TWI276830B - Photoelectric sensor - Google Patents
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- 206010036790 Productive cough Diseases 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
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- 238000010422 painting Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
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- 208000024794 sputum Diseases 0.000 description 1
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Abstract
Description
1276830 九、發明說明： 【發明所屬之技術領域】 本發明為關於以非接觸方式檢測有無檢測對象之光電 感測器。 【先前技術】 關於使用紅外線或疋可見光等之光源來檢測有無檢測 對象之光電感測器，到目前為止開發有各種之型態。其中， 作為適合在檢測對象之存在範圍受❹ϋ形時的光電 感測器之―’有所謂之限定反射形光電感測器。此限定反 射形光電感測器，係用以檢測在投光部之投射光之角度範 圍與受光部之可受光角度範圍的重複部分(檢測範圍)是否 有檢測對象。 一般之限定反射形光電感測器之光學系統，如圖9Α 所示’一係從投光元件2透過透鏡L投射光線形成投光區域 面來自文光區域R之光則透過另外設置在受 光側之透鏡L被聚光在受光元件3。 此處，先前技術之限定反射形光電感測器上，特別是 在使用透鏡時，®^塞# H， 口為構成杈党光區域之光芒太過細長，因 此有下列之問題點。 1 ，當檢測對象為玻璃板等具有光澤之物品時，牧 投光元件2投射之光在檢測對象中係以接近正反射之型能 反射’因此如圖9A所示’當檢測對象w其相對投受光: 相配置之感測器之外殼表面χ以—角度來到檢測區^ 1·來自k測對象w之反射光的前進方向，相較於檢測對 1276830 象w與外殼表面χ平行 射光不會射入受光元件3 “移。如此-來，上述反 么Μ卜 先件 而產生實際上在檢測S肉 無論有無檢測對务比—4仏 々双劂£域S内 如、J對象’皆無法檢測出檢測對象之問題。 Ά]述，限定反射形光電感測器具有對浐i 角度轡务非Α π 八另對才双測對象之 非吊弱的傾向。特別是在光 時，因為原本構成投干糸、，先中存在透鏡 令稱成技文先&域之光芒非常細長，且 域亦為狹長，因此上述對檢 向更為明顯。 才象之角度化非常弱之傾 此外，限定反射形光電感測器，據光學系統之配置， 在收納投受光元件之外殼表面又之投受光面附近，會產生 脫離檢測區域S，，亦即會產生受光輸出減少而無法檢測出 ，測對象之不感光區域N。特別是t光學系統中存在透鏡 k ’如圖9A戶斤示’因為光投射到較廣之角度範圍或是來 自較廣之角度範圍之光無法聚光，因此會有不感光區域N 變大之問題。 此外，由於光的強度或是受光輸出之大小，具有與距 離平方成反比之性質，若係使用透鏡將光聚光之構成的 活，光雖能到達遠方，但另一方面檢測區域内外之光強度 差會變小，亦即所謂之S/N(顯示信號對雜訊之比率）會變 差，而有感測器因檢測區域外之光（雜訊）而產生誤動作之 問題。 特別是如圖10、及圖11A以及C所示，從上下方向 以固定間隔配置複數個玻璃基板之下方移動之光感測器， 向上方投射光來檢測有無玻璃基板之例子中，目前的感測 1276830 器，幾乎無法得到適當的檢測區域s及檢測距離d，如此 來，如圖10以及圖1 1A以及C所示，通過透明檢測對 象w之光，在檢測對象w上方之非檢測對象w，之玻璃基 板以及與檢測對象W相離很遠之背景等處反射，而會有光 感測益1產生誤動作之問題。此外，在限定反射形光電感 測器中，當因為檢測對象表面之反射率等而使得檢測特性 變化時，例如檢測對象w為透明之玻璃基板，另一方面在 2 j方之反檢測對象w，之玻璃基板為反射率高之蒸鍍基板 等T來自非祆測對象之蒸鍍基板的反射光，使得感測器 之誤動作會更強。即使在光電感測器i，之正上方沒有檢測 對象時，同樣的，從投光元件2投射之光，如圖10所示， 在原本檢測對象w之位置上方之非檢測對象w，之玻璃基 板：及與檢測對象评相離很遠之背景等反射，而會有光感 測益1’產生誤動作之問題。 關於此决才欢測之問題，當檢測對象W之配置間隔越 小，其傾向越強。 此外’如上述般’從上下方向以固定間隔配置之複數 個玻璃基板下方移動之来咸、、丨 九成利為向上方投射光來檢測有無 玻㈤基板之例子中，由圖1 〇 ^ ^ α υ可清楚得知，為了緊縮檢測 對象W之配列間隔，井雷成、丨 w九電感^ 1，，特別是内藏有投光部 與文光部之檢測頭，必須要镜 5 貝罟潯型化。然而，如圖9A所示， 光學系統中使用透鏡之構成φ ◊ #成中，在杈受光元件與投光或是 文光透鏡之間必須確俘一 “ ” …、點距離f，因此檢測頭之 溥型化就物理上來說是困難之問題。 1276830 如前所述，於光學系統使用透鏡之限定反射形光電感 測器存在種種之問題。 另一方面，為了解決上述之缺點，如圖1丨B所示，亦 考慮有在光學系統不使用透鏡，而藉由比較廣之視野投受 光光芒來構成限定反射形光點感測器。然而，當視野角取 得越廣，則來自檢測對向之非反射光之擾亂光（雜訊），因 射入受光元件而產生感測器誤動作之可能性變高。 此外’如圖9B所示，亦有透過光纖ρ等媒體，將光 導至離光源一定距離之投光面，或將到達受光面之光導入 文光元件等之方法。根據此例，由於投光面以及受光面之 周圍之構造簡單，因此可有效達到檢測頭之薄型化。圖9B 一 1係顯示利用光纖F構成限定反射形光電感測器例的立 體圖’圖9B - 2 ’係® 9B - 1戶斤示之光電感測器由光纖F 之端部側、亦即圖9B — 1中所示之箭頭方向所視之圖。光 纖F之端面，如圖9B—1所示，係被斜.切而形成為朝向斜 上方之尖銳狀。來自投光元件2之光，如圖卯—i所示， 在光纖F之端面被垂直反射，&形成檢出區域s而從光纖 F之外周面向斜上方投射。 於叩’田圖 曲成弧狀使得有透鏡之效果，因此從光纖F外周面向上 射之光中，&纖橫截面方向之成分係聚光之型態擴散。 此一來，由光纖F外周面向上方投射之光，如圖 及9B-2所示，光不會一樣地投射在廣的角度範圍内， 會擴散成長圓狀。在受光側亦同樣的，光無法從廣的角 1276830 範圍一樣地聚光。 至：在使用光纖卩等媒體之例子中，同樣的，由於 之二一=方向係成為與光學系統中存在透鏡時相同 =’目此與上述在光學系統中使用透鏡之限定反射形 先電感測器有相同之問題。 近年來，就省空間、少&、広 令此源、以及壽命成等觀點而言， 液晶顯示器（LCD)之利用急速地發展。 在LCD之製程中，將LCD所使用之玻璃基板在上下 方向依既定間隔收納之收纟 , 円息（搬運卡匣）内，必須檢測有 …適當收納之玻璃基板（亦料Mapping)，作為使用光電 感测器檢測收納在搬運卡£中之玻璃基板之技術，一般來 說係使用反射型感測器(用以偵測照射到玻璃基板W側面 而反射之光），利用此感測器隨著搬運卡匡之上向方向逐步 和動來逐m有無玻璃基板（參考專利文獻1[刪以 及專利文獻2[圖5以及11 ])。 ^而，由於上述系統係使用光電感測器一片一片地檢 測出玻璃基板’因此該作業需耗費大量時間效率極差，且 必須有使光電感測H上下方向移動之移動機構，因此系統 全體會有複雜以及太貴之問題。 此外，與上述例不同地，亦提案有：將感測器本體移 動至在上下方向依既定距離排列之各玻璃基板下方，藉由 從玻璃基板下方朝上方投射光線來進行定位之方法（參考專 利文獻1[0013])。就此方法而言，在反射型光電感測器中 限定反射型被認為是較適合的。 1276830 然而，目前的限定反射型咸 使^ μ、+、 + ^ ^态有上述各種問題，即 使適用上述方法來構成系統， 對片⑷抑 了於例如因自重而彎曲成為 ^ ^ ^ . 又之狀恶的破璃基板，將無法 只地才双測出，或是因非來自檢 掉q I + 利對象物之反射光而是因 擾亂光使得感測器產生誤動作笤望卜 十“44，無法提供一具有可靠 注的系統。此外，由於檢 松測碩不易缚型化，因此會有無法 &小收納在搬運卡㈣玻縣板之配和隔之問題。 再者，此例中’在玻璃基板之檢測時，與上述公知例 5羡的必須片-片檢測玻璃基板端部下面，而仍存在 檢測效率差等之問題。 除此之外/亦有·在肖以將收納在搬運卡匿内之玻璃 =板搬出4般入之搬送裝置之搬送臂前端埋入限定反射型光 電感測器之檢測頭，當將上述搬送臂前端插入在上下方向 依既定間関狀各玻璃基板下方時，藉由從玻璃基板下 方朝上方投射光來檢測有無玻璃基板，並將搬送裝置正在 搬运玻璃基板之情形，顯示或輸出至外部的系統（參考專利 文獻3)。此時，與在上述定位時使用之感測器同樣的，無 法確實地檢測出因自重彎曲之玻璃基板，或是因為檢測頭 不易溥型化，而有無法縮小收納在搬運卡匣内玻璃基板之 排列間隔之問題。 [專利文獻1]特開2000- 40735號公報 [專利文獻2]特開2003 — 60010號公報 [專利文獻3]特開平丨丨—232972號公報 【發明内容】 10 1276830 因此， 之薄型化， 本發明之課題在於，提供一 且可靠性高的光電感測器。 種可以實現檢測頭 又，本發明之另一課題在於，提供一種争 审 — i J文有效率且 更確貫地檢測出以既定間隔排列之複數個檢測 的光電感測器。 丁泵之有無1276830 IX. Description of the Invention: [Technical Field] The present invention relates to a photoelectric sensor that detects a presence or absence of a detection target in a non-contact manner. [Prior Art] Various types of optical sensors have been developed so far for detecting the presence or absence of a detection object using a light source such as infrared rays or xenon visible light. Among them, there is a so-called limited reflection type photodetector which is suitable for a photoelectric sensor when the detection target is subjected to a meandering range. The limited-reflection photo-electrical sensor is used to detect whether or not there is a detection target in a repeating portion (detection range) of the angle range of the projection light of the light projecting portion and the light-receiving angle range of the light-receiving portion. The optical system of the generally limited reflective photo-electrical sensor is as shown in FIG. 9A. 'One unit emits light from the light projecting element 2 through the lens L to form a light-emitting area. The light from the light-receiving area R is transmitted through the light-receiving side. The lens L is condensed on the light receiving element 3. Here, in the prior art limited-reflection photo-electrical sensor, especially when a lens is used, the light of the port is too long, so the following problems are caused. 1. When the object to be detected is a glossy object such as a glass plate, the light projected by the grazing light projecting element is reflected in a type close to the regular reflection in the object to be detected. Therefore, as shown in FIG. 9A, when the object w is detected, Receiving and receiving light: The surface of the outer surface of the sensor is configured to enter the detection area by angle - 1 · the direction of the reflected light from the k-measuring object w, compared with the detection of the 1276830 image w and the surface of the outer casing parallel to the light Will enter the light-receiving element 3 "shift. So - come, the above-mentioned anti-make the first part of the production is actually in the detection of S meat with or without the detection of the opposite ratio - 4 仏々 double 劂 域 domain S, J object ' It is impossible to detect the problem of the detection object. Ά], the limited reflection type photo-electrical sensor has a tendency to 吊i 辔 辔 π π 八 另 才 双 双 双 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Originally, it constitutes a dry sputum, and there is a lens in the first place. The ray of the technique is very slender and the field is also long and narrow, so the above-mentioned check direction is more obvious. , defined reflective photo-electrical sensor, according to the optical system In the configuration, the separation detecting region S is generated in the vicinity of the surface of the casing on which the light-receiving element is housed, and the light-receiving output is reduced, and the non-photosensitive region N of the object to be measured is detected. In the optical system, there is a lens k' as shown in Fig. 9A. Since light is projected to a wider angular range or light from a wider range of angles cannot be concentrated, there is a problem that the non-photosensitive region N becomes large. Because of the intensity of the light or the size of the light output, it has the property of being inversely proportional to the square of the distance. If the lens is used to concentrate the light, the light can reach the far side, but on the other hand, the light intensity inside and outside the area is detected. The difference will be smaller, that is, the so-called S/N (the ratio of the display signal to the noise) will be worse, and the sensor will malfunction due to the light outside the detection area (noise). 