WO2003093845A2 - Semiconductor test system having multitasking algorithmic pattern generator - Google Patents

Semiconductor test system having multitasking algorithmic pattern generator Download PDF

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Publication number
WO2003093845A2
WO2003093845A2 PCT/US2003/014328 US0314328W WO03093845A2 WO 2003093845 A2 WO2003093845 A2 WO 2003093845A2 US 0314328 W US0314328 W US 0314328W WO 03093845 A2 WO03093845 A2 WO 03093845A2
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor devices
apg
coupled
multitasking
dut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2003/014328
Other languages
English (en)
French (fr)
Other versions
WO2003093845A3 (en
Inventor
John M. Holmes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nextest Systems Corp
Original Assignee
Nextest Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nextest Systems Corp filed Critical Nextest Systems Corp
Priority to KR1020047017833A priority Critical patent/KR101021375B1/ko
Priority to JP2004502010A priority patent/JP2005528596A/ja
Publication of WO2003093845A2 publication Critical patent/WO2003093845A2/en
Anticipated expiration legal-status Critical
Publication of WO2003093845A3 publication Critical patent/WO2003093845A3/en
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/31813Test pattern generators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3183Generation of test inputs, e.g. test vectors, patterns or sequences
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31917Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56004Pattern generation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/08Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
    • G11C29/12Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
    • G11C29/18Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
    • G11C29/26Accessing multiple arrays
    • G11C2029/2602Concurrent test
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602Interface to device under test

Definitions

  • Each PE channel 251 typically includes a PE driver (not shown) capable of coupling signals to a pin 231 of DUT 203, a comparator (not shown) for comparing an.-output signal with an expected output signal, and an error logic circuit (not shown) for coupling results of the comparison back through the multitasking APG 201 to an error catch RAM 260.
  • PE driver and comparator are not active in the same PE channel 251 at the same time, since pin 231 is either receiving data or control signals or transmitting a result at a given time.
  • the Address Generator 220 being driven by MicroRAM 204.
  • the output of the Address Generator 220 drives, an Address Topological Scrambler 222 and a Data Generator 230.
  • the Address Topological Scrambler 222 is typically Random Access Memory that provides a topologically true data pattern to the DUT's internal array (not shown) after passing through the DUT's address decoders (not shown), which often scramble the address applied to pins 231 of the DUT 203.
  • test site's timing system or T/Fs 250 is executing the DUT cycle just loaded, the multitasking APG 201 continues on to the other DUT sites to do the same thing.
  • the multitasking capability does not cause any dead cycles in pattern execution. Patterns execute just like they would on a conventional APG. Users write all test patterns to the multitasking APG 201 from the host computer (not shown) as they would with a conventional APG and they do not have to manage any of the multitasking hardware: The only thing the user needs to be cognizant of is the number of DUTs 203 to be tested or time domains into which the multitasking APG •
  • DUTs 203 in a particular time domain have been programmed and adjusting the period or frequency with which the test pattern is coupled to DUTs in the remaining time domains, thereby maximizing the efficiency of tester 200.
  • the DUTs 203 or time -domains need not be serviced in a regular, or sequential staggered order, but can selecting any of the storage elements 272, 273, 274, to service the DUTs or time domains in any order required based on priorities. For example, where a plurality of DUTs are tested in four time domains having or requiring in upcoming cycles, cycle times of 80nSec, 100 nSec, 80 nSec and 200nSec, the DUT

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
PCT/US2003/014328 2002-05-06 2003-05-06 Semiconductor test system having multitasking algorithmic pattern generator Ceased WO2003093845A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020047017833A KR101021375B1 (ko) 2002-05-06 2003-05-06 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템
JP2004502010A JP2005528596A (ja) 2002-05-06 2003-05-06 マルチタスク・アルゴリズミック・パターン・ジェネレータを有する半導体試験システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37848802P 2002-05-06 2002-05-06
US60/378,488 2002-05-06

Publications (2)

Publication Number Publication Date
WO2003093845A2 true WO2003093845A2 (en) 2003-11-13
WO2003093845A3 WO2003093845A3 (en) 2005-05-26

