TWI269847B - Mechanical seal - Google Patents

Mechanical seal Download PDF

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Publication number
TWI269847B
TWI269847B TW94128928A TW94128928A TWI269847B TW I269847 B TWI269847 B TW I269847B TW 94128928 A TW94128928 A TW 94128928A TW 94128928 A TW94128928 A TW 94128928A TW I269847 B TWI269847 B TW I269847B
Authority
TW
Taiwan
Prior art keywords
seal
ring
sealing
sealed
gas
Prior art date
Application number
TW94128928A
Other languages
English (en)
Chinese (zh)
Other versions
TW200617305A (en
Inventor
Makoto Ueda
Satoshi Fujiwara
Mitsuru Kudari
Masanobu Ninomiya
Original Assignee
Nippon Pillar Packing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing filed Critical Nippon Pillar Packing
Publication of TW200617305A publication Critical patent/TW200617305A/zh
Application granted granted Critical
Publication of TWI269847B publication Critical patent/TWI269847B/zh

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  • Mechanical Sealing (AREA)
TW94128928A 2004-11-19 2005-08-24 Mechanical seal TWI269847B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004335434A JP4336295B2 (ja) 2004-11-19 2004-11-19 静圧形ノンコンタクトガスシール

Publications (2)

Publication Number Publication Date
TW200617305A TW200617305A (en) 2006-06-01
TWI269847B true TWI269847B (en) 2007-01-01

Family

ID=36624829

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94128928A TWI269847B (en) 2004-11-19 2005-08-24 Mechanical seal

Country Status (2)

Country Link
JP (1) JP4336295B2 (ja)
TW (1) TWI269847B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11092225B2 (en) 2017-02-28 2021-08-17 Harmonic Drive Ag Strain wave gear mechanism with an inner seal

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673807B2 (ja) * 2006-08-02 2011-04-20 日本ピラー工業株式会社 静圧形ノンコンタクトガスシール
EP2017507B1 (en) * 2007-07-16 2016-06-01 Tenaris Connections Limited Threaded joint with resilient seal ring
JP6422378B2 (ja) * 2015-03-09 2018-11-14 日本ピラー工業株式会社 端面接触形メカニカルシール

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08296744A (ja) * 1995-04-26 1996-11-12 Mitsubishi Heavy Ind Ltd メカニカルシール
DE69735197T2 (de) * 1997-11-21 2006-07-13 Nippon Pillar Packing Co., Ltd. Mit statischem druck arbeitende kontaktlose gasdichtung
JP4294791B2 (ja) * 1999-05-17 2009-07-15 アプライド マテリアルズ インコーポレイテッド 半導体製造装置
JP2001200848A (ja) * 2000-01-17 2001-07-27 Matsushita Electric Ind Co Ltd 流体軸受装置
JP2002299271A (ja) * 2001-03-29 2002-10-11 Tokyo Electron Ltd 縦型熱処理装置
JP3974772B2 (ja) * 2001-11-16 2007-09-12 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP2004225725A (ja) * 2003-01-20 2004-08-12 Eagle Ind Co Ltd 摺動部品

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11092225B2 (en) 2017-02-28 2021-08-17 Harmonic Drive Ag Strain wave gear mechanism with an inner seal

Also Published As

Publication number Publication date
JP4336295B2 (ja) 2009-09-30
TW200617305A (en) 2006-06-01
JP2006144902A (ja) 2006-06-08

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