TWI263824B - Substrate adsorption device and substrate bonding device - Google Patents
Substrate adsorption device and substrate bonding deviceInfo
- Publication number
- TWI263824B TWI263824B TW094101207A TW94101207A TWI263824B TW I263824 B TWI263824 B TW I263824B TW 094101207 A TW094101207 A TW 094101207A TW 94101207 A TW94101207 A TW 94101207A TW I263824 B TWI263824 B TW I263824B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- adsorption
- stage
- region
- face
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004009021 | 2004-01-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200537166A TW200537166A (en) | 2005-11-16 |
TWI263824B true TWI263824B (en) | 2006-10-11 |
Family
ID=34792256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094101207A TWI263824B (en) | 2004-01-16 | 2005-01-14 | Substrate adsorption device and substrate bonding device |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070158031A1 (zh) |
JP (1) | JP2007511781A (zh) |
KR (1) | KR100803452B1 (zh) |
CN (1) | CN100405571C (zh) |
TW (1) | TWI263824B (zh) |
WO (1) | WO2005069366A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI738888B (zh) * | 2016-10-17 | 2021-09-11 | 日商信越工程股份有限公司 | 貼合器件的真空貼合裝置 |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7207442B2 (en) * | 2003-12-16 | 2007-04-24 | Xerox Corporation | Die storage tray having machined grooves and vacuum channels |
KR100596022B1 (ko) * | 2005-09-27 | 2006-07-05 | 주식회사 탑 엔지니어링 | 디스펜서 스테이지의 글라스 흡착구조 |
JP2008124050A (ja) * | 2006-11-08 | 2008-05-29 | Dainippon Screen Mfg Co Ltd | 吸着ステージおよび基板処理装置 |
KR100828118B1 (ko) * | 2007-02-23 | 2008-05-08 | 세메스 주식회사 | 평판 패널 지지 장치 및 평판 패널 처리 장치 |
KR100901982B1 (ko) * | 2007-07-12 | 2009-06-08 | 주식회사 실트론 | 접착강도 시험장치 |
CN103258762B (zh) * | 2007-08-10 | 2016-08-03 | 株式会社尼康 | 基板贴合装置及基板贴合方法 |
JP2010181770A (ja) * | 2009-02-09 | 2010-08-19 | Ulvac Japan Ltd | シール剤塗布装置 |
ES2370567B1 (es) * | 2009-11-12 | 2012-11-27 | Abengoa Solar New Technologies, S.A. | Mesa de conformado para el curvado de espejos. |
JP5466964B2 (ja) | 2010-02-08 | 2014-04-09 | 株式会社ディスコ | ワーク保持機構 |
KR101248735B1 (ko) * | 2011-03-18 | 2013-03-28 | 국립대학법인 울산과학기술대학교 산학협력단 | 자가 부착용 보드 |
CN102654668B (zh) * | 2011-08-01 | 2014-11-19 | 北京京东方光电科技有限公司 | 真空对盒设备及对盒系统 |
JP2013232466A (ja) * | 2012-04-27 | 2013-11-14 | Mitsuboshi Diamond Industrial Co Ltd | 基板吸着装置 |
US20130312907A1 (en) * | 2012-05-23 | 2013-11-28 | Lg Display Co., Ltd. | Substrate-bonding apparatus for display device and method for manufacturing bonded substrate |
KR102034754B1 (ko) * | 2012-09-18 | 2019-10-22 | 삼성디스플레이 주식회사 | 공기압을 이용한 기판 고정 장치 |
US9227261B2 (en) * | 2013-08-06 | 2016-01-05 | Globalfoundries Inc. | Vacuum carriers for substrate bonding |
KR20160062057A (ko) * | 2013-09-26 | 2016-06-01 | 수스 마이크로텍 리소그라피 게엠바하 | 웨이퍼를 석션 및 홀딩하기 위한 척 |
CN104409395B (zh) * | 2014-11-18 | 2018-12-18 | 昆山国显光电有限公司 | 一种基于基板阵列测试的异物处理系统及其处理方法 |
CN105093575B (zh) * | 2015-07-14 | 2018-07-06 | 业成光电(深圳)有限公司 | 贴合治具 |
DE102015213818A1 (de) * | 2015-07-22 | 2017-01-26 | Asys Automatisierungssysteme Gmbh | Vorrichtung zur Handhabung von flachen Substraten |
CN105589232A (zh) * | 2016-03-11 | 2016-05-18 | 京东方科技集团股份有限公司 | 一种显示面板加工设备 |
KR101701213B1 (ko) * | 2016-07-18 | 2017-02-01 | 원종우 | 평탄도 검사장치 |
CN105974655B (zh) * | 2016-07-25 | 2019-05-28 | 武汉华星光电技术有限公司 | 一种彩膜基板的制造方法 |
US10978332B2 (en) * | 2016-10-05 | 2021-04-13 | Prilit Optronics, Inc. | Vacuum suction apparatus |
JP6255546B1 (ja) * | 2016-10-17 | 2017-12-27 | 信越エンジニアリング株式会社 | 貼合デバイスの真空貼り合わせ装置 |
TWM549447U (zh) * | 2016-11-23 | 2017-09-21 | Scientech Corp | 基板對準及檢測裝置與基板處理機台 |
KR102397545B1 (ko) | 2017-05-02 | 2022-05-12 | 삼성전자주식회사 | 척 스테이지 이물질 감지 장치 |
CN107092118B (zh) * | 2017-06-30 | 2020-05-01 | 上海天马微电子有限公司 | 一种阵列基板、显示面板及显示装置 |
JP2019109982A (ja) * | 2017-12-15 | 2019-07-04 | トヨタ自動車株式会社 | 燃料電池用膜電極接合体の吸着台 |
CN108630586B (zh) * | 2018-05-25 | 2021-03-02 | Tcl华星光电技术有限公司 | 带异物检测功能的基板吸附设备及异物检测方法 |
