JP3977481B2 - Substrate tray cassette - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a tray-type cassette that accommodates a substrate such as a large or very large glass substrate.
[0002]
[Prior art]
As a substrate cassette for separating and accommodating substrates such as glass substrates so as not to contact each other, a pair of opposing side surfaces of a box-shaped frame is formed with grooved side plates, and both grooved side plates are supported. A substrate in which a substrate can be put in and out between the grooves is widely used. There are various shapes and designs of the grooved side plate, but in principle, many rib-shaped shelf pieces project in parallel from the back plate of the side plate at a predetermined pitch toward the inside of the cassette. It has a different shape. A gap between adjacent rib-shaped shelf pieces becomes a groove, and a substrate enters and exits and is accommodated therein.
[0003]
This type of cassette includes, for example, Japanese Patent Application Laid-Open No. 2-295150, Japanese Patent Application Laid-Open No. 3-133152, Japanese Patent Application Laid-Open No. 5-147680, Japanese Patent Application Laid-Open No. There are cassettes disclosed in JP-A-6-286812, JP-A-8-46022, and the like.
[0004]
However, when the size of the glass substrate is increased, even the glass substrate that is a rigid body is excessively bent. Therefore, depending on the support method for supporting the glass substrate with the rib-shaped shelf pieces of the grooved side plate, If the pitch is not significantly increased, the glass substrate cannot be smoothly put in and out, and the number of glass substrates that can be accommodated in one cassette is reduced.
[0005]
Therefore, in order to deal with the increase in the size of the glass substrate, in Japanese Patent Application Laid-Open No. 9-36219 according to the application of the present applicant, the length of the rib-shaped shelf piece of the side plate is significantly longer than the conventional one ( More specifically, a cassette in which the protruding length of the shelf piece is 1/10 to 1/4 of the effective width of the cassette has been proposed.
[0006]
[Problems to be solved by the invention]
Increasing the size of glass substrates is increasing. For example, when the thickness is 0.7 mm and the height and width are 900 mm × 1100 mm or 1000 mm × 1000 mm, the conventional method of supporting the glass substrate 10 to 20 mm from the end thereof Depending on the case, the deflection near the center of the glass substrate may be 80 to 90 mm. And even if it employ | adopts the system of Unexamined-Japanese-Patent No. 9-36219 which lengthens the length of the rib-shaped shelf piece of a side plate with a groove | channel, it becomes impossible to fully suppress bending.
[0007]
Under such a background, the present invention can deal with an increase in the size or size of a substrate based on a mechanism different from a method of supporting a substrate such as a glass substrate with a rib-like shelf piece of a grooved side plate. The object is to provide a tray-shaped cassette.
[0008]
[Means for Solving the Problems]
The substrate tray cassette of the present invention comprises:
It has a basic structure consisting of form a rectangular framework peripheral frame (1) and the peripheral frame (1) bridging has been crosspiece between (2) and insertion of the substrate hand and out of robot (G) (6) It is a grid-like tray-shaped cassette performed by
Among the peripheral frames (1), the left peripheral frame (1L), the right peripheral frame (1R), and the rear peripheral frame (1B) constitute a main frame, and the upper surfaces of these main frames are substantially flush with each other. Yes,
The front frame (1F) of the peripheral frame (1) and the crosspiece (2) constitute a sub-frame,
The main frame has a projecting member (3) protruding from the inner side surface of the main frame or the bottom surface of the main frame at a position lower than the upper surface thereof.
To support the substrate (G) from below on at least the crosspiece (2) of the extension frame (3) attached to the main frame and the front peripheral frame (1F) and the crosspieces (2) constituting the subframe And the upper ends of these resin pins (4) are substantially in the same plane at a position lower than the plane formed on the upper surface of the main frame,
Furthermore, the main frame is characterized by having an intricate engagement structure that enables stacking of trays.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
The present invention will be described in detail below.
[0010]
The substrate tray cassettes of the invention, form a rectangular framework peripheral frame (1) and the peripheral frame (1) has a basic structure consisting of bridged been a crosspiece (2) during the entire lattice-shaped tray-type The substrate (G ) is inserted and removed by inserting and removing the robot hand (6) .
[0011]
The crosspiece (2) is arranged in parallel or at right angles to the peripheral frame (1) forming the rectangular skeleton, for example, “-”, “=”, “+”, “ki”, “well”. Further, depending on the case, it may be arranged obliquely like “/”, “x”, “XX”, or a parallel / right angle shape and an oblique shape may be mixed, or it may be curved as shown in FIG. You can also.
[0012]
In this tray cassette, the main frame is constituted by the left peripheral frame (1L), the right peripheral frame (1R) and the rear peripheral frame (1B) of the peripheral frame (1). The upper surfaces of the main frames are substantially in the same plane.
[0013]
Further, a sub-frame is configured by the front peripheral frame (1F) and the crosspiece (2) of the peripheral frame (1).
[0014]
The main frame has a projecting member (3) protruding from the inner side surface of the main frame or the bottom surface of the main frame at a position lower than the upper surface. This overhanging member (3) may be provided over the entire length of the main frame (for example, “L” in a cross-sectional view) or may be provided partially on the main frame. From the viewpoint of weight reduction, it is advantageous to partially provide the projecting member (3) on the main frame. Furthermore, it is also preferable that the overhang member (3) is provided so as to extend from the main frame toward the inside of the tray cassette as illustrated in FIG. 5 described later. The overhang member (3) may be formed by integral molding when the main frame is molded, or may be attached to the main frame afterwards.
[0015]
To support the substrate (G) from below on at least the crosspiece (2) of the extension frame (3) attached to the main frame and the front peripheral frame (1F) and the crosspieces (2) constituting the subframe The resin pin (4) is projected. The number of the resin pins (4) is not limited, but for example, it may be about 6 to 20 in total on the overhanging member (3) and about 3 to 20 on the subframe. The upper ends of the resin pins (4) are substantially in the same plane at a position lower than the plane formed by the upper surface of the main frame. The height of the resin pin (4) is arbitrary, but when the substrate (G) is supported from below by the upper end of the resin pin (4), the upper surface of the substrate (G) is from the plane formed by the upper surface of the main frame. It is preferable not to protrude above, and care should be taken so that the back surface of the substrate (G) supported by the resin pins (4) does not contact the crosspiece (2).
[0016]
Further, the main frame is formed in an intricate engagement structure so as to allow stacking of trays. The intricate engagement structure at this time is usually only provided at the four corners of the main frame, but can also be provided at the sides or at both the four corners and the sides.
[0017]
In the above description, a tray-type cassette having only a grid and having no bottom is described. However, it is preferable to provide a bottom plate (5) at the bottom of the grid-shaped tray. When the bottom plate (5) is provided, even if abrasion dust is generated due to friction between the upper end of the resin pin (4) and the back surface of the substrate (G), the dust may fall on the upper surface of the lower substrate (G). This is because it is prevented. The bottom plate (5) may be provided so that the upper surface thereof is flush with the back surface of the crosspiece (2), or the upper surface thereof may be provided at a position slightly apart from the back surface of the crosspiece (2). If the bottom plate (5) is provided, it will be slightly disadvantageous in terms of weight and cost compared to the case where it is not provided.Therefore, considering the user's request, the tray cassette without the bottom plate (5) or the bottom plate ( 5) Tray cassette with
The peripheral frame (1) and the crosspiece (2) are made of resin, metal, or resin-metal composite, and resin is usually used. The material of the overhang member (3) is also resin, metal, or resin-metal composite, and resin is usually used. The bottom plate (5) is usually made of resin.
[0019]
Resin pin (4) is a dust-proof resin (for example, polyetheretherketone, polyimide, polyetherimide, polyacetal, polyamide, ultrahigh molecular weight polyethylene, It is desirable to use a molded body of polytetrafluoroethylene, various elastomers, etc., and at that time, molding is performed using a natural product that does not substantially contain a filler.
[0020]
Examples of the substrate accommodated in the tray cassette having the above structure include various substrates including a glass substrate and a ceramic substrate, and the glass substrate is particularly important. Even if the substrate is large or very large, there is an advantage that it can be handled without any problems.
[0021]
<Action>
In the conventional method in which the glass substrate is supported on both sides by the rib-shaped shelf pieces of the grooved side plate, the deflection becomes larger as the glass substrate becomes larger, and the deflection becomes larger as the thickness becomes thinner. The relationship between the size (width × depth × thickness) of the glass substrate and the maximum amount of deflection is, for example, as shown in Table 1 below.
[0022]
[Table 1]

Glass size Weight Deflection from substrate edge
(mm) (kg) Support length (mm) (mm)
550 × 650 × 0.7 0.603 10 10
650 × 830 × 0.7 0.910 10 20
900 × 1100 × 1.1 2.625 15 28
1000 x 1000 x 1.1 2.651 15 36
[0023]
If the support length is increased (that is, the length of the rib-shaped shelf on the grooved side plate is increased), the amount of deflection is reduced, but there are restrictions on strength, and the robot hand (fork) (6) Because there is an obstacle to the insertion and removal, there is a limit naturally.
[0024]
In the tray cassette of the present invention, a grid-like tray-shaped cassette is used based on a mechanism different from the conventional method of supporting a substrate such as a glass substrate with a rib-like shelf piece of a grooved side plate. . Then, on the front peripheral frame constituting a projecting member (3) and on the sub-frame of the attached to the main frame (1F) and crosspieces plastic pins projecting from above into at least crosspiece (2) of (2) (4) The substrate (G) is placed, and the substrate (G) is supported from below by the upper end of the resin pin (4). Therefore, even if the substrate (G) is large or very large, the substrate (G) is supported securely with almost no bending, and the robot hand (fork) (6) can be used to move the substrate (G) in and out. It will not cause any trouble.
[0025]
If the bottom plate (5) is provided at the bottom of the grid-like tray, even if abrasion dust is generated due to friction between the upper end of the resin pin (4) and the back surface of the substrate (G), the dust remains on the lower substrate (G). It is prevented from falling on the upper surface of the.
[0026]
Increasing the overhang length of the overhang member (3) and projecting the resin pin (4) on the free end side of the overhang member (3) is more preferable because the amount of bending of the substrate (G) is further reduced.
[0027]
【Example】
The following examples further illustrate the invention.
[0028]
Example 1
FIG. 1 is a perspective view showing an example of a tray cassette of the present invention. FIG. 2 is an enlarged view of portion A of the tray cassette of FIG. FIG. 3 is an enlarged view of portion B of the tray cassette of FIG.
[0029]
The tray cassette in FIGS. 1 to 3 is composed of a peripheral frame (1) forming a rectangular skeleton and a crosspiece (2) installed between the peripheral frames (1). The peripheral frame (1) and the crosspiece (2) can be obtained, for example, by injection molding high molecular weight polycarbonate or polyetherimide.
[0030]
Of the peripheral frames (1), the left peripheral frame (1L), the right peripheral frame (1R), and the rear peripheral frame (1B) constitute a main frame. The upper surface of the main frame is in the same plane.
[0031]
Of the peripheral frame (1), the front peripheral frame (1F) and the crosspiece (2) constitute a sub-frame. In the first embodiment, the crosspiece (2) is one between the front peripheral frame (1F) and the rear peripheral frame (B), and the upper surface of the front peripheral frame (1F) and the upper surface of the crosspiece (2) are flush with each other. It is constructed so that the upper surface of the crosspiece (2) is lower than the upper surface of the front peripheral frame (1F), with two pieces between the left peripheral frame (1L) and the right peripheral frame (1R). It is erected.
[0032]
Of the main frame, the left peripheral frame (1L) and the right peripheral frame (1R) have an overhanging member (3) protruding from the inner surface of the main frame at a position lower than the upper surface in the horizontal direction toward the inside of the cassette. Four each are mounted (see FIG. 1). And the resin pin (4) is protrudingly provided on each upper surface of these overhang | projection members (3) (refer FIG. 2). In addition, a total of four same resin pins (4) project from the upper surface of the crosspiece (2) installed between the front peripheral frame (1F) and the rear peripheral frame (1B) among the subframes. The upper ends of these 12 resin pins (4) are on the same plane lower than the plane formed by the upper surface of the main frame, and when the glass substrate (G) is supported by the upper ends of the resin pins (4). The positional relationship is such that the upper surface of the glass substrate (G) does not protrude above the upper surface of the main frame. The resin pin (4) is obtained, for example, by injection molding of a natural product of polyetheretherketone, polyetherimide or elastomer.
[0033]
The glass substrate (G) placed on the overhanging member (3) attached to the main frame and the resin pin (4) protruding on the subframe has a thickness of 1.1 mm or 0.7 mm, for example. Even if it is thin and has a large or very large size such as 900mm x 1100mm or 1000mm x 1000mm, it is installed on the upper surface of the crosspiece (2) installed between the front frame (1F) and the rear frame (1B) Since it is also supported by the resin pin (4) in the middle part, the amount of bending is very small. Further, since the glass substrate (G) is supported only by the upper end of the resin pin (4), the frictional force applied to the back surface of the glass substrate (G) is also minimized.
[0034]
Four corners of the main frame are formed in an intricate engagement structure that allows stacking of trays (see FIG. 3).
[0035]
The tray cassette having the above structure is stacked, and as shown in FIG. 1, the robot hand (fork) (6) is moved from the front peripheral frame (1F) side to the front peripheral frame (1F) and the glass substrate (G). The glass substrate (G) is moved in and out by being inserted into the gap.
[0036]
Example 2
FIG. 4 is a perspective view showing another example of the tray cassette of the present invention.
[0037]
In the second embodiment, the bottom plate (5) is integrally provided at the bottom of the grid-like tray of the tray cassette of the first embodiment.
[0038]
Example 3
FIG. 5 is a perspective view showing still another example of the tray cassette of the present invention.
[0039]
In Example 3, the bottom plate (5) is integrally provided at the bottom of the grid-like tray of the tray cassette of Example 1, and the overhang length of the overhang member (3) is increased, A resin pin (4) is projected on the free end side.
[0040]
Comparing the tray cassettes shown in Examples 1 to 3, the tray cassette of Example 3 is the best.
[0041]
Example 4
FIG. 6 is a perspective view showing another example of the tray cassette of the present invention.
[0042]
In the fourth embodiment, the tray cassette of the second embodiment (FIG. 4) is further modified so that a part of the crosspiece (2) is formed in a curved shape and the resin pin (4) on the sub-frame is formed. The length of the pair of left and right projecting members (3) on the front side is increased, and two resin pins (4) are projected on the free end side. . In this tray cassette, the strength of the sub-frame is increased and the number of support points increases, so the flexure of the substrate (G) is further reduced, and there is no problem in getting in and out of the robot hand (fork) (6). Don't give.
[0043]
【The invention's effect】
As described in the section of operation, the tray cassette of the present invention is based on a mechanism different from the conventional method in which a substrate such as a glass substrate is supported by a rib-like shelf piece of a grooved side plate. The tray type cassette is used. Then, on the front peripheral frame constituting a projecting member (3) and on the sub-frame of the attached to the main frame (1F) and crosspieces plastic pins projecting from above into at least crosspiece (2) of (2) (4) The substrate (G) is placed, and the substrate (G) is supported from below by the upper end of the resin pin (4). Therefore, even if the substrate (G) is large or very large, the substrate (G) is supported securely with almost no bending, and the robot hand (fork) (6) can be used to move the substrate (G) in and out. It will not cause any trouble. When the bottom plate (5) is provided at the bottom of the grid-like tray, even if abrasion dust is generated due to friction between the upper end of the resin pin (4) and the back surface of the substrate (G), the dust is removed from the lower substrate ( G) is prevented from falling on the top surface. If the overhanging length of the overhanging member (3) is increased and the resin pin (4) is projected from the free end side, the amount of bending of the substrate (G) is further reduced.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an example of a tray cassette of the present invention.
2 is an enlarged view of part A of the tray cassette of FIG. 1. FIG.
3 is an enlarged view of part B of the tray cassette of FIG. 1. FIG.
FIG. 4 is a perspective view showing another example of the tray cassette of the present invention.
FIG. 5 is a perspective view showing still another example of the tray cassette of the present invention.
FIG. 6 is a perspective view showing another example of the tray cassette of the present invention.
[Explanation of symbols]
(1) ... perimeter frame,
(1L) ... Left frame, (1R) ... Right frame, (1B) ... Rear frame, (1F) ... Front frame,
(2)… Pier,
(3) ... overhang member,
(4)… Resin pin,
(5)… bottom plate,
(6) ... Robot hand (fork),
(G)… Board

Claims (2)

It has a basic structure consisting of form a rectangular framework peripheral frame (1) and the peripheral frame (1) bridging has been crosspiece between (2) and insertion of the substrate hand and out of robot (G) (6) It is a grid-like tray-shaped cassette performed by
Among the peripheral frames (1), the left peripheral frame (1L), the right peripheral frame (1R), and the rear peripheral frame (1B) constitute a main frame, and the upper surfaces of these main frames are substantially flush with each other. Yes,
The front frame (1F) of the peripheral frame (1) and the crosspiece (2) constitute a sub-frame,
The main frame has a projecting member (3) protruding from the inner side surface of the main frame or the bottom surface of the main frame at a position lower than the upper surface thereof.
To support the substrate (G) from below on at least the crosspiece (2) of the extension frame (3) attached to the main frame and the front peripheral frame (1F) and the crosspieces (2) constituting the subframe And the upper ends of these resin pins (4) are substantially in the same plane at a position lower than the plane formed on the upper surface of the main frame,
Further, the main frame has an intricate engagement structure that allows stacking of trays.   The substrate tray cassette according to claim 1, wherein a bottom plate (5) is provided at the bottom of the grid-like tray.

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