TWI258863B - Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof - Google Patents

Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof Download PDF

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Publication number
TWI258863B
TWI258863B TW094118890A TW94118890A TWI258863B TW I258863 B TWI258863 B TW I258863B TW 094118890 A TW094118890 A TW 094118890A TW 94118890 A TW94118890 A TW 94118890A TW I258863 B TWI258863 B TW I258863B
Authority
TW
Taiwan
Prior art keywords
electrode
film
insulating film
contact hole
contact
Prior art date
Application number
TW094118890A
Other languages
English (en)
Chinese (zh)
Other versions
TW200614513A (en
Inventor
Harumi Murakami
Toshio Araki
Nobuaki Ishiga
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200614513A publication Critical patent/TW200614513A/zh
Application granted granted Critical
Publication of TWI258863B publication Critical patent/TWI258863B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133345—Insulating layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/42—Arrangements for providing conduction through an insulating substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW094118890A 2004-10-26 2005-06-08 Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof TWI258863B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004310677A JP2006126255A (ja) 2004-10-26 2004-10-26 電気光学装置、液晶表示装置及びそれらの製造方法

Publications (2)

Publication Number Publication Date
TW200614513A TW200614513A (en) 2006-05-01
TWI258863B true TWI258863B (en) 2006-07-21

Family

ID=36721093

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118890A TWI258863B (en) 2004-10-26 2005-06-08 Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof

Country Status (3)

Country Link
JP (1) JP2006126255A (cg-RX-API-DMAC10.html)
KR (1) KR100801172B1 (cg-RX-API-DMAC10.html)
TW (1) TWI258863B (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007093686A (ja) 2005-09-27 2007-04-12 Mitsubishi Electric Corp 液晶表示装置及びその製造方法
JP4728170B2 (ja) * 2006-05-26 2011-07-20 三菱電機株式会社 半導体デバイスおよびアクティブマトリクス型表示装置
JP2008098611A (ja) * 2006-09-15 2008-04-24 Kobe Steel Ltd 表示装置
JP2008112847A (ja) * 2006-10-30 2008-05-15 Shin Etsu Chem Co Ltd 単結晶シリコン太陽電池の製造方法及び単結晶シリコン太陽電池
WO2011158704A1 (en) 2010-06-18 2011-12-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2019087768A (ja) * 2019-03-13 2019-06-06 ラピスセミコンダクタ株式会社 半導体装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190460A (ja) * 1984-10-11 1986-05-08 Nec Corp 半導体装置
JPH07273064A (ja) * 1994-03-28 1995-10-20 Sony Corp 微小構造及びその製造方法、及び接続配線構造の形成方法
FR2751468A1 (fr) * 1996-07-15 1998-01-23 Lgelectronics Procede d'attaque pour un dispositif presentant un materiau organique
JPH11284069A (ja) * 1998-03-30 1999-10-15 Toshiba Corp 半導体装置の製造方法
JP3941901B2 (ja) * 1998-04-28 2007-07-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR100408345B1 (ko) * 2001-05-22 2003-12-06 엘지.필립스 엘시디 주식회사 반사투과형 액정표시장치용 어레이기판과 그 제조방법
JP4488688B2 (ja) * 2002-03-27 2010-06-23 東芝モバイルディスプレイ株式会社 表示装置用配線基板及びその製造方法
JP3880568B2 (ja) * 2002-10-25 2007-02-14 鹿児島日本電気株式会社 液晶表示装置の製造方法
KR20040061206A (ko) * 2002-12-30 2004-07-07 엘지.필립스 엘시디 주식회사 액정표시패널 및 그 제조방법
KR20040066268A (ko) * 2003-01-17 2004-07-27 삼성전자주식회사 어레이 기판의 제조방법

Also Published As

Publication number Publication date
KR100801172B1 (ko) 2008-02-11
TW200614513A (en) 2006-05-01
KR20060051517A (ko) 2006-05-19
JP2006126255A (ja) 2006-05-18

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MM4A Annulment or lapse of patent due to non-payment of fees