JP6733966B2 (ja) * | 2018-07-09 | 2020-08-05 | Aiメカテック株式会社 | 基板組立装置及び基板組立方法 |
CN109319475A (zh) * | 2018-09-30 | 2019-02-12 | 苏州富强科技有限公司 | 一种用于装配键盘的多合一吸附组件 |
CN110211503A (zh) * | 2019-06-28 | 2019-09-06 | 云谷(固安)科技有限公司 | 贴合设备和贴合方法 |
KR20210037218A (ko) * | 2019-09-27 | 2021-04-06 | (주)테크윙 | 픽커 및 이를 포함하는 핸드 |
CN112045600B (zh) * | 2020-09-14 | 2022-05-13 | 镇江龙瀚电气有限公司 | 一种电缆桥架的加工工装及其使用方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3066851B2 (ja) * | 1993-02-15 | 2000-07-17 | 日立電子エンジニアリング株式会社 | 液晶表示板の基板重ね合わせ方法 |
JPH1086085A (ja) * | 1996-09-19 | 1998-04-07 | Dainippon Screen Mfg Co Ltd | 基板吸着装置および基板吸着方法 |
JPH10270535A (ja) * | 1997-03-25 | 1998-10-09 | Nikon Corp | 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法 |
JP2001118913A (ja) * | 1999-10-18 | 2001-04-27 | Dainippon Printing Co Ltd | 基板吸着プレート |
JP3966720B2 (ja) * | 2001-12-05 | 2007-08-29 | 株式会社アドテックエンジニアリング | 保持装置 |
US7102726B2 (en) * | 2002-03-15 | 2006-09-05 | Lg. Philips Lcd Co., Ltd. | System for fabricating liquid crystal display and method of fabricating liquid crystal display using the same |
US7040525B2 (en) * | 2002-03-20 | 2006-05-09 | Lg.Philips Lcd Co., Ltd. | Stage structure in bonding machine and method for controlling the same |
KR100685923B1 (ko) * | 2002-03-25 | 2007-02-23 | 엘지.필립스 엘시디 주식회사 | 합착 장치 및 이를 이용한 액정표시장치의 제조 방법 |
-
2005
- 2005-01-13 WO PCT/JP2005/000712 patent/WO2005069366A1/en active Application Filing
- 2005-01-13 KR KR1020067009750A patent/KR100803452B1/ko not_active IP Right Cessation
- 2005-01-13 US US10/583,639 patent/US20070158031A1/en not_active Abandoned
- 2005-01-13 JP JP2006519674A patent/JP2007511781A/ja active Pending
- 2005-01-13 CN CNB2005800021929A patent/CN100405571C/zh not_active Expired - Fee Related
- 2005-01-14 TW TW094101207A patent/TWI263824B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI738888B (zh) * | 2016-10-17 | 2021-09-11 | 日商信越工程股份有限公司 | 貼合器件的真空貼合裝置 |
Also Published As
Publication number | Publication date |
---|---|
JP2007511781A (ja) | 2007-05-10 |
KR20060106838A (ko) | 2006-10-12 |
TW200537166A (en) | 2005-11-16 |
WO2005069366A1 (en) | 2005-07-28 |
KR100803452B1 (ko) | 2008-02-14 |
CN1910745A (zh) | 2007-02-07 |
CN100405571C (zh) | 2008-07-23 |
US20070158031A1 (en) | 2007-07-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI263824B (en) | Substrate adsorption device and substrate bonding device | |
CN103620759B (zh) | 带贴附设备 | |
TW200714951A (en) | Substrate assembly apparatus and method | |
SG152213A1 (en) | Multi-port pumping system for substrate processing chambers | |
DK1720441T3 (da) | Konnektor med trykföler beregnet til et endoskopisystem | |
EP2589946A3 (en) | Gas Leak Detector | |
WO2008094703A3 (en) | Liquid collection system and related methods | |
ATE455572T1 (de) | Anordnung zum sammeln und messen von flüssigkeiten | |
TW200833579A (en) | Vacuum suction apparatus | |
IN2012DN02178A (zh) | ||
BR0110564A (pt) | Sistema e método de detecção e de medida de propagação de falhas em um componente ou uma estrutura | |
EP1715320A3 (en) | Leak-testing technique for differential pressure sensor array | |
ES1047765U (es) | Compresor alternativo de unidad refrigeradora hermetica con sistema valvular perfeccionado. | |
WO2011141725A3 (en) | Vacuum pumping system | |
JP2006525467A5 (zh) | ||
DE60200546D1 (de) | Vakuumerzeugervorrichtung | |
KR20090102568A (ko) | 세라믹 볼 패널 타입 에어진공척 | |
ATE404103T1 (de) | Sauggerät insbesondere für staub | |
KR200438633Y1 (ko) | 진공발생기가 일체화된 플레이트 흡착장치 | |
EP1358936A3 (en) | Vacuum manifold and uses thereof | |
DK1692990T3 (da) | Stövsugerpose og fremgangsmåde til fremstilling af en stövsugerpose | |
CN112230531A (zh) | 用于电子产品的真水测试设备 | |
CO6311035A2 (es) | Unidad de deshidratacion por medio de zeolitas | |
CN217403748U (zh) | 一种罐头食品的气密性快速检测设备 | |
CN204286696U (zh) | 一种用于输液器漏堵检测机的水平推进器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |