JP2014504039A - Substrate support boat and support unit using the same - Google Patents

Abstract

A board support boat and a support unit using the same are disclosed.
In the substrate support boat and the support unit according to the present invention, since the entire surface of the substrate is uniformly supported, the substrate is prevented from drooping due to its own weight when the substrate is processed. Therefore, even if the substrate is processed, there is no change in the characteristics of the substrate, so that there is an effect that the reliability of the substrate processing process is improved.
[Selection] Figure 2

Description

  The present invention relates to a substrate support boat that can uniformly support the entire surface of a substrate and prevent the substrate from being deformed by its own weight during the processing of the substrate, and a support unit using the same.

  The substrate processing apparatus is used when manufacturing a flat panel display, and is roughly classified into a vapor deposition apparatus and an annealing apparatus.

  The vapor deposition device is a device for forming a transparent conductive layer, an insulating layer, a metal layer, or a silicon layer that forms the core of a flat panel display, such as LPCVD (Low Pressure Chemical Vapor Deposition) or PECVD (Plasma-Enhanced Chemical Vapor Deposition). There are chemical vapor deposition apparatuses such as the above, and physical vapor deposition apparatuses such as sputtering.

  The annealing apparatus is an apparatus for improving the characteristics of the deposited film after depositing the film on the substrate and crystallizing or phase-changing the deposited film.

  In general, the heat treatment apparatus includes a single substrate type (Single Substrate Type) that heat-treats one substrate and a batch type (Batch Type) that heat-treats a plurality of substrates. The single-wafer type heat treatment apparatus has an advantage that the configuration is simple, but has a disadvantage that the productivity is lowered, and a batch type heat treatment apparatus is often used for mass production.

  A chamber for providing a heat treatment space is formed in the batch type heat treatment apparatus, and support means for supporting each of a plurality of substrates carried into the chamber is essential for the chamber.

  However, since the conventional support means supports and supports the edge side of the substrate, the substrate may be bent and deformed by its own weight when the substrate is heat-treated. As a result, the characteristics of the flat panel display deteriorate, and there is a problem that the reliability of the substrate processing process decreases.

  The present invention has been made to solve the above-described problems of the prior art, and its purpose is to uniformly support the entire surface of the substrate and prevent the substrate from being deformed by its own weight during the processing of the substrate. It is an object of the present invention to provide a boat for supporting a substrate and a support unit using the same.

  To achieve the above object, a boat for supporting a substrate according to the present invention is a boat for supporting a substrate to be processed by being loaded into a chamber of a substrate processing apparatus, and a pair of first main bars facing each other; A pair of second main bars respectively coupled to the upper surface of the first main bar and parallel to the first main bar, facing each other and supporting the edge side of the substrate in contact with each other; A plurality of first connection bars that connect the first main bars to each other, and a plurality of first connection bars that are provided in the first main bar and the second main bar and that are formed in the space formed by the second main bar. The space formed by the second main bar is partitioned into a plurality of sections so that the plurality of substrates are partitioned and supported, and the plurality of substrates are prevented from flowing due to contact with the corners of the plurality of substrates. That a plurality of sections - and a support pin.

  In order to achieve the above object, a substrate support support unit according to the present invention is a support unit that supports a substrate to be processed by being loaded into a chamber of a substrate processing apparatus, and is in contact with the bottom surface of the chamber. A plurality of pedestals, a support stand extending vertically from one end of the pedestal, and horizontally extending from one side of the support stand and stacked vertically with a space between each other. A support rib provided on the front side and the rear side of the chamber in a pair, and one end side of the support rib facing the pair in a pair. And a cross support bar on which the other end side is supported, the cross support bar positioned on the front side of the chamber, and the cross support bar positioned on the rear side of the chamber One end side and the other end is respectively supported, and a boat in which a plurality of the substrates are mounted supported by being partitioned.

  The substrate support boat and the support unit using the same according to the present invention uniformly support the entire surface of the substrate, so that the substrate is prevented from sagging due to its own weight when the substrate is processed. Therefore, even if the substrate is processed, there is no change in the characteristics of the substrate, so that there is an effect that the reliability of the substrate processing process is improved.

It is a perspective view of the substrate processing apparatus provided with the support unit for substrate support concerning one embodiment of the present invention. It is an enlarged view of the support unit shown in FIG. It is an enlarged view of the supporter shown in FIG. FIG. 4 is an enlarged view of a “B” portion of FIG. 3. FIG. 3 is an enlarged view of the boat shown in FIG. 2. FIG. 3 is an enlarged view of “A” portion of FIG. 2. FIG. 6 is an enlarged view of a “C” portion of FIG. 5. It is a figure which shows the use condition of the boat concerning one Embodiment of this invention. It is a perspective view of the boat concerning other embodiments of the present invention. It is a figure which shows the various shapes of the 1st vertical support pin concerning other embodiment of this invention. It is a figure which shows the various shapes of the 1st vertical support pin concerning other embodiment of this invention.

  The following detailed description of the invention refers to the accompanying drawings that illustrate, by way of illustration, specific embodiments in which the invention can be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different from each other but need not be mutually exclusive. For example, the specific shapes, structures and characteristics described herein are associated with one embodiment and can be implemented in other embodiments without departing from the spirit and scope of the invention. It should also be understood that the location or arrangement of the individual components in each disclosed embodiment can be changed without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is, when properly described, appended claims along with all equivalents of the claims that are claimed. Limited only by. In the drawings, like reference numerals indicate like or similar functions across various aspects, and lengths, areas, thicknesses, and the like, and forms thereof, may be exaggerated for convenience.

  Hereinafter, a board support boat and a support unit using the same according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view of a substrate processing apparatus provided with a substrate supporting support unit according to an embodiment of the present invention.

  As shown in the figure, the substrate processing apparatus 100 includes a main body 110 formed in a substantially rectangular parallelepiped shape and having an appearance, and a chamber 110 a in which the substrate 50 is processed is formed in the main body 110. The main body 110 can be formed not only in a rectangular parallelepiped shape but also in various shapes according to the shape of the substrate 50, and the chamber 110a is provided as a sealed space.

  Hereinafter, the processing of the substrate 50 includes heating and cooling the substrate 50, all steps for depositing a predetermined film on the substrate 50, annealing, crystallization, or deposition of the predetermined film deposited on the substrate 50. It should be understood as a concept including all heat treatment steps for phase change. And the material of the board | substrate 50 is not specifically limited, It can form with materials, such as glass, a plastics, a polymer, a silicon wafer, or stainless steel.

  The front surface of the main body 110 is opened and a door 113 is provided. The door 113 opens and closes the chamber 110a. With the door 113 opened and the chamber 110a opened, the substrate 50 is supported by a robot arm (not shown) or the like, and the substrate 50 is carried into the chamber 110a. Then, the substrate 50 is processed with the door 113 closed and the chamber 110a closed.

  Inside the main body 110, a support unit 120 for supporting the substrate 50, a heater (not shown) for heating the substrate 50, a cooling pipe (not shown) for cooling the substrate 50, and the like are provided. .

  The support unit 120 according to the present embodiment will be described with reference to FIGS. 2 is an enlarged view of the support unit shown in FIG. 1, FIG. 3 is an enlarged view of the supporter shown in FIG. 2, and FIG. 4 is an enlarged view of “B” portion of FIG.

  As illustrated, the support unit 120 according to the present embodiment includes a supporter 130, a cross support bar 140, and a boat 150.

  The supporter 130 is a base 131 that contacts the bottom surface of the main body 110 forming the chamber 110a, a support base 133 that extends vertically from one end of the base 131, and a horizontal extension from one side of the support base 133. And a plurality of support ribs 135 formed in a stacked manner with a space therebetween.

  The supporters 130 are set as a pair facing each other, and the supporters 130 forming the set are provided at both front corners and rear corners of the main body 110, respectively. And the support rib 135 of the supporter 130 which makes a set opposes each other.

