JP3835403B2 - 電気光学装置及び電子機器 - Google Patents
電気光学装置及び電子機器 Download PDFInfo
- Publication number
- JP3835403B2 JP3835403B2 JP2002342490A JP2002342490A JP3835403B2 JP 3835403 B2 JP3835403 B2 JP 3835403B2 JP 2002342490 A JP2002342490 A JP 2002342490A JP 2002342490 A JP2002342490 A JP 2002342490A JP 3835403 B2 JP3835403 B2 JP 3835403B2
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- JP
- Japan
- Prior art keywords
- electrode
- layer
- electro
- pixel
- relay
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 230000008569 process Effects 0.000 description 29
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- 229910021342 tungsten silicide Inorganic materials 0.000 description 2
- -1 (silicon oxide) Chemical compound 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
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- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
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- 229910052796 boron Inorganic materials 0.000 description 1
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- 230000005611 electricity Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
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- 238000010030 laminating Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/40—Arrangements for improving the aperture ratio
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002342490A JP3835403B2 (ja) | 2002-11-26 | 2002-11-26 | 電気光学装置及び電子機器 |
| US10/676,143 US7079198B2 (en) | 2002-11-26 | 2003-10-02 | Wiring structure, method of manufacturing the same, electro-optical device, and electronic device |
| TW092130533A TWI277026B (en) | 2002-11-26 | 2003-10-31 | Wiring structure and its manufacturing method, optoelectronic apparatus and electronic machine |
| KR1020030083925A KR100611861B1 (ko) | 2002-11-26 | 2003-11-25 | 전기 광학 장치 및 전자기기 |
| CNB2003101152751A CN100339941C (zh) | 2002-11-26 | 2003-11-26 | 布线结构及其制造方法和电光装置、电子设备 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002342490A JP3835403B2 (ja) | 2002-11-26 | 2002-11-26 | 電気光学装置及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004177589A JP2004177589A (ja) | 2004-06-24 |
| JP2004177589A5 JP2004177589A5 (enExample) | 2005-09-29 |
| JP3835403B2 true JP3835403B2 (ja) | 2006-10-18 |
Family
ID=32588065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002342490A Expired - Lifetime JP3835403B2 (ja) | 2002-11-26 | 2002-11-26 | 電気光学装置及び電子機器 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7079198B2 (enExample) |
| JP (1) | JP3835403B2 (enExample) |
| KR (1) | KR100611861B1 (enExample) |
| CN (1) | CN100339941C (enExample) |
| TW (1) | TWI277026B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006073994A (ja) * | 2004-08-05 | 2006-03-16 | Seiko Epson Corp | 接続用基板、接続構造、接続方法並びに電子機器 |
| TW200617547A (en) * | 2004-11-19 | 2006-06-01 | Innolux Display Corp | A liquid crystal display device |
| KR20070014715A (ko) * | 2005-07-29 | 2007-02-01 | 삼성전자주식회사 | 개구율이 향상된 어레이 기판 및 이의 제조방법 |
| TW200746940A (en) * | 2005-10-14 | 2007-12-16 | Ibiden Co Ltd | Printed wiring board |
| US7882928B2 (en) * | 2008-06-26 | 2011-02-08 | Welch Allyn, Inc. | Acoustic measurement tip |
| WO2010137213A1 (ja) * | 2009-05-29 | 2010-12-02 | シャープ株式会社 | 液晶表示素子、及び、液晶表示装置 |
| FR2965942B1 (fr) * | 2010-10-08 | 2013-02-22 | Commissariat Energie Atomique | Afficheur a cristal liquide de type transmissif en technologie cmos avec capacite de stockage auxiliaire |
| ITTO20110995A1 (it) * | 2011-10-31 | 2013-05-01 | St Microelectronics Srl | Dispositivo micro-elettro-meccanico dotato di regioni conduttive sepolte e relativo procedimento di fabbricazione |
| JP5953923B2 (ja) * | 2012-05-15 | 2016-07-20 | セイコーエプソン株式会社 | 電気光学装置および電子機器 |
| TW201539095A (zh) * | 2014-04-01 | 2015-10-16 | Seiko Epson Corp | 光電裝置及電子機器 |
| CN114156267B (zh) * | 2020-09-07 | 2024-10-29 | 长鑫存储技术有限公司 | 半导体器件及其制备方法、存储装置 |
| CN118609471B (zh) * | 2024-06-06 | 2025-11-28 | 天马新型显示技术研究院(厦门)有限公司 | 一种显示面板和显示装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10104660A (ja) | 1996-10-03 | 1998-04-24 | Hitachi Ltd | 液晶表示装置 |
| TW396454B (en) * | 1997-06-24 | 2000-07-01 | Matsushita Electrics Corporati | Semiconductor device and method for fabricating the same |
| KR100437353B1 (ko) * | 1997-07-16 | 2004-07-16 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
| JP3401589B2 (ja) * | 1998-10-21 | 2003-04-28 | 株式会社アドバンスト・ディスプレイ | Tftアレイ基板および液晶表示装置 |
| KR100324591B1 (ko) * | 1998-12-24 | 2002-04-17 | 박종섭 | 티타늄 알루미늄 질소 합금막을 상부전극의 확산방지막으로서 이용하는 캐패시터 제조 방법 |
| JP3134866B2 (ja) * | 1999-02-05 | 2001-02-13 | 日本電気株式会社 | 液晶表示装置とその製造方法 |
| JP4402197B2 (ja) * | 1999-05-24 | 2010-01-20 | シャープ株式会社 | アクティブマトリクス型表示装置 |
| JP4496600B2 (ja) | 2000-04-24 | 2010-07-07 | セイコーエプソン株式会社 | 電気光学装置及びプロジェクタ |
| JP3616313B2 (ja) * | 2000-06-30 | 2005-02-02 | 花王株式会社 | 固形石鹸 |
| JP3830361B2 (ja) | 2000-08-11 | 2006-10-04 | セイコーエプソン株式会社 | Tftアレイ基板、電気光学装置及び投射型表示装置 |
| JP3608531B2 (ja) | 2000-08-31 | 2005-01-12 | セイコーエプソン株式会社 | 電気光学装置及び投射型表示装置 |
| JP2002107745A (ja) | 2000-09-27 | 2002-04-10 | Seiko Epson Corp | 電気光学装置 |
-
2002
- 2002-11-26 JP JP2002342490A patent/JP3835403B2/ja not_active Expired - Lifetime
-
2003
- 2003-10-02 US US10/676,143 patent/US7079198B2/en not_active Expired - Lifetime
- 2003-10-31 TW TW092130533A patent/TWI277026B/zh not_active IP Right Cessation
- 2003-11-25 KR KR1020030083925A patent/KR100611861B1/ko not_active Expired - Lifetime
- 2003-11-26 CN CNB2003101152751A patent/CN100339941C/zh not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004177589A (ja) | 2004-06-24 |
| KR20040047627A (ko) | 2004-06-05 |
| CN100339941C (zh) | 2007-09-26 |
| TW200410181A (en) | 2004-06-16 |
| KR100611861B1 (ko) | 2006-08-11 |
| US20040119899A1 (en) | 2004-06-24 |
| CN1503322A (zh) | 2004-06-09 |
| TWI277026B (en) | 2007-03-21 |
| US7079198B2 (en) | 2006-07-18 |
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