TWI277026B - Wiring structure and its manufacturing method, optoelectronic apparatus and electronic machine - Google Patents

Wiring structure and its manufacturing method, optoelectronic apparatus and electronic machine Download PDF

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Publication number
TWI277026B
TWI277026B TW092130533A TW92130533A TWI277026B TW I277026 B TWI277026 B TW I277026B TW 092130533 A TW092130533 A TW 092130533A TW 92130533 A TW92130533 A TW 92130533A TW I277026 B TWI277026 B TW I277026B
Authority
TW
Taiwan
Prior art keywords
layer
electrode
conductive layer
relay
film
Prior art date
Application number
TW092130533A
Other languages
English (en)
Chinese (zh)
Other versions
TW200410181A (en
Inventor
Toshihide Miyazaki
Shin Oyamada
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW200410181A publication Critical patent/TW200410181A/zh
Application granted granted Critical
Publication of TWI277026B publication Critical patent/TWI277026B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/40—Arrangements for improving the aperture ratio

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW092130533A 2002-11-26 2003-10-31 Wiring structure and its manufacturing method, optoelectronic apparatus and electronic machine TWI277026B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002342490A JP3835403B2 (ja) 2002-11-26 2002-11-26 電気光学装置及び電子機器

Publications (2)

Publication Number Publication Date
TW200410181A TW200410181A (en) 2004-06-16
TWI277026B true TWI277026B (en) 2007-03-21

Family

ID=32588065

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092130533A TWI277026B (en) 2002-11-26 2003-10-31 Wiring structure and its manufacturing method, optoelectronic apparatus and electronic machine

Country Status (5)

Country Link
US (1) US7079198B2 (enExample)
JP (1) JP3835403B2 (enExample)
KR (1) KR100611861B1 (enExample)
CN (1) CN100339941C (enExample)
TW (1) TWI277026B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073994A (ja) * 2004-08-05 2006-03-16 Seiko Epson Corp 接続用基板、接続構造、接続方法並びに電子機器
TW200617547A (en) * 2004-11-19 2006-06-01 Innolux Display Corp A liquid crystal display device
KR20070014715A (ko) * 2005-07-29 2007-02-01 삼성전자주식회사 개구율이 향상된 어레이 기판 및 이의 제조방법
TW200746940A (en) * 2005-10-14 2007-12-16 Ibiden Co Ltd Printed wiring board
US7882928B2 (en) * 2008-06-26 2011-02-08 Welch Allyn, Inc. Acoustic measurement tip
WO2010137213A1 (ja) * 2009-05-29 2010-12-02 シャープ株式会社 液晶表示素子、及び、液晶表示装置
FR2965942B1 (fr) * 2010-10-08 2013-02-22 Commissariat Energie Atomique Afficheur a cristal liquide de type transmissif en technologie cmos avec capacite de stockage auxiliaire
ITTO20110995A1 (it) * 2011-10-31 2013-05-01 St Microelectronics Srl Dispositivo micro-elettro-meccanico dotato di regioni conduttive sepolte e relativo procedimento di fabbricazione
JP5953923B2 (ja) * 2012-05-15 2016-07-20 セイコーエプソン株式会社 電気光学装置および電子機器
TW201539095A (zh) * 2014-04-01 2015-10-16 Seiko Epson Corp 光電裝置及電子機器
CN114156267B (zh) * 2020-09-07 2024-10-29 长鑫存储技术有限公司 半导体器件及其制备方法、存储装置
CN121281379A (zh) * 2024-06-06 2026-01-06 天马新型显示技术研究院(厦门)有限公司 一种显示面板和显示装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10104660A (ja) 1996-10-03 1998-04-24 Hitachi Ltd 液晶表示装置
TW396454B (en) * 1997-06-24 2000-07-01 Matsushita Electrics Corporati Semiconductor device and method for fabricating the same
KR100437353B1 (ko) * 1997-07-16 2004-07-16 삼성전자주식회사 반도체 장치의 제조 방법
JP3401589B2 (ja) * 1998-10-21 2003-04-28 株式会社アドバンスト・ディスプレイ Ｔｆｔアレイ基板および液晶表示装置
KR100324591B1 (ko) * 1998-12-24 2002-04-17 박종섭 티타늄 알루미늄 질소 합금막을 상부전극의 확산방지막으로서 이용하는 캐패시터 제조 방법
JP3134866B2 (ja) * 1999-02-05 2001-02-13 日本電気株式会社 液晶表示装置とその製造方法
JP4402197B2 (ja) * 1999-05-24 2010-01-20 シャープ株式会社 アクティブマトリクス型表示装置
JP4496600B2 (ja) 2000-04-24 2010-07-07 セイコーエプソン株式会社 電気光学装置及びプロジェクタ
JP3616313B2 (ja) * 2000-06-30 2005-02-02 花王株式会社 固形石鹸
JP3830361B2 (ja) 2000-08-11 2006-10-04 セイコーエプソン株式会社 Ｔｆｔアレイ基板、電気光学装置及び投射型表示装置
JP3608531B2 (ja) 2000-08-31 2005-01-12 セイコーエプソン株式会社 電気光学装置及び投射型表示装置
JP2002107745A (ja) 2000-09-27 2002-04-10 Seiko Epson Corp 電気光学装置

Also Published As

Publication number Publication date
TW200410181A (en) 2004-06-16
KR100611861B1 (ko) 2006-08-11
JP3835403B2 (ja) 2006-10-18
KR20040047627A (ko) 2004-06-05
JP2004177589A (ja) 2004-06-24
US20040119899A1 (en) 2004-06-24
CN100339941C (zh) 2007-09-26
US7079198B2 (en) 2006-07-18
CN1503322A (zh) 2004-06-09

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