10 and FIG. 11A and FIG. 1C show that the light sensor that moves below the plurality of glass substrates at a fixed interval from the vertical direction and projects the light upward to detect the presence or absence of the glass substrate, the current sense In the 1276830 device, the appropriate detection area s and the detection distance d are hardly obtained. Thus, as shown in FIG. 10 and FIGS. 11A and C, the non-detection object w above the detection object w is detected by transparently detecting the light of the object w. The glass substrate and the background that is far away from the detection object W are reflected, and there is a problem that the light-sensing benefit 1 causes malfunction. In addition, in the limited-reflection photo-electrical sensor, when the reflection of the surface of the object is detected When the detection characteristics are changed, for example, the detection target w is a transparent glass substrate, and on the other hand, the glass substrate of the reverse detection target w of 2 j square is a vapor deposition substrate having a high reflectance, etc. T is derived from a non-measurement object. The reflected light of the vapor-deposited substrate makes the sensor malfunction more strongly. Even if there is no object directly above the photo-electrical sensor i, the light projected from the light-emitting element 2 is as shown in FIG. It is shown that the non-detection object w above the position of the original detection object w, the glass substrate: and the background that is far away from the detection object are reflected, and there is a problem that the light-sensing benefit 1' causes malfunction. Regarding the problem of this decision, the smaller the configuration interval of the detection object W, the stronger the tendency. In addition, as described above, in the case where a plurality of glass substrates arranged at a fixed interval from the upper and lower sides are moved to the bottom, and the glass is projected upward to detect the presence or absence of the glass (five) substrate, FIG. 1 图 ^ ^ α υ can clearly know that in order to tighten the arrangement interval of the detection object W, Jing Leicheng, 丨w nine inductance ^ 1, especially the detection head with the light projecting part and the text light part, must be mirrored 5 Shaped. However, as shown in FIG. 9A, in the optical system, the configuration of the lens φ ◊ is used, and a “ ” ..., a point distance f must be captured between the 杈 light receiving element and the light projecting or the illuminating lens, so the detecting head The latter is physically difficult. 1276830 As mentioned earlier, there are various problems with the use of a defined reflective photoinductor for a lens in an optical system. On the other hand, in order to solve the above disadvantages, as shown in Fig. 1B, it is also considered that the optical system does not use a lens, but a relatively limited field of view light is emitted to form a limited reflection type spot sensor. However, when the viewing angle is taken wider, the disturbing light (noise) from detecting the non-reflected light in the opposite direction is likely to cause a malfunction of the sensor due to the incident light receiving element. Further, as shown in Fig. 9B, there is a method of guiding light to a light projecting surface at a certain distance from a light source through a medium such as an optical fiber ρ, or introducing light reaching a light receiving surface into a light-emitting element or the like. According to this example, since the structure of the light projecting surface and the periphery of the light receiving surface is simple, the thickness of the detecting head can be effectively reduced. Fig. 9B-1 is a perspective view showing an example of a configuration of a limited-reflective photo-electrical sensor using an optical fiber F. Fig. 9B-2' is a photo-inductor of the optical fiber F from the end side of the optical fiber F, that is, Figure 9B-1 shows the direction of the arrow as it appears. The end face of the optical fiber F, as shown in Fig. 9B-1, is formed obliquely and obliquely upward. As shown in Fig. 卯-i, the light from the light projecting element 2 is vertically reflected at the end face of the optical fiber F, and the detection region s is formed and projected obliquely upward from the outer circumferential surface of the optical fiber F. The shape of the 横截 田 田 田 弧 使得 使得 使得 弧 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 田 叩 田 田 田 田As a result, the light projected from the outer peripheral surface of the optical fiber F as shown in Fig. 9 and Fig. 2B-2, the light is not projected in a wide range of angles, and is diffused and rounded. Similarly, on the light receiving side, light cannot be concentrated in the same range from the wide angle of 1276830. To: In the case of using a medium such as fiber optic iridium, the same, since the direction of the second direction = the same as when the lens is present in the optical system = the purpose of the above-mentioned lens in the optical system using the limited reflection first inductance The device has the same problem. In recent years, the use of liquid crystal displays (LCDs) has rapidly developed from the viewpoints of saving space, reducing &, making this source, and life expectancy. In the process of the LCD, the glass substrate used for the LCD is stored at a predetermined interval in the vertical direction. In the suffocation (transport cassette), it is necessary to detect the glass substrate (which is also used for proper storage). The photo-inductance detector detects the glass substrate stored in the card, and generally uses a reflective sensor (for detecting the light that is reflected on the side of the glass substrate W), and uses the sensor to The glass substrate is gradually and steadily moved in the direction of the transport cassette (refer to Patent Document 1 [deleted and patent document 2 [Figs. 5 and 11]). ^Because, the above system uses a photo-sensing device to detect the glass substrate one by one. Therefore, the operation takes a lot of time and the efficiency is extremely poor, and the moving mechanism for moving the photo-sensing H in the up-and-down direction must be performed. There are complex and too expensive problems. Further, unlike the above-described example, a method of moving the sensor body to the lower side of each of the glass substrates arranged at a predetermined distance in the vertical direction and projecting light from the lower side of the glass substrate is also proposed (refer to the patent). Document 1 [0013]). For this method, defining a reflection type in a reflective photoinductor is considered to be more suitable. 1276830 However, the current limited reflection type salt has various problems as described above in the ^μ, +, + ^ ^ state, and even if the above method is applied to constitute the system, the sheet (4) is suppressed from being bent by, for example, its own weight to become ^^^. A broken glass substrate can not be measured only by double, or because it does not detect the reflected light of the object, but causes the sensor to malfunction due to disturbing the light. It is impossible to provide a system with a reliable note. In addition, since it is not easy to be tied up, it is impossible to <smallly accommodate the problem of the distribution of the transport card (4) glass plate. In addition, in this case, At the time of the detection of the glass substrate, the underside of the end portion of the glass substrate of the above-mentioned known example 5) is detected, and there is still a problem that the detection efficiency is poor, etc. Others/also have to be stored in the conveyance. The glass inside the card is the detection head of the reflection-type photo-sensing sensor embedded in the front end of the transfer arm of the transfer device, and the front end of the transfer arm is inserted under the glass substrate in the vertical direction. By glass base When the light is projected upward to detect the presence or absence of the glass substrate, and the transport device is transporting the glass substrate, the system is displayed or output to the outside (refer to Patent Document 3). In this case, the sensor is used in the above positioning. However, it is impossible to reliably detect the glass substrate bent by its own weight, or the detection head is not easily deformed, and there is a problem that the arrangement interval of the glass substrate stored in the transport cassette cannot be reduced. [Patent Document 1] [Patent Document 2] JP-A-2003-60010 [Patent Document 3] JP-A-232972 Highly reliable photo-electrical sensor. It is also possible to implement a detection head. Another object of the present invention is to provide a method for verifying that a plurality of detections are arranged at a predetermined interval efficiently and more accurately. Photoelectric detector.
