TWI269847B - Mechanical seal - Google Patents

Abstract

To provide a mechanical seal having excellent follow-up capability to a stationary seal ring and capable of developing excellent sealing function. This mechanical seal 4 comprises a rotating seal ring 5 fixed to a rotating shaft and the stationary seal ring 7 fittedly held on the inner peripheral part of a metal seal case 6 through an O-ring 12 so as to be moved in the axial direction. A clearance between the seal case 6 and the stationary seal ring 7 is secondarily sealed while the seal ring 7 is allowed to move in the axial direction by engagedly holding the O-ring 12 on the outer peripheral surface part of the stationary seal ring 7 and pressingly bringing it into contact with the inner peripheral surface part of the seal case 6. A resin coating film 63 with a film thickness of 5 to 100 mum is formed on the inner peripheral surface part of the seal case 6 within a range where the O-ring 12 is relatively displaced following at least the axial movement of the stationary seal ring 7.

Description

1269847 IX. Description of the invention: [Technical field to which the invention belongs] The invention relates to a kind of mechanical seal, which is fixed on the side of the rotating shaft, and is fixed on the side of the rotating shaft; Turning over the AA month to seal the metal seal box in the manner of moving the dust coat to move it in the axial direction; by pressing the flat and holding the two-axis through the face and pressing it into contact with the sealed box on Tuesday φ It can be allowed to move in the axial direction of the seal ring. Mountain::Secondary seal ring [Prior Art] As a conventional mechanical seal, the gas seal is sealed and straightforward. · A well-known static pressure type non-connecting seal The ring is fixed on the side of the rotating shaft and rotates, loosely seals the ring, is a through-to-single type ring, a sealed box through which the stationary rotating shaft penetrates; and a spring, and: = between the two sealed boxes 'with the static sealing ring Between the seal box and the stationary seal ring, a space is formed by the pair-to-shoulder, and the sealed box and the seal of the seal are connected to each other, and the two seals are sealed. The gas is sprayed through the 4' scoop to seal the gas at a predetermined pressure between the seal faces: The sealing gas discharge path will be maintained in a non-contact state (e.g., between two faces) to maintain the sealing end faces > ", and seek documents 1). However, it is preferable that the above-mentioned static pressure type non-technique has a milk seal of the 琴 type card holder in advance in sealing conditions or construction. In the case of a stationary seal ring, or 1269847 Patent Document··〇99/27281 (Fig. 8) [Summary of the Invention] When the seal = ring is held in the stationary seal ring, it will follow the peripheral face of the sealed box. The shape, the movement of the 'direction' causes the 0-ring to slide under the pressure of pressing, that is, the shape of I, and thus the following problem occurs. The M 狁 box is in its function, due to #s ^ κ , : and therefore. Contact of the type ring...,::==, -Stop, the ring is slippery and slippery. 'The tunnel moves to the ground without the ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ The follow-up of the ring is reduced, and the sealing gas is not stopped. The second:: In particular, the non-contact gas seal is static, and the rotation is *the r is: ά, the static seal ring may * smoothly move the sealed end :;=: and: Na hits the rotation, the static seal ❹ 'even if the supply of the sealing gas is stopped again, and a gap is formed between the sealing end faces, at this time, the raw sealing gas & There is no "suitable static pressure between the sealing end faces, so that the sealing function is lost. The above problem" may also be in the moving dust type non-contact mechanical squeezing type non-contact mechanical seal (by two sealing ring cake) Λ,, in the _ contact type mechanical seal ^ ^, slewing to produce a sealing function) or seal and create dynamic pressure between the faces to maintain a non-contact state. The purpose of the seal in July, is provided - does not produce The above problems can be achieved with excellent static seal ring and good mechanical seal Pingliangye is in the function of sealing 7 1269847 r. 2 = mechanical seal for the above purpose, and: 疋 = = ring ' is fixed on the side of the rotating shaft; and still: face two two touch: Γ〇 环 环 保持 保持 保持 保持 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止 静止Relatively shifting Y to seal the film. m^ is formed with a resin coating, such a mechanical seal, a preferred embodiment of the shape, non-contact gas seal, the static heart, for example, a static type - the type Producer: The gas-sealing seal is connected to the stationary ring seal (9) at a predetermined interval, and is sealed in the sealed box and the static gas discharge passage, and the sealing gas discharge passage 2 = sealed and connected - a series of passages, and opened as a gap between the two = phase space seals, _ from the opposite side of the garment to the sealing gas r introduced ~ sealed gas discharge path to introduce a predetermined pressure of the sealing milk Between the sealing end faces, 疋& In the non-contact type, the static non-contact gas seal is used for "cleaning treatment of semiconductor wafers, electronic components, etc.", """, "reverse, mask, and glass-based domains". It is necessary to have a high-level pollution prevention countermeasure ^\, and a f-transfer table processing area sealing mechanism, for example, this: month / 'is adopted as an effective

^ ^ Μ # Χ ^Dust non-contact gas seal, used in the county seat of the π-shaped plastic 骖 以 以 , , , , , , , , , , , , , , , 被 被 被 被 被 被 被 被 被 被 被 被 被 被 被The processing area of the table is in the heart gel ^ In this state of use, the rotary seal 珲, & or set. The axis of rotation is concentric; the sealed box is equipped with a cylindrical structure that is fixed in the rotating stage and fixed in the plastic cover, and is placed in the plastic cover, and the support frame of the weeping # + 4 Sealing ring, system 盥# The soil is too confined to be concentric and is kept in the seal in the direction of the rotation of the rotary seal to the direction of the axis, so as to be able to move in, in the inner periphery of the plastic cover Forming:: the method is more than the cover section; the plastic cover is formed with a sealing gas supply passage for sealing the annular passage ... sealing:: ... sealing gas is discharged - the sealing gas supply passage is in the shape of the sealing The seal gas discharge passage portion of the box is formed/formed; the butt joint portion of the portion is connected to the connected state" ^ and the sealed box end, the static pressure type non-contact gas seal can also be produced by a dense seal. By bringing the static pressure of the sealing gas into contact with the moving state. At the end, the male and the sealing end faces are kept at a non-t. When the sealed fluid is to avoid the metal component (metal material, etc.) mixed, there is a possibility that the metal corrosion can be prevented, so as to prevent the sealed fluid from being straight to the metal sealing case, Preferably, the resin coating film is preliminarily formed on the peripheral surface of the sealing case and the portion which is sealed by the flow, and the portion includes the portion in which the 〇-shaped ring is relatively moved. In particular, the upper _ type non-contact gas seal, in order to contact the sealing gas with the sealing gas for 2 j, causes the metal to be formed: preferably, the sealing gas of the sealed box and/or the contact with the sealed fluid. The knife is preliminarily formed with a resin-coated film (including a portion where this portion is likely to be in contact) 'this portion contains a portion for sliding the 0-ring. 9 -1269847 As a constituent material of the resin coating film, it is preferable to use a low-friction type plastic having a low contact resistance with the 〇-type ring, and further preferably, it is excellent according to the properties of the dense fluid or the sealing condition. It is preferable to use a fluororesin such as tetrafluoroethylene (PTEF) which has excellent low friction and heart. Further, the film of the resin coating film = 5 ~ "Guy' and 2 〇 ~, the claw is even better. The resin coating at least ... the part of the ring sliding), preferably machined into according to the present invention, can provide - The displacement of the seal with the stationary seal ring can be smoothed with the seal of the seal. 66 A. % of the seal is good with the seal % _ ^, the piece. Because of A, static pressure type non-contact seal and other mechanical seals The sealing function is impaired by the failure of the (4) ring, and the sealing function can be damaged at any time. The sealing function can be pre-coated with the resin coating film in the 'knife and the self-contact with the 〇-type ring technology. The sealing fluid contact portion 77 (in the case of static pressure type non-contact _ 4 of the eighth, ten seals) also contains a sealing gas to contact the sealed box to produce metal separation /= ~ sealing gas contact with metal cesium ions, even In order to avoid the generation of metal ions, it can still exert a good sealing function. In addition, due to the resistance of the insect and chemical resistance material 匕 + ^ ^ ^ y 1θ i (three) film to be covered with the sealed fluid 2 (four) = Divided, therefore even if the fluid being sealed is viscous (four), the work is in the metal (4) The box is not rotted in the state of being good. In the case of using the suspected transfer table to process the semiconductor wafer, the configuration must be rotated in advance... the processing area of the reverse feed/r 褥 load σ is kept clean, and -1269847 It is necessary to prevent the intrusion of particles from the driving side of the rotating stage to 2 in advance. Therefore, such a treatment device for preventing high pollution prevention has been conventionally used: D proposes to pre-rotate the stage and cover the driving part thereof. The plastic cover is pre-arranged to shield the processing area of the rotating stage from the plastic cover, and the sealing device is sealed with a labyrinth or a magnetic fluid (for example, refer to the special opening η-% bulletin). Pre-setting the lining of the lining of the lining into the stone 走 楂 楂 , , , , , , , , 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒 微粒In the process of invading the inside of the hood (in the case of harmful substances, etc.), the driving system of the rotating shaft is generated: early.: Actually, the curved shaft used by the conventional processing device Sealing It is not possible to adequately cover the processing of the substrate cleaning device, etc., and the area inside the cover, but not in the case of the labyrinth shaft seal. The composition == stop measures are perfect. Also the machine accuracy becomes uneven- Because of the rotation accuracy or the unevenness of the text, the ridge suction effect caused by the unevenness of the path diameter will lead to the two-zone fluid seal, and the quality work: the song 'full play. The sealing function is sufficient. It is difficult to use the same as the Qu Han seal. The above-mentioned cylindrical plastic processing device uses the rotary seal ring of the driving portion of the mount to contact the gas seal (from the rotating stage side to the processing). In the area and the inner area of the hood, the η-enclosure room will be in the sealing gas discharge mechanism, and the machine maple seals invented by H will be used as the sealing area and the plastic cover of the sealing table. At the same time, compared with the h-shape of the temple in the case of using the above-mentioned labyrinth shaft seal, it is more reliably shielded between the processing area of the rotating stage and the inner area of the cover where the rotating shaft is arranged. Therefore, by using the mechanical seal of the present invention (static type non-contact gas seal), the treatment of the treatment area can be maintained in a dry-air atmosphere in which the particles are completely prevented from being infiltrated from the inner region of the cover, and the substrate is cleaned well. The treatment is carried out to achieve a high degree of pollution prevention measures. Further, it is possible to eliminate the problem that the cleaning liquid residue generated in the treatment area or the harmful substances generated in the treatment area leak into the inner region of the cover and adversely affect the driving system of the rotating shaft. The re-appearer will form a (4) rubber cover when sealing the gas supply passage (to supply the sealing gas to the sealing gas discharge passage), and when the sealing gas is discharged from the sealing gas supply passage to the sealing emulsion (the sealing gas formed in the sealed box) When the gas flow in the discharge passage portion is performed in the diameter direction of the plastic cover, the gas may be deformed by the gas which acts on the joint between the sealed oxygen supply passage and the sealed gas discharge passage, and the sealing gas may be generated. The supply cannot be carried out well, 'but the mechanical seal of the present invention (static type mechanical seal), due to the flow of gas from the =-f shame t, the passage to the dense gas outlet is in the plastic: The axial direction is carried out, so no matter whether the material of the plastic grass or the wall thickness (diameter direction ^ degree), the plastic cover will not be deformed, that is, the above problem will not occur. The material and shape (wall thickness) of the plastic knee cover can be freely set according to the conditions of use of the processing device in the state in which the moon is not self-contained. y 胄 is a mechanical seal of the present invention which is a static type I non-contact gas seal, and can be configured to maintain the seal end faces by adding a static gas of the seal gas to the (four) ά μ, The non-contact state is composed of ^ ^, even in the general static pressure type non-contact gas seal (static dust type non-contact gas seal which is only held by static pressure and maintained in a non-contact state between the surfaces) cannot be charged 12 • 1269847 points Contamination function under the condition of sealing function. The sealing function can still be satisfactorily performed and the following is not provided. [Embodiment] The mechanical seal 4 of the present invention is placed in the fourth embodiment. The processing is performed, and the main part is enlarged. ,... "The plastic cover 3 covers the drive section of the rotating stage i".

Cut. (1) When the substrate (semiconductor wafer, electronic 7L substrate, iridium liquid crystal substrate, photomask, glass substrate, etc.) of the object to be processed is placed in a proper place (two processes, chemical treatment, etc.), The mechanical seal tool 4, shields and seals the processing area 2 in which the sealed fluid region of the rotating carrier 1 is disposed, and the region in the plastic cover 3 of the unsealed fluid region (in this example, the atmospheric region, the following county 1) "

The % is the area inside the cover") B to keep the processing area A in a clean state. Further, the driving unit 2 includes a rotating shaft 2a that is coupled to the rotating stage 2 and extends in the vertical direction, a bearing that rotatably supports the rotating shaft 2a, and a driving mechanism that supports the rotating shaft 2a, and supports the members. The support casing 2b in the cover inner region B is configured to rotationally drive the rotary stage 1. The rotary stage 1 is made of carbonized tantalum, and is formed into a shape of a rotating body such as a circular plate horizontally disposed in the processing area A. Moreover, as shown in FIG. 1, the plastic cover 3 is formed in a cylindrical shape in which the upper end opening is integrally formed with a sleek plastic (in this example, PTFE is used), and the driving portion disposed on the lower surface side of the rotary stage 1 is covered. 2. As shown in Fig. 1, between the rotating stage 丨 and the plastic cover 3, an appropriate labyrinth shaft seal 1a may be provided in advance as needed. By setting such a labyrinth shaft seal 1 & in advance, 13 1269847 叮 /, 岔 丨〇 丨〇 后 后 k k k k k k k k k k k k k 往 往 往 往 往 往 往 往 往 往 往 往 往 往 , , , , , , , ... domain B. y, the night temple 坆 treatment area A invades into the inner area of the hood as shown in Fig. 1 and Fig. 2, the machine κ ¢ ,1, the mechanical seal selection 4 series a static pressure type non-contact hole seal (static pressure type non-contact mechanical It is attached to the rotating stage! It is fixed and rotated: it is equipped with a rotating sealing ring 5, which is arranged in the plastic cover 3 and is coaxial with the line; the cylindrical sealing box 6' is a stationary sealing ring 7, which is connected with the rotary seal and the moving part. 2 support casing 2b; ring 5 && τ % 5 into concentric and in the direction of the opposite direction of rotation to ^ 〇 〇 ring 12, 12 to be able to move on the axis. Inner circumference) 6 a / spring structure IT ^ portion (between the seal ring retaining portions 61 7 described later 1 to seal the seal ring 6 and the stationary seal ring cover portion 3a at a time, press the < ^ ' 5 to the rotary seal ring 5; ring you open > into the plastic 1 1 part (the sealing g ^ inner circumference mentioned later and docked in the sealed box, the end of the mountain seal% holding part 61 under the gas passage 9, through the plastic cover 3, capital) and A series of seals in the two sealing rings 5 7 in the sealing box 6 and the stationary sealing ring 7, from the sealing gas 1 〇 from the sealing ... between the seals 5a, 7a; to hold it, * New, 9 is ejected between the sealing end faces 5a, 7a. The material is made non-contact «', and the two regions are sealed by the cover (4), β is as shown in Figs. 1 and 2, and the holding portion 61 is inwardly from the lower end portion thereof; == Made of a metal seal made of a cylindrical seal (for example, the ®-like elastic yellow retaining portion 62 is attached to the lower end portion thereof (sealed environmentally friendly: the part is broken, etc., sealed box... the section 3a and its outer peripheral part ( The seal W) 6b is butted against the annular cover, the garment ', and the outer peripheral portion of the portion 61). The 〇-shaped ring 11 is fused to the inner peripheral portion of the upper end side of the plastic cover 3 (the upper portion of the annular cover portion 3a). In the state of the inner peripheral portion of the side portion, the transmission spring holding portion 62 is attached to the support casing 2b. The rotary seal ring 5 is made of a material harder than the constituent material (for example, carbon) of the stationary seal ring 7 (for example) The annular body formed by the carbonaceous stone is fixed to the lower surface of the rotary stage 1 as shown in Fig. 1. The lower end surface of the rotary seal ring 5 is a sealed end surface of a smooth annular surface (hereinafter also referred to as "rotating side" Sealing end face") 5a 〇 As shown in Fig. 1, the stationary sealing ring 7 is a sealing end face with a smooth annular surface on the upper end surface (hereinafter also The annular body of the "stationary side seal end face" 7a is placed in the vertical direction by a pair of fluorocarbon rubber ring-shaped rings 12, 12, and is movable in the axial direction (movable up and down). The inner peripheral portion 6a of the seal ring holding portion 61 of the seal case 6. The outer diameter of the stationary-side seal end surface 7a is set to be slightly smaller than the outer diameter of the rotary-side seal end surface 5a, and the inner diameter of the stationary-side seal end surface 7a is set to be slightly It is larger than the inner diameter of the rotary side seal end surface 5a. Each of the 0-rings 12 is engaged with the annular 0-ring formed on the outer peripheral portion of the stationary seal ring 7 in a state of being crimped to the inner peripheral portion 6a of the seal case 6. The groove 7b is capable of allowing the stationary seal ring 7 to move in the axial direction (moving up and down) while sealing the gap between the stationary seal ring 7 and the seal case 6. Further, a circular hole 7c extending in the axial direction is formed at a lower end portion of the stationary seal ring 7, and a metal (for example, SUS316 or the like) drive pin 13 inserted into the spring holding portion 62 of the seal case 6 is engaged with the drive pin 13 With this circular hole 7c, the axial direction of the stationary seal ring 7 can be allowed to move within a predetermined range, and the stationary seal ring 7 cannot be rotated relative to the seal case 6. In addition, the number of the circular holes 7c and the card 15 1269847 t in the circular holes ～ is arbitrary, and a plurality of them may be provided as needed. As shown in Fig. 1, the spring member 8 is formed by a number of rituals attached to the stationary seal ring 7 and the spring holding portion 62 below it (the 楛 - - only a few (only one)) , which is used to seal the static seal and produce a closing force for closing the ring 5 and the roof to close the surface 5a, 7a. As shown in Figure 2 and Figure 2, The sealing gas supply passage of the sealing gas passage rubber cover 3... ▲ plastic sealing seal 7 and the gas ejection passage 91 formed in the sealed casing 6 and the static gas circulation passage 91 are formed by the shape # %忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 忒猃 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由 由The ring 12, 12 is 94, and the sealing ring side of the groove is generated as shown in Fig. 1. The axial direction of the sealing gas supply rubber cover 3 extends through the upper and lower directions of the plastic G system (the opening of the plastic cover segment 3a, above it) The upper end (downstream end) is connected to the body supply line (not shown). The swim ^) is connected to the appropriate sealing gas as shown in Figure 1. The box side passage 92 holding portion 61 penetrates from the lower end portion thereof to the inner circumference / seals the environmental protection body supply passage 90 of the seal case 6 and the communication space 94 13 八 P 6a, and connects and communicates with the seal gas seal gas supply passage 90: 4. The downstream end of the cartridge side passage 92 and the seal between the seal and the end portion of the seal case (9) are connected to the cover segment portion %. The ring 16 is sealed and connected to the 16 1269847 static pressure generating groove 93. Invited, and continuous or intermittent " side 岔 端面 end face 7a into a concentric ring groove). That is, as shown in Figure 3 household _ θ, in this case the latter is used (interrupted sealing end face 7a into Concentric: not the static pressure generating groove 93, which is formed by the stationary side 93a~. The space between the plurality of arcuate grooves arranged in parallel with the communication space 94 is based on the width of the upper and lower directions (〇-shaped ring)丨2,12 Amount of movement in the axial direction (upper protection required for the follow-up of the seal ring 7)

The seal ring 7 is moved, and the sides are shifted by the amount of %. 俾 俾 俾 俾 俾 俾 俾 俾 俾 俾 俾 俾 俾 俾 amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp amp Also, the seal ring. The connection between the connecting stations 94 is also not in the center of the groove, in the static seal: 57 - the end (upstream end), tied. Type opening), the outer peripheral surface of the mountain and the garment 7 is opened (in the communication space 94, such as the circle 3, and the first end), and the plurality of branch portions 95a are branched, and as shown in Fig. 3, the arcuate grooves 93a are formed. Opening. In the appropriate place of each of the circular seal gas passages 9 constituting the static ink generating groove 93 (for example, the adjacent portion #, the field, and the upstream side of the divergent portion 9Sa, the flow device 96 is provided (the buzzer, the capillary, the porous member) The device of the instant power b) "even if the gap between the sealing end faces 5a, 7a becomes a force T', the gap will be kept in an appropriate state by the weight of the hexagram 1. That is, when the machine is rotated (rotating the stage ^ ^ + Mama Vibrating Temple seals the gaps of the sealing end faces 5a, 7a a J «The yoke generating groove 93 flows out into the seal 2 between the sealing end faces 5a, 7a, and is sealed to the static pressure generating groove 93 through the throttle 96 The amount of gas will be unbalanced, causing the pressure in the static pressure generating groove 93 to decrease, and the sealing gas = the opening force generated will be smaller than the closing force generated by the spring member 8, and the joint will be between the seals 5a, 7a. The gap becomes smaller, and the gap is adjusted to the extent of the field. Conversely, when the gap between the sealing end faces becomes small, 17 1269847 straw rises by the same dust force as above, and the opening force becomes more closed. The gap between the static plant and the groove 93 becomes larger, and the gap is adjusted to an appropriate degree: Between the two ends, the two areas A, B are high-pressure and do not contain the material of the private seal gas rA ^ ^ ^ Λ /, clean gas 1 〇, system = gas passage 9 (sealed gas supply ... 〇, box side passage 92, communication space 94, And the seal ring side passage as a sealing gas! 〇, according to the secret two, ^

II A :: Any traits of undesirable traits of gas. In this case, in addition, the sealing gas ^. In general, it is harmless and clean. When the rotary shaft k is driven, the supply is stopped during the operation of the operation/stage 1 (the rotation is stopped after the rotation of the load A, and the w ^ T is stopped. The rotary port is operated, and the seal gas 10 is supplied to the door. 5a, 7a is maintained after the start of the proper start, and after the supply of the sealing gas 10 is stopped, the dense rotating shaft 2a is completely stopped: after the following:: Rotating: After the operation of the stage is stopped and whether 1 is being Operation, raining at any time, or without rotating the stage, will... supply the supply of sealing gas 10. The mountain, oxygen 10 is supplied to the static pressure production ^ The static pressure generating groove 93 is Xuan ^ γ 钇 93钇, bad The sealing gas is introduced by opening the gap between the partitions 5a, 7a. The opening force is generated by introducing the sealing end faces 5a, 7a = the static pressure of the raw. Therefore, the sealing faces 5a, 7a are closed. Μ ## 8 (acting on the state of the sealed end. That is, the closing force (the magazine load) of the guide is the balanced non-contact end face 5a, and the read gas 10 forming the 曰93 between the h is sealed to the fluid sealed into 4 Membrane, by the presence of the fluid film, 18 1269847 = sealing end face 5a, 7a outside the area (processing area) eight with (within the cover The eggs are sealed and sealed. The seal gas 1 () j = the elastic force of the member 8 (strong hope #舌,〆 and 浑肓^ 〃 K load), according to the sealing conditions, the Shiyi seal end faces 5a, 7a are appropriately set according to the sealing conditions. Between the gaps of the gap, the gap between the Weng a pq and the η is the appropriate gap (generally m) 〇 1) "In addition, the static seal ring 7, the system, the 丨t Zhi, the ancient sudden" Supply, 佟 即 即 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 The inside of the sealed box 6 is Cui Bao, but the sealed case 6 is composed of 6a and fluororubber, etc.

, 72仏I 1 1 2 between the two holdings #餐ΐ六 I and in order to make the 〇-shaped ring 12,12 play two times the rut, filled in the sealed box 6 and the stationary seal ring - and installed in a dusty state The inside of the sealed case 6 &< S, the 0-ring 12, 12 is crimped to the j-plate 0 < the inner peripheral surface 6a is shrugged, and the rake 〇_丄 is moved to perform the 〇-shaped ring 1212 J. This may make With the stationary seal ring 7 causing the static seal #7... (sliding) is difficult to carry out smoothly, and the followability of the hawthorn % 7 is lowered. Therefore, the mechanical seal ring holding portion 61 of the present invention (for the 〇-shaped ring 12, 12) is formed as shown in Fig. 2, 'the low-marsh holding tree is formed in the seal 6a, and the inner portion of the seal portion is closed. The resin-coated coating film 63 is slid to improve the static 1 & i2, U can be smoothly _ ^ 么 么 么 ^ ^ 7 7 7 。 。 。 。 。 。 。 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂The sealing box portion is formed in a portion of the sealing box that is contacted by the 0-ring (or the sealed fluid is also formed in the contact with the sealed fluid). That is, 19 1269847 is sealed in the sealed box 6 as shown in FIG. The surface of the ring holding portion 6i is in the form of a resin coating film 63', so that the sealed fluid does not directly contact the metal portion of the dense two. Thus, the sealed fluid can be prevented from coming into contact with the sealing case 6. The metal ions are prevented from being deteriorated by the metal ion conduction treatment in the processing area A. In addition, the processing device and the mechanical seal 4 mounted on the device are in contact with the sealed fluid, All components except the sealed box 7 are not produced by metal ions. The non-metal 杻 Λ , - VA , ... is coated with a non-metallic material, that is, the slave 轺 达 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The carbon-made dust coats U, 12, and 16 are made of a fluororubber member, and then a non-metal material is used to constitute a rotary stage, and a resin is applied to the portion facing the place: or the portion to be touched. g's part of the LAA is connected to the '1 face', and the spring member 8 and the value r 13 which are made of metal are disposed in the inner region of the cover B to avoid the metal separation of the conductive wafer and the like. In addition, as a resin coating film 63, it is a low-friction property such as a fluororesin having a small coefficient of /. Plastic dolphins, PTFE is used in the middle. i I ' This example is further preferably a film thickness of the resin coating film 63 of 5 or more. By making the core '2〇~4〇, the average film thickness is obtained, and the unevenness of the film thickness is avoided. “3 Contacting the contact resistance of the tf 12, 12 u Dal #止密封环7 The surface of the film 63, in particular, the surface of the film portion 63a that is in contact with the resin is mechanically processed into a smooth surface with high precision. In addition, the sealing gas passage 9 is also recognized by you. > 9 For example, as shown in Fig. 1, #绿& _ makes the mountain seal rolling body supply passage 90 chain line, the downstream rises and 9〇a 趟朦 趟朦 q q ' mouth and seal gas discharge passage, cover 3 The inner peripheral surface opens ^ 之 β the upstream end 9 1 a in the poor twisted B, the surface is open, and the two open ends 9〇μ1ά 6 the outer circumference of the high pressure sealing gas 10, but as a result, by the neighboring eight The sill acts on the two open ends 90a, 9la, and the fish pass P knife, so the plastic cover 3 is connected to the a

Can produce two open ... 〇 a, 9 丨: the two-way deformation. As a result, there is a problem that the sealing gas supply is reduced, and the sealing function of the good seven-point is reduced or succumbed to ..., /5: 艮 is good. However, since the above mechanical seal is in the sealing gas supply passage 9()_ of #^^3, the money (4) is in the plastic cover mountain, the crucible and the sealing gas outlet passage portion formed in the sealed casing 6 (box side passage 9 The hole body is abutted #8, 4 Λ The cover portion is in communication with the seal box end portion 6b, and is made to pass from the seal gas supply passage 9. ^: The gas flow of the discharge passage 91 is ordered in the axial direction of the plastic cover 3 'Therefore, the material of the ^ 勉 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Therefore, the material of the plastic cover 3 can be freely set according to the use conditions of the processing device without the test of the pressure strength of the above-mentioned sealing body 1 +, +, + + (wall thickness) Moreover, since the above-mentioned labyrinth shaft seal la is disposed between the plastic cover 3 and the rotary stage 1 due to the transmission, the plastic cover 3 is not deformed, so that the curved shaft seal is not damaged. In addition, the composition of the present invention is not limited to the above embodiment. It is also possible to appropriately modify and modify without departing from the basic principles of the invention. 21 1269847 The coating film 63 is formed in the supply ring 12 "4 4 , although the resin is "closed by the sealing fluid; 2 Two-touch ^ can be in contact with the sealed box part), but in addition to the sealing fluid can be touched) sealed box part. That is, if the seal may be connected to the surface portion of the ring holding portion 61 and the side of the seal ring side (2::6' (4)

::==“3, the sealed fluid and the sealing gas are in contact with the metal part of the sealed box 6. If the direct fluid and the sealing gas are not in contact with the metal, the metal can be prevented from being sealed by the metal ions. Lead to the treatment area 2::: and; the raw metal is good. The treatment of the secondary enthalpy is not made into a body structure, but it is also possible to seal the box. For example, such as. And = is formed by a cylindrical upper portion... a lower body;:: Γ, which is held by a cylindrical seal ring, and is composed of a = H6 1囫%-staying portion 66. The upper body 6 "lower 66 is connected by a suitable coupling. The sealing case and the lower end of the seal holding portion 65) 6a abuts against the annular cover = the outer peripheral portion (the outer peripheral portion of the upper body 64) is permeable to the fluoro rubber The kneading type is loosely attached to the inner peripheral portion of the upper end side of the plastic cover 3 (relative to the inner peripheral portion of the annular cover section 2: part), and the shore casing 2 is mounted through the spring holding portion 〇 The rings 12, 12 are loaded in the annular protrusion (10) 22 ^ 1269847 formed in the stationary seal ring 7 and formed in the upper body 64: the wide annular protrusion "a, 65a (upper and lower facing the static seal) The annular space between the ring 7 and the holding portion ¢5). Further, ap -jt- _ A, by means of a circular hole rus316 which is inserted into the seal 6 〃 in the axial direction (In the case of the month b, the stationary hole D is allowed to pass through the circular hole 7c in the predetermined range, and the stationary seal ring 7 cannot move in the axial direction of the hole, and the dense direction is transmitted in the axial direction. The box side passage 92 is a part The body 64 is from the J: the lower end portion, the first gas passage 92a of the portion 65, and the upper portion, the inner portion of the upper portion, and the upper end portion of the first gas passage 92a (four) first, 1 - path 92b Percent. Gas t rubber square ring end portion, the abutment portion being based) poor sealing of the shape. Two left foot body "and the sealing ring remains connected to the lower portion 65 upper end communicating state under bad ... ^. The second gas path (downstream) communicates with the communication space 94. The first ι _ lower end U swim end) is facing the sealing gas supply passage 9. ::: Two:: " a) and open at the end 63 of the sealed box. Further, both of them are connected to each other in a state in which they are sealed by a fluororubber 0-ring 16 (attached between the cover segment portion a and the seal case end portion 6a). When the sealed casing 6 is formed as a separate structure, as shown in Figs. 5 and 6, the resin coating film 63 is formed on the supply ring 12, 12, and the sealed portion 6a is sealed. The portion of the sealed box that the fluid contacts, that is, the portion of the upper body 64 is formed. Further, as shown in Fig. 7, a resin coating film 63 may be formed in the seal box portion which is in contact with the sealing gas 1 、, that is, on the inner peripheral surface of the cartridge side passage 92 and the surface portion of the seal ring holding portion 65 as needed. ^ θ 23 1269847 The invention can also be applied to the end face of the two sealing rings which are relatively rotatably slipped = mechanical seal. However, the present invention can be more suitably adapted to the non-contact type mechanical seal that attaches to the follow-up of the stationary seal ring (ie, the mechanical seal is attached to the static pressure type non-contact gas seal or to the dynamic pressure of the seal. The groove is formed to be held in a non-contact state by a sealing end face y pressure between the sealing end faces. The mechanical seal shown in Fig. 5 or Fig. 7 is configured to seal the static non-contact gas in a non-contact state only with the static pressure of the sealing gas 10, a ~ Keep "Jin", the mechanical seal of the present invention is configured as =;; Figure 8 or Figure Chuanqi Xuan private #再攻冯糟 by static pressure and dynamic pressure between the w sealing face 5a, 7a will The composite non-contact gas seal 104 of the sealing end face 5a7 is in the state of surname. The complex human pull-type self-contact is in the sealing function, and the static sealing ring 7 is: the prime: the 丨 is more important. That is, the composite type shown in Fig. 8 or Fig. 9 is rotated in the end face of the sealing end, and the sealing end face 5a of the sealing core 5 is formed by the dynamic pressure production _19 ^ f The surface (the square-turning side sealing end is generated in the sealing end surface 5a7: the door dynamic pressure generating groove 19 is used to sway the repeated sealing condition, etc., and is appropriately set to two: the shape of the secondary groove 19 can be configured according to the dynamic pressure generating groove 19 In the two cases, as shown in Fig. U or Fig. 12, 9 is formed in a shape in which a plurality of grooves are arranged side by side, and the groove is in the second groove portion 2 of the mountain seal a... 0b is configured such that the 曰 groove portion 2〇a and the side seal end face 5a are: 曰/曰 portion 2〇a, which is rotated in the direction of rotation, and is rotated to rotate two pairs: (4) the direction of rotation (direction A) The opposite direction extends 24 1269847 into a slanted shape, and the second, even her μ seal ring 5 r entangled / 9 σ minute 2 〇 b is in the opposite direction of the inner diameter direction and the rotation direction (1 direction) Extending into a slanting shape, each groove is a shallow groove with a depth of one to one 11, and the outermost 泸 phase "mountain portion (the first groove portion is eight Π eight sides of the work side i and the knife a Diameter side end) and innermost diameter side end (2nd

The ditch is only awkward. P is within 20b; ^ phase "Mountain A 乂田円铋 side )", located in the heavy abundance area of the two sealing end faces 5a, 7a. That is, as shown in Figure 1 ,, dynamic pressure creates a groove The outer diameters E and F of the inner and outer parts of the seal are 7 mm outside the sealing end face (the stationary side seal end face) of the seal 7% and the inner side of the outer seal (g rotating side is j...the outer surface is 5a outer diameter) A and The outer diameter B of the diameter (^ the rotating side seal end face 5a and the my Γ» 仏) D and # pressure generating groove 93 (the arcuate groove 93) and its inner guard c and the eyesight} ^ c with b< The relationship between f<a, d<e<C is appropriately set in the range of the relationship. In this example - ' σ 疋 疋 b b b 5 5 g (F a b ) / (A-mail 0.9 or 〇 5 叩-e) / (c - BDg 〇 9 conditions. Each of the grooves 20 is formed in a substantially "shaped shape" in which the i-th groove portion core and the second groove portion 20b are coincident at the base end portion as shown in FIG. Or, as shown in Fig. η, the first groove portion 2〇a and the second groove portion & the base end portion of the bird are staggered in the circumferential direction. Further, the composite non-contact gas seal 1〇 The configuration other than the above is the static diagram shown in Fig. 4, Fig. 4, Fig. 5 or Fig. 7. The type non-contact gas seal 4 is the same. ' According to the composite non-contact gas seal 1〇4, the static pressure of the sealing gas ι and the dynamic pressure of the dynamic pressure generating groove 19 are generated between the sealing end faces 5aJa, thereby The isostatic pressing and the dynamic pressure maintain the (four) end faces 5a, 7a in a non-contact state. This causes a situation in which the sealing end faces 5a, 7a cannot be held in an appropriate non-contact state even with a static pressure of the sealing gas 1〇. At the same time, it can be maintained in a proper non-contact state by dynamic pressure. Moreover, the static pressure type non-contact gas seal which is kept in contact with only 25 1269847 by static pressure is less than the static pressure to reduce the sealing gas 1 ( b) In the '10 rolling body 10, the required supply pressure generating groove 19 is opened to the sealing ώ. The unmoving groove is not moved... The innermost diameter side end: and the sealing end TM is at the sealing end surface... the leak is 1° The levee has a function of reducing the formation of the ς and the gap. As a result, the sealing gas introduced between the 5a and 7a of the 宓 立 山 山 〇 〇 〇 〇 〇 〇 〇

The side of the sputum is suppressed in the leakage of the gp 妯 妯 域 domain (the gas area to be sealed) A ,, so that the capture characteristics of the illusion are extremely good. Thereby, the intrusion of the particles of the sealing gas of 19 is caused. In addition, depending on the installation, the conditions of the clothes, the conditions of use, etc. can be suppressed to the two-way rotation of the shaft 2a instead of the one-way rotation. In this case, only the two directions of rotation and the reverse direction of the rotary seal ring 5 are correct. This kind of moving factory produces the shape of the 19L 疋 均 均 即 即 即 即 定 定 定 定 定 定 定 定 定 定 定 定 定 定 定 定 定 θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ θ Dance and shoot. σ y For example, the sealing side line on the rotating side is a symmetrical shape makeup cage, * wide, illusory and relatively straight to the circumferential direction of the circumference, both the sill generation groove and the second dynamic pressure generation groove are formed): white distance The interval is formed as a complex array, and the side row 5 is rotated in the forward direction. You are in the seal %. In the rotary seal ring 5, the reverse is mixed: the brother 1 moves repeatedly and the slot produces a wish, and when the 4 reverse direction rotates, the movement is generated by the cymbal. Pressure. As a long-distance flute... ^ τ 猎 by the second dynamic pressure to create a groove for each brother 1 and brother 2 dynamic pressure to produce groove depth and groove width - for example, the use of the groove 26 -1269847, in addition, without the need to inhibit the production of metal ions Under the sealing condition, the resin coating may also be pre-formed on the sealing plate (type ring 12), the second type: the 壌12 is relatively displaced (slip force) with the movement of the stationary sealing ring 7 (the sliding force) of the mouth p-knife 6a. In addition, the material of the resin coating film 63 is a condition of the contact resistance of the large two. The condition is based on the seal: the body is sealed: 6: the piece is selected. For example, the sealed fluid may be formed by a coring: a contact portion of the sealant 6 with the sealed fluid, and a resin coated film 63 of a chemical-resistant material. At this time, the mechanical seal member or part thereof is a member of the ώ 1 + 4 body contact or a part of the knives and is a coating with the sealed flow = before or with such a material. The right kitchen 4 u wood can also play a good sealing function even if it is broken. 2a viscous two sealed box 6, and 蒋#丝- 奸I is fixed at the relative side of the seal _t, 疋 at the seal % 5 to be able to move in the axial direction and the helmet 1 is relatively suspected to be held in the rotating side member . (4) It is not possible [Illustration of the drawings] Fig. 1' shows the machine view of the present invention. Λ T is a detailed view of the main part of the longitudinal section of the longitudinal section. θ ′ is the top view of the mechanical seal such as ^; m '' Fig. 4, which is a display of the seal ring. Fig. 5 is a longitudinal cross-sectional front view corresponding to Fig. 1 of Fig. 1 showing a mechanical seal of the present invention. Fig. 5 is a longitudinal cross-sectional front view corresponding to Fig. 1 of the present invention. And 6, a detailed view of the main part of Fig. 5. Fig. 7 shows a mechanical seal of the present invention. Fig. 6 is a longitudinal sectional front view corresponding to 盥q δ of the W<3> variant. j Fig. 8 Fig. 2 shows the longitudinal seal of the mechanical seal of the present invention. Fig. 9 shows the longitudinal section of the mechanical seal of the present invention. Fig. 9 shows the HI c of the mechanical seal of the present invention. Example of a longitudinal example (3) 6 is a longitudinal section front view. Figure 10 is a detailed view of the main part of Figure 8 or Figure 11 showing the mechanical seal shown in Figure 8 or Figure 9 (composite The main diagram of the rotating seal ring of the dynamic pressure generating groove of the type of contact gas seal. The top view of the clothing cow is shown in Fig. 12'. The mechanical seal is not shown in Fig. 8 or Fig. 9 (, >,

Non-contact air seal) The rotary seal ring of the modified example of the dynamic pressure generating groove is only a thousand-section view. [Main component symbol description] 1 Rotary stage 2 Drive part 2a Rotary shaft 2b Support case 3 Plastic cover 28 • 1269847 4 Mechanical seal (static type non-contact air seal) 5 Rotary seal ring 5a Rotary seal ring seal End face 6 Sealing box 6a Sealing box inner peripheral surface 7 Static sealing ring 7a Sealing end face of stationary sealing ring 7b Type 0 ring groove 8 Spring member 9 Sealing gas passage 10 Sealing gas 12 0-ring 61 岔 Sealing and holding portion 63 Resin coating Membrane 19 Dynamic pressure generating groove 90 Sealing gas supply path 91 Sealing gas discharge path 92 Case side passage 93 Static pressure generating groove 94 Connecting space 95 Sealing ring side passage 104 Mechanical seal (composite type non-contact gas seal) A Processing area B Area inside the plastic cover (inside the cover) 29

Claims (1)

1269847 X. Patent application scope: 1 · A mechanical seal, and borrowed. The rotary seal ring is fixed in the direction of rotation I ': and the stationary seal ring is transmitted through the 0-ring to move to the axis ΓΓ type ΓΓ a metal sealed box that is held by the rotating shaft; the axis of the sealing ring can be allowed to be allowed between the seal box and the stationary seal ring by the seal The direction is privately sealed and is secondarily sealed, and is characterized in that: the axis == heavy box circumferential surface portion is formed at least in a range in which the 0-ring is relatively displaced with the direction of the stationary seal ring. There is a resin coated film. Factory _ two = range... mechanical seal, the system is a kind of static non-contact (four), the static pressure type non-contact air seal, the remaining distance is Γ ο :: the ring, formed between the sealed box and the stationary sealing ring - "Connecting space of the seal" and the sealed box and the static passage through the communication space - the series of passages, the sealing ring of the two seal rings =: the sealing gas discharge path between the sealing end faces of the surface, by: : The outlet passage introduces the sealing gas of the predetermined pressure into the seal: π to keep the 'sealing surface' in a non-contact state. The bundle 3. The mechanical seal of the second paragraph of the patent scope, such as two non-contact (four) In the case where the processing device of the rotary part is covered with a cylindrical (four) cover, the area I in the drive cover of the mouth is set to a concealed configuration area of the rotary stage and the plastic win = (4) is concentric with the axis of rotation The cylinder I structure of the casing: placed in the plastic cover, installed in the branch of the swaying part 30 1269847, the static seal 譬〆 seal ring u is ^ concentric with the * turn seal ring, and is rotating the seal The inner circumference of the box is 'Γ' held in a dense plastic cover such as: weekly * The mechanical seal of item 3, wherein the annular cover of the end of the sealed box is formed with a cover cover, and the sealing gas supply is supplied to the sealed gas discharge passage passage portion. The sealing passage is sealed with the sealing gas formed in the sealed box. The portion of the sealing portion is connected with the end portion of the sealed box to form a connection. 5. For example, the patent scope of Shen Qing is in the section of Qianfeng. a piece, wherein, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The mountain can be kept in a non-contact state. 6. If the scope of the patent application is 帛, the mechanical seal of the member is attached to the peripheral surface of the sealed box and is in contact with the sealed fluid. Forming a resin coating film, the portion comprising the relatively displaced portion of the 0-ring. ^ 7. The mechanical seal of claim 2, 3 or 4, wherein the sealing gas is sealed in the sealed box and / or a part of the sealed fluid is formed with a resin coating film, the part And the mechanical seal of the sixth aspect of the invention, wherein the resin coating film has a film thickness of 5 to 1 〇〇/zm. The mechanical seal of the present invention, wherein the resin coating film has a film thickness of 20 to 40 / / m. 31 -1269847 10. The mechanical seal of claim 6, wherein the surface of the resin coating film is at least The part of the 0-ring sliding is machined into a smooth surface. XI. Schema: 32