JP3160629U - Integrated multi-layer firing placement device - Google Patents

Integrated multi-layer firing placement device Download PDF

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JP3160629U
JP3160629U JP2010002585U JP2010002585U JP3160629U JP 3160629 U JP3160629 U JP 3160629U JP 2010002585 U JP2010002585 U JP 2010002585U JP 2010002585 U JP2010002585 U JP 2010002585U JP 3160629 U JP3160629 U JP 3160629U
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江徳生
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富源磁器股▲分▼有限公司
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Abstract

【課題】通気性が高く、カスタマイズでき、強固に一体を成した熱処理設備用の一体型多層式焼成載置装置を提供する。【解決手段】一体型多層式焼成載置装置は、複数本の直立棒、複数本のX方向横棒、複数本のY方向横棒と少なくとも2つのセッターを含み、各直立棒は外側壁面に相互に垂直なX方向孔とY方向孔が相互の間にそれぞれ設けられ、複数本のX方向横棒と複数本のY方向横棒はX方向孔とY方向孔に固定して設置され、直立棒はX方向横棒とY方向横棒を介して連結され、しっかりと一体として組み立てられ、セッターは直立棒の間の複数本のX方向横棒が構成する多層水平面上に収容される。【選択図】図1The present invention provides an integrated multi-layer firing mounting device for heat treatment equipment that is highly breathable, customizable, and firmly integrated. An integrated multilayer firing mounting apparatus includes a plurality of upright bars, a plurality of X-direction horizontal bars, a plurality of Y-direction horizontal bars and at least two setters, and each of the upright bars is provided on an outer wall surface. An X-direction hole and a Y-direction hole perpendicular to each other are provided between each other, and a plurality of X-direction horizontal bars and a plurality of Y-direction horizontal bars are fixedly installed in the X-direction holes and the Y-direction holes, The upright bar is connected via the X-direction horizontal bar and the Y-direction horizontal bar, and is assembled firmly and integrally. The setter is accommodated on a multilayer horizontal plane constituted by a plurality of X-direction horizontal bars between the upright bars. [Selection] Figure 1

Description

本考案は多層式焼成載置装置に関し、特に、通気性が高く、カスタマイズでき、強固に一体を成した一体型多層式焼成載置装置に関する。   The present invention relates to a multilayer fired mounting apparatus, and more particularly, to an integrated multilayer fired mounting apparatus that is highly breathable, customizable, and firmly integrated.

一般に、熱処理設備用の載置装置は、熱処理待ちの物品(陶磁器、硬化部材等)を載置装置上に載置した後、載置装置と熱処理待ちの物品を順に重ねて熱処理設備(いわゆる焼成炉)内に入れ、加熱または冷却処理を行う(俗に焼成;sinteringまたは焼なまし;annealingと呼ばれる)。従来、載置装置は次のA類とB類の2種類に分けることができる。   Generally, a placement device for heat treatment equipment is a heat treatment equipment (so-called firing) in which an article waiting for heat treatment (ceramics, a hardening member, etc.) is placed on the placement device, and then the placement device and the article waiting for heat treatment are sequentially stacked. It is placed in a furnace and heated or cooled (commonly fired; called sintering or annealed; called annealing). Conventionally, mounting devices can be divided into the following two types: A and B.

A類:いわゆるボックス(box)型。五面体の箱状であり、熱処理待ちの物品をボックス(box)内に入れた後、ボックスを1つ1つ順に炉(熱処理設備)内に重ねて配列するもので、ボックスは組み立て式とすることもできる。日本の1993年12月10日公開の日本実開平5−90298号実用新案、日本実用新案登録証第3091044号、中華民国特許第171548号などがある。   Class A: so-called box type. It is a pentahedron box, and after placing the items waiting for heat treatment in a box (box), the boxes are arranged one by one in the furnace (heat treatment equipment) one by one. You can also. There are Japanese utility model No. 5-90298 utility model published in Japan on December 10, 1993, Japanese utility model registration certificate No. 3091044, Chinese patent No. 171548, and the like.

B類:いわゆるラック(rack)型(一般に棚板と支柱の組み合わせで成る)。3本または4本の支柱上に棚板を載せた後、焼成待ちの物品をラック上に置き、さらに3本または4本の支柱を取り付けて支柱上に棚板を載せ、順に重ねていくものである。   Class B: A so-called rack type (generally composed of a combination of a shelf board and a column). After placing a shelf on 3 or 4 columns, place the items waiting to be fired on the rack, attach 3 or 4 columns and place the shelf on the column, and stack them in order. It is.

ラック(rack)型は一体式とすることもでき、棚板と支柱を一体に組み合わせたもの(鋼体、soild)もあり、例えば日本の特開平11−304371号(1999)、日本の特開昭58−115292号などがある。   The rack type can be an integral type, and there is also a combination of a shelf board and a support (steel body, solid), for example, Japanese Patent Laid-Open No. 11-304371 (1999), Japanese Patent No. 58-115292.

実開平5−90298号明細書Japanese Utility Model Publication No. 5-90298 実用新案登録第3091044号明細書Utility Model Registration No. 3091044 中華民国特許第171548号明細書Taiwan patent No. 171548 specification 特開平11−304371号明細書Japanese Patent Laid-Open No. 11-304371 特開昭58−115292号明細書 しかしながら、上述の熱処理設備用の載置装置は使用時に次のような問題と欠点が確実に存在し、改善が必要である。However, the above-described mounting apparatus for heat treatment equipment certainly has the following problems and drawbacks when used, and needs to be improved.

A類のボックス(box)とB類のラック(rack)には共通の特性があり、すなわち、一層重ねた後に再度上に一層重ねていく方法は、大型物品の処理時に非常に便利であるが、小型物品(MLCC等の電子部材など)の処理時、連続熱処理方式を採用するため、載置装置が炉の中で移動し、ボックスまたはラックが横にずれ落ち、製品不良を引き起こしたり、設計の原因によって左右または前後の通気不良が生じ、炉内の温度分布が理想的でなくなったりするため、改良の必要がある。   Class A boxes and Class B racks have a common characteristic, that is, the method of stacking layers one after another and then stacking them again on top is very convenient when processing large articles. When processing small articles (such as electronic components such as MLCC), a continuous heat treatment method is adopted, so that the mounting device moves in the furnace, the box or rack slips to the side, causing product defects or design. Because of the cause of the air flow failure in the left and right or the front and rear, the temperature distribution in the furnace becomes not ideal, so it needs to be improved.

このため、上述の従来品の問題と欠点をいかに解決するかが本考案の考案者とこの産業に従事する関連企業が改善を研究する方向性である。   For this reason, how to solve the problems and disadvantages of the above-mentioned conventional products is the direction in which the inventor of the present invention and the affiliated companies engaged in this industry study the improvement.

本考案の考案者は上述の欠点に鑑み、関連資料を収集し、かつ多方面の評価と考慮を経て、関連産業において蓄積した長年の経験に基づき、試作と修正を重ね、ついにこの通気性が高く、カスタマイズでき、強固に一体を成した一体型多層式焼成載置装置の考案に至ったものである。   In light of the above-mentioned drawbacks, the inventor of the present invention collected related materials, evaluated and considered various aspects, based on many years of experience accumulated in related industries, repeated trial manufacture and correction, and finally this air permeability It has led to the creation of an integrated multi-layer fired mounting device that is high, customizable and firmly integrated.

本考案の主な目的は、通気性が高く、カスタマイズでき、強固に一体を成した熱処理設備用載置装置を提供することにある。   The main object of the present invention is to provide a heat treatment equipment mounting apparatus that is highly breathable, customizable, and firmly integrated.

上述の目的を達するため、本考案の一体型多層式焼成載置装置は、複数本の直立棒、複数本のX方向横棒、複数本のY方向横棒、少なくとも2つのセッターを含み、前記各直立棒の外側壁面に相互に垂直なX方向孔とY方向孔が相互の間にそれぞれ設けられ、前記複数本のX方向横棒と複数本のY方向横棒は前記X方向孔と前記Y方向孔にそれぞれ固定して設置され、前記直立棒は前記X方向横棒と前記Y方向横棒を介して連結され、しっかりと一体として組み立てられる。前記セッターは前記直立棒の間の複数本のX方向横棒が構成する多層の水平面上に収容することができ、前記セッター上に少なくとも1つの被焼成物を配置することができる。   In order to achieve the above-described object, an integrated multi-layer firing mounting apparatus of the present invention includes a plurality of upright bars, a plurality of X-direction horizontal bars, a plurality of Y-direction horizontal bars, and at least two setters, An X-direction hole and a Y-direction hole perpendicular to each other are provided on the outer wall surface of each upright bar, and the plurality of X-direction horizontal bars and the plurality of Y-direction horizontal bars correspond to the X-direction holes and the Y-direction holes, respectively. The upright rods are fixedly installed in the Y-direction holes, and the upright rods are connected to the X-direction horizontal rods via the Y-direction horizontal rods, and are firmly assembled as a unit. The setter can be accommodated on a multilayer horizontal plane formed by a plurality of X-direction horizontal bars between the upright bars, and at least one object to be fired can be disposed on the setter.

上述の構造により、焼成を行う前に、先に被焼成物(MLCC等電子受動部材など)を前記セッター上に配置し、その後セッターを被焼成物と共に複数本のX方向横棒が構成する多層(2層以上)の水平面上に挿入する。そしてこの一体型の多層載置装置を連続焼成炉の中に入れて焼成を行うことができる。   According to the above-described structure, before firing, a multi-layered structure in which an object to be fired (such as an electronic passive member such as MLCC) is first placed on the setter, and then the setter is configured with a plurality of X-direction horizontal bars together with the object to be fired. Insert on a horizontal plane (two or more layers). The integrated multilayer mounting apparatus can be fired by placing it in a continuous firing furnace.

本考案の一体型多層式焼成載置装置の直立棒の高さは顧客の熱処理設備(焼成炉)の有効高さに合わせて設計することができ、直立棒上の層間距離は顧客の炉内の縦方向と横方向の通気性要求に合わせて設計することができる。一体型多層設計で運搬時間を節約でき、且つ運搬過程または熱処理の移動過程においても滑落が発生しない。効果的に作業の利便性を改善すると共に、連続処理炉内の縦方向と横方向すべて良好な通気性を得ることができる。さらにセッターも多孔板にした場合、炉内の上下の熱気滞留も改善され、熱処理設備(焼成炉)の断面温度分布がより均一になり、製品品質の均一性をより高めることができる。   The height of the upright bar of the integrated multi-layer firing mounting device of the present invention can be designed to match the effective height of the customer's heat treatment equipment (firing furnace), and the interlayer distance on the upright bar is within the customer's furnace Can be designed to meet the vertical and horizontal air permeability requirements. The integrated multi-layer design saves transportation time and does not slip during the transportation process or heat transfer process. It is possible to effectively improve the convenience of work and to obtain good air permeability in all the vertical and horizontal directions in the continuous processing furnace. Further, when the setter is made of a perforated plate, the hot air retention in the upper and lower portions in the furnace is improved, the cross-sectional temperature distribution of the heat treatment equipment (firing furnace) becomes more uniform, and the product quality uniformity can be further enhanced.

本考案の最良の実施例の立体図である。It is a three-dimensional view of the best embodiment of the present invention. 本考案の最良の実施例の立体分解図である。It is a three-dimensional exploded view of the best embodiment of the present invention. 本考案の最良の実施例の実施を示す立体図1である。FIG. 1 is a three-dimensional view illustrating the implementation of the best embodiment of the present invention. 本考案の最良の実施例の実施を示す立体図2である。FIG. 3 is a three-dimensional view illustrating the implementation of the best embodiment of the present invention. 本考案の別の最良の実施例の実施を示す立体図である。It is a three-dimensional view showing the implementation of another best embodiment of the present invention. 本考案のさらに別の最良の実施例の実施を示す立体図である。It is a three-dimensional view showing the implementation of still another best embodiment of the present invention.

上述の目的及び効果を達するため、本考案が採用する技術手段と構造について、図面を参照しながら本考案の最良の実施例を挙げてその特徴と機能を以下で詳細に説明する。   In order to achieve the above objects and advantages, the technical means and structure employed by the present invention will be described in detail below with reference to the drawings, with the best embodiment of the present invention.

図1と図2に本考案の最良の実施例の立体図と立体分解図をそれぞれ示す。これらの図からはっきりと分かるように、本考案の一体型多層式焼成載置装置1は、複数本の直立棒2、複数本のX方向横棒31と複数本のY方向横棒32、少なくとも2つのセッター4を含む。   1 and 2 show a three-dimensional view and a three-dimensional exploded view, respectively, of the best embodiment of the present invention. As can be clearly seen from these drawings, the integrated multi-layer firing mounting apparatus 1 of the present invention includes a plurality of upright bars 2, a plurality of X-direction horizontal bars 31, and a plurality of Y-direction horizontal bars 32, at least. Two setters 4 are included.

前記各直立棒2は外側壁面に相互に垂直なX方向孔21とY方向孔22が相互の間にそれぞれ設けられる。   Each of the upright rods 2 is provided with an X-direction hole 21 and a Y-direction hole 22 perpendicular to each other on the outer wall surface.

前記複数本のX方向横棒31と複数本のY方向横棒32は前記X方向孔21とY方向孔22にそれぞれ固定して設置され、前記直立棒が前記X方向横棒31と前記Y方向横棒32を介して連結されてしっかりと一体として組み立てられる。   The plurality of X direction horizontal bars 31 and the plurality of Y direction horizontal bars 32 are fixedly installed in the X direction hole 21 and the Y direction hole 22, respectively, and the upright bar is the X direction horizontal bar 31 and the Y direction horizontal bar. They are connected via the directional bar 32 and are assembled firmly and integrally.

前記少なくとも2つのセッター4は、前記直立棒2の間の複数本の前記X方向横棒31が構成する多層水平面上に収容することができ、前記セッター4上に少なくとも1つの被焼成物5を配置できると共に、前記セッター4は複数のセッター通気孔41を穿設して通気に使用してもよい。   The at least two setters 4 can be accommodated on a multilayer horizontal plane formed by the plurality of X-direction horizontal bars 31 between the upright bars 2, and at least one object to be fired 5 is placed on the setter 4. The setter 4 may be used for ventilation by forming a plurality of setter ventilation holes 41.

(実施例1)
上述の構造、組み立て設計に基づき、本考案の使用操作状況について以下で説明する。同時に図2、図3、図4に本考案の最良の実施例の立体分解図、実施を示す立体図1と2をそれぞれ示す。これらの図からはっきりと分かるように、本考案は4本の直立棒2、複数本のX方向横棒31、複数本のY方向横棒32と少なくとも2つのセッター4から構成され、そのうち、直立棒2の壁面に複数本のX方向孔21とY方向孔22がそれぞれ開設され、複数本のX方向横棒31、複数本のY方向横棒32が二方向(X軸方向とY軸方向)の直立棒2のX方向孔21とY方向孔22にしっかりと取り付けられ、且つ複数本のX方向横棒31、複数本のY方向横棒32を介して効果的に各直立棒2を一体として結合させ、一体型多層式焼成載置装置1に複数の層を持たせることができ、しっかりと組み立てる方法は、未焼成(sintering)の二方向に複数の孔を設けた細長い形状の直立棒2素地(Green body)及び焼成済み(sintered)の複数本のX方向横棒31、複数本のY方向横棒32を組み立てて一体型多層式焼成載置装置1の半完成品とした後、この組み立てた半完成品を一緒に炉の中に入れて焼成(sintering)する。焼成で生じる収縮を利用して直立棒2のX方向孔21とY方向孔22を縮小させ、前記X方向孔21とY方向孔22に挿入されたX方向横棒31、Y方向横棒32を効果的に固定でき、一体型多層式焼成載置装置1がしっかりとした鋼体(Soild body)となる。
Example 1
Based on the above-described structure and assembly design, the operating conditions of the present invention will be described below. At the same time, FIG. 2, FIG. 3, and FIG. As can be clearly seen from these drawings, the present invention is composed of four upright bars 2, a plurality of X-direction horizontal bars 31, a plurality of Y-direction horizontal bars 32 and at least two setters 4. A plurality of X-direction holes 21 and Y-direction holes 22 are respectively formed on the wall surface of the bar 2, and a plurality of X-direction horizontal bars 31 and a plurality of Y-direction horizontal bars 32 are provided in two directions (X-axis direction and Y-axis direction). ) Are firmly attached to the X direction hole 21 and the Y direction hole 22 of the upright bar 2, and each of the upright bars 2 is effectively attached via the plurality of X direction horizontal bars 31 and the plurality of Y direction horizontal bars 32. The integrated multi-layer firing mounting device 1 can have a plurality of layers, and can be firmly assembled by elongating an elongated shape having a plurality of holes in two directions of sintering. 2 green bodies and fired (Sintered) A plurality of X-direction horizontal bars 31 and a plurality of Y-direction horizontal bars 32 are assembled into a semi-finished product of the integrated multilayer firing mounting apparatus 1, and then the assembled semi-finished products are joined together. Place in a furnace and sinter. The X direction hole 21 and the Y direction hole 22 of the upright bar 2 are contracted by using the shrinkage caused by firing, and the X direction horizontal bar 31 and the Y direction horizontal bar 32 inserted into the X direction hole 21 and the Y direction hole 22. Can be effectively fixed, and the integrated multilayer firing mounting device 1 becomes a solid steel body.

(実施例2、実施例3)
図2、図5、図6に本考案の最良の実施例の立体分解図、別の最良の実施例の実施を示す立体図、さらに別の最良の実施例の実施を示す立体図をそれぞれ示す。これらの図からはっきりと分かるように、本考案の前記直立棒2は6本または9本設置することもでき、被焼成物5の焼成操作を行うときは、まず被焼成物5を前記セッター4上に配置するが、前記セッター4は無孔型または多孔型のセッター4とすることができ、即ちセッター4にセッター通気孔41を開設し、多孔型とした場合はより良好な通気性を得ることができ、その後セッター4を被焼成物5と共に本考案の一体型多層式焼成載置装置1内に挿入する。セッター4を挿入するときは、セッター4を複数本のX方向横棒31が構成する平面に載置することができ、その後この載置装置を炉の中に入れて焼成を行う。そのうち、本考案は複数本のX方向横棒31、複数本のY方向横棒32と複数本の直立棒2を組み立てて焼成し、一体型多層式焼成載置装置1としたものであり、確実に良好な通気効果を備え、且つ本考案の構造は簡単で、一体型多層式焼成載置装置1の層数は顧客の必要に応じてカスタマイズし、異なる層数及び高さまたは大きさとすることができる。また、本考案の一体型多層式焼成載置装置1はそのものが強固に一体を成した鋼体であり、運搬過程または焼成移動で傾いて失敗することがない。
(Example 2, Example 3)
2, 5, and 6 show a three-dimensional exploded view of the best embodiment of the present invention, a three-dimensional view showing the implementation of another best embodiment, and a three-dimensional view showing the implementation of another best embodiment, respectively. . As can be clearly seen from these drawings, six or nine upright rods 2 of the present invention can be installed, and when the firing object 5 is fired, the fired object 5 is first set to the setter 4. Although the setter 4 is arranged above, the setter 4 can be a non-porous type or a porous type setter 4. That is, when the setter vent hole 41 is opened in the setter 4 to obtain a porous type, better air permeability is obtained. After that, the setter 4 is inserted into the integrated multilayer baking mounting device 1 of the present invention together with the workpiece 5. When the setter 4 is inserted, the setter 4 can be placed on a plane formed by a plurality of X-direction horizontal bars 31, and then the placement device is placed in a furnace to perform firing. Among them, the present invention assembles and fires a plurality of X-direction horizontal bars 31, a plurality of Y-direction horizontal bars 32 and a plurality of upright bars 2 to form an integrated multi-layer firing mounting device 1, The structure of the present invention is surely provided with a good ventilation effect, and the number of layers of the integrated multi-layer baking mounting device 1 is customized according to the needs of the customer, and the number of layers and the height or size are different. be able to. Moreover, the integrated multilayer firing mounting device 1 of the present invention is a steel body that is firmly integrated with itself, and does not fail during the transportation process or firing movement.

本考案の一体型多層式焼成載置装置1が従来技術の欠点を改善できる鍵は次の点にある。   The key that the integrated multilayer firing mounting device 1 of the present invention can improve the drawbacks of the prior art is as follows.

本考案の一体型多層式焼成載置装置1は壁面にX方向孔21とY方向孔22を備えた直立棒2と、前記X方向孔21とY方向孔22に固定できる複数本のX方向横棒31とY方向横棒32を含む。セッター4は前記複数本のX方向横棒31が構成する平面上に配置される。この構造により、一体型多層式焼成載置装置1の前後左右すべて層と層の間の空隙を備えており、焼成時、良好な通気効果が得られる。且つ本考案の一体型多層式焼成載置装置1は強固に一体を成した鋼体であり、構造が安全かつ安定しており、運搬過程または焼成移動時に傾いて失敗することがなく、また本考案は顧客の熱処理設備の大きさまたは通気性の必要性に応じて形式または層数を変えることができ、炉内の断面温度分布をより均一にして、製品品質の均一性をより高めることができる。   The integrated multi-layer firing mounting apparatus 1 of the present invention includes an upright bar 2 having an X-direction hole 21 and a Y-direction hole 22 on a wall surface, and a plurality of X-directions that can be fixed to the X-direction hole 21 and the Y-direction hole 22. A horizontal bar 31 and a Y-direction horizontal bar 32 are included. The setter 4 is disposed on a plane formed by the plurality of X-direction horizontal bars 31. With this structure, all the front, rear, left and right layers of the integrated multilayer firing mounting device 1 are provided with a gap between the layers, and a good ventilation effect can be obtained during firing. In addition, the integrated multilayer fired mounting apparatus 1 of the present invention is a steel body that is firmly integrated, has a safe and stable structure, and does not fail during the transportation process or firing movement. The device can change the type or number of layers according to the size of the heat treatment equipment of the customer or the necessity of breathability, making the cross-sectional temperature distribution in the furnace more uniform, and improving the uniformity of product quality it can.

以上の説明は本考案の最良の実施例に基づくものであり、本考案の特許範囲を制限することはなく、本考案の明細書及び図面の内容を運用した簡易な修飾及び同等効果の構造変化はすべて、本考案の特許範囲内に含まれるものとする。   The above description is based on the best embodiment of the present invention, and does not limit the patent scope of the present invention. The simple modification using the contents of the description and drawings of the present invention and the structural change of the equivalent effect. Are all within the patent scope of the present invention.

上述をまとめると、本考案の一体型多層式焼成載置装置は使用時に確実にその効果と目的を達することができるため、本考案は実用性に優れた考案であり、特許出願要件を満たしているため、法に基づきここに出願を提出するものである。   In summary, the integrated multi-layer fired mounting device of the present invention can reliably achieve its effects and purpose when in use, so the present invention is a highly practical device that satisfies the requirements for patent application. Therefore, the application is filed here under the law.

1 一体型多層式焼成載置装置
2 直立棒
21 X方向孔
22 Y方向孔
31 X方向横棒
32 Y方向横棒
4 セッター
41 セッター通気孔
5 被焼成物
DESCRIPTION OF SYMBOLS 1 Integral type multi-layer firing mounting device 2 Upright bar 21 X-direction hole 22 Y-direction hole 31 X-direction horizontal bar 32 Y-direction horizontal bar 4 Setter 41 Setter vent hole 5

Claims (5)

一体型多層式焼成載置装置であって、複数本の直立棒と、複数本のX方向横棒及び複数本のY方向横棒と、少なくとも2つのセッターを含み、
前記各直立棒は外側壁面に相互に垂直なX方向孔とY方向孔が相互の間にそれぞれ設けられ、
複数本のX方向横棒と複数本のY方向横棒は前記X方向孔と前記Y方向孔にそれぞれ固定して設置され、前記直立棒が前記X方向横棒と前記Y方向横棒を介して連結され、しっかりと一体として組み立てられ、
前記少なくとも2つのセッターは、前記直立棒の間の複数本の前記X方向横棒が構成する多層水平面上に収容される、
ことを特徴とする、一体型多層式焼成載置装置。
An integrated multilayer firing mounting apparatus, comprising a plurality of upright bars, a plurality of X direction horizontal bars and a plurality of Y direction horizontal bars, and at least two setters,
Each of the upright bars is provided with an X-direction hole and a Y-direction hole perpendicular to the outer wall surface, respectively.
A plurality of X-direction horizontal bars and a plurality of Y-direction horizontal bars are fixedly installed in the X-direction hole and the Y-direction hole, respectively, and the upright bar is interposed between the X-direction horizontal bar and the Y-direction horizontal bar. Connected and assembled as one piece,
The at least two setters are accommodated on a multilayer horizontal plane formed by a plurality of the X-direction horizontal bars between the upright bars.
An integrated multi-layer firing mounting device.
前記直立棒が4本設置されたことを特徴とする、請求項1に記載の一体型多層式焼成載置装置。 2. The integrated multilayer firing mounting apparatus according to claim 1, wherein four upright bars are installed. 前記直立棒が6本設置されたことを特徴とする、請求項1に記載の一体型多層式焼成載置装置。 2. The integrated multilayer firing mounting apparatus according to claim 1, wherein six of the upright bars are installed. 前記直立棒が9本設置されたことを特徴とする、請求項1に記載の一体型多層式焼成載置装置。 The integrated multi-layer firing mounting apparatus according to claim 1, wherein nine of the upright bars are installed. 前記セッターに複数のセッター通気孔が穿設されたことを特徴とする、請求項1に記載の一体型多層式焼成載置装置。
2. The integrated multilayer firing mounting apparatus according to claim 1, wherein a plurality of setter ventilation holes are formed in the setter.
JP2010002585U 2010-04-19 2010-04-19 Integrated multi-layer firing placement device Expired - Fee Related JP3160629U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120062604A (en) * 2010-12-06 2012-06-14 고요 써모 시스템 가부시끼 가이샤 Apparatus for stocking work
JP2014504039A (en) * 2011-02-01 2014-02-13 株式会社テラセミコン Substrate support boat and support unit using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120062604A (en) * 2010-12-06 2012-06-14 고요 써모 시스템 가부시끼 가이샤 Apparatus for stocking work
JP2012122619A (en) * 2010-12-06 2012-06-28 Koyo Thermo System Kk Workpiece loading apparatus
JP2014504039A (en) * 2011-02-01 2014-02-13 株式会社テラセミコン Substrate support boat and support unit using the same

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