為解決上述課題而經過一再重複檢討的結果，本發明 者發現·· X —、i)在光學系統中不使用透鏡，而以廣角度投射光線， 右^廣視野加以感光的$，即能構成即使檢測對象相對感 測為外设上面傾斜時，亦可確實檢測出檢測對象之表面反 射，並旎安定地檢測出有無傾斜之檢測對象的光學系統。 此外， ’' 、 Π)藉由在光學系統前面，亦即在由投光元件到受光元 件之光線應經過之路徑中，在投光元㈣之射出開口部或 光元件側之入射開口部之一方或是雙方，預先設置百 ，自狀之視野角調整遽光器（以既定間距排列多數個具有既 、斜角度之方向板（遮板）者），藉由將從投光元件射出或 疋射入受光兀件之光之方向限制在-定方向，gp能解決上 述課題。本發明之光電感測器，為限定反射型纟，具備投 光^件所投射之光之角纟範圍#受光元件T受光之角度範 圍重複配置的光學系統’從該投光元件投射之光係在位於 該重複區域之檢測對象表面反射而射入該受光元件，據以 檢測該檢測對象’其特徵在於：在光線從該投光元件到該 又光元件所應銓過的路徑中、該投光元件之出射開口部或 1276830 "亥又光7L件之入射開口部之一方或雙方，設有視野調整用 濾光器’此濾光器係預先以既定間隔排列複數個具有既定 傾斜角度之方向板；將從該投光元件射出或射入該受光元 件之光之方向限制在既定方向，以防止該投光元件將光投 :至該重複區域外’或是來自該重複區域以外之光射入該 受光元件。上述本發明之光電感測器，其具有收容該投光 兀件、受光元件以及視野調整用濾光器及其他之外殼，該 投光元件及該受光元件以及該視野調整用濾光器係配置在 該外殼表面所形成之凹部内’並將光學系統偏離該外殼而 構成者較佳。據此，即能從外殼上方除去不感光區域，而 使外殼上方全部皆為檢測區域。此外，為了解決上述課題 之本發明之感測器陣列’係用來檢測以既定間隔排列之複 數個檢測對象，其特徵在於：係由與該檢測對象之排列間 隔相當之間隔排列在一直線上，並與該檢測對象之數目相 對就數目的請求範圍第i或第2項之光電感測器所構 成’猎由將該光電感測器插入以既定間隔排列之檢測對象 間之空間内，據以—次地檢測出複數個該檢測對象之有 無0 +疣月書中所謂的本發明之光電感測器，係指根 據來自檢測對象之反射所產生之受光量之大小，檢測有盔 檢測對象並輸出之應用光電效果之非接觸檢測機器。 所謂的光學系統，係指將用來射出光線、反射光線、 以及收斂光線之投光元件、受光元件、視野調整用濟光哭 以及檢測對象等光學S件加以組合，《由此等所規定^ 12 1276830As a result of repeatedly reviewing the above-mentioned problems, the inventors have found that X-, i) can use a lens at a wide angle without using a lens in an optical system, and can illuminate a right-wide field of view. Even if the detection object is relatively sensed as being tilted on the periphery of the peripheral device, the surface reflection of the detection target can be surely detected, and the optical system of the detection target with or without inclination can be stably detected. Further, '', Π) is in the front of the optical system, that is, in the path through which the light from the light projecting element to the light receiving element should pass, in the exit opening portion of the light projecting element (4) or the incident opening portion on the light element side. One or both of them are set in advance, and the chopper is adjusted from the viewing angle of the self-form (a plurality of plates (shields) having a slanted angle are arranged at a predetermined pitch), by ejecting or ejecting from the light projecting element. The direction of the light incident on the light-receiving element is limited to the -direction, and gp can solve the above problem. The optical-inductance detector of the present invention is provided with a reflection type 纟, and includes an angle 纟 of the light projected by the light-emitting member # an optical system in which the light-receiving element T is repeatedly arranged in an angular range of light, and a light system projected from the light-emitting element Reflecting on a surface of the detection target located in the overlap region and entering the light-receiving element, thereby detecting the detection object', wherein the light is emitted from the light-emitting element to the path that the light-emitting element should pass, The exit opening of the optical element or one or both of the incident openings of the 1276830 "Heil and 7L pieces are provided with a field-of-view adjusting filter. The filter is arranged at a predetermined interval in advance at a predetermined interval. a direction plate; a direction of light emitted from the light projecting element or incident on the light receiving element is restricted in a predetermined direction to prevent the light projecting element from throwing light out of the repeating area or from outside the repeating area The light receiving element is incident on the light receiving element. In the photodetector of the present invention, the light-emitting element, the light-receiving element, and the field-of-view adjusting filter and the other housing are housed, and the light-emitting element, the light-receiving element, and the field-of-view adjusting filter are disposed. Preferably, the optical system is offset from the outer casing in the recess formed in the surface of the outer casing. Accordingly, the non-photosensitive area can be removed from above the outer casing, and all of the upper surfaces of the outer casing are detection areas. Further, the sensor array of the present invention for solving the above-described problems is for detecting a plurality of detection objects arranged at predetermined intervals, and is characterized in that they are arranged in a line at intervals corresponding to the arrangement interval of the detection objects. And corresponding to the number of the detection objects, the number of request ranges of the optical sensor of the i-th or the second item constitutes a hunt by inserting the photo-inductor into the space between the detection objects arranged at a predetermined interval, according to - detecting the presence or absence of a plurality of the objects to be detected in the second place. The photodetector of the present invention in the present invention refers to detecting the object to be detected by the helmet based on the amount of light received by the reflection from the object to be detected. The output is a non-contact detection machine that uses photoelectric effects. The term "optical system" refers to an optical S component that emits light, reflects light, and condenses light, and combines optical elements such as a light-receiving element, a field-of-view adjustment, and a detection target. 12 1276830
隔配列多數個 扳以既定間 係指相對於 祝野調整用濾光器，係限制投光或是受光方向 為預先將具有既定傾斜角度之方向板以既定間Most of the spacers are arranged with respect to the filter for the adjustment of the field, and the direction of the light projection or the light receiving direction is set to a predetermined direction with a predetermined tilt angle.
方向板配列方向之各方向板之傾斜角度。 、一視野角調整用方向板（遮板），指的是視野角調整用濾鲁 、> 冓成元件，係依照既定間隔排列、具有既定傾斜^ 度之方向板之一部份或是全部。 … ，所謂視野角’係對於投光元件之投光面或是受光元件-之受光面所看到通過投光元件或是受光元件中心之線，投 _ 光凡件所射出之光之廣度（角度範圍）或是受光元件可以受 ，之區域(角度範圍)。一般來說’投射光之廣度大的話： 可以在較廣之視野角投射光線’或是若受光區域大的話， 可以在較廣之視野角受光。 φ a如上所述，本發明中使用之視野角調整用濾光器係用 來限制投光或是受光方向。例如，投光側視野角之調整， 為容許由投光元件射出光線到某一方向，而限制光線射出 到別的方向。 相反地，受光射之視野角之調整，為容許由某個方向 來之光射入受光元件，但是防止來自其他方向之光射入受 13 1276830 完全不使用 投光及受光 本發明之光電感測器，因Λ u马在先學系統t 透鏡，因此投光側以及受光側之視野角度廣， 區域可以同時取得廣範圍之檢出區域。又' 元件所配置之感 度放置在檢出區 得到對檢測對象 因此，若根據本發明，相對於投受光 側器之外殼表面，即使檢測對象以一定角 域中，亦可以確實地檢測出檢測對象，而 角度變化有強適應能力之光電感測器。 因此可以得 此外，若根據本發明，因為檢出區域大 到不感光區域較小之光電感測器。 此外，若根據本發明， 有效地抑制成本。 因為可以省略透鏡，因此可以 再者，本發明之光電感測器中’藉由視野角度調整用 屬先益之動作，使得來自檢測區域外之擾亂光不會射入受 光元件’因此’可以防止因擾亂光所引起之誤檢測。 ”此外，因為投光區域以及受光區域被視野角調整渡光 器限制在既定方向，因此可以確實防止感測器誤動作之產 生。特別是可以防止：當通過透明檢測對象之光，或是沒 有檢測對象時由投光元件直接投射之光，被位於檢測對象 上方之非檢測對象之玻璃基板、或是與檢測對象相距很遠 之为景4所反射之光產生之感測器之誤動作。 【實施方式】 以下’使用添附圖式來詳細說明本發明之光點感測器。 圖1為言兒明本發明之光電感測器之光學系、統以及檢出 原理之立體圖，圖2為說明本發明之光電感測器之光學系 14 1276830 統以及檢出屑踩夕；立 亦即圖！中顯—圖1之光電感測器由端部側、 之光二：方向所看之圖。圖3為顯示本發明 亦+式、目,丨傅攻之立體圖，圖4為圖3之 先电感測益、從其端部側所視 感測器之光學系统。圖… 本W之光電 .® 5 411示本發明之光電感測器之其 他只施例之構成圖。圖6為佶 咸彳# I 為使用本务明之光電感測器構成 感測印陣列例之立體圖， S 7為圖6之感測器陣列之側視 ❿ 本發明光電❹u之變形狀構成圖。 《檢測原理》 …首先，根據圖！及圖2說明本發明之光電感測器之光 學系統以及檢測原理。 如圖1所不，本發明之光電感測器1，其特徵在於’ 係將投射“檢測介質之光的投光元# 2、與接收從檢測 對象W所反射之來自投光元件之光並轉換為電氣訊號之受 光元件3,相距一既定間隔加以排列，且在從投光元件到 受光元件之間光線應經過之路徑，，在投光元件側之出射 開口部或是受光元件側之入射開口部之一方或是雙方設置 ，野調整用濾光器4 ’將從投光元件2射出之光或是射入 受光元件3之光之方向限制在既定方向。藉此構成，可以 防止投光元件2將光射出至檢測區域s外，或是來自檢測 區域S外之光射入受光元件3。檢測對象w，例如可以為 薄透明玻璃基板等適當之東西。 此光電感測器1，亦即所謂之限定反射形光感測器， 其投光區域（光芒）P與受光區域（光芒）R所重複之區域成為 15 1276830 檢測區域s。本例中，當檢測對象w相對感測器外殼表面、. X以適當之角度位於檢測區域s時，從投光元件2射出之_ 光被反射而射入受光元件3之光量增加，利用受光元件3 之電氣特性的變化來檢測有無檢測對象w。 、如圖1及圖2所不，本發明之光電感測器！，係藉由 視野角调整用濾光器4，來調整視野角使來自檢測對象貿 之非反射光的擾亂光（Noise)無法射入受光元件3。本例中， 係將預先相對表面或背面具有既定傾斜角度Θ之視野角調 整用之方向板（遮板）5在内部以既定排列間隔形成多數個_ 之片狀成型體作為視野角調整用濾光器4。視野角調整用 濾光叩4係配置成在投光側及受光側，視野角之調整方 向亦即遮4反5之傾斜角度^相對向。此視野角調整用濾光 σσ 係瓜入δ又在感測器外殼表面X之投光或受光用開口 部6 。 以下，使用圖2來說明本發明之光電感測器丨中視野 角之調整狀態。又，圖2中，關於投光側之光之狀況，為 易方…兒明’係顯示將投光元件假設為點光源來使用之情 φ 如圖2所示，例如從投光元件2之出射面中心射出之 光，百先到達視野角調整用濾光器4。此處，圖2中以虛 線（a)所示角度之光因為被遮板遮住因此不會透過至檢測對 为一方面，除此以外之光會通過視野角調整用濾 光為4到達檢測對象w。本例中，檢測對象w假設為玻璃 基板等’到達檢測對象W之光會在檢測對象表面正反射。 16 1276830 於受光元件3，只有通過受光側之視野角調整用濾光器4 之反射光射入。此處，通過視野角調整用濾光器4之光， 平均末。兒為沿著遮板5傾斜方向之光。此外，來自檢測區 或 乂外之光因為被遮板5所遮蔽，因此不會射入受光元 件3。此外，圖2中，因為將投光元件當作一個點光源， 因此如圖中γ所示產生所謂陰影之現象，但是實際之投光 70件因為有發光面積因此陰影Y會減少。此外，可以以更The inclination angle of each direction plate of the direction plate. A direction plate for adjusting the viewing angle (shutter) refers to a filter for adjusting the viewing angle, and a component is a part or all of the direction plate having a predetermined inclination according to a predetermined interval. . The so-called "viewing angle" is the width of the light emitted by the light-emitting surface of the light-emitting element or the light-receiving surface of the light-receiving element through the light-emitting element or the center of the light-receiving element. Angle range) or the area (angle range) at which the light-receiving element can be exposed. Generally speaking, if the breadth of the projected light is large: the light can be projected at a wider viewing angle or if the light receiving area is large, the light can be received at a wider viewing angle. φ a As described above, the filter for adjusting the viewing angle used in the present invention is used to limit the light projection or the light receiving direction. For example, the adjustment of the viewing angle of the light-emitting side allows the light-emitting element to emit light to a certain direction, and restricts the light from being emitted to another direction. On the contrary, the adjustment of the viewing angle of the light is allowed to allow light from a certain direction to enter the light receiving element, but the light from other directions is prevented from being incident on the 13 1276830. The light is not used at all and the light is measured. Because the U-Ma is learning the system t lens first, the field of view on the light-emitting side and the light-receiving side is wide, and the area can simultaneously obtain a wide range of detection areas. Further, the sensitivity of the component is placed in the detection area to obtain the object to be detected. Therefore, according to the present invention, the detection object can be surely detected even if the detection object is in a certain angular range with respect to the surface of the casing of the light-receiving side device. , and the optical sensor with strong adaptability to the angle change. Therefore, in addition, according to the present invention, the photodetector is small because the detection area is large and the non-sensing area is small. Further, according to the present invention, cost is effectively suppressed. Since the lens can be omitted, it can be further avoided that the optical inductance detector of the present invention uses the prior action of the viewing angle adjustment so that the disturbing light from outside the detection area does not enter the light receiving element. False detection caused by disturbing light. In addition, since the light projecting area and the light receiving area are limited by the viewing angle adjustment directional light in a predetermined direction, it is possible to surely prevent the occurrence of sensor malfunction. In particular, it is possible to prevent: when the object is transparently detected, or is not detected. When the object is directly projected by the light projecting element, the glass substrate that is not detected on the object to be detected or the sensor that is far from the object to be detected is the sensor that is reflected by the light reflected by the scene 4 is malfunctioning. The following is a detailed description of the optical spot sensor of the present invention using the accompanying drawings. Fig. 1 is a perspective view showing the optical system, the system and the detection principle of the optical inductance measuring device of the present invention, and Fig. 2 is a view of the present invention. The optical system of the invention is 14 1476830 and the chip is detected. The picture is shown in Figure 1. The light sensor of Figure 1 is viewed from the end side, the light 2: the direction. Figure 3 In order to show the stereoscopic view of the invention, the shape of the method, and the image of the sensor, the optical system of the sensor from the end side of the figure is shown in Fig. 3. Fig. 411 shows the invention The other components of the inductive detector are shown in Fig. 6. Fig. 6 is a perspective view of a sample of the sensing array using the optical inductive detector of the present invention, and S 7 is the side of the sensor array of Fig. 6.视 构成 ❹ ❹ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测 检测The sensor 1 is characterized in that 'the projection light element #2 that projects the light of the detection medium and the light-receiving element 3 that receives the light from the light-emitting element reflected from the detection object W and converts it into an electrical signal are separated by Arranged at a predetermined interval, and the path through which light rays pass between the light projecting element and the light receiving element is set, either on the exit opening side of the light projecting element side or the incident opening part on the light receiving element side, or both. The adjustment filter 4' restricts the direction of the light emitted from the light projecting element 2 or the light incident on the light receiving element 3 in a predetermined direction. With this configuration, it is possible to prevent the light projecting element 2 from emitting light out of the detection area s or the light from outside the detection area S to enter the light receiving element 3. The object to be detected w may be, for example, a suitable material such as a thin transparent glass substrate. The photodetector 1, that is, a so-called limited-reflection photosensor, has a region where the light-emitting region (light) P and the light-receiving region (ray) R overlap to become a 15 1276830 detection region s. In this example, when the detection target w is positioned on the surface of the sensor housing and the X is located at the detection area s at an appropriate angle, the amount of light emitted from the light projecting element 2 is reflected and the amount of light incident on the light receiving element 3 is increased, and the light is received. The presence or absence of the detection object w is detected by a change in the electrical characteristics of the element 3. As shown in Fig. 1 and Fig. 2, the optical inductance detector of the invention! By adjusting the viewing angle by the viewing angle adjusting filter 4, the disturbing light (Noise) from the non-reflected light of the detection target cannot be incident on the light receiving element 3. In this example, the direction plate (shutter) 5 for adjusting the viewing angle with respect to the front or back surface at a predetermined inclination angle Θ is formed by forming a plurality of sheet-like molded bodies at predetermined intervals in the interior as the viewing angle adjustment filter. Lighter 4. The filter angle adjustment filter 4 is arranged on the light projecting side and the light receiving side, and the viewing angle adjustment direction, that is, the tilt angle of the 4th and 5th faces is opposite. This viewing angle adjustment filter σσ is incorporated into the opening/closing portion 6 of the light-emitting or light-receiving δ on the surface X of the sensor casing. Hereinafter, the adjustment state of the viewing angle in the photodetector 本 of the present invention will be described with reference to Fig. 2 . In addition, in FIG. 2, regarding the state of the light on the light-emitting side, it is shown that the light-emitting element is assumed to be a point light source and used as shown in FIG. 2, for example, from the light-emitting element 2 The light emitted from the center of the exit surface reaches the viewing angle adjustment filter 4 first. Here, the light of the angle indicated by the broken line (a) in FIG. 2 is not blocked by the detection pair because it is blocked by the shutter, and the light is passed through the viewing angle adjustment filter for 4 arrival detection. Object w. In this example, the detection target w is assumed to be a glass substrate or the like. The light reaching the detection target W is regularly reflected on the surface of the detection target. 16 1276830 In the light-receiving element 3, only the reflected light of the filter 4 for the viewing angle adjustment on the light-receiving side is incident. Here, the light passing through the filter 4 of the viewing angle adjustment is averaged. It is light that is inclined along the shutter 5. Further, since the light from the detection area or the outside is blocked by the shutter 5, it does not enter the light-receiving element 3. Further, in Fig. 2, since the light projecting element is regarded as a point light source, a phenomenon of so-called shadow is generated as shown by γ in the figure, but the actual light projecting 70 has a light-emitting area, so the shadow Y is reduced. In addition, you can
積極地增加投光光量為目的，而使用多個投光元件來減少 陰影部分。 如使用上述實施型態所說明般，本發明之光電感測器 1，因為在光學系統中沒有使用透鏡，因此投光側及受光 側之視野角廣，因此可以在投光及受光區域P、R内廣範 圍取得檢測區域S。 此外’若根據本發明，由於當檢測對象相對於配置有 投受光元件之夕卜Mv ^ 士 丁心外奴表面X有一定角度而位於檢測區域sThe purpose of actively increasing the amount of light to be cast is to use a plurality of light projecting elements to reduce the shadow portion. As described in the above embodiment, the photo-electrical sensor 1 of the present invention has a wide viewing angle on the light-emitting side and the light-receiving side because the lens is not used in the optical system, so that the light-emitting and light-receiving areas P can be used. The detection area S is obtained in a wide range of R. Further, according to the present invention, since the detection object is located at a detection area s with respect to the surface X of the outer surface of the Mv.
T亦月b確貫檢測出檢測對象w，因此可以得到對檢測對 象W之角度變化適應力強之光電感測器。 、此外本發明之光電感測器1中，藉由視野角調整用 〉慮光器 4之勒你 . 初作’使得來自檢測區域S以外的擾亂光不會 射入受光元件31 曰 卞^ 因此可以防止因為此種擾亂光所引起之 誤檢測。 [貫施例1 ] _接著’根據圖3及圖4說明本發明之光電感測器之一 貫施例。 17 1276830 圖4中，圖4A係顯示在不具備視野角調整用濾光器 之情形下’從投光元件射出之光存在5〇%以上之區域的概· 念圖，圖4B係顯示在具備視野角調整用濾光器之情形下，T also detects the detection object w in a positive manner, so that a photo-electrical sensor having a strong adaptability to the angle change of the detection object W can be obtained. Further, in the photo-electrical sensor 1 of the present invention, the viewing angle adjustment is performed by the light-receiving device 4, so that the disturbing light from the detection region S does not enter the light-receiving element 31. It is possible to prevent erroneous detection caused by such disturbing light. [Common Example 1] Next, a typical example of the photodetector of the present invention will be described with reference to Figs. 3 and 4 . 17 1276830 In Fig. 4, Fig. 4A shows a schematic diagram of an area where the light emitted from the light projecting element is 5% or more in the case where the filter for viewing angle adjustment is not provided, and Fig. 4B shows that In the case of a filter for adjusting the viewing angle,
從杈光元件射出之光存在5〇%以上之區域的概念圖，圖4C 係顯示被視野角調整用遽光器所限制之投光區域及受光區 域所形成之檢測區域的概念圖。 《構成》 如圖3所示，光電感測器丨，主要係由：將從投光元 ，2投射之光之角度範圍與受光元件可受光之角度範圍重_ 稷配置之光學系統，以及在從投光元件到受光元件之間光 線應、、工過的路徑中’在投光元件2之射出開口部及受光元 件2之入射開口部設置之視野角調整用濾光器4所構成。 本只％例中’投光元件# LED，受光元件為光二極體。檢 測=象w為薄透明玻璃基板。投光㈣2及受光元件3， 被设置在以電境E與外部做電氣連接之電路基板9上。電 土板9之供電，由電繞E進行。在電路基板9上，亦穿 載有如動作顯示燈10及其他電路元件。電路基板9㈣ « 納在上下兩分割構造之外殼8, 8，内。 如圖3所示，在上側外殼8之表面上，配合投光元件 、及又光兀件3之位置，形成有投光或受光用開口部$。 視野角调整用據光器4，被敌入在投光側以及受光側之錐 方之開口部6。 又 關於視野角調整用漶光器4，本實施例中，亦係使用 預先相對表面或背面將具有既定傾斜角度Θ之視野角調整 18 1276830 用之方向板（遮板）5在内部以既定間隔排列多數個所形成 之片狀成型體。舉一例而言，遮板5之配列間隔為數十〜 數百μ m，相對各遮板5排列方向之各遮板5之傾斜角度 為60°左右。此視野角調整用濾光器4，如圖4B及圖4c 所示’係設置成在投光側及受光側視野角之調整方向、亦 即遮板5之傾斜角度0相對向。此時，檢測區域s形成如 圖4C中所示之形狀。A conceptual diagram of a region where light emitted from the light-emitting element is 5% or more, and Fig. 4C is a conceptual diagram showing a detection region formed by the light-projecting region and the light-receiving region which are limited by the viewing angle adjustment chopper. "Composition" As shown in Fig. 3, the photo-inductance detector 主要 is mainly composed of an optical system in which the angular range of the light projected from the light-emitting element 2 and the light-receiving element can be received by the optical range, and The light between the light projecting element and the light receiving element is formed by a filter 4 for viewing angle adjustment provided in the exit opening of the light projecting element 2 and the incident opening of the light receiving element 2 in the path that has passed through. In this example, only the 'light-emitting element # LED, the light-receiving element is an optical diode. Detection = Image w is a thin transparent glass substrate. The light-emitting (4) 2 and the light-receiving element 3 are provided on the circuit board 9 electrically connected to the outside by the electric environment E. The power supply to the earth plate 9 is performed by the electric winding E. The circuit board 9 is also provided with an operation display lamp 10 and other circuit elements. The circuit board 9 (4) « is housed in the outer casings 8, 8 of the upper and lower divided structures. As shown in Fig. 3, on the surface of the upper casing 8, a light-emitting or light-receiving opening portion $ is formed at a position where the light-emitting element and the shutter member 3 are combined. The viewing angle adjustment light guide 4 is placed in the opening portion 6 of the taper side on the light projecting side and the light receiving side. Further, regarding the viewing angle adjusting chopper 4, in the present embodiment, the direction plate (shutter) 5 for adjusting the viewing angle of a predetermined inclination angle 18 with a predetermined inclination angle 预先 in advance is also used at a predetermined interval. A plurality of sheet-like molded bodies formed are arranged. For example, the arrangement interval of the shutters 5 is several tens to several hundreds of μm, and the inclination angle of each of the shutters 5 in the direction in which the shutters 5 are arranged is about 60°. As shown in Figs. 4B and 4c, the viewing angle adjusting filter 4 is disposed such that the viewing direction of the light projecting side and the light receiving side viewing angle, that is, the tilt angle 0 of the shutter 5 is opposed. At this time, the detection area s is formed into a shape as shown in Fig. 4C.
