TWI336391B - - Google Patents
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- Publication number
- TWI336391B TWI336391B TW96135903A TW96135903A TWI336391B TW I336391 B TWI336391 B TW I336391B TW 96135903 A TW96135903 A TW 96135903A TW 96135903 A TW96135903 A TW 96135903A TW I336391 B TWI336391 B TW I336391B
- Authority
- TW
- Taiwan
- Prior art keywords
- angle
- interferometer
- sensitivity
- tilt angle
- tilt
- Prior art date
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006285707A JP2008102051A (ja) | 2006-10-20 | 2006-10-20 | 干渉計角度感度較正方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200819706A TW200819706A (en) | 2008-05-01 |
TWI336391B true TWI336391B (ko) | 2011-01-21 |
Family
ID=39334235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96135903A TW200819706A (en) | 2006-10-20 | 2007-09-27 | Interferometer angle sensitivity calibration method |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2008102051A (ko) |
CN (1) | CN101165454A (ko) |
TW (1) | TW200819706A (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5305281B2 (ja) * | 2007-12-11 | 2013-10-02 | 株式会社オプセル | オートコリメータ |
JP5208681B2 (ja) * | 2008-11-06 | 2013-06-12 | 株式会社ミツトヨ | 斜入射干渉計における測定感度の校正方法 |
JP2013117395A (ja) * | 2011-12-01 | 2013-06-13 | Panasonic Corp | 傾斜測定装置およびその方法 |
DE102014209040B4 (de) * | 2014-05-13 | 2019-02-14 | Carl Mahr Holding Gmbh | Verfahren zur Kalibrierung eines Messgerätes |
CN110631510B (zh) * | 2019-09-12 | 2020-07-31 | 中国科学院西安光学精密机械研究所 | 一种基于迈克尔逊结构的高精度测角装置及测角方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5719639A (en) * | 1980-07-09 | 1982-02-01 | Nippon Telegr & Teleph Corp <Ntt> | Measuring device for end surface angle of optical fiber |
JPS5875011A (ja) * | 1981-10-30 | 1983-05-06 | Hitachi Ltd | 平行度の光学的測定装置 |
JPS63168529A (ja) * | 1986-12-29 | 1988-07-12 | Shimadzu Corp | 光フアイバコネクタ検査法 |
JP2990309B2 (ja) * | 1991-06-10 | 1999-12-13 | コニカ株式会社 | 差動型干渉測長計の補正係数測定用光学部材 |
JP2001289627A (ja) * | 2000-04-11 | 2001-10-19 | Sumitomo Metal Ind Ltd | 厚み測定装置 |
JP2002277218A (ja) * | 2001-03-22 | 2002-09-25 | Sharp Corp | 膜厚測定装置およびその方法 |
JP3863408B2 (ja) * | 2001-11-08 | 2006-12-27 | 富士通株式会社 | 磁気ヘッドスライダの検査装置 |
JP2004037167A (ja) * | 2002-07-01 | 2004-02-05 | Fuji Photo Optical Co Ltd | 被検体の傾き測定方法 |
JP4093564B2 (ja) * | 2003-03-20 | 2008-06-04 | フジノン株式会社 | クランプ装置の傾き調整方法 |
JP4786923B2 (ja) * | 2005-03-31 | 2011-10-05 | 富士フイルム株式会社 | 縞計測装置の変換係数較正方法および装置ならびに該変換係数較正装置を備えた縞計測装置 |
-
2006
- 2006-10-20 JP JP2006285707A patent/JP2008102051A/ja active Pending
-
2007
- 2007-09-13 CN CNA2007101547294A patent/CN101165454A/zh active Pending
- 2007-09-27 TW TW96135903A patent/TW200819706A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2008102051A (ja) | 2008-05-01 |
TW200819706A (en) | 2008-05-01 |
CN101165454A (zh) | 2008-04-23 |
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Legal Events
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GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |