TWI276830B - Photoelectric sensor - Google Patents

Photoelectric sensor Download PDF

Info

Publication number
TWI276830B
TWI276830B TW093128857A TW93128857A TWI276830B TW I276830 B TWI276830 B TW I276830B TW 093128857 A TW093128857 A TW 093128857A TW 93128857 A TW93128857 A TW 93128857A TW I276830 B TWI276830 B TW I276830B
Authority
TW
Taiwan
Prior art keywords
light
receiving element
detection
viewing angle
light receiving
Prior art date
Application number
TW093128857A
Other languages
English (en)
Chinese (zh)
Other versions
TW200604577A (en
Inventor
Shyoichi Mitsutake
Kazuyoshi Hamada
Original Assignee
Takenaka Electronic Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takenaka Electronic Ind filed Critical Takenaka Electronic Ind
Publication of TW200604577A publication Critical patent/TW200604577A/zh
Application granted granted Critical
Publication of TWI276830B publication Critical patent/TWI276830B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00Prospecting or detecting by optical means
    • G01V8/10Detecting, e.g. by using light barriers
    • G01V8/20Detecting, e.g. by using light barriers using multiple transmitters or receivers

Landscapes

  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
TW093128857A 2004-07-22 2004-09-23 Photoelectric sensor TWI276830B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004213904A JP3935898B2 (ja) 2004-07-22 2004-07-22 光電センサ

Publications (2)

Publication Number Publication Date
TW200604577A TW200604577A (en) 2006-02-01
TWI276830B true TWI276830B (en) 2007-03-21

Family

ID=35905639

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093128857A TWI276830B (en) 2004-07-22 2004-09-23 Photoelectric sensor

Country Status (3)

Country Link
JP (1) JP3935898B2 (ja)
KR (1) KR100611129B1 (ja)
TW (1) TWI276830B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008033204A1 (de) * 2008-07-15 2010-02-04 Trw Automotive Electronics & Components Gmbh Optischer Sensor
JP6003121B2 (ja) * 2012-03-15 2016-10-05 オムロン株式会社 反射型光電センサ
JP2019133960A (ja) * 2016-05-26 2019-08-08 シャープ株式会社 光センサ
CN108630561B (zh) * 2017-03-15 2021-10-15 北京北方华创微电子装备有限公司 基片表面的检测装置和检测方法、传片腔室
CN108132138A (zh) * 2017-11-23 2018-06-08 矽力杰半导体技术(杭州)有限公司 光学检测组件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63275920A (ja) * 1987-05-07 1988-11-14 Shin Etsu Polymer Co Ltd 光検出装置
JP2660929B2 (ja) * 1989-04-19 1997-10-08 ファナック株式会社 Ccd固体撮像素子を用いたアークセンサ
JPH0533085U (ja) * 1991-10-09 1993-04-30 アツミ電気株式会社 赤外線投光器及び赤外線受光器
JPH06160528A (ja) * 1992-11-25 1994-06-07 Matsushita Electric Works Ltd 偏光回帰型光電センサ
JPH0743465A (ja) * 1993-07-26 1995-02-14 Saraya Kk 光電センサ
JP3473658B2 (ja) * 1996-07-18 2003-12-08 アルプス電気株式会社 指紋読取り装置
JPH1137740A (ja) * 1997-07-24 1999-02-12 Glory Ltd 紙葉類の損傷検知装置
JPH11163080A (ja) * 1997-11-26 1999-06-18 Mecs Corp ロボットハンド
JP2002026375A (ja) * 2000-07-05 2002-01-25 Oputeikon:Kk 光反射型センサ
JP4357731B2 (ja) * 2000-10-31 2009-11-04 サンクス株式会社 反射型光電センサの検出ヘッド
JP2002267498A (ja) * 2001-03-14 2002-09-18 Olympus Optical Co Ltd 光検出器

Also Published As

Publication number Publication date
TW200604577A (en) 2006-02-01
JP3935898B2 (ja) 2007-06-27
JP2006040913A (ja) 2006-02-09
KR100611129B1 (ko) 2006-08-10
KR20060008201A (ko) 2006-01-26

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