接著，就視野角調整用濾光器4之視野角之調整，以 投光側之情形為例加以說明。 不具備視野角調整用濾光器4時，投光元件2所射出 之光P ，如圖4A所示，係從投光元件2之射出面中心一Next, the adjustment of the viewing angle of the viewing angle adjusting filter 4 will be described by taking the case of the light projecting side as an example. When the viewing angle adjustment filter 4 is not provided, the light P emitted from the light projecting element 2 is from the center of the exit surface of the light projecting element 2 as shown in FIG. 4A.
樣的擴散，在投光元件2之射出開口部具有視野角調整用 濾光器4日夺，由投光元件2射出之光，如圖4b所示，會 被限制在$之方向。此外’在目4B中，實線顯示之區 域係投光it件之輸出存纟5()%以上之區域，虛線所示之區 或係因‘板5之遮光效果使得來自投光元彳2之光無法到 達之區域’或來自投光元件之輸出只存在50%以下之區域。 如圖4B所示，通過視野角調整用渡光器4之光，會被平 均的限制在遮板5之傾斜方向0。 同樣地纟又光側亦進行視野角之調整。因此，來自 檢測區域S外之光、及爽白柃、目丨冰丄各 不自仏測對象W之非反射光的擾亂 光’會如圖4C所示，闵盔相軟红 因為視野角調整用濾光器4之遮板6 所遮蔽’而不會射入到受光元件3。 《動作》 19 1276830 接著’說明本實施例之光電感測器1對檢測對象w進 行之檢測動作。本實施例之光電感測器丨，在外殼8内除 了投光部及受光部外，放大器與控制部為一體組裝之放大 裔一體型之構成。因此，從受光元件3輸出之信號，被形 成在圖3之電路基板上之放大器適當地放大後，同樣地在 電路基板9上之控制部進行適當地運算處理。 光電感測器1之光學系統及檢測原理，雖係如上述實 施型態之說明，但本實施例之光電感測器1，係藉由受光 一牛3之入光里之增加使得輸出開關元件導通（〇n)之照明 起動（Light On)型動作方式。因此，當判斷檢測對象w存 在日守’光電感測器1會點亮動作顯示燈丨〇。 如圖4所示，本實施例，可不使用透鏡，而在廣角度 投射光並在廣視野受光。另一方面，& 了防止光線射出至 形成檢測區域S時不需之方向，或來自檢測區i或S之光及 來自k測對象w之非反射光的擾亂光射入受光元件3，從 才又光7G件2射出或射入受光元件3之光的方向，係藉由視 予角旧t用/慮光器4之動作，來限制在形成檢測區域s時 所需之固定方向。 由於此構成，若將本實施例之光電感測器1應用在， 例士將光电感測器移動至在上下方向以既定間隔配置之多 數個玻璃基板之下彳，將光投射到上方來檢測有無玻璃基 板之榀測系統時’可以得到適當之檢測區$ s及檢測距離 此外亦月b確貫防止因通過透明檢測對象w之光、或 沒有檢測對象w時，由投光元件2直接射出之光被在檢測 20 1276830 對象w上方之非檢測對象之玻璃基板w、或是與檢測對象 -W有一定距離之背景所反射之光，而造成感測器產生誤動 -作（參考圖10)。 此外，本實施例之光電感測器1中，可以得到與上述 實施型態相同之作用效果。也就是說，因為在光學系統未 使用透鏡’因此可以省略投光元件或受光元件與各透鏡之 間所須之一定的焦距’而能謀求檢測頭之薄型化。進一步 的，能獲得對檢測對象W之角度變化適應力強、不感光區 域N少之光電感測器。 _ [實施例2 ] 如圖5所示，將投受光元件2, 3以及視野調整用濾光 裔4设在感測裔外殼表面X稍微凹陷處（凹部7)，並使光 學系統偏離外殼表面X來構成，即能從外殼8上方除去不 感光區域N，使外殼8上方皆成為檢測區域。 因此，根據圖5所示之例，昤处p $丨咖， — 心W 除此侍到與上述實施型態 及實施例1中所記載者相同之性歆冰The diffusion of the sample has a viewing angle adjusting filter 4 in the exit opening of the light projecting element 2, and the light emitted from the light projecting element 2 is restricted to the direction of $ as shown in Fig. 4b. In addition, in the case of the head line 4B, the area indicated by the solid line is the area where the output of the light-emitting unit is 5 (%) or more, and the area indicated by the dotted line is caused by the shading effect of the 'plate 5'. The area where the light cannot reach' or the output from the light projecting element is only 50% or less. As shown in Fig. 4B, the light passing through the viewing angle adjustment illuminator 4 is uniformly limited to the tilt direction 0 of the shutter 5. Similarly, the viewing angle is also adjusted on the light side. Therefore, the light from the outside of the detection area S, and the disturbing light of the non-reflected light that is not reflected by the object W, will be as shown in Fig. 4C, and the helmet is soft red because of the viewing angle adjustment. It is shielded by the shutter 6 of the filter 4 and does not enter the light-receiving element 3. <<Operation>> 19 1276830 Next, the detection operation of the photodetector 1 of the present embodiment on the detection target w will be described. In the photodetector 本 of the present embodiment, in addition to the light projecting portion and the light receiving portion in the casing 8, the amplifier and the control portion are integrally assembled and integrated. Therefore, the signal output from the light receiving element 3 is appropriately amplified by the amplifier formed on the circuit board of Fig. 3, and similarly, the control unit on the circuit board 9 performs appropriate arithmetic processing. The optical system and the detection principle of the photo-electrical sensor 1 are as described in the above embodiment. However, the photo-electrical sensor 1 of the present embodiment turns on the output switching element by increasing the light entering the light. (〇n) Light On type operation mode. Therefore, when it is judged that the detection object w exists in the Japanese Guard, the photodetector 1 lights up the operation display lamp 丨〇. As shown in Fig. 4, in the present embodiment, light can be projected at a wide angle and received in a wide field of view without using a lens. On the other hand, & prevents the light from being emitted to the direction in which the detection region S is formed, or the light from the detection region i or S and the non-reflected light from the k-measurement object w are incident on the light-receiving element 3, In the direction in which the light 7G member 2 emits or enters the light of the light receiving element 3, the fixed direction required for forming the detection region s is restricted by the operation of the viewing angle old t/light absorber 4. With this configuration, when the photo-electrical sensor 1 of the present embodiment is applied, the optical sensor is moved to a lower surface of a plurality of glass substrates arranged at a predetermined interval in the vertical direction, and light is projected upward to detect In the presence or absence of the glass substrate measurement system, 'the appropriate detection area $ s and the detection distance can be obtained. In addition, the monthly b is surely prevented from passing through the transparent detection object w or the detection object w is not directly emitted by the light projecting element 2 The light is detected by detecting the glass substrate w of the non-detection object above the object 12 or the light reflected from the background of the detection object-W, causing the sensor to malfunction (refer to FIG. 10). ). Further, in the photo-electrical sensor 1 of the present embodiment, the same operational effects as those of the above-described embodiment can be obtained. In other words, since the lens is not used in the optical system, it is possible to omit the constant focal length required between the light projecting element or the light receiving element and the respective lenses, and it is possible to reduce the thickness of the detecting head. Further, it is possible to obtain a photo-electrical sensor which has a strong adaptability to the change in the angle of the detection object W and which has a small number of non-sensitized regions N. _ [Embodiment 2] As shown in Fig. 5, the light-receiving elements 2, 3 and the field-of-view adjusting filter 4 are disposed on the surface of the sensing shell X, which is slightly recessed (recess 7), and the optical system is deflected from the surface of the casing. The X is configured to remove the non-photosensitive region N from above the outer casing 8 so that the upper portion of the outer casing 8 becomes the detection region. Therefore, according to the example shown in Fig. 5, the p p p 丨 丨 — — 心 心 心 心 心 心 心 心 心 心 心 心 心 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍 侍
注此外，更可以在當檢測對 象W之表面與外殼表面χ密人 山σ之狀恶時，確實檢測出有 無檢測對象W之光電感測器。 [實施例3] 此外，如圖6及圖7所示，^ ^ ^ 7不將在上面詳細說明之多 先电感測器1，以既定間隔，適當 讲#式” ^田地配置在本體部12上方 ^ u, ^ . 各個先電感測器，藉由插入 之*門S C内以既定間隔收納之多數個檢查對象W …即能提供可-次檢測出多數個檢測對象W之 21 1276830 統。舉一例而言，上述光電感測 一 、 j σσ 1或疋檢測對象w之排 列間隔’為數mm〜數十mm左右。 使用此種感測器陣列11，可以腺夕 J以將多個檢測對象w，無 須逐一掃描，而迅速且確實地一呤扒 人榀測。此外，由於來自 檢測區域S以外之擾亂光不會進入 尤70件3，因此可防 止因此種擾亂光所引起之誤檢測 £即使檢測對象W相 對配置有投光元件之感測器外殼表 ,^c , 以一定角度位於檢 測區域S之情形時亦能確實檢測出檢測對象w之點，以及 即時檢測對象為透明之物，蠖县、力士 及疋，又有檢測對象W時由投光 元件2直接投射之光被在檢測對象w±方之非檢測對象之 玻璃基板W，反射亦能誤動作之^，與上述各例相同。 如圖7所示’若將感測器陣列u設為旋轉式，並將感 測器陣列η夾入以既定間隔收納多數個檢查對象w之搬 運卡之間，即能更有效率地運^基之感測器陣列。 《變形例》 關於本發明之光電感側器之光學系統，除了上述各例 中記載之物之外’如圖8所示般可以有種種之變更。 例如，如« 8A戶斤^將投受光元件及適當調整過遮 板角度之視野角調整用遽光器' 4，將投光側及受光側以既 =角度傾斜成剖Μ V字型之對向配置時之構成，亦可以 得到與上述實施型態中記載之物有相同性能之光點感測 器。 此外， 來之配置， 如圖8Β所不，投光元件2與受光元件3為原 僅將遮板適當調整過角度之視野角調整用濾光 22 1276830 為4，並將投光側及受光側以既定角度傾斜成為剖面為v 字型之對向配置之構成時亦相同。又，在圖8A及8β所示 之例中，相對於各遮板5之排列方向各遮板5之傾斜角度 0為90。左右。 又 以上，根據一實施型態及數種實施例，詳細說明了本 發明之光電感測器，然而本發明並不限定於上述之型態， 而可以有種種之設計變更。 例如，在上述各例中將檢測對象W設定為薄透明玻璃 基板，但是檢測對象不限定於此，例如可以是在玻璃基板 之表面上蒸鍍金屬等反射率高之蒸鍍基板或是半導體晶 片、金屬、塑膠、紙等各種材質。 曰 當檢測對象有多個時，其排列方向並不限定於上下方 向，例如為水平方向亦可。此外，在該場合，在左右方向 依恥固疋間隔多個配置之玻璃基板之間差入光電感測器， 並向相岫之玻璃基板投射光線來檢測出有無玻璃基板。當 仏測對象為單數時，亦不會特定限定檢測方向。 關於視野角調整用濾光器4，在上述各例中，係使用 了將預先相對表面或背面具有既定傾斜角度0之遮板5以 既定間隔.排列多數個所形成之栅攔狀成形體，但是亦可以 將同樣之構成以直接、蒸鍍、或塗裝等之方法形成於投光 或是受光元件上。 上述各例中’雖係在投光側或受光側之雙方設置視野 角。周t用渡光器4，但亦可僅在任何一方設置視野角調整 用濾光器4。 23 1276830 遮板5之排配列間隔及傾斜角度等其他規格，並不限 疋Γ上述貫施例之記載，亦可以根據實際之光學系統之狀 來適曰地凋整。因此，例如可漸增或漸減遮板5之配列 角X 〃傾斜角度’或者亦可隨機地設定排列角度與傾斜角 度。 視野角調整用濾光器4之設置型態亦不限於上述各例 之η己載，例如可使用遮板5在内部以既定型態形成之柵攔 狀或疋膠片狀之成形體來作為視野角調整用濾光器4，並 將此設置貼附在形成於感測器外殼8上面之投光或受光用 透明窗上。 此外，上述各例中，雖係以使用LED來作為投光元件 2之情形作了說明，但投光元件並不限定於此，例如可以 使用雷射一極體等各種投光源。關於受光元件3，在上述 各例中，雖係使用光二極體來說明，但是亦可以使用如光 電晶體、光導電元件，等各種光電轉換元件。 在上述實施例中，說明了放大器一體型之光電感測器， 但是將此由有投光部以及受光部之頭部、放大部與控^部 等所形成之放大器分離之構成亦可。 此外，在上述實施例中，光電感測器1 ^ <勖作方式使 用當受光源件3之入光量之增加時輸出開關元 β 導通（On) 之照明起動（Light On)形式，但是亦可以使用卷 田八光量減少 時輸出開關元件會導通之Dark On形式。 如前所述，本發明之光電感測器，除了掊綠、 寸、、、只活用限定 反射形之長處，而實現檢測頭之薄型化外，亦 j、马可以提供 24 1276830 i双則對象之角度變化適應力強，不感光區域之影響少等 回之光電感測器之新穎有用之感測器。 5此外，根據本發明，將複數個此種光電感測器以既定 ^隔排列在一直線上形成感測器陣列，即能提供一種能一 、欢則出以既疋間隔收納在搬運卡匣内之多個檢查 象的系統。 — 【圖式簡單說明】 第1圖，係用來說明本發明之光電感測器及檢測原理 的立體圖。 第2圖，係從端部側觀察第i圖之光電感測器，顯示 本务：光電感测器之光電系統及檢測原理的示意圖。 第3圖，係顯示本發明之光電感測器之一實施例之構 成的立體圖。 第4圖係彳之端部側觀察第3圖之光電感測器，顯示 本發明之光電感測器之光電系統的圖。 弟5圖，係顯示本發明之光電感測器之其他實施例的 構成圖。 第6圖，係顯示使用本發明之光點感測器來構成感測 器陣列例的立體圖。 第7圖，係第6圖之感測器陣列的側視圖。 弟8圖，係顯示本發明之光電感測器之變形例的構成 圖。 第9 ®，係顯示目前之限定反射型光電感測器之光學 系統的圖。 25 1276830 第1 〇圖，係先前技術例之感測器陣列的說明圖。 第11圖，係顯示目前之限定反射型光電感測器之光學 特性的圖。 【主要元件符號說明】 Ρ 投光區域 R 受光區域 S 檢測區域 W 檢測對象Note that it is also possible to detect the presence or absence of the photodetector of the object W when detecting the surface of the object W and the surface of the casing. [Embodiment 3] Further, as shown in Fig. 6 and Fig. 7, the multi-inductance detector 1 which has been described in detail above is not disposed at a predetermined interval, and is disposed in the body portion 12 as appropriate. Above ^ u, ^ . Each of the first inductive detectors, by means of a plurality of inspection objects w ... which are accommodated at a predetermined interval in the inserted * door SC ... can provide 21 1276830 which can detect a plurality of detection objects W - times. For example, the optical inductance measurement, j σσ 1 or the arrangement interval w of the detection target w is about several mm to several tens of mm. With such a sensor array 11, a plurality of detection objects can be used. It is not necessary to scan one by one, but quickly and surely sneak a sneak peek. In addition, since the disturbing light from outside the detection area S does not enter 70 pieces 3, it is possible to prevent erroneous detection caused by such disturbing light even if The detecting object W is opposite to the sensor housing table in which the light projecting element is disposed, and can detect the point of the detecting object w when the angle is located at the detecting area S, and the object to be detected is transparent. County, Lux and 疋, there are test pairs In the case of W, the light directly projected by the light projecting element 2 is reflected on the glass substrate W of the non-detection target of the detection target w±, and the reflection can be malfunctioned, as in the above examples. The sensor array u is set to be a rotary type, and the sensor array n is sandwiched between the transfer cards that accommodate a plurality of inspection objects w at regular intervals, so that the sensor array can be more efficiently transported. The optical system of the photo-inductance side device of the present invention can be variously changed as shown in Fig. 8 in addition to the contents described in the above examples. For example, if «8A households are to be used, light-receiving elements and appropriate Adjusting the viewing angle of the shutter angle by the chopper '4, and arranging the light-emitting side and the light-receiving side at an angle of the opposite angle to the opposite direction of the V-shaped configuration, and the above-described embodiment can also be obtained. The light spot sensor having the same performance as described in the above description. In addition, as shown in Fig. 8 , the light projecting element 2 and the light receiving element 3 are filters for adjusting the viewing angle of the original only by appropriately adjusting the angle of the shutter. Light 22 1276830 is 4, and the light projection side and the light receiving side are at a predetermined angle. The same applies to the configuration in which the inclination is the opposite arrangement of the v-shaped cross section. Further, in the example shown in Figs. 8A and 8β, the inclination angle 0 of each of the shutters 5 with respect to the arrangement direction of the respective shutters 5 is 90. Further, the photodetector of the present invention has been described in detail based on an embodiment and several embodiments. However, the present invention is not limited to the above-described embodiments, and various design changes are possible. In the above-described examples, the detection target W is set to a thin transparent glass substrate. However, the detection target is not limited thereto. For example, a vapor deposition substrate having a high reflectance such as a metal, a semiconductor wafer, or a metal may be deposited on the surface of the glass substrate. Various materials such as plastic and paper. When there are a plurality of detection objects, the arrangement direction is not limited to the vertical direction, and may be, for example, a horizontal direction. Further, in this case, the photodetector is placed between the glass substrates arranged in a plurality of positions in the left-right direction, and the light is projected onto the glass substrate to detect the presence or absence of the glass substrate. When the object to be measured is singular, the direction of detection is not specifically limited. In the above-described respective examples, the filter for adjusting the viewing angle 4 is formed by arranging a plurality of shutters 5 having a predetermined inclination angle of 0 on the front or back surface at a predetermined interval. The same configuration may be formed on the light-emitting or light-receiving element by direct, vapor deposition, or painting. In each of the above examples, the viewing angle is set on both the light projecting side and the light receiving side. The illuminator 4 is used for the circumference t, but the viewing angle adjustment filter 4 may be provided only on either side. 23 1276830 Other specifications such as the arrangement interval and the inclination angle of the shutter 5 are not limited to those described in the above embodiments, and may be appropriately deflated according to the actual optical system. Therefore, for example, the arrangement angle X 〃 inclination angle of the shutter 5 can be gradually increased or decreased, or the arrangement angle and the inclination angle can be randomly set. The arrangement type of the filter for adjusting the viewing angle 4 is not limited to the above-described η load, and for example, a shutter-shaped or stencil-like formed body formed in a predetermined state inside the shutter 5 can be used as the field of view. The angle adjusting filter 4 is attached to the transparent window for light projecting or receiving light formed on the sensor housing 8. In the above-described examples, the case where the LED is used as the light projecting element 2 has been described. However, the light projecting element is not limited thereto. For example, various light sources such as a laser diode can be used. In the above-described respective examples, the light-receiving element 3 is described using a photodiode, but various photoelectric conversion elements such as a photo-electric crystal or a photo-conductive element may be used. In the above-described embodiment, an amplifier-integrated photodetector has been described. However, this may be configured by separating the head formed by the light projecting unit and the light receiving unit, the amplifier unit, and the control unit. Further, in the above embodiment, the photo-electrical sensor 1 ^ < 勖 方式 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 输出 输出 输出 输出 输出 输出 Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light Light It is possible to use the Dark On form in which the output switching element is turned on when the volume of the light is reduced. As described above, the optical sensor of the present invention can provide 24 1276830 i double objects in addition to the advantages of green, inch, and only the use of the limited reflection shape to achieve the thinning of the detection head. The angle is changed, the adaptability is strong, and the non-photosensitive area has less influence, and the sensor is a novel and useful sensor. In addition, according to the present invention, a plurality of such photo-electrical sensors are arranged in a line on a straight line to form a sensor array, that is, a kind of energy can be provided, and the joy can be stored in the carrying cassette at intervals. A system for multiple inspection images. — BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view for explaining the optical inductance detector and the detection principle of the present invention. In the second figure, the photo-inductor of the i-th view is viewed from the end side, and the display is shown in the figure: the photoelectric system of the photo-electric detector and the principle of detection. Fig. 3 is a perspective view showing the construction of an embodiment of the photodetector of the present invention. Fig. 4 is a view showing the photodetector of Fig. 3 viewed from the end side of the crucible, showing the photovoltaic system of the photodetector of the present invention. Fig. 5 is a view showing the configuration of another embodiment of the photodetector of the present invention. Fig. 6 is a perspective view showing an example of constructing a sensor array using the spot sensor of the present invention. Figure 7 is a side view of the sensor array of Figure 6. Fig. 8 is a view showing a configuration of a modification of the photodetector of the present invention. The 9th ® is a diagram showing the optical system of the current limited reflection type photoconductor. 25 1276830 The first diagram is an explanatory diagram of the sensor array of the prior art. Fig. 11 is a view showing the optical characteristics of the current limited reflection type photoconductor. [Description of main component symbols] Ρ Projection area R Light receiving area S Detection area W Detection target
1 光電感測器 2 投光元件 3 受光元件 4 視野角調整用濾光器 5 視野角調整用方向板（遮板） 6 受光用開口部 8 外殼1 Photoelectric sensor 2 Projection element 3 Light-receiving element 4 Filter for viewing angle adjustment 5 Directional plate for viewing angle adjustment (shutter) 6 Light-receiving opening 8 Housing
2626
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004213904A JP3935898B2 (en) | 2004-07-22 | 2004-07-22 | Photoelectric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200604577A TW200604577A (en) | 2006-02-01 |
| TWI276830B true TWI276830B (en) | 2007-03-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW093128857A TWI276830B (en) | 2004-07-22 | 2004-09-23 | Photoelectric sensor |
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| JP (1) | JP3935898B2 (en) |
| KR (1) | KR100611129B1 (en) |
| TW (1) | TWI276830B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008033204A1 (en) * | 2008-07-15 | 2010-02-04 | Trw Automotive Electronics & Components Gmbh | Optical sensor |
| JP6003121B2 (en) * | 2012-03-15 | 2016-10-05 | オムロン株式会社 | Reflective photoelectric sensor |
| JP2019133960A (en) * | 2016-05-26 | 2019-08-08 | シャープ株式会社 | Optical sensor |
| CN108630561B (en) * | 2017-03-15 | 2021-10-15 | 北京北方华创微电子装备有限公司 | Substrate surface detection device and detection method and wafer transfer chamber |
| CN108132138A (en) * | 2017-11-23 | 2018-06-08 | 矽力杰半导体技术(杭州)有限公司 | Optical sensing module |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63275920A (en) * | 1987-05-07 | 1988-11-14 | Shin Etsu Polymer Co Ltd | Light detecting device |
| JP2660929B2 (en) * | 1989-04-19 | 1997-10-08 | ファナック株式会社 | Arc sensor using CCD solid-state imaging device |
| JPH0533085U (en) * | 1991-10-09 | 1993-04-30 | アツミ電気株式会社 | Infrared projector and infrared receiver |
| JPH06160528A (en) * | 1992-11-25 | 1994-06-07 | Matsushita Electric Works Ltd | Polarization regression type photoelectric sensor |
| JPH0743465A (en) * | 1993-07-26 | 1995-02-14 | Saraya Kk | Photoelectric sensor |
| JP3473658B2 (en) * | 1996-07-18 | 2003-12-08 | アルプス電気株式会社 | Fingerprint reader |
| JPH1137740A (en) * | 1997-07-24 | 1999-02-12 | Glory Ltd | Damage detecting device for paper sheets |
| JPH11163080A (en) * | 1997-11-26 | 1999-06-18 | Mecs Corp | Robot hand |
| JP2002026375A (en) * | 2000-07-05 | 2002-01-25 | Oputeikon:Kk | Reflection light sensor |
| JP4357731B2 (en) * | 2000-10-31 | 2009-11-04 | サンクス株式会社 | Reflection type photoelectric sensor detection head |
| JP2002267498A (en) * | 2001-03-14 | 2002-09-18 | Olympus Optical Co Ltd | Photodetector |
-
2004
- 2004-07-22 JP JP2004213904A patent/JP3935898B2/en not_active Expired - Lifetime
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| KR100611129B1 (en) | 2006-08-10 |
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| KR20060008201A (en) | 2006-01-26 |
| JP3935898B2 (en) | 2007-06-27 |
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