KR101021375B1 - 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 - Google Patents

멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 Download PDF

Info

Publication number
KR101021375B1
KR101021375B1 KR1020047017833A KR20047017833A KR101021375B1 KR 101021375 B1 KR101021375 B1 KR 101021375B1 KR 1020047017833 A KR1020047017833 A KR 1020047017833A KR 20047017833 A KR20047017833 A KR 20047017833A KR 101021375 B1 KR101021375 B1 KR 101021375B1
Authority
KR
South Korea
Prior art keywords
semiconductor devices
apg
multitasking
dut
time domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020047017833A
Other languages
English (en)
Korean (ko)
Other versions
KR20050003411A (ko
Inventor
존 엠. 홀메스
Original Assignee
넥스테스트 시스템즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 넥스테스트 시스템즈 코포레이션 filed Critical 넥스테스트 시스템즈 코포레이션
Publication of KR20050003411A publication Critical patent/KR20050003411A/ko
Application granted granted Critical
Publication of KR101021375B1 publication Critical patent/KR101021375B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/31813Test pattern generators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3183Generation of test inputs, e.g. test vectors, patterns or sequences
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31917Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56004Pattern generation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/08Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
    • G11C29/12Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
    • G11C29/18Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
    • G11C29/26Accessing multiple arrays
    • G11C2029/2602Concurrent test
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C29/00Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602Interface to device under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020047017833A 2002-05-06 2003-05-06 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 Expired - Lifetime KR101021375B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37848802P 2002-05-06 2002-05-06
US60/378,488 2002-05-06
PCT/US2003/014328 WO2003093845A2 (en) 2002-05-06 2003-05-06 Semiconductor test system having multitasking algorithmic pattern generator

Publications (2)

Publication Number Publication Date
KR20050003411A KR20050003411A (ko) 2005-01-10
KR101021375B1 true KR101021375B1 (ko) 2011-03-14

Family

ID=29401608

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047017833A Expired - Lifetime KR101021375B1 (ko) 2002-05-06 2003-05-06 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템

Country Status (5)

Country Link
US (1) US7472326B2 (enExample)
JP (1) JP2005528596A (enExample)
KR (1) KR101021375B1 (enExample)
TW (1) TWI278778B (enExample)
WO (1) WO2003093845A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7913002B2 (en) * 2004-08-20 2011-03-22 Advantest Corporation Test apparatus, configuration method, and device interface
JP2006179144A (ja) * 2004-12-24 2006-07-06 Fujitsu Ltd Icの高速試験方法及び装置
JP5480498B2 (ja) * 2005-05-19 2014-04-23 ネクステスト システムズ コーポレイション スマートカードを試験するためのシステム及びその方法
JP4915779B2 (ja) * 2006-06-02 2012-04-11 株式会社メガチップス 装置間の接続方式および接続装置
WO2008020555A1 (en) * 2006-08-14 2008-02-21 Advantest Corporation Test device and test method
TWI436077B (zh) * 2010-11-24 2014-05-01 Etron Technology Inc 增加晶片預燒掃描效率的方法
US9514016B2 (en) * 2011-02-01 2016-12-06 Echostar Technologies L.L.C. Apparatus systems and methods for facilitating testing of a plurality of electronic devices
CN104425269B (zh) * 2013-08-27 2017-07-14 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法
US10242750B2 (en) * 2017-05-31 2019-03-26 Sandisk Technologies Llc High-speed data path testing techniques for non-volatile memory

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0368294U (enExample) * 1989-11-07 1991-07-04
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置
US6243665B1 (en) * 1995-12-27 2001-06-05 Duaxes Corporation Monitoring and control apparatus incorporating run-time fault detection by boundary scan logic testing

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4759021A (en) * 1985-01-31 1988-07-19 Hitachi, Ltd. Test pattern generator
JPH0750159B2 (ja) * 1985-10-11 1995-05-31 株式会社日立製作所 テストパタ−ン発生装置
JPH0754345B2 (ja) * 1986-07-30 1995-06-07 株式会社日立製作所 Ic試験装置
DE3752280T2 (de) * 1986-07-30 2000-02-03 Hitachi, Ltd. Mustergenerator
US5349587A (en) * 1992-03-26 1994-09-20 Northern Telecom Limited Multiple clock rate test apparatus for testing digital systems
JPH07198798A (ja) * 1993-12-28 1995-08-01 Hitachi Ltd アルゴリズミックパターン発生器
US5883905A (en) * 1997-02-18 1999-03-16 Schlumberger Technologies, Inc. Pattern generator with extended register programming
JPH10319095A (ja) * 1997-05-22 1998-12-04 Mitsubishi Electric Corp 半導体テスト装置
US6118304A (en) * 1997-11-20 2000-09-12 Intrinsity, Inc. Method and apparatus for logic synchronization
US6246250B1 (en) * 1998-05-11 2001-06-12 Micron Technology, Inc. Probe card having on-board multiplex circuitry for expanding tester resources
US6363510B1 (en) * 1999-08-31 2002-03-26 Unisys Corporation Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits
US6571365B1 (en) * 1999-11-03 2003-05-27 Unisys Corporation Initial stage of a multi-stage algorithmic pattern generator for testing IC chips
US6314034B1 (en) * 2000-04-14 2001-11-06 Advantest Corp. Application specific event based semiconductor memory test system
US6754868B2 (en) * 2001-06-29 2004-06-22 Nextest Systems Corporation Semiconductor test system having double data rate pin scrambling
US6631340B2 (en) * 2001-10-15 2003-10-07 Advantest Corp. Application specific event based semiconductor memory test system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0368294U (enExample) * 1989-11-07 1991-07-04
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
US6243665B1 (en) * 1995-12-27 2001-06-05 Duaxes Corporation Monitoring and control apparatus incorporating run-time fault detection by boundary scan logic testing
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置

Also Published As

Publication number Publication date
WO2003093845A2 (en) 2003-11-13
JP2005528596A (ja) 2005-09-22
TWI278778B (en) 2007-04-11
KR20050003411A (ko) 2005-01-10
WO2003093845A3 (en) 2005-05-26
US7472326B2 (en) 2008-12-30
US20040153920A1 (en) 2004-08-05
TW200401227A (en) 2004-01-16

Similar Documents

Publication Publication Date Title
US5127011A (en) Per-pin integrated circuit test system having n-bit interface
KR100538404B1 (ko) 테스팅의 병렬 및 스캔 모드용으로 단일 메모리를사용하는 집적회로용 테스트 시스템
US5553082A (en) Built-in self-test for logic circuitry at memory array output
US7114114B1 (en) Dynamically reconfigurable precision signal delay test system for automatic test equipment
KR100634991B1 (ko) 디스크 기반 데이터 스트리밍을 구비한 집적 회로 시험기
US7003697B2 (en) Apparatus having pattern scrambler for testing a semiconductor device and method for operating same
US7035751B2 (en) Nonvolatile memory microcomputer chip, and a method for testing the nonvolatile memory microcomputer chip
KR101021375B1 (ko) 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템
US6891393B2 (en) Synchronous semiconductor device, and inspection system and method for the same
US6754868B2 (en) Semiconductor test system having double data rate pin scrambling
KR100513406B1 (ko) 반도체 시험장치
US7243278B2 (en) Integrated circuit tester with software-scaleable channels
US5917834A (en) Integrated circuit tester having multiple period generators
US4972413A (en) Method and apparatus for high speed integrated circuit testing
US7171611B2 (en) Apparatus for determining the access time and/or the minimally allowable cycle time of a memory
US20080080276A1 (en) Clock frequency doubler method and apparatus for serial flash testing
US6507801B1 (en) Semiconductor device testing system
US20080316846A1 (en) Semiconductor memory device capable of storing data of various patterns and method of electrically testing the semiconductor memory device
JP5068739B2 (ja) 集積回路試験モジュール
US8120977B2 (en) Test method for nonvolatile memory device
JPH04301300A (ja) 半導体メモリ装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20041105

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
AMND Amendment
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20080506

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20100126

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20101028

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20100126

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

AMND Amendment
J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

Patent event date: 20101123

Comment text: Request for Trial against Decision on Refusal

Patent event code: PJ02012R01D

Patent event date: 20101028

Comment text: Decision to Refuse Application

Patent event code: PJ02011S01I

Appeal kind category: Appeal against decision to decline refusal

Decision date: 20101229

Appeal identifier: 2010101008958

Request date: 20101123

PB0901 Examination by re-examination before a trial

Comment text: Amendment to Specification, etc.

Patent event date: 20101123

Patent event code: PB09011R02I

Comment text: Request for Trial against Decision on Refusal

Patent event date: 20101123

Patent event code: PB09011R01I

Comment text: Amendment to Specification, etc.

Patent event date: 20100624

Patent event code: PB09011R02I

Comment text: Amendment to Specification, etc.

Patent event date: 20080506

Patent event code: PB09011R02I

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

Patent event date: 20101229

Comment text: Decision to Grant Registration

Patent event code: PB07012S01D

Patent event date: 20101224

Comment text: Transfer of Trial File for Re-examination before a Trial

Patent event code: PB07011S01I

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20110303

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20110303

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20140221

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20140221

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20150130

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20150130

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20160127

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20160127

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20170201

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20170201

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20180202

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20180202

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20190201

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20190201

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20200130

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20200130

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20210127

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20220118

Start annual number: 12

End annual number: 12

PR1001 Payment of annual fee

Payment date: 20230117

Start annual number: 13

End annual number: 13

PC1801 Expiration of term

Termination date: 20231106

Termination category: Expiration of duration