PL1864313T3 - Próżniowy generator plazmowy - Google Patents
Próżniowy generator plazmowyInfo
- Publication number
- PL1864313T3 PL1864313T3 PL06705364T PL06705364T PL1864313T3 PL 1864313 T3 PL1864313 T3 PL 1864313T3 PL 06705364 T PL06705364 T PL 06705364T PL 06705364 T PL06705364 T PL 06705364T PL 1864313 T3 PL1864313 T3 PL 1864313T3
- Authority
- PL
- Poland
- Prior art keywords
- plasma generator
- vacuum plasma
- vacuum
- generator
- plasma
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/06—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
- H02M7/10—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode arranged for operation in series, e.g. for multiplication of voltage
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH5182005 | 2005-03-24 | ||
| CH12902005 | 2005-08-03 | ||
| PCT/CH2006/000124 WO2006099759A2 (de) | 2005-03-24 | 2006-03-01 | Vakuumplasmagenerator |
| EP06705364A EP1864313B1 (de) | 2005-03-24 | 2006-03-01 | Vakuumplasmagenerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL1864313T3 true PL1864313T3 (pl) | 2013-05-31 |
Family
ID=37024184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL06705364T PL1864313T3 (pl) | 2005-03-24 | 2006-03-01 | Próżniowy generator plazmowy |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7455755B2 (pl) |
| EP (1) | EP1864313B1 (pl) |
| ES (1) | ES2401289T3 (pl) |
| PL (1) | PL1864313T3 (pl) |
| PT (1) | PT1864313E (pl) |
| WO (1) | WO2006099759A2 (pl) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003079397A1 (de) * | 2002-03-15 | 2003-09-25 | Unaxis Balzers Ag | Vakuumplasmagenerator |
| DE102007021386A1 (de) * | 2007-05-04 | 2008-11-06 | Christof-Herbert Diener | Kurztaktniederdruckplasmaanlage |
| US7697253B1 (en) * | 2007-06-01 | 2010-04-13 | The Electric Controller and Manufacturing Company, LLC | Method and apparatus for controlling a lifting magnet of a materials handling machine |
| US8000078B2 (en) * | 2007-12-19 | 2011-08-16 | The Electric Controller & Manufacturing Company, Llc | Method and apparatus for controlling a lifting magnet supplied with an AC source |
| US8004814B2 (en) * | 2007-12-19 | 2011-08-23 | The Electric Controller & Manufacturing Company, Llc | Method and apparatus for controlling a lifting magnet supplied with an AC source |
| FR2927483A1 (fr) * | 2008-02-12 | 2009-08-14 | Renault Sas | Dispositif et procede d'alimentation pour reacteur plasma pour vehicule automobile |
| SE531797C2 (sv) * | 2008-04-07 | 2009-08-04 | Paer H Henriksson | Arrangemang och förfarande för oskadliggörande av mikroorganismer med ett elektriskt fält samt användningar av arrangemanget |
| JP5124344B2 (ja) * | 2008-05-26 | 2013-01-23 | 株式会社アルバック | バイポーラパルス電源及び複数のバイポーラパルス電源からなる電源装置並びに出力方法 |
| JP5429771B2 (ja) * | 2008-05-26 | 2014-02-26 | 株式会社アルバック | スパッタリング方法 |
| EP2369031B1 (de) | 2010-03-18 | 2016-05-04 | Oerlikon Trading AG, Trübbach | Beschichtung auf nial2o4 basis in spinellstruktur |
| NL2008208C2 (en) | 2012-01-31 | 2013-08-01 | Univ Delft Tech | Spark ablation device. |
| EP2891388B1 (en) * | 2012-08-31 | 2021-07-21 | AES Global Holdings, Pte. Ltd. | Arc management with voltage reversal and improved recovery |
| IN2014KN03106A (pl) * | 2012-09-07 | 2015-05-08 | Kyosan Electric Mfg | |
| US9655221B2 (en) | 2013-08-19 | 2017-05-16 | Eagle Harbor Technologies, Inc. | High frequency, repetitive, compact toroid-generation for radiation production |
| US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
| US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
| US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US9960763B2 (en) | 2013-11-14 | 2018-05-01 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser |
| US10790816B2 (en) | 2014-01-27 | 2020-09-29 | Eagle Harbor Technologies, Inc. | Solid-state replacement for tube-based modulators |
| US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
| WO2015131199A1 (en) * | 2014-02-28 | 2015-09-03 | Eagle Harbor Technologies, Inc. | Galvanically isolated output variable pulse generator disclosure |
| CN106460151B (zh) | 2014-06-02 | 2018-11-13 | 三菱日立工具技术株式会社 | 硬质皮膜、硬质皮膜被覆部件、它们的制造方法、以及用于制造硬质皮膜的靶 |
| US11542927B2 (en) | 2015-05-04 | 2023-01-03 | Eagle Harbor Technologies, Inc. | Low pressure dielectric barrier discharge plasma thruster |
| GB2548209B (en) * | 2016-03-07 | 2018-03-21 | Intelligent Growth Solutions Ltd | Controllable power and lighting system |
| US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
| US10903047B2 (en) | 2018-07-27 | 2021-01-26 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| EP4266579A3 (en) | 2017-02-07 | 2023-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
| JP6902167B2 (ja) | 2017-08-25 | 2021-07-14 | イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. | ナノ秒パルスを使用する任意波形の発生 |
| DE102018107824B4 (de) * | 2018-04-03 | 2025-11-20 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Elektrische Ladevorrichtung |
| US11810761B2 (en) | 2018-07-27 | 2023-11-07 | Eagle Harbor Technologies, Inc. | Nanosecond pulser ADC system |
| US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
| US11222767B2 (en) | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| US10607814B2 (en) | 2018-08-10 | 2020-03-31 | Eagle Harbor Technologies, Inc. | High voltage switch with isolated power |
| WO2020033931A1 (en) | 2018-08-10 | 2020-02-13 | Eagle Harbor Technologies, Inc. | Plasma sheath control for rf plasma reactors |
| US12456604B2 (en) | 2019-12-24 | 2025-10-28 | Eagle Harbor Technologies, Inc. | Nanosecond pulser RF isolation for plasma systems |
| WO2020146436A1 (en) | 2019-01-08 | 2020-07-16 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
| TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
| JP7285377B2 (ja) | 2019-12-24 | 2023-06-01 | イーグル ハーバー テクノロジーズ，インク． | プラズマシステム用ナノ秒パルサｒｆ絶縁 |
| US11967484B2 (en) | 2020-07-09 | 2024-04-23 | Eagle Harbor Technologies, Inc. | Ion current droop compensation |
| US11824542B1 (en) | 2022-06-29 | 2023-11-21 | Eagle Harbor Technologies, Inc. | Bipolar high voltage pulser |
| US12354832B2 (en) | 2022-09-29 | 2025-07-08 | Eagle Harbor Technologies, Inc. | High voltage plasma control |
| CN116191906B (zh) * | 2023-03-07 | 2023-11-07 | 东莞市晟鼎精密仪器有限公司 | 一种双脉冲等离子电源智能监控系统及方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3700633C2 (de) * | 1987-01-12 | 1997-02-20 | Reinar Dr Gruen | Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma |
| DE9109503U1 (de) * | 1991-07-31 | 1991-10-17 | Magtron Magneto Elektronische Geraete Gmbh, 7583 Ottersweier | Schaltungsanordnung für ein Stromversorgungsgerät für Geräte und Anlagen der Plasma- und Oberflächentechnik |
| US5461297A (en) * | 1993-05-24 | 1995-10-24 | Analog Modules, Inc. | Series-parallel switchable capacitor charging system |
| SE9704607D0 (sv) * | 1997-12-09 | 1997-12-09 | Chemfilt R & D Ab | A method and apparatus for magnetically enhanced sputtering |
| US5993613A (en) * | 1997-11-07 | 1999-11-30 | Sierra Applied Sciences, Inc. | Method and apparatus for periodic polarity reversal during an active state |
| US6256214B1 (en) * | 1999-03-11 | 2001-07-03 | Ericsson Inc. | General self-driven synchronous rectification scheme for synchronous rectifiers having a floating gate |
| DE60141822D1 (de) * | 2001-07-16 | 2010-05-27 | Cpautomation S A | Eine elektrische Stromversorgung die besonders für Gleichstromplasmabehandlung anwendbar ist |
| EP1434336A4 (en) * | 2001-09-28 | 2008-10-08 | Shibaura Mechatronics Corp | POWER SUPPLY FOR SPUTTER |
| WO2003079397A1 (de) * | 2002-03-15 | 2003-09-25 | Unaxis Balzers Ag | Vakuumplasmagenerator |
-
2006
- 2006-03-01 PL PL06705364T patent/PL1864313T3/pl unknown
- 2006-03-01 PT PT67053645T patent/PT1864313E/pt unknown
- 2006-03-01 WO PCT/CH2006/000124 patent/WO2006099759A2/de not_active Ceased
- 2006-03-01 EP EP06705364A patent/EP1864313B1/de active Active
- 2006-03-01 ES ES06705364T patent/ES2401289T3/es active Active
- 2006-03-20 US US11/817,443 patent/US7455755B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006099759A2 (de) | 2006-09-28 |
| WO2006099759A3 (de) | 2008-04-10 |
| US7455755B2 (en) | 2008-11-25 |
| US20080143260A1 (en) | 2008-06-19 |
| EP1864313B1 (de) | 2012-12-19 |
| ES2401289T3 (es) | 2013-04-18 |
| PT1864313E (pt) | 2013-02-21 |
| EP1864313A2 (de) | 2007-12-12 |
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