WO2003093845A2 - Semiconductor test system having multitasking algorithmic pattern generator - Google Patents
Semiconductor test system having multitasking algorithmic pattern generator Download PDFInfo
- Publication number
- WO2003093845A2 WO2003093845A2 PCT/US2003/014328 US0314328W WO03093845A2 WO 2003093845 A2 WO2003093845 A2 WO 2003093845A2 US 0314328 W US0314328 W US 0314328W WO 03093845 A2 WO03093845 A2 WO 03093845A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor devices
- apg
- coupled
- multitasking
- dut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/31813—Test pattern generators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C29/56004—Pattern generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
- G11C29/26—Accessing multiple arrays
- G11C2029/2602—Concurrent test
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C2029/5602—Interface to device under test
Definitions
- Each PE channel 251 typically includes a PE driver (not shown) capable of coupling signals to a pin 231 of DUT 203, a comparator (not shown) for comparing an.-output signal with an expected output signal, and an error logic circuit (not shown) for coupling results of the comparison back through the multitasking APG 201 to an error catch RAM 260.
- PE driver and comparator are not active in the same PE channel 251 at the same time, since pin 231 is either receiving data or control signals or transmitting a result at a given time.
- the Address Generator 220 being driven by MicroRAM 204.
- the output of the Address Generator 220 drives, an Address Topological Scrambler 222 and a Data Generator 230.
- the Address Topological Scrambler 222 is typically Random Access Memory that provides a topologically true data pattern to the DUT's internal array (not shown) after passing through the DUT's address decoders (not shown), which often scramble the address applied to pins 231 of the DUT 203.
- test site's timing system or T/Fs 250 is executing the DUT cycle just loaded, the multitasking APG 201 continues on to the other DUT sites to do the same thing.
- the multitasking capability does not cause any dead cycles in pattern execution. Patterns execute just like they would on a conventional APG. Users write all test patterns to the multitasking APG 201 from the host computer (not shown) as they would with a conventional APG and they do not have to manage any of the multitasking hardware: The only thing the user needs to be cognizant of is the number of DUTs 203 to be tested or time domains into which the multitasking APG •
- DUTs 203 in a particular time domain have been programmed and adjusting the period or frequency with which the test pattern is coupled to DUTs in the remaining time domains, thereby maximizing the efficiency of tester 200.
- the DUTs 203 or time -domains need not be serviced in a regular, or sequential staggered order, but can selecting any of the storage elements 272, 273, 274, to service the DUTs or time domains in any order required based on priorities. For example, where a plurality of DUTs are tested in four time domains having or requiring in upcoming cycles, cycle times of 80nSec, 100 nSec, 80 nSec and 200nSec, the DUT
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020047017833A KR101021375B1 (ko) | 2002-05-06 | 2003-05-06 | 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 |
| JP2004502010A JP2005528596A (ja) | 2002-05-06 | 2003-05-06 | マルチタスク・アルゴリズミック・パターン・ジェネレータを有する半導体試験システム |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37848802P | 2002-05-06 | 2002-05-06 | |
| US60/378,488 | 2002-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2003093845A2 true WO2003093845A2 (en) | 2003-11-13 |
| WO2003093845A3 WO2003093845A3 (en) | 2005-05-26 |
Family
ID=29401608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2003/014328 Ceased WO2003093845A2 (en) | 2002-05-06 | 2003-05-06 | Semiconductor test system having multitasking algorithmic pattern generator |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7472326B2 (enExample) |
| JP (1) | JP2005528596A (enExample) |
| KR (1) | KR101021375B1 (enExample) |
| TW (1) | TWI278778B (enExample) |
| WO (1) | WO2003093845A2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006179144A (ja) * | 2004-12-24 | 2006-07-06 | Fujitsu Ltd | Icの高速試験方法及び装置 |
| JP2008546063A (ja) * | 2005-05-19 | 2008-12-18 | ネクステスト システムズ コーポレイション | スマートカードを試験するためのシステム及びその方法 |
| CN104425269A (zh) * | 2013-08-27 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其形成方法 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7913002B2 (en) * | 2004-08-20 | 2011-03-22 | Advantest Corporation | Test apparatus, configuration method, and device interface |
| JP4915779B2 (ja) * | 2006-06-02 | 2012-04-11 | 株式会社メガチップス | 装置間の接続方式および接続装置 |
| WO2008020555A1 (en) * | 2006-08-14 | 2008-02-21 | Advantest Corporation | Test device and test method |
| TWI436077B (zh) * | 2010-11-24 | 2014-05-01 | Etron Technology Inc | 增加晶片預燒掃描效率的方法 |
| US9514016B2 (en) * | 2011-02-01 | 2016-12-06 | Echostar Technologies L.L.C. | Apparatus systems and methods for facilitating testing of a plurality of electronic devices |
| US10242750B2 (en) * | 2017-05-31 | 2019-03-26 | Sandisk Technologies Llc | High-speed data path testing techniques for non-volatile memory |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4759021A (en) * | 1985-01-31 | 1988-07-19 | Hitachi, Ltd. | Test pattern generator |
| JPH0750159B2 (ja) * | 1985-10-11 | 1995-05-31 | 株式会社日立製作所 | テストパタ−ン発生装置 |
| JPH0754345B2 (ja) * | 1986-07-30 | 1995-06-07 | 株式会社日立製作所 | Ic試験装置 |
| DE3752280T2 (de) * | 1986-07-30 | 2000-02-03 | Hitachi, Ltd. | Mustergenerator |
| JP2514223Y2 (ja) * | 1989-11-07 | 1996-10-16 | ミサワホーム株式会社 | 引違い障子を納めたサッシ |
| US5349587A (en) * | 1992-03-26 | 1994-09-20 | Northern Telecom Limited | Multiple clock rate test apparatus for testing digital systems |
| JPH07198798A (ja) * | 1993-12-28 | 1995-08-01 | Hitachi Ltd | アルゴリズミックパターン発生器 |
| US5572666A (en) * | 1995-03-28 | 1996-11-05 | Sun Microsystems, Inc. | System and method for generating pseudo-random instructions for design verification |
| EP1632780A2 (en) * | 1995-12-27 | 2006-03-08 | Koken Co., Ltd. | Monitoring control apparatus |
| US5883905A (en) * | 1997-02-18 | 1999-03-16 | Schlumberger Technologies, Inc. | Pattern generator with extended register programming |
| JPH10319095A (ja) * | 1997-05-22 | 1998-12-04 | Mitsubishi Electric Corp | 半導体テスト装置 |
| US6118304A (en) * | 1997-11-20 | 2000-09-12 | Intrinsity, Inc. | Method and apparatus for logic synchronization |
| US6246250B1 (en) * | 1998-05-11 | 2001-06-12 | Micron Technology, Inc. | Probe card having on-board multiplex circuitry for expanding tester resources |
| JP2000276367A (ja) | 1999-03-23 | 2000-10-06 | Advantest Corp | データ書込装置、データ書込方法、及び試験装置 |
| US6363510B1 (en) * | 1999-08-31 | 2002-03-26 | Unisys Corporation | Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits |
| US6571365B1 (en) * | 1999-11-03 | 2003-05-27 | Unisys Corporation | Initial stage of a multi-stage algorithmic pattern generator for testing IC chips |
| US6314034B1 (en) * | 2000-04-14 | 2001-11-06 | Advantest Corp. | Application specific event based semiconductor memory test system |
| US6754868B2 (en) * | 2001-06-29 | 2004-06-22 | Nextest Systems Corporation | Semiconductor test system having double data rate pin scrambling |
| US6631340B2 (en) * | 2001-10-15 | 2003-10-07 | Advantest Corp. | Application specific event based semiconductor memory test system |
-
2003
- 2003-05-06 KR KR1020047017833A patent/KR101021375B1/ko not_active Expired - Lifetime
- 2003-05-06 JP JP2004502010A patent/JP2005528596A/ja active Pending
- 2003-05-06 TW TW092112502A patent/TWI278778B/zh not_active IP Right Cessation
- 2003-05-06 US US10/431,043 patent/US7472326B2/en not_active Expired - Lifetime
- 2003-05-06 WO PCT/US2003/014328 patent/WO2003093845A2/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006179144A (ja) * | 2004-12-24 | 2006-07-06 | Fujitsu Ltd | Icの高速試験方法及び装置 |
| JP2008546063A (ja) * | 2005-05-19 | 2008-12-18 | ネクステスト システムズ コーポレイション | スマートカードを試験するためのシステム及びその方法 |
| CN104425269A (zh) * | 2013-08-27 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其形成方法 |
| CN104425269B (zh) * | 2013-08-27 | 2017-07-14 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005528596A (ja) | 2005-09-22 |
| TWI278778B (en) | 2007-04-11 |
| KR20050003411A (ko) | 2005-01-10 |
| WO2003093845A3 (en) | 2005-05-26 |
| US7472326B2 (en) | 2008-12-30 |
| KR101021375B1 (ko) | 2011-03-14 |
| US20040153920A1 (en) | 2004-08-05 |
| TW200401227A (en) | 2004-01-16 |
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