  FIG. 2 shows that two sets of supporters 130 are arranged, and the shape formed by virtual lines connecting the supporters 130 adjacent to each other is substantially rectangular. That is, each supporter 130 is located at a rectangular apex portion, and the shape formed by each supporter 130 substantially corresponds to the shape of the substrate 50.

  The distance between the supporters 130 facing each other in the set and the distance between the supporters 130 forming the set can be appropriately adjusted according to the size of the substrate 50.

  The left end side and the right end side of the cross support bar 140 are fixedly supported by the support ribs 135 of the supporters 130 forming a set. Needless to say, the cross support bars 140 respectively supported by the support ribs 135 of the supporters 130 that are positioned on the front side and the rear side of the chamber 110a are arranged vertically and parallel to each other. Absent. Also, each cross support bar 140 supported by the support rib 135 of the supporter 130 that is set on the front side of the chamber 110a, and the support rib of the supporter 130 that is set on the rear side of the chamber 110a. Needless to say, the respective cross support bars 140 supported by 135 are positioned at the same height.

  The support rib 135 is formed in a shape corresponding to the cross support bar 140 so that the cross support bar 140 is stably supported by the supporter 130 and the end side of the cross support bar 140 is engaged and supported. A groove 135a is formed. Then, a locking groove 135b is formed perpendicular to the length direction of the mounting groove 135a in the portion of the support rib 135 where the mounting groove 135a is formed, and on the outer peripheral surface on the end side of the cross support bar 140 A locking ring 141 inserted and locked in the locking groove 135b is formed.

  Since the cross support bar 140 is engaged and supported by the mounting groove 135a, the cross support bar 140 is prevented from being displaced on the support rib 135 in the front-rear direction. The cross support bar 140 is prevented from being displaced in the left-right direction on the support rib 135 by the locking groove 135b and the locking ring 141 perpendicular to the mounting groove 135a.

  2 shows that the cross support bar 140 is also supported by the pedestal 131. In this case, both the upper surface of the pedestal 131 and the mounting groove 135a formed on the upper surface of the support rib 135 are shown. And the locking groove 135b can be formed similarly.

  A boat 150 on which a substrate 50 is mounted and supported is supported on the cross support bar 140 positioned on the front side of the chamber 110a and the cross support bar 140 positioned on the rear side. The boat 150 will be described with reference to FIGS. 2 and 5 to 7. 5 is an enlarged view of the boat shown in FIG. 2, FIG. 6 is an enlarged view of “A” portion of FIG. 2, and FIG. 7 is an enlarged view of “C” portion of FIG.

  As illustrated, the boat 150 includes a first main bar 161, a second main bar 171, a first connection bar 181, and a second connection bar 191.

  The first main bars 161 are provided as a pair facing each other with a space therebetween, and the front end portions are respectively held by any one cross support bar 140 located on the front side of the chamber 110a (see FIG. 1). The rear end side is respectively held by another cross support bar 140 located on the rear surface side of the chamber 110a.

  An arc-shaped support piece fixed to the cross support bar 140 located on the front side of the chamber 110a at the front end of the first main bar 161 so that the boat 150 is firmly supported by the cross support bar 140. 163 is provided. The arc-shaped support piece 163 is formed in a semicircular shape corresponding to the outer shape of the cross support bar 140.

  A first connecting bar 181, which will be described later, coupled to the rear end side of the first main bar 161 is provided with a bar-shaped linear support piece 183 mounted and supported on the cross support bar 140. The linear support piece 183 is disposed perpendicular to the cross support bar 140 and is mounted and supported on the cross support bar 140.

  Since the arc-shaped support piece 163 is engaged and supported by the cross support bar 140 and the linear support piece 183 is mounted and supported by the cross support bar 140, the boat 150 is firmly mounted and supported by the cross support bar 140. Further, since the arc-shaped support piece 163 is formed in a semicircular shape and is engaged and supported by the cross support bar 140, and the linear support piece 183 is formed in a bar shape and is mounted and supported on the cross support bar 140, the boat 150 is The boat 150 is separated from the cross support bar 140 simply by lifting up. Therefore, the boat 150 can be easily separated from the cross support bar 140.

  The cross support bar 140 is provided with a plurality of stoppers 143 (see FIG. 6) that prevent the boat 150 from being displaced along the cross support bar 140 on the cross support bar 140. The stopper 143 is provided on the cross support bar 140 located on the front side of the chamber 110 a and contacts the arc-shaped support piece 163. Needless to say, the number of stoppers 143 corresponds to the number of arc-shaped support pieces 163.

  The second main bar 171 is provided as a pair facing each other, is parallel to the first main bar 161, and is coupled to the upper surface of the first main bar 161, respectively. Of the four side surfaces of the substrate 50, one side surface and the other side surface of the substrate 50 are in contact with and supported by the second main bar 171.

  The first main bar 161 and the second main bar 171 are coupled to each other via a plurality of connection protrusions 173 and have a space in the vertical direction. The second main bar 171 is provided with a plurality of horizontal support pins 175 that are formed substantially perpendicular to the second main bar 171 and support the edge side of the substrate 50.

  In the substrate support boat and the support unit using the same according to this embodiment, a plurality of substrates 50 are sectioned and supported by one boat 150. For this purpose, the first main bar 161 and the second main bar 171 are provided by the second main bar 171 so that a plurality of substrates 50 are partitioned and supported in the space formed by the second main bar 171. A plurality of partition-support pins 165 and 177 are provided to partition the formed space into a plurality of portions and to contact the corners of the plurality of substrates 50 and support the plurality of substrates 50, respectively. Since the partition-support pins 165 and 177 are in contact with the corners of the substrate 50 to support the substrate 50, the substrate 50 is prevented from being displaced on the second main bar 171.

  The first connecting bar 181 is substantially perpendicular to the first main bar 161 and connects the pair of first main bars 161 together. The first connection bar 181 is preferably disposed at a position lower than the first main bar 161 and coupled. For this purpose, the first connecting bar 181 is positioned between the pair of first main bars 161, the horizontal bar 181a disposed below the first main bar 161, and both ends of the horizontal bar 181a. And a coupling bar 181b that is respectively bent upward and coupled to the first main bar 161. It goes without saying that the connecting bar 181b can be bent a plurality of times from the horizontal bar 181a depending on the structure of the boat 150.

  The reason why the first connecting bar 181 is arranged lower than the first main bar 161 is that when the substrate 50 is mounted on the second main bar 171 for processing, the first connecting bar 181 is disposed between the substrate 50 and the first connecting bar 181. This is for the purpose of forming a sufficient interval so that the processing gas of the substrate introduced during the processing of the substrate 50 flows smoothly.

  The first connection bar 181 is provided with a plurality of first vertical support pins 185 on which the substrate 50 is mounted and supported. Since a plurality of first vertical support pins 185 are provided on the first connecting bar 181 at regular intervals, the entire surface of the substrate 50 is uniformly supported. Therefore, the substrate 50 is prevented from sagging due to its own weight when the substrate 50 is processed.

  It is preferable that the upper end portion of the first vertical support pin 185 on which the substrate 50 is contacted and supported is formed in a rounded shape and makes point contact with the substrate 50. Then, since the lower surface of the substrate 50 is also exposed in the same manner as the upper surface, the substrate 50 is processed more uniformly.

  The first connecting bars 181 may have different intervals. When the first connection bars 181 are arranged at different intervals, the first vertical support pins 185 provided on the first connection bars 181 having different intervals can be bent a plurality of times.

  More specifically, the intermediate part of the first vertical support pin 185 (see FIG. 7) is bent 185a, and the virtual part passes through the longitudinal center of the upper part and the lower part of the first vertical support pin 185, respectively. The straight lines L1 and L2 are formed in parallel to each other. That is, since the upper part is located outside the lower part of the first vertical support pin 185 coupled to the first connecting bar 181, the upper part separated from the lower part of the first vertical support pin 185. The part supports the substrate 50. Then, when the interval between the first connecting bars 181 is not constant, the first vertical support pins 185 provided on the first connecting bar 181 uniformly support the entire surface of the substrate 50 with a constant interval. be able to.

  When the lower part of the first vertical support pin 185 is formed in a circular shape and the first vertical support pin 185 can rotate, the first vertical support pin 185 is rotated to easily support the part where the substrate 50 hangs down. be able to.

  The second connection bar 191 connects the first connection bars 181 adjacent to each other. The second connection bar 191 is provided with a plurality of second vertical support pins 193 that support the substrate 50. The second vertical support pin 193 can also be formed in the same configuration as the first vertical support pin 185.

  Locking hooks 167 with which robot arms (not shown) are engaged and locked are provided on both ends of the first main bar 161, respectively. When the robot arm is engaged with the locking hook 167 and the locking hook 167 is moved up and down, the boat 150 is moved up and down.

  When the robot arm is locked to the locking hook 167, the height and position of the locking hook 167 may be appropriately adjusted so that the robot arm does not interfere with the partition-support pins 165 and 177. it can.

  FIG. 8 is a diagram showing a use state of the boat according to one embodiment of the present invention, which will be described.

  As shown in the figure, two boats 150 are held on the cross support bar 140 (see FIG. 2), and two boats 50 are supported on each boat 150. Depending on the size of the substrate 50, one or more boats 150 may be supported by the cross support bar 140, and one or more substrates 50 may be supported by each boat 150.

  The board support boat and the support unit using the board support board according to the present embodiment have the plurality of horizontal support pins 175, the plurality of first vertical support pins 185, and the second vertical support pins 193 to make the entire surface of the substrate 50 uniform. Since it is supported, the substrate 50 is prevented from sagging due to its own weight when the substrate 50 is processed.

  FIG. 9 is a perspective view of a boat according to another embodiment of the present invention, which will be described.

  As illustrated, in the boat 250 according to another embodiment of the present invention, the lower side of the first vertical support pin 285 and the lower side of the second vertical support pin 293 are the first connection bar 281 and the second connection pin 281. The connecting bars 291 are detachably coupled to each other. For this purpose, the first connecting bar 281 and the second connecting bar 291 have a first coupling groove 281a and a second connecting bar 281 into which the first vertical support pin 285 and the second vertical support pin 293 are inserted and removed. A coupling groove 291a is formed.

  Since the first and second vertical support pins 285 and 293 are attached and detached, when the substrate 50 is processed, the first and second vertical support pins 285 and 293 are concentrated on a portion where the substrate 50 hangs due to its own weight. Can be arranged. Therefore, it is possible to more completely prevent the substrate 50 from being deformed.

  Needless to say, the shape of the lower side of the first and second vertical support pins 285 and 293 and the shape of the first and second coupling grooves 281a and 291a correspond to each other.

  10 and 11 are views showing various shapes of a first vertical support pin according to another embodiment of the present invention, which will be described.

  FIG. 10 shows that the cross-sectional shape of the lower side of the first vertical support pin 385 is elliptical, and FIG. 11 shows that the cross-sectional shape of the lower side of the first vertical support pin 485 is square. . Needless to say, the shape of the first coupling grooves 381a and 481a into which the first vertical support pins 385 and 485 are inserted and removed should correspond to the shape of the first vertical support pins 385 and 485.

  The shapes of the second vertical support pins 293 and the second coupling grooves 291a described with reference to FIG. 9 can also be formed so that the cross-sectional shapes corresponding to each other are elliptical or the cross-sectional shape is square.

  When the shapes of the first vertical support pins 185, 285, 385, 485 are different from each other and the shapes of the second vertical support pins 193, 293 are different from each other, the first vertical support pins 185, 285, 385, 485 are combined. The function of displaying the position and the coupling position of the second vertical support pins 193 and 293 can be performed.

  The drawings relating to the embodiments of the present invention described above are those in which detailed contour lines are omitted, and are schematically shown so that portions belonging to the technical idea of the present invention can be easily understood. In addition, the above-described embodiment is not a standard for limiting the technical idea of the present invention, but merely a reference matter for understanding the technical matters included in the claims of the present invention.

Claims (30)

A boat for supporting a substrate to be inserted and processed into a chamber of a substrate processing apparatus,
A pair of first main bars facing each other;
A pair of second main bars respectively coupled to the upper surface of the first main bar and parallel to the first main bar, facing each other, and contacting and supporting the edge side of the substrate;
A plurality of first connecting bars for connecting the pair of first main bars to each other;
A plurality of spaces formed by the second main bar are provided in the first main bar and the second main bar, and a plurality of substrates are partitioned and supported in the space formed by the second main bar. A board support boat comprising: a plurality of section-support pins that partition and contact the corners of the plurality of substrates to prevent the plurality of substrates from being displaced.   2. The board support boat according to claim 1, wherein the second main bar is provided with a plurality of horizontal support pins that support an edge side of the board. 3.   2. The board support boat according to claim 1, wherein the first connection bar is provided with a plurality of first vertical support pins that support the board. 3. The first connection bars adjacent to each other are connected by a second connection bar;
4. The board support boat according to claim 3, wherein the second connection bar is provided with a plurality of second vertical support pins for supporting the board.   5. The board support boat according to claim 4, wherein the first vertical support pin and the second vertical support pin are detachably coupled to the first connection bar and the second connection bar, respectively. 6. . One side portion of the first vertical support pin and the second vertical support pin is formed in any one shape selected from a circular shape, an oval shape, or a square shape in cross section,
A first coupling groove and a second coupling groove into which the one side portion of the first vertical support pin and the one side portion of the second vertical support pin are inserted and removed from the first connection bar and the second connection bar, respectively. 6. The board support boat according to claim 5, wherein the board support boat is formed corresponding to the shape of each of the first vertical support pins and the second vertical support pins. The first connecting bar is
A horizontal bar provided with the first vertical support pin and positioned between the pair of first main bars;
A bending bar formed at each end of the horizontal bar and coupled to one of the pair of first main bars and the other one of the first main bars; The board support boat according to claim 3, wherein the board support boat is located below the first main bar.   8. The boat for supporting a substrate according to claim 7, wherein the coupling bar is bent a plurality of times from the horizontal bar. Among the first connecting bars, some have different intervals,
The first vertical support pins provided on the first connection bars having different distances are rotatably provided on the first connection bar by bending an intermediate portion,
An imaginary straight line passing through the center in the length direction of one side portion of the first vertical support pin provided on the first connection bar and the other side portion of the first vertical support pin on which the substrate is supported, The board supporting boat according to claim 3, wherein the board supporting boat is parallel to each other.   The board support boat according to claim 9, wherein an intermediate portion of the first vertical support pin is bent a plurality of times.   The board support boat according to claim 1, wherein the first main bar and the second main bar are coupled to each other through a connection protrusion. On one end side of the first main bar, an arc-shaped support piece provided in a semicircular shape and engaged and supported by a relative object is provided,
The substrate according to claim 1, wherein the first connection bar coupled to the other end portion side of the first main bar is provided with a linear support piece that is mounted and supported by a relative object. Support boat.   2. The board support boat according to claim 1, wherein locking hooks for engaging and locking a robot arm are provided on both ends of the first main bar, respectively. A support unit for supporting a substrate to be inserted into a chamber of a substrate processing apparatus and processed;
A base that contacts the bottom surface of the chamber, a support base that extends vertically from one end of the base, and a horizontal extension that extends from one side of the support base, and is stacked vertically with a space between each other. Each having a plurality of support ribs formed in a form, and a pair of supporters that are opposed to each other in a set and provided on the front side and the rear side of the chamber,
A cross support bar in which one end side and the other end side are respectively supported by the support ribs of the supporter that form a pair and face each other;
