TWI318545B - Atmospheric plasma generating apparatus with electrode structure for preventing unnecessary discharge - Google Patents

Atmospheric plasma generating apparatus with electrode structure for preventing unnecessary discharge

Info

Publication number
TWI318545B
TWI318545B TW095125144A TW95125144A TWI318545B TW I318545 B TWI318545 B TW I318545B TW 095125144 A TW095125144 A TW 095125144A TW 95125144 A TW95125144 A TW 95125144A TW I318545 B TWI318545 B TW I318545B
Authority
TW
Taiwan
Prior art keywords
electrode structure
generating apparatus
plasma generating
atmospheric plasma
preventing unnecessary
Prior art date
Application number
TW095125144A
Other languages
English (en)
Other versions
TW200719772A (en
Inventor
Jae Hwack Pyo
Bong Chul Jang
Yun Hwan Kim
Jae Weon Kim
Sang Ro Lee
Original Assignee
Se Plasma Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Se Plasma Inc filed Critical Se Plasma Inc
Publication of TW200719772A publication Critical patent/TW200719772A/zh
Application granted granted Critical
Publication of TWI318545B publication Critical patent/TWI318545B/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW095125144A 2005-08-22 2006-07-10 Atmospheric plasma generating apparatus with electrode structure for preventing unnecessary discharge TWI318545B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050076828A KR100749406B1 (ko) 2005-08-22 2005-08-22 불용방전 방지를 위한 전극 구조를 갖는 대기압 플라즈마발생장치

Publications (2)

Publication Number Publication Date
TW200719772A TW200719772A (en) 2007-05-16
TWI318545B true TWI318545B (en) 2009-12-11

Family

ID=37778875

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095125144A TWI318545B (en) 2005-08-22 2006-07-10 Atmospheric plasma generating apparatus with electrode structure for preventing unnecessary discharge

Country Status (4)

Country Link
JP (1) JP4705891B2 (zh)
KR (1) KR100749406B1 (zh)
CN (1) CN1921250B (zh)
TW (1) TWI318545B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296526A (ja) * 2007-06-04 2008-12-11 Tohoku Ricoh Co Ltd 基材搬送システム及び印刷装置
KR101103349B1 (ko) * 2009-10-22 2012-01-05 (주)에스이피 Ｔｆｔ 기판의 패드영역 개방을 위한 대기압 플라즈마 에칭 장치 및 이를 이용한 대기압 플라즈마 에칭 방법
JP5940239B2 (ja) * 2009-11-02 2016-06-29 株式会社イー・スクエア プラズマ表面処理装置およびその製造方法
WO2011093497A1 (ja) * 2010-01-31 2011-08-04 国立大学法人九州大学 プラズマ酸化還元方法及びそれを用いた動植物成長促進方法、並びに動植物成長促進方法に用いるプラズマ生成装置
JP6083093B2 (ja) * 2011-11-11 2017-02-22 国立大学法人佐賀大学 プラズマ生成装置
KR101845767B1 (ko) 2016-09-30 2018-04-05 주식회사 에이아이코리아 플라즈마 장치용 전극 및 이의 제조방법
JP7159694B2 (ja) * 2018-08-28 2022-10-25 日本電産株式会社 プラズマ処理装置
KR102014892B1 (ko) * 2018-09-20 2019-08-27 주식회사 경동냉열산업 수처리장치 등에 사용되는 플라즈마 발생장치
WO2021171462A1 (ja) * 2020-02-27 2021-09-02 東芝三菱電機産業システム株式会社 活性ガス生成装置
JP7240362B2 (ja) * 2020-08-26 2023-03-15 川田工業株式会社 誘電体バリア放電リアクター

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4079260A (en) * 1976-07-20 1978-03-14 Andrei Vladimirovich Dmitriev Ozone generator
JPS6424835A (en) * 1987-07-22 1989-01-26 Sankyo Dengyo Kk Discharge process and apparatus for modifying surface of solid
JP3930625B2 (ja) * 1997-10-31 2007-06-13 芝浦メカトロニクス株式会社 プラズマ処理装置
CN2312518Y (zh) * 1997-11-28 1999-03-31 复旦大学 低温等离子体放电管
KR100634654B1 (ko) * 1998-08-03 2006-10-16 동경 엘렉트론 주식회사 Ｅｓｒｆ 챔버 냉각시스템 및 처리
JP3982153B2 (ja) * 1999-07-27 2007-09-26 松下電工株式会社 プラズマ処理装置及びプラズマ処理方法
KR100499917B1 (ko) * 2001-12-04 2005-07-25 이동훈 수중방전/유중방전 겸용 플라즈마 반응장치
JP4046224B2 (ja) * 2003-02-14 2008-02-13 日鉄鉱業株式会社 気体励起用の電極
US20070163499A1 (en) * 2003-05-05 2007-07-19 Australian Wool Innovation Limited Plasma treatment apparatus and method
JP4381963B2 (ja) * 2003-11-19 2009-12-09 パナソニック株式会社 プラズマ処理装置
KR100481492B1 (ko) 2004-04-22 2005-04-07 주식회사 피에스엠 미세아크 방지형 플라즈마 형성장치 및 형성방법

Also Published As

Publication number Publication date
CN1921250A (zh) 2007-02-28
TW200719772A (en) 2007-05-16
KR100749406B1 (ko) 2007-08-14
KR20070022527A (ko) 2007-02-27
JP2007059385A (ja) 2007-03-08
CN1921250B (zh) 2010-05-12
JP4705891B2 (ja) 2011-06-22

Similar Documents

Publication Publication Date Title
TWI318545B (en) Atmospheric plasma generating apparatus with electrode structure for preventing unnecessary discharge
SG122049A1 (en) Plasma spray apparatus
PL1732368T3 (pl) Plazmotron z systemami wymiennych elektrod
GB2430253B (en) Plasma torch spectrometer
PL1864313T3 (pl) Próżniowy generator plazmowy
GB2413692B (en) Plasma display apparatus
PL1599075T3 (pl) Palnik łukowo-plazmowy
EP2137796A4 (en) EXTENSIBLE ELECTRODE FOR GAS LASER
EP1874478A4 (en) COMPOSITE DISCHARGE ELECTRODE
EP1734360A4 (en) PLASMA GENERATION DEVICE
PL1848473T3 (pl) Urządzenie - koncentrator osocza
EP1870974A4 (en) PLASMA DEVICE OF SILENT DISCHARGE TYPE
EP2068602A4 (en) PLASMA GENERATOR APPARATUS OF EXTENDED RANGE
AP2007004106A0 (en) Anode support apparatus
EP1791172A4 (en) PLASMA TREATMENT APPARATUS
EP1729551A4 (en) PLASMA PRODUCTION EQUIPMENT
EP2149902A4 (en) ARC DISCHARGE DEVICE
EP2006860A4 (en) ELECTRON PRODUCTION DEVICE
EP2174707A4 (en) ELECTRODE FOR GENERATING PLASMA
TWI319296B (en) Apparatus for converting gas using gliding plasma
EP1976345A4 (en) ELECTRODE DEVICE FOR PLASMA DISCHARGE
HK1136738A1 (zh) 用於脈衝等離子體生成的陰極組件和方法
GB0302265D0 (en) Plasma generating electrode assembly
GB2455687B (en) Electrode for cold cathode tube and cold cathode tube using the same
EP1835789A4 (en) PLASMA GENERATING ELECTRODE AND PLASMA REACTOR

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees