CN211045383U - Glass substrate manufacturing device - Google Patents

Abstract

The utility model provides a glass substrate's manufacturing installation, this glass substrate's manufacturing installation can prevent that dust from attaching to glass substrate and making the glass substrate who has high surface quality. A glass substrate (G) manufacturing device (1) that cleans and dries a glass substrate (G) that is being processed upstream, wherein the glass substrate (G) manufacturing device (1) comprises: a contact cleaning unit (2) for cleaning a glass substrate (G); a rinsing part (3) for rinsing the glass substrate cleaned by the contact cleaning part (2); and a drying section (4) for drying the glass substrate (G) rinsed in the rinsing section (3), wherein a clean air introducing unit (34) for ejecting clean air is provided in the drying section (4).

Description

Glass substrate manufacturing device

Technical Field

The utility model relates to a technology of a manufacturing device of a glass substrate.

Background

Conventionally, in the production of glass substrates such as liquid crystal panels (L CD), Plasma Display Panels (PDP), and organic E L panels, protective films are sometimes attached to one or both surfaces of the glass substrates, and when a protective film is attached to the surface of a glass substrate, the protective film may be peeled off if dust adheres to the surface, and therefore, a glass substrate production apparatus is known which performs a step of cleaning the surface of the glass substrate in a step prior to the step of attaching the protective film to the glass substrate (for example, see patent document 1).

The glass substrate manufacturing apparatus of patent document 1 includes: a cleaning section for cleaning the surface of the glass substrate while supplying a cleaning liquid thereto; a rinsing unit that rinses the surface of the glass substrate cleaned by the cleaning unit; and a drying section for drying the glass surface rinsed in the rinsing section. In the drying section, an air knife is provided as an example of a drying unit that dries the glass surface.

Prior art documents

Patent document

Patent document 1: japanese patent laid-open No. 2008-212862

In patent document 1, when drying is performed using an air knife in a drying section, turbulence may be generated in the drying section by an air flow caused by the air knife and an air flow sent from a clean room at a positive pressure in a downstream process, and minute residual dust may adhere to the surface of the glass substrate after cleaning and rinsing again. Therefore, as a glass substrate requiring high quality, a glass substrate manufacturing apparatus that prevents dust from re-adhering is desired.

SUMMERY OF THE UTILITY MODEL

Problem to be solved by utility model

In view of the above problems, the present invention provides an apparatus for manufacturing a glass substrate, which can prevent dust from adhering to the glass substrate and can manufacture a glass substrate having high surface quality.

Means for solving the problems

As described above, the problems to be solved by the present invention are described below.

That is, the present invention relates to an apparatus for manufacturing a glass substrate, which cleans and dries a glass substrate that is processed upstream, the apparatus comprising:

a contact cleaning unit for cleaning the glass substrate; a rinsing unit for performing a rinsing process with respect to the glass substrate cleaned by the contact cleaning unit; and a drying section for drying the glass substrate rinsed in the rinsing section,

the drying part is provided with a clean air introducing unit for spraying clean air.

In the present invention, the contact cleaning section, the washing section and the drying section are provided with an exhaust unit.

In the utility model, the drying part is provided with the air knife,

the exhaust port of the exhaust unit is disposed at a side to which the air knife is directed.

In the utility model, the conveying unit for conveying the glass substrate is inclined in the width direction orthogonal to the conveying direction of the glass substrate,

in the contact cleaning unit and the flushing unit, the exhaust port is disposed below an inclined upper side of the conveying unit.

In the present invention, the exhaust port of the exhaust unit is further disposed on a downstream side in the conveying direction of the glass substrate with respect to the air knife.

In the present invention, the clean air introducing unit is disposed on a downstream side in a carrying direction of the glass substrate.

In the present invention, the exhaust unit in the flushing portion has a larger exhaust amount than the exhaust unit in the contact cleaning portion, and the exhaust unit in the contact cleaning portion has a larger exhaust amount than the exhaust unit in the drying portion.

In the present invention, the contact cleaning portion and the flushing portion are divided into sections, and an exhaust unit is provided for each of the sections.

Effect of the utility model

As the effects of the present invention, the following effects are obtained.

The utility model discloses in, come the clear air of blowout in to the drying part through setting up the leading-in unit of clean air, consequently be difficult for making dust fly upward because of the turbulent flow, wash by the contact cleaning part, can prevent that dust from attaching to the glass substrate who has carried out the rinsing in the washing part once more. Thus, a glass substrate having high surface quality can be produced.

Additionally, the utility model discloses in, through set up the exhaust unit at contact cleaning part, washing portion and drying portion to the air is rectified, and dust is difficult for flying upward, can prevent that dust from attaching to the glass substrate. Thus, a glass substrate having high surface quality can be produced.

In addition, in the present invention, since the exhaust port is provided on the side to which the air knife is directed, the air ejected from the air knife easily flows into the exhaust port, and the air is rectified, so that dust is not easily blown up, and dust can be prevented from adhering to the glass substrate. Thus, a glass substrate having high surface quality can be produced.

In addition, in the present invention, since the glass substrate is inclined in the width direction, the cleaning liquid and the rinsing liquid are likely to be concentrated on the inclined lower side. Further, by providing the exhaust port with an inclined upper side, water droplets and the like are less likely to enter the exhaust port, and only dust can be efficiently collected in the exhaust port. Thus, a glass substrate having high surface quality can be produced.

Further, in the present invention, since the exhaust port is disposed on the side to which the air knife is directed and the exhaust port is disposed on the side opposite to the side to which the air knife is directed, dust flying due to an air flow other than the air ejected from the air knife can easily flow into the exhaust port, and the dust can be prevented from adhering to the glass substrate. Thus, a glass substrate having high surface quality can be produced.

In addition, in the present invention, the turbulent flow generated on the side opposite to the direction in which the air knife is directed can be rectified.

In addition, the present invention can adjust the drying section to the most positive pressure state, and the most amount of air can be discharged from the flushing section, which is required to discharge two fluids including the positive pressure air flow flowing from the drying section and the high pressure air used for rinsing.

Additionally, the utility model discloses in through setting up the division board to the dust that flies upward is difficult for removing to the downstream side of air current flow direction, can prevent that dust from attaching to the glass substrate. Thus, a glass substrate having high surface quality can be produced.

Drawings

Fig. 1 is a side view showing an overall configuration of a glass substrate manufacturing apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view showing the entire configuration of the glass substrate manufacturing apparatus.

Fig. 3 is a sectional view taken along line a-a of fig. 2.

Fig. 4 is a sectional view taken along line B-B of fig. 2.

Fig. 5 is a plan view showing the entire configuration of an apparatus for manufacturing a glass substrate according to another embodiment.

Fig. 6 is a side view showing the entire configuration of an apparatus for manufacturing a glass substrate according to still another embodiment.

Description of reference numerals:

1 manufacturing apparatus

2 contact cleaning part

3 washing part

4 drying section

5 splitter plate

6 conveying unit

7 conveyance path

11 detergent spraying device

12-roller brush

15 exhaust port

21 functional water jet device

22 high-pressure two-fluid sprayer

31 air knife

34 clean air introduction unit

35 exhaust port

36 second exhaust port

38 divider plate

41 blower

42 exhaust pipe.

Detailed Description

Next, embodiments of the present invention will be described.

Fig. 1 is a diagram showing an apparatus for manufacturing a glass substrate according to an embodiment of the present invention. In fig. 1, thin arrows indicate the glass substrate conveyance direction, and thick arrows indicate the gas flow.

The manufacturing apparatus 1 for a glass substrate G is a manufacturing apparatus that performs the following steps: a processing step of processing the glass substrate G; a cleaning step of cleaning the processed glass substrate; and a finishing step of attaching a thin film to the dried glass substrate. In particular, the apparatus 1 for manufacturing a glass substrate G according to the present embodiment is used in a cleaning step of cleaning a glass substrate G processed in a processing step, wherein the surface of the glass substrate G is cleaned in the cleaning step, and a cleaning liquid adhering to the surface of the glass substrate G is rinsed after the cleaning step, and the rinsed surface of the glass substrate G is dried. The glass substrate G is a glass substrate for flat panel displays such as liquid crystal displays and plasma displays. The thickness is, for example, 0.05mm to 10mm, preferably 0.2mm to 0.7 mm.

As shown in fig. 1 and 2, the apparatus 1 for manufacturing a glass substrate G includes: a contact cleaning unit 2 disposed on the downstream side in the conveying direction of the processing apparatus; a flushing unit 3 disposed on the downstream side of the contact cleaning unit 2 in the conveying direction; and a drying unit 4 disposed downstream of the flushing unit 3 in the conveying direction. The contact cleaning section 2, the rinsing section 3, and the drying section 4 are partitioned into small chambers by partition plates 5 and 5, respectively, and a conveyance unit 6 for conveying the glass substrate G from upstream to downstream in the conveyance direction is provided in the contact cleaning section 2, the rinsing section 3, and the drying section 4. The conveyance unit 6 conveys the glass substrate G to the contact cleaning unit 2 from a not-shown processing device provided upstream in the conveyance direction of the contact cleaning unit 2 and performing a processing step. The conveyance unit 6 conveys the glass substrate G, which has been subjected to the cleaning step and is carried out from the drying unit 4 to the downstream side in the conveyance direction, to a clean room, not shown, in which the finishing step is performed.

The contact cleaning unit 2 is a part for cleaning the glass substrate G processed in the processing step, and a detergent spraying device 11 for spraying a detergent for cleaning the glass substrate G and a roller brush 12 for physically cleaning the front and back surfaces of the glass substrate G are provided in the contact cleaning unit 2. The detergent spray devices 11 are provided above and below the carrying unit 6. The roller brushes 12 are provided in a plurality of rows above and below the conveyance unit 6. The detergent spray device 11 and the roller brush 12 may be provided only above or below the carrying unit 6. Instead of the detergent for cleaning the glass substrate G, functional water may be used. The means for physically cleaning the front and back surfaces of the glass substrate G is not limited to the roller brush 12, and may be, for example, a disk brush.

The rinsing unit 3 is a part for rinsing the cleaning liquid adhering to the surface of the glass substrate G after the cleaning step, and a rinsing water jet device 21 for jetting rinsing water such as pure water for rinsing the cleaning agent adhering to the glass substrate G and a high-pressure two-fluid shower 22 for physically blowing away (performing a liquid removal step) residues of the cleaning agent adhering to the front and back surfaces of the glass substrate G are provided in the rinsing unit 3. The flush water jet devices 21 are provided in a plurality of rows above and below the conveyance unit 6. The jet direction of the washing water is a direction orthogonal to the surface of the glass substrate G. Further, the high-pressure two-fluid showers 22 are provided above and below the conveyance unit 6. The flushing water spray device 21 and the high-pressure two-fluid sprayer 22 may be provided only on one of the upper and lower sides of the conveyance unit 6. Instead of pure water for rinsing the detergent attached to the glass substrate G, functional water may be used.

The drying section 4 is a portion for drying the surface of the glass substrate G after the rinsing step in the rinsing section 3, and an air knife 31 for spraying gas onto the surface of the glass substrate G in the width direction is provided in the drying section 4. The air knife 31 is disposed to be inclined with respect to the conveying direction. The air knife 31 is directed to eject gas from the downstream side toward the upstream side in the conveying direction. The air knives 31 are provided in a plurality of rows above and below the conveying unit 6. The air knife 31 may be provided only above or only below the conveying unit 6.

The contact cleaning unit 2, the rinsing unit 3, and the drying unit 4 are provided with a conveyance passage 7 so as to connect an upstream side and a downstream side in the conveyance direction. The conveyance unit 6 is disposed in the conveyance path 7. Further, the gas can flow through the contact cleaning unit 2, the rinsing unit 3, and the drying unit 4 via the conveyance passage 7.

The conveyance unit 6 is a device for conveying the glass substrate G from the upstream side to the downstream side, and is composed of a plurality of conveyors. Each conveyor is inclined in the width direction, and the glass substrate G is conveyed in an inclined posture. Here, the width direction is a direction orthogonal to the conveyance direction of the glass substrate G in a plan view. For example, as shown in fig. 3, when the conveyance unit 6 is viewed from the downstream side in the conveyance direction of the glass substrates G, each conveyor is inclined downward from left to right in the width direction. As shown in FIG. 3, the inclination angle θ is preferably 3 to 7 degrees.

Since the downstream side of the conveyance path 7 provided in the drying unit 4 communicates with a dust-free chamber, not shown, which is set to a positive pressure, clean air in the dust-free chamber flows from the downstream side into the drying unit 4, the flushing unit 3, and the contact cleaning unit 2 via the conveyance path 7. In the clean room, a finishing process of attaching a film to the glass substrate G may be performed, or the finishing process of attaching a film may be omitted and the inspection process of the glass substrate G and the packaging process of packaging the glass substrate G may be performed.

As shown in fig. 1 and 3, an exhaust port 15 is provided at a lower portion of the contact cleaning portion 2. The exhaust port 15 is disposed on the upstream side in the conveying direction. As shown in fig. 3, the exhaust port 15 is disposed below the portion of the conveyance unit 6 having a high inclination. For example, when the left side is located at a high position in the width direction, the exhaust port 15 is disposed below the left side in the width direction. Further, an exhaust port 25 is provided at the lower portion of the flushing unit 3. The exhaust port 25 is provided on the upstream side in the conveying direction.

As shown in fig. 1 and 4, the exhaust port 25 is disposed below the portion of the conveyance unit 6 having a high inclination. For example, when the left side is located at a high position in the width direction, the exhaust port 25 is disposed below the left side in the width direction.

The exhaust port 15 and the exhaust port 25 are provided with openable and closable valves 15a and 25 a. The discharge or shutoff of the exhaust gas can be switched by opening and closing the valves 15a and 25 a. The exhaust gas amount may be adjusted by adjusting the opening degrees of the valves 15a and 25 a.

Further, a clean air introducing unit 34 is provided above the drying section 4. The clean air introducing unit 34 is constituted by, for example, a clean fan (clean fan). The clean air introducing unit 34 is a unit that supplies clean air other than the clean air from the clean room to the drying section 4.

The clean air introduction unit 34 is disposed at a side opposite to a side at which the air knife 31 is directed. That is, the clean air introducing unit 34 is provided on the downstream side of the air knife 31 in the conveying direction.

Further, an exhaust port 35 is provided at a lower portion of the drying section 4. The exhaust port 35 is disposed on the upstream side in the conveying direction and on the side directed by the air knife 31. That is, the exhaust port 35 is disposed on the upstream side of the air knife 31 in the conveyance direction of the glass substrate G. The exhaust port 35 is disposed below the portion of the conveyance unit 6 having a low inclination. For example, in the case where the left side is located at a high position in the width direction, the exhaust port 35 is disposed below the right side in the width direction.

In addition, a second air outlet 36 is provided at a lower portion of the drying section 4. The second exhaust port 36 is provided at the side opposite to the side at which the air knife 31 is directed. That is, the exhaust port 36 is provided on the downstream side in the conveying direction.

The exhaust port 35 and the second exhaust port 36 are provided with openable and closable valves 35a and 36 a. The discharge or shutoff of the exhaust gas can be switched by opening and closing the valves 35a and 36 a. The exhaust gas amount may be adjusted by adjusting the opening degrees of the valves 35a and 36 a.

The exhaust unit 8 is constituted by the exhaust port 15, the exhaust port 25, the exhaust port 35, the second exhaust port 36, and the blower 41. The blower 41 sucks and exhausts air from the contact cleaning unit 2, the flushing unit 3, and the drying unit 4 by setting a negative pressure in the exhaust pipe 42 communicating with the exhaust port 15, the exhaust port 25, the exhaust port 35, and the second exhaust port 36. The exhaust unit 8 is configured such that the exhaust unit 8 in the flushing unit 3 has a larger exhaust amount than the exhaust unit 8 in the contact cleaning unit 2, and the exhaust unit 8 in the contact cleaning unit 2 has a larger exhaust amount than the exhaust unit 8 in the drying unit 4. The amount of exhaust gas is adjusted by the valve opening amounts of the valves 15a, 25a, 35a, and 36 a.

A method for producing a glass substrate G using the apparatus 1 for producing a glass substrate G according to the present embodiment will be described.

The glass substrate G is subjected to a process such as an end surface process before entering the contact cleaning section 2. This causes dust such as glass chips to adhere to the front and back surfaces of the glass substrate G. The glass substrate G is conveyed to the contact cleaning unit 2 by the conveying unit 6.

In the contact cleaning portion 2, the front and back surfaces of the glass substrate G are cleaned by spraying a detergent from a detergent spraying device 11, and are physically cleaned by a roller brush 12. The glass substrate G cleaned by the roller brush 12 is adhered with a detergent. Since the carrying unit 6 is inclined in the width direction, the adhered detergent is easily collected downward. The glass substrate G cleaned in the contact cleaning unit 2 is transported to the rinsing unit 3.

In the rinsing section 3, rinsing with pure water is performed. In the rinsing section, pure water is sprayed from a rinsing water spraying device 21 to the front and back surfaces of the glass substrate G, and high-pressure gas and mist are sprayed from a high-pressure two-fluid shower 22 to perform a liquid removing step of the detergent residue adhering to the front and back surfaces of the glass substrate G. Thus, the detergent is washed in the washing section 3, and pure water used for rinsing and spray from the high-pressure two-fluid shower 22 are attached as water droplets. Since the conveyance unit 6 is inclined in the width direction, the adhered pure water and mist are likely to be concentrated downward. The glass substrate G cleaned in the rinsing unit 3 is transported to the drying unit 4.

In the drying section 4, compressed air is blown from the air knife 31 to the front and back surfaces of the glass substrate G in the width direction, thereby drying the glass substrate G so that water droplets are peeled off. Then, the dried glass substrate G is conveyed to a clean room by the conveyance unit 6, and a protective film is attached to the clean room.

As shown in fig. 1, clean air flows from the clean room to the upstream side in the conveying direction. In the drying section 4, clean air is also supplied from the clean air introduction unit 34, and the scattering rate of dust in the drying section 4 is reduced. In addition, a part of the clean air flows into the flushing part 3. A part of the clean air contains a small amount of dust and is discharged by being rectified to the exhaust port 35 and the second exhaust port 36. Since the exhaust port 35 is provided in the direction in which the air knife 31 is directed, more dust is discharged from the exhaust port 35 than from the second exhaust port 36.

In the flushing part 3, the cleaned air is rectified to the exhaust port 25 and discharged. In the rinsing section 3, air and a two-fluid spray are sprayed to the glass substrate G by a high-pressure two-fluid sprayer 22. Since the high-pressure two-fluid shower sprays air taken in from the outside of the rinsing section 3 onto the glass substrate, the flow of air in the rinsing section 3 is rectified by increasing the amount of exhaust gas from the exhaust port 25. A part of the clean air flows into the contact cleaning portion 2. In the contact washing part 2, the cleaned air is rectified to the exhaust port 15 and discharged.

As described above, by providing the exhaust port 15, the exhaust port 25, the exhaust port 35, and the second exhaust port 36 in each of the contact cleaning unit 2, the rinsing unit 3, and the drying unit 4, the air flow in each cell is rectified, and it is possible to prevent the adhesion of minute residual dust to the surface of the glass substrate after cleaning and rinsing. Therefore, a glass substrate G requiring high quality can be manufactured.

As described above, the glass substrate G manufacturing apparatus 1 cleans and dries a glass substrate G processed upstream, and includes: a contact cleaning part 2 for cleaning the glass substrate G; a rinsing unit 3 for performing a rinsing process on the glass substrate cleaned in the contact cleaning unit 2; and a drying section 4 for drying the glass substrate G rinsed in the rinsing section 3, wherein a clean air introducing unit 34 for ejecting clean air is provided in the drying section 4.

With this configuration, since the clean air introducing unit 34 is provided to discharge clean air into the drying section 4, dust is less likely to fly due to turbulence, and is cleaned by the contact cleaning section 2, so that dust can be prevented from adhering to the glass substrate G rinsed in the rinsing section 3 again. Thereby, the glass substrate G having high surface quality can be manufactured.

Further, an exhaust unit 8 is provided in the contact cleaning unit 2, the rinsing unit 3, and the drying unit 4.

With this configuration, by providing the exhaust unit 8 in the contact cleaning unit 2, the rinsing unit 3, and the drying unit 4, the air is rectified, so that dust is less likely to fly upward, and the dust can be prevented from adhering to the glass substrate G. Thereby, the glass substrate G having high surface quality can be manufactured.

Further, the drying section 4 is provided with an air knife 31, and an exhaust port 35 of the exhaust unit 8 is disposed on the side directed by the air knife 31.

With this configuration, since the exhaust port 35 is provided on the side directed by the air knife 31, the air ejected from the air knife 31 easily flows into the exhaust port 35, the air is rectified, the dust is not easily blown, and the dust can be prevented from adhering to the glass substrate G. Thereby, the glass substrate G having high surface quality can be manufactured.

The conveying unit 6 for conveying the glass substrate G is inclined in the width direction orthogonal to the conveying direction of the glass substrate G, and the exhaust port 15 and the exhaust port 16 are disposed below the inclined upper side of the conveying unit 6 in the contact cleaning unit 2 and the flushing unit 3.

With this configuration, since the glass substrate G is inclined in the width direction orthogonal to the conveyance direction, the cleaning liquid and the rinsing liquid are likely to be concentrated on the inclined lower side. Further, by providing the exhaust port 15 and the exhaust port 16 on the obliquely upper side, water droplets and the like are less likely to enter the exhaust port 15 and the exhaust port 16, and only dust can be efficiently collected in the exhaust port. Thereby, the glass substrate G having high surface quality can be manufactured.

The second exhaust port 36 of the exhaust unit 8 is disposed downstream of the air knife 31 in the conveyance direction of the glass substrate G.

By configuring in this manner, the turbulence generated on the side opposite to the direction in which the air knife 31 is directed can be rectified.

The clean air introducing unit 34 is disposed on the downstream side in the conveyance direction of the glass substrate G.

By configuring in this manner, the turbulence generated on the side opposite to the direction in which the air knife 31 is directed can be rectified.

Further, as for the exhaust amount of the exhaust unit 8, the exhaust amount of the exhaust unit 8 in the flushing portion 3 is larger than the exhaust amount of the exhaust unit 8 in the contact cleaning portion 2, and the exhaust amount of the exhaust unit 8 in the contact cleaning portion 2 is larger than the exhaust amount of the exhaust unit 8 in the drying portion 4.

With this configuration, the drying unit 4 can be adjusted to the maximum positive pressure state, and the amount of air to be discharged is the largest in the flushing unit 3 that needs to discharge two fluids, which are the positive pressure air flow flowing in from the drying unit 4 and the high pressure air used for rinsing.

In another embodiment, as shown in fig. 5, the contact cleaning portion 2 is divided into sections by partition plates 18. An exhaust port 45 is provided in each section. The exhaust port 45 is disposed below the portion of the conveyance unit 6 having a high inclination in each section. The flushing part 3 is divided into sections by partition plates 28. An exhaust port 55 is provided in each section. The exhaust port 55 is disposed below the portion of the conveyance unit 6 having a high inclination in each section.

With this configuration, the partition of the segment makes it difficult for the flying dust to move, and the dust can be prevented from adhering to the glass substrate G. Thereby, the glass substrate G having high surface quality can be manufactured.

In another embodiment, as shown in fig. 6, a partition plate 38 is provided above the air knife 31 of the drying section 4. The partition plate 38 is disposed corresponding to the air knife 31. Thereby, the inside of the drying section 4 is divided into small sections.

With this configuration, in the drying unit 4, the dust flying in the upstream side in the conveying direction due to the airflow from the dust-free chamber can be prevented from moving to the downstream side, and the dust can be prevented from adhering to the glass substrate G.

Industrial applicability of the invention

The utility model discloses can be used to glass substrate's manufacturing installation's technique.

Claims (9)

1. A glass substrate manufacturing apparatus for cleaning and drying a glass substrate processed upstream,

the glass substrate manufacturing apparatus is characterized by comprising:

a contact cleaning unit for cleaning the glass substrate;

a rinsing unit for performing a rinsing process with respect to the glass substrate cleaned by the contact cleaning unit; and

a drying section for drying the glass substrate rinsed in the rinsing section,

the drying part is provided with a clean air introducing unit for spraying clean air.

2. The glass substrate manufacturing apparatus according to claim 1,

exhaust units are provided in the contact cleaning unit, the rinsing unit, and the drying unit.

3. The glass substrate manufacturing apparatus according to claim 2,

an air knife is arranged at the drying part,

the exhaust port of the exhaust unit is disposed at a side to which the air knife is directed.

4. The glass substrate manufacturing apparatus according to claim 2,

a conveying unit for conveying the glass substrate is inclined in a width direction orthogonal to the conveying direction of the glass substrate,

in the contact cleaning unit and the flushing unit, the exhaust port of the exhaust unit is disposed below an inclined upper side of the conveyance unit.

5. The glass substrate manufacturing apparatus according to claim 2,

an air knife is arranged at the drying part,

the exhaust port of the exhaust unit is further disposed downstream of the air knife in the conveyance direction of the glass substrate.

6. The glass substrate manufacturing apparatus according to claim 1,

the clean air introduction unit is disposed on a downstream side in a conveyance direction of the glass substrate.

7. The glass substrate manufacturing apparatus according to claim 2,

the exhaust unit in the flushing portion has a larger exhaust amount than the exhaust unit in the contact cleaning portion, and the exhaust unit in the contact cleaning portion has a larger exhaust amount than the exhaust unit in the drying portion.

8. The glass substrate manufacturing apparatus according to claim 2,

the contact cleaning portion and the flushing portion are divided into sections, and an exhaust unit is provided for each of the sections.

9. The glass substrate manufacturing apparatus according to claim 3,

the air knife is installed on a partition plate dividing the inside of the drying part.

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