One end side and the other end side are respectively supported by the cross support bar positioned on the front side of the chamber and the cross support bar positioned on the rear side of the chamber, and a plurality of the substrates are partitioned and supported. A support unit for supporting a substrate, comprising: a boat.   The substrate supporting support unit according to claim 14, wherein a mounting groove into which the cross support bar is inserted is formed in the support rib.   The mounting groove is formed with a locking groove orthogonal to the mounting groove, and the cross support bar is provided with a locking ring inserted and locked into the locking groove. The support unit for supporting a substrate according to claim 15.   15. The substrate support support unit according to claim 14, wherein the cross support bar is provided with a plurality of stoppers for preventing the boat from being displaced along the cross support bar. The boat
Provided as a pair facing each other, one end side is supported by the cross support bar located on the front side of the chamber, and the other end side is supported by the cross support bar located on the rear side of the chamber. The first main bar,
A pair of second main bars respectively coupled to the upper surface of the first main bar and parallel to the first main bar, facing each other, and contacting and supporting the edge side of the substrate;
A plurality of first connecting bars for connecting the pair of first main bars to each other;
A plurality of spaces formed by the second main bar are provided in the first main bar and the second main bar, and a plurality of substrates are partitioned and supported in the space formed by the second main bar. The support for supporting a substrate according to claim 14, further comprising: a plurality of partition-support pins that partition and contact corner sides of the plurality of substrates to prevent the plurality of substrates from being displaced. unit.   The support unit for supporting a substrate according to claim 18, wherein the second main bar is provided with a plurality of horizontal support pins for supporting the edge side of the substrate.   The support unit for supporting a substrate according to claim 18, wherein the first connecting bar is provided with a plurality of first vertical support pins for supporting the substrate. The first connection bars adjacent to each other are connected by a second connection bar;
21. The substrate supporting support unit according to claim 20, wherein the second connecting bar is provided with a plurality of second vertical support pins for supporting the substrate.   The substrate support support according to claim 21, wherein the first vertical support pin and the second vertical support pin are detachably coupled to the first connection bar and the second connection bar, respectively. unit. One side portion of the first vertical support pin and the second vertical support pin is formed in any one shape selected from a circular shape, an oval shape, or a square shape in cross section,
A first coupling groove and a second coupling groove into which the one side portion of the first vertical support pin and the one side portion of the second vertical support pin are inserted and removed from the first connection bar and the second connection bar, respectively. 23. The substrate supporting support unit according to claim 22, wherein each of the first vertical supporting pin and the second vertical supporting pin is formed corresponding to the shape of the first vertical supporting pin. The first connecting bar is
A horizontal bar provided with the first vertical support pin and positioned between the pair of first main bars;
A bending bar formed at each end of the horizontal bar and coupled to one of the pair of first main bars and the other one of the first main bars; 21. The support unit for supporting a substrate according to claim 20, wherein the support unit is located below the first main bar.   The support unit for supporting a substrate according to claim 24, wherein the coupling bar is bent from the horizontal bar a plurality of times. Among the first connecting bars, some have different intervals,
The first vertical support pins provided on the first connection bars having different distances are rotatably provided on the first connection bar by bending an intermediate portion,
An imaginary straight line passing through the center in the length direction of one side portion of the first vertical support pin provided on the first connection bar and the other side portion of the first vertical support pin on which the substrate is supported, 21. The support unit for supporting a substrate according to claim 20, wherein the support units are parallel to each other.   27. The substrate supporting support unit according to claim 26, wherein an intermediate portion of the first vertical support pin is bent a plurality of times.   The support unit for supporting a substrate according to claim 18, wherein the first main bar and the second main bar are coupled to each other through a connection protrusion. On one end portion side of the first main bar, an arc-shaped support piece that is formed in a semicircular shape and is engaged and supported by the cross support bar located on the front side of the chamber is provided,
The first connecting bar coupled to the other end side of the main bar is provided with a linear support piece mounted and supported on the cross support bar located on the rear surface side of the chamber. The support unit for supporting a substrate according to claim 18.   The support unit for supporting a substrate according to claim 18, wherein locking hooks for engaging and locking a robot arm are provided on both ends of the first main bar.

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