Family

ID=29401608

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/014328 Ceased WO2003093845A2 (en) 2002-05-06 2003-05-06 Semiconductor test system having multitasking algorithmic pattern generator

Country Status (5)

Country Link
US (1) US7472326B2 (enExample)
JP (1) JP2005528596A (enExample)
KR (1) KR101021375B1 (enExample)
TW (1) TWI278778B (enExample)
WO (1) WO2003093845A2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006179144A (ja) * 2004-12-24 2006-07-06 Fujitsu Ltd Icの高速試験方法及び装置
JP2008546063A (ja) * 2005-05-19 2008-12-18 ネクステスト システムズ コーポレイション スマートカードを試験するためのシステム及びその方法
CN104425269A (zh) * 2013-08-27 2015-03-18 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7913002B2 (en) * 2004-08-20 2011-03-22 Advantest Corporation Test apparatus, configuration method, and device interface
JP4915779B2 (ja) * 2006-06-02 2012-04-11 株式会社メガチップス 装置間の接続方式および接続装置
WO2008020555A1 (en) * 2006-08-14 2008-02-21 Advantest Corporation Test device and test method
TWI436077B (zh) * 2010-11-24 2014-05-01 Etron Technology Inc 增加晶片預燒掃描效率的方法
US9514016B2 (en) * 2011-02-01 2016-12-06 Echostar Technologies L.L.C. Apparatus systems and methods for facilitating testing of a plurality of electronic devices
US10242750B2 (en) * 2017-05-31 2019-03-26 Sandisk Technologies Llc High-speed data path testing techniques for non-volatile memory

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US4759021A (en) * 1985-01-31 1988-07-19 Hitachi, Ltd. Test pattern generator
JPH0750159B2 (ja) * 1985-10-11 1995-05-31 株式会社日立製作所 テストパタ−ン発生装置
JPH0754345B2 (ja) * 1986-07-30 1995-06-07 株式会社日立製作所 Ic試験装置
DE3752280T2 (de) * 1986-07-30 2000-02-03 Hitachi, Ltd. Mustergenerator
JP2514223Y2 (ja) * 1989-11-07 1996-10-16 ミサワホーム株式会社 引違い障子を納めたサッシ
US5349587A (en) * 1992-03-26 1994-09-20 Northern Telecom Limited Multiple clock rate test apparatus for testing digital systems
JPH07198798A (ja) * 1993-12-28 1995-08-01 Hitachi Ltd アルゴリズミックパターン発生器
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
EP1632780A2 (en) * 1995-12-27 2006-03-08 Koken Co., Ltd. Monitoring control apparatus
US5883905A (en) * 1997-02-18 1999-03-16 Schlumberger Technologies, Inc. Pattern generator with extended register programming
JPH10319095A (ja) * 1997-05-22 1998-12-04 Mitsubishi Electric Corp 半導体テスト装置
US6118304A (en) * 1997-11-20 2000-09-12 Intrinsity, Inc. Method and apparatus for logic synchronization
US6246250B1 (en) * 1998-05-11 2001-06-12 Micron Technology, Inc. Probe card having on-board multiplex circuitry for expanding tester resources
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置
US6363510B1 (en) * 1999-08-31 2002-03-26 Unisys Corporation Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006179144A (ja) * 2004-12-24 2006-07-06 Fujitsu Ltd Icの高速試験方法及び装置
JP2008546063A (ja) * 2005-05-19 2008-12-18 ネクステスト システムズ コーポレイション スマートカードを試験するためのシステム及びその方法
CN104425269A (zh) * 2013-08-27 2015-03-18 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法
CN104425269B (zh) * 2013-08-27 2017-07-14 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法

Also Published As

Publication number Publication date
JP2005528596A (ja) 2005-09-22
TWI278778B (en) 2007-04-11
KR20050003411A (ko) 2005-01-10
WO2003093845A3 (en) 2005-05-26
US7472326B2 (en) 2008-12-30
KR101021375B1 (ko) 2011-03-14
US20040153920A1 (en) 2004-08-05
TW200401227A (en) 2004-01-16

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