TWI278778B - Apparatus for testing semiconductor devices and method for use therewith - Google Patents
Apparatus for testing semiconductor devices and method for use therewith Download PDFInfo
- Publication number
- TWI278778B TWI278778B TW092112502A TW92112502A TWI278778B TW I278778 B TWI278778 B TW I278778B TW 092112502 A TW092112502 A TW 092112502A TW 92112502 A TW92112502 A TW 92112502A TW I278778 B TWI278778 B TW I278778B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor devices
- test
- apg
- dut
- coupled
- Prior art date
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 122
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000003860 storage Methods 0.000 claims description 37
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 3
- 238000010998 test method Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 101100117775 Arabidopsis thaliana DUT gene Proteins 0.000 description 7
- 101150091805 DUT1 gene Proteins 0.000 description 7
- 101150028385 ATG2 gene Proteins 0.000 description 6
- 101100536419 Arabidopsis thaliana TATC gene Proteins 0.000 description 6
- 102100028765 Heat shock 70 kDa protein 4 Human genes 0.000 description 6
- 101150054249 Hspa4 gene Proteins 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 102100031584 Cell division cycle-associated 7-like protein Human genes 0.000 description 4
- 101000777638 Homo sapiens Cell division cycle-associated 7-like protein Proteins 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 101100444142 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) dut-1 gene Proteins 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101100380548 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) apg-2 gene Proteins 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000008672 reprogramming Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/31813—Test pattern generators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C29/56004—Pattern generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
- G11C29/26—Accessing multiple arrays
- G11C2029/2602—Concurrent test
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C2029/5602—Interface to device under test
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37848802P | 2002-05-06 | 2002-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200401227A TW200401227A (en) | 2004-01-16 |
| TWI278778B true TWI278778B (en) | 2007-04-11 |
Family
ID=29401608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092112502A TWI278778B (en) | 2002-05-06 | 2003-05-06 | Apparatus for testing semiconductor devices and method for use therewith |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7472326B2 (enExample) |
| JP (1) | JP2005528596A (enExample) |
| KR (1) | KR101021375B1 (enExample) |
| TW (1) | TWI278778B (enExample) |
| WO (1) | WO2003093845A2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7913002B2 (en) * | 2004-08-20 | 2011-03-22 | Advantest Corporation | Test apparatus, configuration method, and device interface |
| JP2006179144A (ja) * | 2004-12-24 | 2006-07-06 | Fujitsu Ltd | Ｉｃの高速試験方法及び装置 |
| US7765080B2 (en) * | 2005-05-19 | 2010-07-27 | Nextest Systems Corporation | System for testing smart cards and method for same |
| JP4915779B2 (ja) * | 2006-06-02 | 2012-04-11 | 株式会社メガチップス | 装置間の接続方式および接続装置 |
| KR20090036144A (ko) * | 2006-08-14 | 2009-04-13 | 가부시키가이샤 어드밴티스트 | 시험 장치 및 시험 방법 |
| TWI436077B (zh) * | 2010-11-24 | 2014-05-01 | Etron Technology Inc | 增加晶片預燒掃描效率的方法 |
| US9514016B2 (en) * | 2011-02-01 | 2016-12-06 | Echostar Technologies L.L.C. | Apparatus systems and methods for facilitating testing of a plurality of electronic devices |
| CN104425269B (zh) * | 2013-08-27 | 2017-07-14 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其形成方法 |
| US10242750B2 (en) * | 2017-05-31 | 2019-03-26 | Sandisk Technologies Llc | High-speed data path testing techniques for non-volatile memory |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR900002577B1 (ko) * | 1985-01-31 | 1990-04-20 | 가부시기가아샤 히다찌세이사꾸쇼 | 테스트 패턴 제너레이터(발생장치) |
| JPH0750159B2 (ja) * | 1985-10-11 | 1995-05-31 | 株式会社日立製作所 | テストパタ−ン発生装置 |
| EP0255118B1 (en) * | 1986-07-30 | 1999-06-09 | Hitachi, Ltd. | Pattern generator |
| JPH0754345B2 (ja) * | 1986-07-30 | 1995-06-07 | 株式会社日立製作所 | Ｉｃ試験装置 |
| JP2514223Y2 (ja) * | 1989-11-07 | 1996-10-16 | ミサワホーム株式会社 | 引違い障子を納めたサッシ |
| US5349587A (en) * | 1992-03-26 | 1994-09-20 | Northern Telecom Limited | Multiple clock rate test apparatus for testing digital systems |
| JPH07198798A (ja) * | 1993-12-28 | 1995-08-01 | Hitachi Ltd | アルゴリズミックパターン発生器 |
| US5572666A (en) * | 1995-03-28 | 1996-11-05 | Sun Microsystems, Inc. | System and method for generating pseudo-random instructions for design verification |
| KR100339865B1 (ko) * | 1995-12-27 | 2002-09-19 | 듀아키시즈 가부시키가이샤 | 감시제어장치 |
| US5883905A (en) * | 1997-02-18 | 1999-03-16 | Schlumberger Technologies, Inc. | Pattern generator with extended register programming |
| JPH10319095A (ja) * | 1997-05-22 | 1998-12-04 | Mitsubishi Electric Corp | 半導体テスト装置 |
| US6118304A (en) | 1997-11-20 | 2000-09-12 | Intrinsity, Inc. | Method and apparatus for logic synchronization |
| US6246250B1 (en) | 1998-05-11 | 2001-06-12 | Micron Technology, Inc. | Probe card having on-board multiplex circuitry for expanding tester resources |
| JP2000276367A (ja) | 1999-03-23 | 2000-10-06 | Advantest Corp | データ書込装置、データ書込方法、及び試験装置 |
| US6363510B1 (en) * | 1999-08-31 | 2002-03-26 | Unisys Corporation | Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits |
| US6571365B1 (en) * | 1999-11-03 | 2003-05-27 | Unisys Corporation | Initial stage of a multi-stage algorithmic pattern generator for testing IC chips |
| US6314034B1 (en) * | 2000-04-14 | 2001-11-06 | Advantest Corp. | Application specific event based semiconductor memory test system |
| US6754868B2 (en) * | 2001-06-29 | 2004-06-22 | Nextest Systems Corporation | Semiconductor test system having double data rate pin scrambling |
| US6631340B2 (en) * | 2001-10-15 | 2003-10-07 | Advantest Corp. | Application specific event based semiconductor memory test system |
-
2003
- 2003-05-06 TW TW092112502A patent/TWI278778B/zh not_active IP Right Cessation
- 2003-05-06 US US10/431,043 patent/US7472326B2/en not_active Expired - Lifetime
- 2003-05-06 KR KR1020047017833A patent/KR101021375B1/ko not_active Expired - Lifetime
- 2003-05-06 JP JP2004502010A patent/JP2005528596A/ja active Pending
- 2003-05-06 WO PCT/US2003/014328 patent/WO2003093845A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005528596A (ja) | 2005-09-22 |
| US20040153920A1 (en) | 2004-08-05 |
| KR20050003411A (ko) | 2005-01-10 |
| KR101021375B1 (ko) | 2011-03-14 |
| WO2003093845A2 (en) | 2003-11-13 |
| TW200401227A (en) | 2004-01-16 |
| WO2003093845A3 (en) | 2005-05-26 |
| US7472326B2 (en) | 2008-12-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |