4b: flat air nozzle, 5: air discharge port, 5a: U-shaped suction nozzle, 6: air discharge pipe, 7: cleaning liquid recovery port, 8: cleaning liquid supply means, 9a, b: air supply pipe, 10a: cleaning liquid Pumping pipe, 10b: cleaning liquid supply pipe, 11a: cleaning liquid supply container, 11b: cleaning liquid recovery container, 12: positioning member, 13: first opening, 13a: pressed part, 13b: inclined part, 14: air control device 15: Recovery cleaning liquid transport pipe, 20 (20a, 20b, 20c, 20d, 20e): Object to be cleaned, 20α: Front side surface of the strain generating body included in the load cell, 20β : Back surface of strain generating body included in load cell, 21: Cleaning target part (circuit board part), 22: Wiring, 25: Screw part, 30: Elastic masking member, 30a: Standing part, 30a ': Top part 30b: plane part, 30c: groove part, 30d: plane part, 31: second opening part, 32: recessed part, 33: screw, 34: nut, 35: resin, 36: fixing member, 40: plate member, 50 : Toggle clamp, 61: flexible pipe for supplying air, 62: flexible pipe for supplying cleaning liquid, 63 (63a, 63b): rail member, 64: wide-angle nozzle moving member, 65: slit-type air nozzle moving member, 70: Slit-type air nozzle body, 71: Flat plate-shaped jig, 72: L-shaped extending jig, 73: Screw, 74: Air blowing part, 80: Injection hole, 81: Air suction hole, 82: Groove part, 83 : D Over the supply port

Claims (12)

A partial cleaning apparatus for partially cleaning an object to be cleaned,
A housing having a cleaning liquid discharge nozzle and an air blowing nozzle inside, and having a first opening on an upper or side wall;
An elastic masking member having a second opening for forming an opening communicating with the first opening in the housing, and removably fixed to the housing;
With
The structural member constituting the housing has an opening, a tray member that is removable from the housing, and the opening of the tray member is the first opening, and
A cleaning liquid is discharged from the cleaning liquid discharge nozzle through the first and second openings to the object to be cleaned which is partially masked by the elastic masking member above or on the side of the housing. Then, the air is blown by the air blowing nozzle to forcibly remove the cleaning liquid adhering to the object to be cleaned.   The partial cleaning apparatus according to claim 1, wherein the housing has a convex pressed portion around the first opening on the side where the elastic masking member is in close contact.   The partial cleaning apparatus according to claim 1, wherein an inner wall of the first opening has an inclined portion so that the first opening in the housing expands toward the inside of the housing. .   4. The pressing device according to claim 1, further comprising a pressing unit configured to press the object to be cleaned in a state partially masked by the elastic masking member against the housing. Partial cleaning device. The main raw material of the elastic masking member is natural rubber, ethylene propylene diene rubber, urethane rubber, silicone rubber, acrylic rubber, acrylonitrile butadiene rubber, ethylene propylene rubber, isoprene rubber, epichlorohydrin rubber, chloroprene rubber, styrene butadiene rubber, butadiene rubber, The partial cleaning apparatus according to claim 1 , wherein the partial cleaning apparatus is at least one selected from fluororubber and polyisobutylene. The cleaning liquid discharge nozzle, with a wide angle nozzle, the wide angle nozzles, in any one of claims 1 to 5, characterized in that said first be translated along the opening surface of the opening The partial cleaning apparatus described. The partial cleaning apparatus according to claim 1 , wherein an air discharge port is provided in a part of the housing. Partial cleaning device according to cross-sectional area of the air outlet to claim 7 you, characterized in that a value within the range of 1~200cm ^2. The air blowing nozzle is a slit-type air nozzle, and the slit-type air nozzle can be translated along the opening surface of the first opening, and through the first opening. The partial cleaning apparatus according to claim 1 , further comprising a U-shaped suction nozzle at a position facing the slit type air nozzle. The partial cleaning apparatus according to claim 9 , wherein an air flow rate in the slit type air nozzle is set to a value of 80 to 300 m / second or more. A partial cleaning method using the partial cleaning apparatus according to claim 1,
A partial cleaning method comprising the following steps (a) to (d):
(A) A step of placing an object to be cleaned on an elastic masking member that is detachably fixed to the housing, and partially masking the object to be cleaned by the elastic masking member.
(B) A step of pressing an object to be cleaned that is partially masked by the elastic masking member against the housing.
(C) A step of cleaning the object to be cleaned by discharging a cleaning liquid from a cleaning liquid discharge nozzle to the portion to be cleaned in the pressed object to be cleaned.
(D) A step of forcibly removing the cleaning liquid adhering to the object to be cleaned by blowing air from an air blowing nozzle to the portion to be cleaned in the pressed object to be cleaned. The partial cleaning method according to claim 11 , wherein the following step (a ′) is performed after the step (a) .
(A ′) A step of confirming that the portion to be cleaned of the object to be cleaned is exposed through the first and second openings on the housing side of the tray member.

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