TWI264407B - Substrate cassette having cross-bar connecting units - Google Patents

Substrate cassette having cross-bar connecting units

Info

Publication number
TWI264407B
TWI264407B TW094111997A TW94111997A TWI264407B TW I264407 B TWI264407 B TW I264407B TW 094111997 A TW094111997 A TW 094111997A TW 94111997 A TW94111997 A TW 94111997A TW I264407 B TWI264407 B TW I264407B
Authority
TW
Taiwan
Prior art keywords
cross
substrate
bar
bars
cassette
Prior art date
Application number
TW094111997A
Other languages
Chinese (zh)
Other versions
TW200626443A (en
Inventor
Young-Jin Lee
Byung-Il Cho
Original Assignee
Sang A Flontec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sang A Flontec Co Ltd filed Critical Sang A Flontec Co Ltd
Publication of TW200626443A publication Critical patent/TW200626443A/en
Application granted granted Critical
Publication of TWI264407B publication Critical patent/TWI264407B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electrophotography Configuration And Component (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

Disclosed herein is a substrate cassette having cross-bar connecting units. The substrate cassette basically comprises a bottom frame, a top frame spaced apart upward from the bottom frame by a predetermined distance, a plurality of side frames located between the top frame and the bottom frame to maintain the distance between the bottom and top frames, and one or more cross-bars horizontally secured between the side frames to support substrate thereon. A respective one of the cross-bars has a plurality of supporting protrusion each extending upward from the cross-bar to come into the contact at an upper end thereof with a lower surface of the substrate seated on the cross-bar. Preferably, the upper end of the supporting protrusion is provided with a contact piece to come into contact with the lower surface of the substrate. Such a configuration is effective to substantially prevent generation of cross-bars debris to thereby minimize damage of substrates, and enables the cross-bars to be secured to the cassette from a substrate entering/exiting direction with a high securing operation efficiency. Further, the present invention can obtain a robot arm working space between the cross-bar and a substrate supported on the cross-bar, thereby enabling effective substrate loading using robot arms.
TW094111997A 2005-01-20 2005-04-15 Substrate cassette having cross-bar connecting units TWI264407B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050005243A KR100600515B1 (en) 2005-01-20 2005-01-20 Cassette having a connector for installing the cross-bar

Publications (2)

Publication Number Publication Date
TW200626443A TW200626443A (en) 2006-08-01
TWI264407B true TWI264407B (en) 2006-10-21

Family

ID=36840206

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094111997A TWI264407B (en) 2005-01-20 2005-04-15 Substrate cassette having cross-bar connecting units

Country Status (3)

Country Link
KR (1) KR100600515B1 (en)
CN (1) CN100416362C (en)
TW (1) TWI264407B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101029827B1 (en) 2009-03-05 2011-04-15 (주)상아프론테크 hexahedral framework of casette for loding LCD glass
KR101385701B1 (en) 2011-02-01 2014-04-17 주식회사 테라세미콘 Boat for supporting substrate and support unit using the same
KR101284105B1 (en) * 2011-04-01 2013-07-10 주식회사 테라세미콘 Boat for supporting substrate
KR20120089192A (en) 2011-02-01 2012-08-09 주식회사 테라세미콘 Boat for supporting substrate and support unit using the same
JP2014504039A (en) * 2011-02-01 2014-02-13 株式会社テラセミコン Substrate support boat and support unit using the same
JP6006734B2 (en) * 2011-02-01 2016-10-12 株式会社テラセミコンＴｅｒａｓｅｍｉｃｏｎ Ｃｏｒｐｏｒａｔｉｏｎ Substrate support boat and support unit using the same
JP5981986B2 (en) * 2011-04-13 2016-08-31 株式会社テラセミコンＴｅｒａｓｅｍｉｃｏｎ Ｃｏｒｐｏｒａｔｉｏｎ Support unit for substrate support
WO2013027396A1 (en) * 2011-08-23 2013-02-28 Hitachi Koki Co., Ltd. Fastening tool
KR101317328B1 (en) 2011-12-01 2013-10-11 주식회사 테라세미콘 Apparatus for processing substrate
TW201330170A (en) * 2011-11-28 2013-07-16 Tera Semicon Corp Supporting pin for supporting substrate and substrate processing apparatus for using the same
KR101279941B1 (en) 2013-02-08 2013-07-05 (주)상아프론테크 Proof reinforcement structure deformation glass substrate having a loaded cassette
KR101484533B1 (en) * 2013-08-27 2015-01-28 주식회사 테라세미콘 Substrate supporting apparatus
KR101725263B1 (en) * 2015-10-16 2017-04-10 (주)상아프론테크 Support bar and substrate loading cassette having the same
KR101725264B1 (en) * 2015-10-16 2017-04-10 (주)상아프론테크 Support bar and substrate loading cassette having the same
KR101683427B1 (en) 2016-06-16 2016-12-06 주성이엔지 주식회사 Valve room for anti sweating and anti floating
KR101683426B1 (en) 2016-06-16 2016-12-06 주성이엔지 주식회사 Valve room for anti sweating and water hammer preventing fuction
KR101802863B1 (en) * 2016-12-06 2017-11-29 양락주 Mask cassette
CN110099532A (en) * 2018-01-29 2019-08-06 上海东熠数控科技有限公司 The board of EDM CNC System combines the unit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977491B2 (en) * 1997-07-16 2007-09-19 淀川ヒューテック株式会社 PCB cassette
CN1214274C (en) * 2001-12-14 2005-08-10 奇美电子股份有限公司 Glass base plate box for liquid crystal display
KR100675627B1 (en) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 Cassette for accepting substrate

Also Published As

Publication number Publication date
CN1808224A (en) 2006-07-26
CN100416362C (en) 2008-09-03
KR100600515B1 (en) 2006-07-13
TW200626443A (en) 2006-08-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees