TWI223278B - A programmable conductor random access memory and a method for writing thereto - Google Patents
A programmable conductor random access memory and a method for writing thereto Download PDFInfo
- Publication number
- TWI223278B TWI223278B TW091136822A TW91136822A TWI223278B TW I223278 B TWI223278 B TW I223278B TW 091136822 A TW091136822 A TW 091136822A TW 91136822 A TW91136822 A TW 91136822A TW I223278 B TWI223278 B TW I223278B
- Authority
- TW
- Taiwan
- Prior art keywords
- voltage
- memory
- memory element
- conductor
- bit line
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0011—RRAM elements whose operation depends upon chemical change comprising conductive bridging RAM [CBRAM] or programming metallization cells [PMCs]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0023—Address circuits or decoders
- G11C13/0026—Bit-line or column circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/12—Bit line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, equalising circuits, for bit lines
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
- G11C2013/009—Write using potential difference applied between cell electrodes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/79—Array wherein the access device being a transistor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
- Dram (AREA)
- Programmable Controllers (AREA)
Description
1223278 (〇) 玖、發明說明 (發明說明應敘明:發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單說明) 技術領域 本發明係關於積體記憶體電路。更明確地說,其係關 於一種用以將資料寫入可程式化之導體隨機存取記憶體 (PCRAM)單元之方法。 先前技術 DRAM積體電路陣列已經存在超過三十年,並且因為半 導體製造技術及電路設計技術的進步,已經使得其儲存 容量大幅地提昇。該兩項技術的大幅進步同時也達到越 來越高的整合程度,使得能夠大幅地縮減記憶體陣列的 尺寸及成本,並提高製程產能。 DRAM記憶體單元通常包括的基本組件如下:一存取電 晶體(切換開關);以及一電容器,以電荷的形式儲存二 進制的資料位元。一般來說,可將其中一種極性的_電_荷 儲存於該電容器之上來表示高位準邏輯(例如二進制中的 「1」),並且以相反極性的儲存電荷表示低位準邏輯(例 如二進制中的「01」)。DRAM的主要缺點是該電容器上的 電荷最後都會洩漏出去,因而必須「補充」電容器電荷 ,否則該記憶體單元所儲存的資料位元便會遺失。 相反地,'丨貫用的SRAM之記憶體單元包括的基本組件如 下:一存取電晶體(或多個電晶體);以及一記憶體元件 ,其形式為以兩個以上互連的積體電路裝置作為一雙穩 閂。此種雙穩閂的範例為一對交錯耦合的反向器。雙穩 閂並不需要如同DRAM記憶體單元般地進行「補充」,只要 1223278
發明說明續頁 能夠不斷地接收到供應電壓,其便能夠可靠地永久儲存 一資料位元。不過,此種記憶體單元需要較大量的電晶 體,所以其所需要的矽面積大於簡易的DRAM單元,消耗 的功率亦高於DRAM單元。
目前仍然有人不斷地努力,希望找出其它型式的記憶 體元件,不僅能夠儲存資料狀態,同時不需要進行大量 的補充。近年來的研究都集中於電阻式材料上,經過程 式化之後其便能夠表現出高或低的穩定歐姆狀態。此種 材料的其中一個可程式化電阻元件可進行程式化(設定) 以變成高阻抗狀態,用以儲存二進制「1」資料位元,或 程式化以變成低阻抗狀態,用以儲存二進制「0」資料位 元。接著藉由存取裝置偵測讀出電壓(其會供應可經由該 電阻式記憶體元件切換的電流)的幅度,便可擷取出所儲 存的資料位元,因而可表示出先前被程式化的穩定阻抗 狀態。 ·—
其中一種最被看好的可程式化、雙穩電阻式材料便是 大家所熟知的可程式化金屬材料,其亦稱為可程式化導 體材料。由此種材料所構成的記憶體元件在大部份的時 候都具有一穩定的高阻抗狀態,不過藉由施加一適當的 電壓跨接於-該記憶體元件上,便可將其程式化成穩定的 低阻抗狀態。施加一適當幅度的反向電壓跨接於該記憶 體元件上,便可還原成該高阻抗狀態。低阻抗狀態係因 為在整個可程式化之導體材料中或其表面上長出導電的 樹狀結晶的關係。可程式化之導體記憶體元件係非揮發 1223278 (2) 發明說明續頁 性的,因為低阻抗狀態時並不需要進行補充,即使需要 進行補充,其週期亦非常長,例如數天或數週。
其中一種示範性的可程式化之導體材料包括其中散佈 著金屬離子的硫系化合物玻璃材料。其中一種特定範例 為散佈著銀(Ag)離子的鍺:硒化合物(GexSeUx)。其中一種將 該等銀離子散佈於該鍺:硒化合物材料中的方法是先蒸 發該鍺:硒玻璃,然後在該玻璃之上沉積(舉例來說,可 利用濺鍍、物理氣相沉積、或本技術中其它熟知的技術 來進行)一薄的銀層。照射(較佳的係,以波長低於600奈 米的電磁波能量來進行)該銀層,讓該能量穿過銀並到達 銀/玻璃介面,以打斷該硫系化合物材料的硫系化合物鍵 結。因此,便可以銀來摻雜該鍺··硒玻璃。在該硫系化 合物玻璃上相隔的位置處則可配備電極,用以供應電壓 ,以便寫入及讀取該記憶體元件。
目前正不斷地開發用以將資料寫入可程式化之導‘體記 憶體元件陣列中的電路。與從高阻抗狀態將可程式化之 導體記憶體元件寫入至低阻抗狀態相關的一項問題是必 須使用驅動器於高電流處供應一寫入電壓,而且一旦該 記憶體元件切換至低阻抗狀態後,該驅動器仍然必須提 供該高電流導致浪費電源。 發明内容 本發明提供一種經過改良的寫入電路及方法,用以寫 入一可程式化之導體隨機存取記憶體(PCRAM)單元,減低 電源浪費。藉由儲存於位元線之寄生電容中的能量來供 1223278 (3) 發明說明續頁 應該寫入電壓給可程式化之導體記憶體元件使用便可達 到此目的。施加一第一預設電壓給一可程式化之導體記 憶體元件的第一端點,並且將一位元線充電至一第二預 設電壓。存取電晶體可將該被預充電的位元線耦合至該 記憶體元件的一第二端點,而該第一及第二電壓的振幅 及極性相同,其可讓欲被寫入的記憶體元件變成預期的 阻抗狀態。如果該第一預設電壓維持恆定的話,便可利 用該第二電壓的兩種不同電壓值進行控制,用以將記憶 體元件寫入成表示一二進制數值的特殊阻抗。因為不需 要使用電流供應驅動器來寫入一記憶體元件,因此可減 低電流的浪費。 貫施方式 現在將配合圖1 -5所示之示範具體實施例來說明本發明 。在不脫離本發明的精神或範疇下,可以實現其它的具 體實施例,並且對所揭示的具體實施例進行其它變更。 「銀」一詞,希望不僅包括元素銀,還包括含有其它 線路金屬的銀,或與半導體工業熟知的其它金屬的各種 合金組合,只要此種銀合金可以導電,而且並未改變該 銀的物理及電氣特性即可。同樣地,「鍺」及「硒」一詞 ,希望不僅--包括元素鍺及硒,還包括含有其它線路金屬 的鍺及硒,或與半導體工業熟知的其它金屬的各種合金 組合,只要並未改變該鍺及硒的物理及電氣特性即可。 圖1所示的係一記憶體陣列100,其具有複數條列線路110 、112、114及位元(行)線路116、118、120。在其中一列及位 (4) 發明說明續頁 元線路的每個交叉處都會形成一 PCRAM單元,例如記憶體 單元122。每個記憶體單元(例如122)都含有一存取電晶體 124及一可程式化之導體記憶體元件126。該可程式化之導體 記憶體元件可由換雜銀的Se:Ge之硫系化合物玻璃組合物所 構成。在美國申請案序號第09/941,544號,標題為「Stoichiometry for Chalocogenide Glasses Useflil for Memory Devices and Method of Formation」 中便敘述著可當作元件126的適當材料組合物,此處將其 所揭示的部份以引用的方式併入本文中。根據本發明之 一示範具體實施例,作為記憶體元件的鍺:硒玻璃可從 下面化學計量值落在第一化學計量範圍&内的鍺:硒玻 璃所組成的範圍中選出,其包括:Ge18Se82 (當銀的摻雜比 例約為30%或以下時,其會有最大的原子百分比)一直到 Ge28Se72 (當銀的摻雜比例約為20%或以下時,其會有最大的 原子百分比),其一般的化學式為(GewSeuxOMAgy!,其中18S Xi $28,而其中yl代表的是會在玻璃形成區中保留該玻璃 之最大量的合宜的銀(Ag)原子百分比。 該可程式化之導體記憶體元件126的第一端點150係被耦 合至一共用單元平板128。每個存取電晶體124的其中一個 源極/汲極端點係被耦合至一條對應的位元線(例如118), 而每個存取--電晶體124的另一個源極/汲極端點則係被耦 合至該可程式化之導體記憶體元件126之第二端點152。進 一步地說,每條位元線116、118、120都係被耦合至一預充 電電路130,因此可將該條位元線預充電至兩個預設值(例 如Vdd或約為Vdd,以及接地或約為接地)中其中一個,其 1223278 (5) I發明說明續頁 方式將於下面敘述。同時,圖1中顯示出行線路118的寄 生電容132,舉例來說,其可用以寫入該記憶體單元122。 該寄生電容值約為500 ff,不過此數值可能會隨著位元線 及記憶體陣列結構而改變。
參考圖2,其中更詳細地描繪記憶體單元122之概略圖 。位元線118係被耦合至一預充電電路130,並且還被耦合 至存取電晶體124的第一源極/汲極端點,以及被耦合至 複數個其它存取電晶體之個別的第一源極/汲極端點。圖 中的存取電晶體124以及其它存取電晶體都係η型的互補 金屬氧化半導體(CMOS)電晶體。不過,很輕易地便可以ρ 型的CMOS電晶體來取代存取電晶體124,只要適當地修改 其它組件的對應極性與電壓即可。該可程式化之導體記 憶體元件126的第一端點150係被耦合至一共用單元平板 128。電晶體124的第二源極/汲極端點係被耦合至該可程 式化之導體記憶體元件126之第二端點。如上所述,該可 程式化之導體記憶體元件126可由摻雜銀的Ge:Se硫系化合 物玻璃所構成,不過熟習本技術的人士便知道亦可使用 其它的可程式化之導體材料。該可程式化之導體記憶體 元件126係被耦合至供複數個記憶體單元使用的一共用單 元平板128該單元平板128係黏接至一電壓端點,用以提 供一預設的電壓位準(例如Vdd/2或約為Vdd/2)給該單元平 板128。圖2中的每個存取電晶體124之閘極係被黏接至一 條個別的列線路114。當供應足夠的電壓給其中一條列線 路(例如114)時,便可開啟且導通一個相關的存取電晶體 -10- 1223278 (6) 發明說明續頁 124。該等列線路114、位元線路118極單元平板128的電壓 必須以下面所述的方式來選擇,以便對可程式化之導體 記憶體元件126進行讀取及寫入作業。
圖3A及3B所示的分別係用以描述根據本發明之示範具 體實施例之寫入作業的流程圖及電壓圖。在此示範處理 流程中,會假設該可程式化之導體記憶體單元之下面參 數:i)用以從低阻抗狀態寫成高阻抗狀態所需要之跨接 於元件126上的電壓為0.25V ; (ii)所需要之電流約為10 μΑ ; iii)用以從高阻抗狀態寫成低阻抗狀態所需要之跨接於元 件126上的電壓為- 0.25V ; (iv)所需要之電流約為10 μΑ ; (v)低 阻抗狀態約為10 ΚΩ ;及(vi)高阻抗狀態可以是任何大於10 ΜΩ的數值。應該可輕易地瞭解,亦可選擇替代的參數供 該PCRAM單元使用,其係取決於該可程式化之導體記憶 體元件126之材料組合物及尺寸,並不會脫離本發明精神 及範嗔。
參考圖3A及3B,寫入處理從處理區段300開始。在區段 302中,會先將位元線(例如位元線118)預充電至GND或Vdd (或是約為GND或Vdd),其係取決於該單元究竟是要被程 式化成高阻抗狀態或低阻抗狀態。如果該單元欲進入高 阻抗狀態的話,那麼便必須將該條位元線118預充電至接 地;如果該單元欲進入低阻抗狀態的話,那麼便必須將 該條位元線118預充電至Vdd或約為Vdd。透過分別被耦合 至位元線118的預充電電路130便可將位元線118預充電至 預設的電壓。為達到此示範說明的目的,吾人將假設該 -II - 1223278 ⑺ 發明說明續頁 條位元線電壓為VI、跨接於存取電晶體124的電壓降為V2 、跨接於記憶體元件126的電壓為V3、單元平板電壓為V4 以及字組線(電晶體124閘極)電壓為V5,如圖3B所示。同 時,吾人亦將假設Vdd為2.5V。因此該單元平板128便會被
黏接至預設電壓V4,其為Vdd/2或約為Vdd/2 (例如1.25V)。請 注意,該可程式化之導體記憶體元件126具有一反向電壓 寫入極性V3,如果記憶體元件欲被寫入至低阻抗狀態的 話,V3=-.25V ;如果記憶體元件欲被寫入至高阻抗狀態的 話,V3=-2.5V。同時,寫入至高阻抗狀態亦可視為一種抹 除作業。因此,如果該單元122欲進入低阻抗狀態的話, 那麼便必須將該位元線118預充電至Vdd或約為Vdd ;如果 該單元欲進入高阻抗狀態的話,那麼便必須將該位元線 118預充電至接地或約為接地。
當該條位元線被預充電之後,處理區段304便可藉由施 加一預設電壓V5於一被選擇的列線路,以啟動該條、Γ、線 路。處理區段300亦顯示出該單元平板係被保持在Vdd/2或 約為Vdd/2。在此範例中,2.5V或約為2.5V (Vdd)的預設列線 路電壓V5便足以開啟該存取電晶體124。因為V1=2.5V、 V4二1.25V,而且跨接於該存取電晶體的電壓降V2約為1伏 (也就是,伏特值高於電晶體的阻抗)。跨接於該記憶體 元件126的電壓為V3則便剩餘.25V,其足以將其從高阻抗 程式化成低阻抗,或保持先前被程式化的低阻抗狀態。 如果該位元線118被預充電至接地或約為接地的VI,跨 接於該電晶體的電壓降V2約為.2伏的話,那麼跨接於該 -12- 1223278 (8) I發明說明續頁 記憶體元件126的電壓為V3則便剩餘-1.05V,其足以將其從 低阻抗程式化成高阻抗(亦稱抹除),或保持先前被程式 化的高阻抗狀態。
處理區段308表示的係跨接於該記憶體元件126的施加電 壓會經由該記憶體元件放置,以便將所選擇的阻抗寫入 其中。利用該位元線118的寄生電容132保持該預充電電壓 ,便不需要利用被連接至電壓源的電晶體來驅動該條位 元線118,降低寫入作業期間的電流消耗。最後在處理區 段310中,於寫入作業結束時,位元線118的電壓會設定為 低於被施加的單元平板電壓V4,例如小於Vdd/2或小於約 為 Vdd/2。
為讀取該記憶體單元122的内容,或更明確地說,為讀 取該記憶體單元122之可程式化之導體記憶體元件126的阻 抗,必須施加+0.25V以下的電壓差跨接於該可程式化之導 體記憶體元件126。舉例來說,可使用.2V的電壓來進行1賣 取作業。於讀取作業期間,藉由適當的選擇電壓便能夠 達成此目的。舉例來說,2.45V的位元線118電壓VI,以及 1伏的電壓降V2,便可產生.2V跨接於記憶體元件126。 現在參考圖4,圖中採用複數個可程式化之導體記憶體 單元122的私憶體陣列400包括寄生電容132,以及電容器134 與電晶體136。先前已於圖1說明過的元件皆具有相同的 元件符號,並且不在於此處作說明。舉例來說,如果由 電容132於行線路118所提供的寄生電容不足以儲存該預充 電電壓的話,便可在該行線路118上加入電容器134以提供 -13 - 1223278 (9) I發明說明續頁 額外的電容。所以,必要時可以提供一個以上的電容器 134,供寫入作業使用。在預充電作業之前或在預充電作 業時,可啟動電晶體136以便將一個以上的外加電容器134 耦合至該位元線118。在寫入作業之後,會「關閉」電晶 體136,以關閉該位元線118的額外電容值,如此方能不致 於干涉到該記憶體陣列100的其它作業時序。
圖5所示的係含有圖1 - 4所述之可程式化之導體隨機半 導體記憶體之處理器系統500之方塊圖。舉例來說,圖1 -4所述之PCRAM記憶體陣列100可能是被裝配成插入式記憶 體模組之隨機存取記憶體(RAM) 508的一部份。該處理器 型系統500可能是電腦系統或任何其它的處理器系統。該 系統500包括一中央處理單元(CPU) 502 (例如微處理器),用 以透過匯流排520與磁碟機512、CD-ROM光碟機514及RAM 508進行通信。必須注意的係,匯流排520可能是處理器型 系統中常用的一連_匯流排及橋接器,不過為方便解釋 ,圖中的匯流排520僅以單匯流排來顯示。輸入/輸出(I/O) 裝置(例如螢幕)504、506亦會被連接至該匯流排520,不過 並非實現本發明之必要裝置。該處理器型系統500亦包括 一唯讀記憶體(ROM) 510,其亦可用於儲存軟體程式。雖然 圖5的方塊圖僅顯示出一個CPU 502,不過圖5的系統亦可 設計成平行處理器機器,用以執行平行處理。 雖然至此已經配合熟知的較佳具體實施例詳細地說明 本發明,不過應該可輕易地暸解,本發明並不受限於該 等已揭示的具體實施例。更確切地說,本發明可以進行 -14- 1223278 (10) 發明說明續頁
修正,以併入前面未提及的任何數量的變化例、替代例 、取代例或等效的配置,不過其皆與本發明的精神及範 疇一致。舉例來說,雖然本發明係配合特定的電壓位準 加以說明,不過應該可輕易地暸解,亦可使用本文所述 之外的電壓位準。同樣地,雖然本發明係配合記憶體元 件126之特定極性加以說明,不過熟習本技術的人士亦可 將極性倒置,以便產生不同的電壓位準,以施加於供寫 入作業使用的電晶體、單元平板及數位線路中。因此, 本發明並不受限於前面的說明或圖式,而僅受限於隨附 申請專利範圍的範疇。 圖式簡單說明 從上面本發明較佳具體實施例之詳細說明,參考隨附 的圖式,便可更瞭解本發明前面及其它的優點與特點,其 中:
圖1所示的係根據本發明之示範具體實施例,採用複數 個PCRAM記憶體單元之記憶體陣列; 圖2所示的係圖1之PCRAM記憶體單元; 圖3A所示的係用以描述根據本發明之示範具體實施例 之作業流程的流程圖; 圖3B所示二的係跨接於圖1之PCRAM記憶體單元的電壓系 統; 圖4所示的係根據本發明之替代具體實施例,採用複數 個PCRAM記憶體單元之記憶體陣列;及 圖5所示的係根據本發明之示範具體實施例,含有一 -15- 1223278 (ii) 發明說明續頁· PCRAM記憶體之處理器型系統之方塊圖。 圖式代表符號說明 100,400 記 憶 體 陣 列 110, 112, 114 列 線 路 116, 118, 120 位 元 線 路 122 記 憶 體 單 元 124 存 取 電 晶 體 126 可 程 式 化 之 導體記憶體元件 128 共 用 單 元 平 板 130 預 充 電 電 路 132 寄 生 電 容 134 電 容 器 136 電 晶 體 150 第 — 端 點 152 第 二 端 點 500 處 理 器 系 統 502 中 央 處 理 單 元 504 輸 入 /輸出 ;裝置 508 隨 機 存 取 記 憶體 510 '唯 讀 記 情 體 512 磁 碟 機 514 光 碟 機 520 匯 流 排
-16-
Claims (1)
1223278 第091136822號專利申請案 中文申請專利範圍替換本(93年4月)
拾、申請專利範圍 1. 一種用以寫入一記憶體元件之方法,該方法包括 將一導體預充電至一第一電壓,該第一電壓可 與該導體相關的電容維持於該導體中; 於該導體之第一電壓及第二電壓之間耦合一可 化之導體記憶體元件,以便將預設的阻抗狀態寫 記憶體元件中。 2. 如申請專利範圍第1項之方法,其中該可程式化 體記憶體元件係藉由啟動一存取記憶體而被耦合 導體。 3. 如申請專利範圍第1項之方法,其中該導體係一 該記憶體元件相關聯的位元線。 4. 如申請專利範圍第1項之方法,其中該記憶體元 括一硫系化合物玻璃記憶體元件。 5. 如申請專利範圍第4項之方法,其中該硫系化合 璃記憶體元件包括掺雜銀的鍺:磁玻璃組合物。 6. —種用以寫入一半導體記憶體單元之方法,該方 括: 施加一第一電壓給一可程式化之導體記憶體元 第一端點; 替一記憶體陣列的位元線充電,讓該記憶體單 成一第二預設電壓,該位元線具有儲存著該第二 電壓的寄生電容; 施加一第三預設電壓給一電晶體的閘極,用以 O:\82\82735-930405.doc 藉由 程式 入該 之導 至該 條與 件包 物玻 法包 件的 元便 預設 啟動 1223278 I £ ;,- 93; ! L—…..ϋ—— 該電晶體’並且將該位元線搞合至 記憶體元件的第二端點;及 當該電晶體被啟動以建立該記憶 時,使用跨接於該記憶體元件的電 7. 如申請專利範圍第6項之方法,其 大於該第一預設電壓。 8. 如申請專利範圍第6項之方法,其 大於該第二預設電壓。 9. 如申請專利範圍第6項之方法,其 元件的該電壓係經由該記憶體元件 該阻抗狀態。 10. 如申請專利範圍第6項之方法,其 電壓的動作包括將已經被耦合至第 耦合至該第一預設電壓源。 11. 如申請專利範圍第6項之方法,進 驟:選擇性地將至少一個電容器耦 儲存該第二預設電壓。 12. 如申請專利範圍第11項之方法,進 晶體,以便選擇性地將至少一個電 線。 13. —種用以操作一記憶體單元之方法 將一位元線預充電至一第一電壓 施加一第二電壓給一硫系化合物 端點;及 O:\82\82735-930405.doc 申請專利範圍績頁 該可程式化之導體 體元件之阻抗狀態 壓。 中該第二預設電壓 中該第一預設電壓 中跨接於該記憶體 進行放電,以建立 中該施加第一預設 一端點的單元平板 一步包括下面的步 合至該位元線,以 一步包括啟動一電 容器耦合至該位元 ,該方法包括: 記憶體元件的第一 1223278 將該硫系化合物記憶體元件的第二端點連接至該位 元線,以便於跨接該記憶體元件處產生一足夠的電壓 ,用以將預設的阻抗狀態寫入該記憶體元件中。 14. 如申請專利範圍第13項之方法,其中該第一電壓係藉 由寄生電容保留於該位元線中。 15. 如申請專利範圍第13項之方法,進一步包括下面的步* 驟:選擇性地將至少一個電容器耦合至該位元線,以 接收且儲存該第一電壓。 16. 如申請專利範圍第15項之方法,進一步包括操作一電 晶體,以便選擇性地將至少一個電容器耦合至該位元 線。 17. 如申請專利範圍第13項之方法,其中該位元線的寄生 電容值約為500 fF。 18. —種記憶體結構,包括: 一具有一相關電容的導體; 一預充電電路,用以將該導體預充電至一第一電壓 ,該第一電壓可藉由該相關的電容維持於該導體中; 一可程式化之導體記憶體元件,其具有一被連接至 一第二電壓的端點;及 一存取裝置,用以將該記憶體元件的第二端點選擇 性地耦合至該導體,該存取裝置可啟動該第一及第二 電壓,以便於跨接該可程式化之元件處建立足夠的電 壓,以便將該記憶體元件程式化成較高或較低阻抗狀 態中其中一種。 O:\82\82735-930405.doc 1223278
申請夢利範園績頁 19. 如申請專利範圍第18項之記憶體結構,其中該存取裝 置係一電晶體。 20. 如申請專利範圍第18項之記憶體結構,其中該預充電 電路會供應一第一數值給該第一電壓,用以將較高的 阻抗狀態程式化至該記憶體元件之中,以及供應一第 二數值給該第一電壓,用以將較低的阻抗狀態程式化 至該記憶體元件。 21. 如申請專利範圍第18項之記憶體結構,其中該相關的 電容包括一該導體的寄生電容。 22. 如申請專利範圍第18項之記憶體結構,其中該相關的 電容包括耦合至該導體的至少一個電容器。 23. 如申請專利範圍第18項之記憶體結構,其中該相關的 電容包括一該導體的寄生電容以及耦合至該導體的至 少一個電容器。 24. —種半導體記憶體,包括: 一具有一相關電容的位元線; 一具有第一及第二端點的可程式化之導體記憶體元 件; 一預充電電路,用以依照程式化該記憶體元件的預 期阻抗狀態將該位元線預充電至兩個可能電壓值中其 中一個,該相關的電容可保留該位元線上的預充電電 壓值; 一單元平板,其係被耦合至該記憶體元件的第一端 點,用以供應第三電壓值給該第一端點;及 -4- O:\82\82735-930405.doc 1223278
争滅本对範圍績頁 一存取電晶體,其會響應字組線上的電壓,用以選 擇性地將該位元線耦合至該記憶體元件的第二端點, 以便依照該單元平板及位元線上的電壓值將該記憶體 元件程式化成一阻抗狀態。 25. 如申請專利範圍第24項之半導體記憶體,其中該等兩 個可能電壓值中之其中一個高於該第三電壓值,而該 等兩個可能電壓值中另外一個則低於該第三電壓值。 26. —種記憶體單元,包括: 一具有第一及第二端點的硫系化合物記憶體元件; 一第一 1己憶體線路; 一電路,用以選擇性地將該第一記憶體線路預充電 至第一或第二電壓; 一電路,用以供應第三電壓給該硫系化合物記憶體 元件的第一端點;及 一裝置,在該第一記憶體線路被預充電之後,以可 切換的方式將該硫系化合物記憶體元件的第二端點耦 合至該第一記憶體線路,該裝置可讓欲被施加跨接於 該硫系化合物記憶體元件上的電壓足以依照被預充電 至該記憶體線路上第一或第二電壓’將兩種預設阻抗 狀態中其中一種寫入該硫系化合物元件中。 27. 如申請專利範圍第26項之記憶體單元,其中該記憶體 線路的寄生電容值約為500 fF。 28. —種處理器系統,包括: 一處理器;及 O:\82\82735-930405.doc 1223278 一被耦合至該處理器的半導體記憶體,該半導體記 憶體包括: 一具有一相關電容的導體; 一預充電電路,用以將該導體預充電至一第一電壓 ,該第一電壓可藉由該相關的電容維持於該導體中; 一可程式化之導體記憶體元件,其具有一被連接至 一第二電壓的端點;及 一存取裝置,用以將該記憶體元件的第二端點選擇 性地耦合至該導體,該存取裝置可啟動該第一及第二 電壓,以便於跨接該可程式化之元件處建立足夠的電 壓,以便將該記憶體元件程式化成較高或較低阻抗狀 態中其中一種。 29.如申請專利範圍第28項之處理器系統,其中該相關的 電容包括一該導體的寄生電容以及耦合至該導體的至 少一個電容器。 O:\82\82735-930405.doc
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/022,722 US6873538B2 (en) | 2001-12-20 | 2001-12-20 | Programmable conductor random access memory and a method for writing thereto |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200304150A TW200304150A (en) | 2003-09-16 |
TWI223278B true TWI223278B (en) | 2004-11-01 |
Family
ID=21811095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW091136822A TWI223278B (en) | 2001-12-20 | 2002-12-20 | A programmable conductor random access memory and a method for writing thereto |
Country Status (10)
Country | Link |
---|---|
US (1) | US6873538B2 (zh) |
EP (2) | EP1456851B1 (zh) |
JP (1) | JP4081011B2 (zh) |
KR (1) | KR100626505B1 (zh) |
CN (2) | CN100538878C (zh) |
AT (2) | ATE551699T1 (zh) |
AU (1) | AU2002364167A1 (zh) |
DE (1) | DE60234273D1 (zh) |
TW (1) | TWI223278B (zh) |
WO (1) | WO2003054887A1 (zh) |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7102150B2 (en) * | 2001-05-11 | 2006-09-05 | Harshfield Steven T | PCRAM memory cell and method of making same |
US6951805B2 (en) * | 2001-08-01 | 2005-10-04 | Micron Technology, Inc. | Method of forming integrated circuitry, method of forming memory circuitry, and method of forming random access memory circuitry |
US6955940B2 (en) * | 2001-08-29 | 2005-10-18 | Micron Technology, Inc. | Method of forming chalcogenide comprising devices |
US6881623B2 (en) * | 2001-08-29 | 2005-04-19 | Micron Technology, Inc. | Method of forming chalcogenide comprising devices, method of forming a programmable memory cell of memory circuitry, and a chalcogenide comprising device |
US6646902B2 (en) | 2001-08-30 | 2003-11-11 | Micron Technology, Inc. | Method of retaining memory state in a programmable conductor RAM |
US6560155B1 (en) * | 2001-10-24 | 2003-05-06 | Micron Technology, Inc. | System and method for power saving memory refresh for dynamic random access memory devices after an extended interval |
US6791859B2 (en) | 2001-11-20 | 2004-09-14 | Micron Technology, Inc. | Complementary bit PCRAM sense amplifier and method of operation |
US6909656B2 (en) * | 2002-01-04 | 2005-06-21 | Micron Technology, Inc. | PCRAM rewrite prevention |
US6867064B2 (en) * | 2002-02-15 | 2005-03-15 | Micron Technology, Inc. | Method to alter chalcogenide glass for improved switching characteristics |
US6791885B2 (en) | 2002-02-19 | 2004-09-14 | Micron Technology, Inc. | Programmable conductor random access memory and method for sensing same |
US7151273B2 (en) | 2002-02-20 | 2006-12-19 | Micron Technology, Inc. | Silver-selenide/chalcogenide glass stack for resistance variable memory |
US6847535B2 (en) | 2002-02-20 | 2005-01-25 | Micron Technology, Inc. | Removable programmable conductor memory card and associated read/write device and method of operation |
US6891749B2 (en) * | 2002-02-20 | 2005-05-10 | Micron Technology, Inc. | Resistance variable ‘on ’ memory |
US6858482B2 (en) * | 2002-04-10 | 2005-02-22 | Micron Technology, Inc. | Method of manufacture of programmable switching circuits and memory cells employing a glass layer |
US6864500B2 (en) * | 2002-04-10 | 2005-03-08 | Micron Technology, Inc. | Programmable conductor memory cell structure |
US6731528B2 (en) * | 2002-05-03 | 2004-05-04 | Micron Technology, Inc. | Dual write cycle programmable conductor memory system and method of operation |
US6825135B2 (en) | 2002-06-06 | 2004-11-30 | Micron Technology, Inc. | Elimination of dendrite formation during metal/chalcogenide glass deposition |
US6890790B2 (en) * | 2002-06-06 | 2005-05-10 | Micron Technology, Inc. | Co-sputter deposition of metal-doped chalcogenides |
US6864521B2 (en) | 2002-08-29 | 2005-03-08 | Micron Technology, Inc. | Method to control silver concentration in a resistance variable memory element |
US7364644B2 (en) | 2002-08-29 | 2008-04-29 | Micron Technology, Inc. | Silver selenide film stoichiometry and morphology control in sputter deposition |
US7010644B2 (en) * | 2002-08-29 | 2006-03-07 | Micron Technology, Inc. | Software refreshed memory device and method |
US7022579B2 (en) | 2003-03-14 | 2006-04-04 | Micron Technology, Inc. | Method for filling via with metal |
US6888771B2 (en) * | 2003-05-09 | 2005-05-03 | Micron Technology, Inc. | Skewed sense AMP for variable resistance memory sensing |
JP4322048B2 (ja) * | 2003-05-21 | 2009-08-26 | 株式会社ルネサステクノロジ | 半導体記憶装置 |
JP2005026576A (ja) * | 2003-07-04 | 2005-01-27 | Sony Corp | 記憶装置 |
JP4290494B2 (ja) * | 2003-07-08 | 2009-07-08 | 株式会社ルネサステクノロジ | 半導体記憶装置 |
DE60310915D1 (de) * | 2003-08-05 | 2007-02-15 | St Microelectronics Srl | Verfahren zur Herstellung einer Anordnung von Phasenwechselspeichern in Kupfer-Damaszenertechnologie sowie entsprechend hergestellte Anordnungen von Phasenwechselspeichern |
US6903361B2 (en) * | 2003-09-17 | 2005-06-07 | Micron Technology, Inc. | Non-volatile memory structure |
US20050149969A1 (en) * | 2004-01-06 | 2005-07-07 | Vishnu Kumar | TV graphical menu interface that provides browseable listing of connected removable media content |
US7138687B2 (en) * | 2004-01-26 | 2006-11-21 | Macronix International Co., Ltd. | Thin film phase-change memory |
US7583551B2 (en) | 2004-03-10 | 2009-09-01 | Micron Technology, Inc. | Power management control and controlling memory refresh operations |
JP4553620B2 (ja) * | 2004-04-06 | 2010-09-29 | ルネサスエレクトロニクス株式会社 | 薄膜磁性体記憶装置 |
US7326950B2 (en) | 2004-07-19 | 2008-02-05 | Micron Technology, Inc. | Memory device with switching glass layer |
US7354793B2 (en) | 2004-08-12 | 2008-04-08 | Micron Technology, Inc. | Method of forming a PCRAM device incorporating a resistance-variable chalocogenide element |
US7365411B2 (en) | 2004-08-12 | 2008-04-29 | Micron Technology, Inc. | Resistance variable memory with temperature tolerant materials |
JP2006114087A (ja) | 2004-10-13 | 2006-04-27 | Sony Corp | 記憶装置及び半導体装置 |
JP2006134398A (ja) | 2004-11-04 | 2006-05-25 | Sony Corp | 記憶装置及び半導体装置 |
DE102004056911B4 (de) * | 2004-11-25 | 2010-06-02 | Qimonda Ag | Speicherschaltung sowie Verfahren zum Auslesen eines Speicherdatums aus einer solchen Speicherschaltung |
DE102004061548A1 (de) * | 2004-12-21 | 2006-06-29 | Infineon Technologies Ag | Integration von 1T1R-CBRAM-Speicherzellen |
US20060131555A1 (en) * | 2004-12-22 | 2006-06-22 | Micron Technology, Inc. | Resistance variable devices with controllable channels |
US7374174B2 (en) | 2004-12-22 | 2008-05-20 | Micron Technology, Inc. | Small electrode for resistance variable devices |
US7317200B2 (en) | 2005-02-23 | 2008-01-08 | Micron Technology, Inc. | SnSe-based limited reprogrammable cell |
US7427770B2 (en) | 2005-04-22 | 2008-09-23 | Micron Technology, Inc. | Memory array for increased bit density |
US7709289B2 (en) | 2005-04-22 | 2010-05-04 | Micron Technology, Inc. | Memory elements having patterned electrodes and method of forming the same |
JP2007018615A (ja) * | 2005-07-08 | 2007-01-25 | Sony Corp | 記憶装置及び半導体装置 |
US7274034B2 (en) | 2005-08-01 | 2007-09-25 | Micron Technology, Inc. | Resistance variable memory device with sputtered metal-chalcogenide region and method of fabrication |
US7332735B2 (en) | 2005-08-02 | 2008-02-19 | Micron Technology, Inc. | Phase change memory cell and method of formation |
US7579615B2 (en) | 2005-08-09 | 2009-08-25 | Micron Technology, Inc. | Access transistor for memory device |
US7251154B2 (en) | 2005-08-15 | 2007-07-31 | Micron Technology, Inc. | Method and apparatus providing a cross-point memory array using a variable resistance memory cell and capacitance |
US20070047291A1 (en) * | 2005-08-26 | 2007-03-01 | Heinz Hoenigschmid | Integrated memory circuit comprising a resistive memory element and a method for manufacturing such a memory circuit |
US7257013B2 (en) * | 2005-09-08 | 2007-08-14 | Infineon Technologies Ag | Method for writing data into a memory cell of a conductive bridging random access memory, memory circuit and CBRAM memory circuit |
US7369424B2 (en) * | 2005-11-09 | 2008-05-06 | Industrial Technology Research Institute | Programmable memory cell and operation method |
US7518902B2 (en) | 2005-12-23 | 2009-04-14 | Infineon Technologies Ag | Resistive memory device and method for writing to a resistive memory cell in a resistive memory device |
DE102005061996B4 (de) * | 2005-12-23 | 2016-02-18 | Polaris Innovations Ltd. | CBRAM-Speichereinrichtung und Verfahren zum Beschreiben einer Widerstandsspeicherzelle in einer CBRAM-Speichereinrichtung |
US20070195580A1 (en) * | 2006-02-23 | 2007-08-23 | Heinz Hoenigschmid | Memory circuit having a resistive memory cell and method for operating such a memory circuit |
EP1835509A1 (de) * | 2006-03-14 | 2007-09-19 | Qimonda AG | Speicherzelle, Speicher mit einer Speicherzelle und Verfahren zum Einschreiben von Daten in eine Speicherzelle |
US7560723B2 (en) | 2006-08-29 | 2009-07-14 | Micron Technology, Inc. | Enhanced memory density resistance variable memory cells, arrays, devices and systems including the same, and methods of fabrication |
US7619917B2 (en) * | 2006-11-28 | 2009-11-17 | Qimonda North America Corp. | Memory cell with trigger element |
US8077495B2 (en) * | 2006-12-05 | 2011-12-13 | Spansion Llc | Method of programming, erasing and repairing a memory device |
US20080247218A1 (en) * | 2007-04-04 | 2008-10-09 | International Business Machines Corporation | Design structure for implementing improved write performance for pcram devices |
JP5503102B2 (ja) * | 2007-07-04 | 2014-05-28 | ピーエスフォー ルクスコ エスエイアールエル | 相変化メモリ装置 |
KR101416878B1 (ko) * | 2007-11-13 | 2014-07-09 | 삼성전자주식회사 | 파워 공급 회로 및 이를 구비하는 상 변화 메모리 장치 |
US7729163B2 (en) * | 2008-03-26 | 2010-06-01 | Micron Technology, Inc. | Phase change memory |
US8059447B2 (en) * | 2008-06-27 | 2011-11-15 | Sandisk 3D Llc | Capacitive discharge method for writing to non-volatile memory |
US7978507B2 (en) * | 2008-06-27 | 2011-07-12 | Sandisk 3D, Llc | Pulse reset for non-volatile storage |
US8467236B2 (en) | 2008-08-01 | 2013-06-18 | Boise State University | Continuously variable resistor |
US7825479B2 (en) | 2008-08-06 | 2010-11-02 | International Business Machines Corporation | Electrical antifuse having a multi-thickness dielectric layer |
US8130528B2 (en) | 2008-08-25 | 2012-03-06 | Sandisk 3D Llc | Memory system with sectional data lines |
US8027209B2 (en) | 2008-10-06 | 2011-09-27 | Sandisk 3D, Llc | Continuous programming of non-volatile memory |
KR101537316B1 (ko) * | 2008-11-14 | 2015-07-16 | 삼성전자주식회사 | 상 변화 메모리 장치 |
US8279650B2 (en) | 2009-04-20 | 2012-10-02 | Sandisk 3D Llc | Memory system with data line switching scheme |
JP4796640B2 (ja) * | 2009-05-19 | 2011-10-19 | シャープ株式会社 | 半導体記憶装置、及び、電子機器 |
JP5688376B2 (ja) * | 2010-01-06 | 2015-03-25 | 株式会社ヤクルト本社 | 経口用のdna損傷修復促進剤及びエラスターゼ活性抑制剤 |
US8929125B2 (en) * | 2013-02-20 | 2015-01-06 | Micron Technology, Inc. | Apparatus and methods for forming a memory cell using charge monitoring |
US9178143B2 (en) * | 2013-07-29 | 2015-11-03 | Industrial Technology Research Institute | Resistive memory structure |
DE102014113030A1 (de) | 2014-09-10 | 2016-03-10 | Infineon Technologies Ag | Speicherschaltungen und ein Verfahren zum Bilden einer Speicherschaltung |
US10134470B2 (en) * | 2015-11-04 | 2018-11-20 | Micron Technology, Inc. | Apparatuses and methods including memory and operation of same |
US9978810B2 (en) | 2015-11-04 | 2018-05-22 | Micron Technology, Inc. | Three-dimensional memory apparatuses and methods of use |
US9659646B1 (en) | 2016-01-11 | 2017-05-23 | Crossbar, Inc. | Programmable logic applications for an array of high on/off ratio and high speed non-volatile memory cells |
US10446226B2 (en) | 2016-08-08 | 2019-10-15 | Micron Technology, Inc. | Apparatuses including multi-level memory cells and methods of operation of same |
US9990992B2 (en) * | 2016-10-25 | 2018-06-05 | Arm Ltd. | Method, system and device for non-volatile memory device operation |
US10157670B2 (en) | 2016-10-28 | 2018-12-18 | Micron Technology, Inc. | Apparatuses including memory cells and methods of operation of same |
Family Cites Families (136)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3271591A (en) | 1963-09-20 | 1966-09-06 | Energy Conversion Devices Inc | Symmetrical current controlling device |
US3622319A (en) | 1966-10-20 | 1971-11-23 | Western Electric Co | Nonreflecting photomasks and methods of making same |
US3868651A (en) | 1970-08-13 | 1975-02-25 | Energy Conversion Devices Inc | Method and apparatus for storing and reading data in a memory having catalytic material to initiate amorphous to crystalline change in memory structure |
US3743847A (en) | 1971-06-01 | 1973-07-03 | Motorola Inc | Amorphous silicon film as a uv filter |
US4267261A (en) | 1971-07-15 | 1981-05-12 | Energy Conversion Devices, Inc. | Method for full format imaging |
US3961314A (en) | 1974-03-05 | 1976-06-01 | Energy Conversion Devices, Inc. | Structure and method for producing an image |
US3966317A (en) | 1974-04-08 | 1976-06-29 | Energy Conversion Devices, Inc. | Dry process production of archival microform records from hard copy |
US4177474A (en) | 1977-05-18 | 1979-12-04 | Energy Conversion Devices, Inc. | High temperature amorphous semiconductor member and method of making the same |
JPS5565365A (en) | 1978-11-07 | 1980-05-16 | Nippon Telegr & Teleph Corp <Ntt> | Pattern forming method |
DE2901303C2 (de) | 1979-01-15 | 1984-04-19 | Max Planck Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Festes Ionenleitermaterial, seine Verwendung und Verfahren zu dessen Herstellung |
US4312938A (en) | 1979-07-06 | 1982-01-26 | Drexler Technology Corporation | Method for making a broadband reflective laser recording and data storage medium with absorptive underlayer |
US4269935A (en) | 1979-07-13 | 1981-05-26 | Ionomet Company, Inc. | Process of doping silver image in chalcogenide layer |
US4316946A (en) | 1979-12-03 | 1982-02-23 | Ionomet Company, Inc. | Surface sensitized chalcogenide product and process for making and using the same |
US4499557A (en) | 1980-10-28 | 1985-02-12 | Energy Conversion Devices, Inc. | Programmable cell for use in programmable electronic arrays |
US4405710A (en) | 1981-06-22 | 1983-09-20 | Cornell Research Foundation, Inc. | Ion beam exposure of (g-Gex -Se1-x) inorganic resists |
US4737379A (en) | 1982-09-24 | 1988-04-12 | Energy Conversion Devices, Inc. | Plasma deposited coatings, and low temperature plasma method of making same |
US4545111A (en) | 1983-01-18 | 1985-10-08 | Energy Conversion Devices, Inc. | Method for making, parallel preprogramming or field programming of electronic matrix arrays |
US4608296A (en) | 1983-12-06 | 1986-08-26 | Energy Conversion Devices, Inc. | Superconducting films and devices exhibiting AC to DC conversion |
US4795657A (en) | 1984-04-13 | 1989-01-03 | Energy Conversion Devices, Inc. | Method of fabricating a programmable array |
US4668968A (en) | 1984-05-14 | 1987-05-26 | Energy Conversion Devices, Inc. | Integrated circuit compatible thin film field effect transistor and method of making same |
US4670763A (en) | 1984-05-14 | 1987-06-02 | Energy Conversion Devices, Inc. | Thin film field effect transistor |
US4843443A (en) | 1984-05-14 | 1989-06-27 | Energy Conversion Devices, Inc. | Thin film field effect transistor and method of making same |
US4769338A (en) | 1984-05-14 | 1988-09-06 | Energy Conversion Devices, Inc. | Thin film field effect transistor and method of making same |
US4673957A (en) | 1984-05-14 | 1987-06-16 | Energy Conversion Devices, Inc. | Integrated circuit compatible thin film field effect transistor and method of making same |
US4678679A (en) | 1984-06-25 | 1987-07-07 | Energy Conversion Devices, Inc. | Continuous deposition of activated process gases |
US4646266A (en) | 1984-09-28 | 1987-02-24 | Energy Conversion Devices, Inc. | Programmable semiconductor structures and methods for using the same |
US4664939A (en) | 1985-04-01 | 1987-05-12 | Energy Conversion Devices, Inc. | Vertical semiconductor processor |
US4637895A (en) | 1985-04-01 | 1987-01-20 | Energy Conversion Devices, Inc. | Gas mixtures for the vapor deposition of semiconductor material |
US4710899A (en) | 1985-06-10 | 1987-12-01 | Energy Conversion Devices, Inc. | Data storage medium incorporating a transition metal for increased switching speed |
US4671618A (en) | 1986-05-22 | 1987-06-09 | Wu Bao Gang | Liquid crystalline-plastic material having submillisecond switch times and extended memory |
US4766471A (en) | 1986-01-23 | 1988-08-23 | Energy Conversion Devices, Inc. | Thin film electro-optical devices |
US4818717A (en) | 1986-06-27 | 1989-04-04 | Energy Conversion Devices, Inc. | Method for making electronic matrix arrays |
US4728406A (en) | 1986-08-18 | 1988-03-01 | Energy Conversion Devices, Inc. | Method for plasma - coating a semiconductor body |
US4845533A (en) | 1986-08-22 | 1989-07-04 | Energy Conversion Devices, Inc. | Thin film electrical devices with amorphous carbon electrodes and method of making same |
US4809044A (en) | 1986-08-22 | 1989-02-28 | Energy Conversion Devices, Inc. | Thin film overvoltage protection devices |
US4853785A (en) | 1986-10-15 | 1989-08-01 | Energy Conversion Devices, Inc. | Electronic camera including electronic signal storage cartridge |
US4788594A (en) | 1986-10-15 | 1988-11-29 | Energy Conversion Devices, Inc. | Solid state electronic camera including thin film matrix of photosensors |
GB8627488D0 (en) | 1986-11-18 | 1986-12-17 | British Petroleum Co Plc | Memory matrix |
US4847674A (en) | 1987-03-10 | 1989-07-11 | Advanced Micro Devices, Inc. | High speed interconnect system with refractory non-dogbone contacts and an active electromigration suppression mechanism |
US4800526A (en) | 1987-05-08 | 1989-01-24 | Gaf Corporation | Memory element for information storage and retrieval system and associated process |
US4775425A (en) | 1987-07-27 | 1988-10-04 | Energy Conversion Devices, Inc. | P and n-type microcrystalline semiconductor alloy material including band gap widening elements, devices utilizing same |
US4891330A (en) | 1987-07-27 | 1990-01-02 | Energy Conversion Devices, Inc. | Method of fabricating n-type and p-type microcrystalline semiconductor alloy material including band gap widening elements |
US5272359A (en) | 1988-04-07 | 1993-12-21 | California Institute Of Technology | Reversible non-volatile switch based on a TCNQ charge transfer complex |
GB8910854D0 (en) | 1989-05-11 | 1989-06-28 | British Petroleum Co Plc | Semiconductor device |
US5159661A (en) | 1990-10-05 | 1992-10-27 | Energy Conversion Devices, Inc. | Vertically interconnected parallel distributed processor |
US5314772A (en) | 1990-10-09 | 1994-05-24 | Arizona Board Of Regents | High resolution, multi-layer resist for microlithography and method therefor |
JPH0770731B2 (ja) | 1990-11-22 | 1995-07-31 | 松下電器産業株式会社 | 電気可塑性素子 |
US5335219A (en) | 1991-01-18 | 1994-08-02 | Ovshinsky Stanford R | Homogeneous composition of microcrystalline semiconductor material, semiconductor devices and directly overwritable memory elements fabricated therefrom, and arrays fabricated from the memory elements |
US5596522A (en) | 1991-01-18 | 1997-01-21 | Energy Conversion Devices, Inc. | Homogeneous compositions of microcrystalline semiconductor material, semiconductor devices and directly overwritable memory elements fabricated therefrom, and arrays fabricated from the memory elements |
US5341328A (en) | 1991-01-18 | 1994-08-23 | Energy Conversion Devices, Inc. | Electrically erasable memory elements having reduced switching current requirements and increased write/erase cycle life |
US5536947A (en) | 1991-01-18 | 1996-07-16 | Energy Conversion Devices, Inc. | Electrically erasable, directly overwritable, multibit single cell memory element and arrays fabricated therefrom |
US5534712A (en) | 1991-01-18 | 1996-07-09 | Energy Conversion Devices, Inc. | Electrically erasable memory elements characterized by reduced current and improved thermal stability |
US5534711A (en) | 1991-01-18 | 1996-07-09 | Energy Conversion Devices, Inc. | Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
US5166758A (en) | 1991-01-18 | 1992-11-24 | Energy Conversion Devices, Inc. | Electrically erasable phase change memory |
US5414271A (en) | 1991-01-18 | 1995-05-09 | Energy Conversion Devices, Inc. | Electrically erasable memory elements having improved set resistance stability |
US5406509A (en) | 1991-01-18 | 1995-04-11 | Energy Conversion Devices, Inc. | Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
US5296716A (en) | 1991-01-18 | 1994-03-22 | Energy Conversion Devices, Inc. | Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
US5128099A (en) | 1991-02-15 | 1992-07-07 | Energy Conversion Devices, Inc. | Congruent state changeable optical memory material and device |
US5219788A (en) | 1991-02-25 | 1993-06-15 | Ibm Corporation | Bilayer metallization cap for photolithography |
US5177567A (en) | 1991-07-19 | 1993-01-05 | Energy Conversion Devices, Inc. | Thin-film structure for chalcogenide electrical switching devices and process therefor |
US5359205A (en) | 1991-11-07 | 1994-10-25 | Energy Conversion Devices, Inc. | Electrically erasable memory elements characterized by reduced current and improved thermal stability |
US5238862A (en) | 1992-03-18 | 1993-08-24 | Micron Technology, Inc. | Method of forming a stacked capacitor with striated electrode |
US5512328A (en) | 1992-08-07 | 1996-04-30 | Hitachi, Ltd. | Method for forming a pattern and forming a thin film used in pattern formation |
US5350484A (en) | 1992-09-08 | 1994-09-27 | Intel Corporation | Method for the anisotropic etching of metal films in the fabrication of interconnects |
BE1007902A3 (nl) | 1993-12-23 | 1995-11-14 | Philips Electronics Nv | Schakelelement met geheugen voorzien van schottky tunnelbarriere. |
US5500532A (en) | 1994-08-18 | 1996-03-19 | Arizona Board Of Regents | Personal electronic dosimeter |
JP2643870B2 (ja) | 1994-11-29 | 1997-08-20 | 日本電気株式会社 | 半導体記憶装置の製造方法 |
US5543737A (en) | 1995-02-10 | 1996-08-06 | Energy Conversion Devices, Inc. | Logical operation circuit employing two-terminal chalcogenide switches |
US5869843A (en) | 1995-06-07 | 1999-02-09 | Micron Technology, Inc. | Memory array having a multi-state element and method for forming such array or cells thereof |
US5751012A (en) | 1995-06-07 | 1998-05-12 | Micron Technology, Inc. | Polysilicon pillar diode for use in a non-volatile memory cell |
US5879955A (en) * | 1995-06-07 | 1999-03-09 | Micron Technology, Inc. | Method for fabricating an array of ultra-small pores for chalcogenide memory cells |
US6420725B1 (en) | 1995-06-07 | 2002-07-16 | Micron Technology, Inc. | Method and apparatus for forming an integrated circuit electrode having a reduced contact area |
US5789758A (en) | 1995-06-07 | 1998-08-04 | Micron Technology, Inc. | Chalcogenide memory cell with a plurality of chalcogenide electrodes |
AU6048896A (en) | 1995-06-07 | 1996-12-30 | Micron Technology, Inc. | A stack/trench diode for use with a multi-state material in a non-volatile memory cell |
US5714768A (en) | 1995-10-24 | 1998-02-03 | Energy Conversion Devices, Inc. | Second-layer phase change memory array on top of a logic device |
US5694054A (en) | 1995-11-28 | 1997-12-02 | Energy Conversion Devices, Inc. | Integrated drivers for flat panel displays employing chalcogenide logic elements |
US5591501A (en) | 1995-12-20 | 1997-01-07 | Energy Conversion Devices, Inc. | Optical recording medium having a plurality of discrete phase change data recording points |
US6653733B1 (en) * | 1996-02-23 | 2003-11-25 | Micron Technology, Inc. | Conductors in semiconductor devices |
US5687112A (en) | 1996-04-19 | 1997-11-11 | Energy Conversion Devices, Inc. | Multibit single cell memory element having tapered contact |
US5761115A (en) | 1996-05-30 | 1998-06-02 | Axon Technologies Corporation | Programmable metallization cell structure and method of making same |
US5789277A (en) | 1996-07-22 | 1998-08-04 | Micron Technology, Inc. | Method of making chalogenide memory device |
US5998244A (en) | 1996-08-22 | 1999-12-07 | Micron Technology, Inc. | Memory cell incorporating a chalcogenide element and method of making same |
US5883827A (en) * | 1996-08-26 | 1999-03-16 | Micron Technology, Inc. | Method and apparatus for reading/writing data in a memory system including programmable resistors |
US5761112A (en) | 1996-09-20 | 1998-06-02 | Mosel Vitelic Corporation | Charge storage for sensing operations in a DRAM |
US6087674A (en) | 1996-10-28 | 2000-07-11 | Energy Conversion Devices, Inc. | Memory element with memory material comprising phase-change material and dielectric material |
US5825046A (en) | 1996-10-28 | 1998-10-20 | Energy Conversion Devices, Inc. | Composite memory material comprising a mixture of phase-change memory material and dielectric material |
US5781469A (en) * | 1997-01-24 | 1998-07-14 | Atmel Corporation | Bitline load and precharge structure for an SRAM memory |
US5846889A (en) | 1997-03-14 | 1998-12-08 | The United States Of America As Represented By The Secretary Of The Navy | Infrared transparent selenide glasses |
US5998066A (en) | 1997-05-16 | 1999-12-07 | Aerial Imaging Corporation | Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
US5933365A (en) | 1997-06-19 | 1999-08-03 | Energy Conversion Devices, Inc. | Memory element with energy control mechanism |
US6011757A (en) | 1998-01-27 | 2000-01-04 | Ovshinsky; Stanford R. | Optical recording media having increased erasability |
US6141241A (en) | 1998-06-23 | 2000-10-31 | Energy Conversion Devices, Inc. | Universal memory element with systems employing same and apparatus and method for reading, writing and programming same |
US6297170B1 (en) | 1998-06-23 | 2001-10-02 | Vlsi Technology, Inc. | Sacrificial multilayer anti-reflective coating for mos gate formation |
US5912839A (en) | 1998-06-23 | 1999-06-15 | Energy Conversion Devices, Inc. | Universal memory element and method of programming same |
US6388324B2 (en) * | 1998-08-31 | 2002-05-14 | Arizona Board Of Regents | Self-repairing interconnections for electrical circuits |
US6825489B2 (en) * | 2001-04-06 | 2004-11-30 | Axon Technologies Corporation | Microelectronic device, structure, and system, including a memory structure having a variable programmable property and method of forming the same |
US6487106B1 (en) * | 1999-01-12 | 2002-11-26 | Arizona Board Of Regents | Programmable microelectronic devices and method of forming and programming same |
US6177338B1 (en) | 1999-02-08 | 2001-01-23 | Taiwan Semiconductor Manufacturing Company | Two step barrier process |
US6180456B1 (en) * | 1999-02-17 | 2001-01-30 | International Business Machines Corporation | Triple polysilicon embedded NVRAM cell and method thereof |
US6072716A (en) | 1999-04-14 | 2000-06-06 | Massachusetts Institute Of Technology | Memory structures and methods of making same |
US6143604A (en) | 1999-06-04 | 2000-11-07 | Taiwan Semiconductor Manufacturing Company | Method for fabricating small-size two-step contacts for word-line strapping on dynamic random access memory (DRAM) |
US6350679B1 (en) * | 1999-08-03 | 2002-02-26 | Micron Technology, Inc. | Methods of providing an interlevel dielectric layer intermediate different elevation conductive metal layers in the fabrication of integrated circuitry |
US6188615B1 (en) * | 1999-10-29 | 2001-02-13 | Hewlett-Packard Company | MRAM device including digital sense amplifiers |
US6314014B1 (en) * | 1999-12-16 | 2001-11-06 | Ovonyx, Inc. | Programmable resistance memory arrays with reference cells |
JP2002050181A (ja) * | 2000-02-07 | 2002-02-15 | Toshiba Corp | 半導体記憶装置 |
US6339544B1 (en) * | 2000-09-29 | 2002-01-15 | Intel Corporation | Method to enhance performance of thermal resistor device |
US6555860B2 (en) * | 2000-09-29 | 2003-04-29 | Intel Corporation | Compositionally modified resistive electrode |
US6567293B1 (en) * | 2000-09-29 | 2003-05-20 | Ovonyx, Inc. | Single level metal memory cell using chalcogenide cladding |
US6404665B1 (en) * | 2000-09-29 | 2002-06-11 | Intel Corporation | Compositionally modified resistive electrode |
US6563164B2 (en) * | 2000-09-29 | 2003-05-13 | Ovonyx, Inc. | Compositionally modified resistive electrode |
US6653193B2 (en) * | 2000-12-08 | 2003-11-25 | Micron Technology, Inc. | Resistance variable device |
US6696355B2 (en) * | 2000-12-14 | 2004-02-24 | Ovonyx, Inc. | Method to selectively increase the top resistance of the lower programming electrode in a phase-change memory |
US6569705B2 (en) * | 2000-12-21 | 2003-05-27 | Intel Corporation | Metal structure for a phase-change memory device |
US6534781B2 (en) * | 2000-12-26 | 2003-03-18 | Ovonyx, Inc. | Phase-change memory bipolar array utilizing a single shallow trench isolation for creating an individual active area region for two memory array elements and one bipolar base contact |
US6531373B2 (en) * | 2000-12-27 | 2003-03-11 | Ovonyx, Inc. | Method of forming a phase-change memory cell using silicon on insulator low electrode in charcogenide elements |
US6687427B2 (en) * | 2000-12-29 | 2004-02-03 | Intel Corporation | Optic switch |
US6727192B2 (en) * | 2001-03-01 | 2004-04-27 | Micron Technology, Inc. | Methods of metal doping a chalcogenide material |
US6348365B1 (en) * | 2001-03-02 | 2002-02-19 | Micron Technology, Inc. | PCRAM cell manufacturing |
US6570784B2 (en) * | 2001-06-29 | 2003-05-27 | Ovonyx, Inc. | Programming a phase-change material memory |
US6514805B2 (en) * | 2001-06-30 | 2003-02-04 | Intel Corporation | Trench sidewall profile for device isolation |
US6511862B2 (en) * | 2001-06-30 | 2003-01-28 | Ovonyx, Inc. | Modified contact for programmable devices |
US6511867B2 (en) * | 2001-06-30 | 2003-01-28 | Ovonyx, Inc. | Utilizing atomic layer deposition for programmable device |
US6673700B2 (en) * | 2001-06-30 | 2004-01-06 | Ovonyx, Inc. | Reduced area intersection between electrode and programming element |
US6951805B2 (en) * | 2001-08-01 | 2005-10-04 | Micron Technology, Inc. | Method of forming integrated circuitry, method of forming memory circuitry, and method of forming random access memory circuitry |
US6590807B2 (en) * | 2001-08-02 | 2003-07-08 | Intel Corporation | Method for reading a structural phase-change memory |
US20030047765A1 (en) | 2001-08-30 | 2003-03-13 | Campbell Kristy A. | Stoichiometry for chalcogenide glasses useful for memory devices and method of formation |
US6507061B1 (en) * | 2001-08-31 | 2003-01-14 | Intel Corporation | Multiple layer phase-change memory |
US7113474B2 (en) * | 2001-09-01 | 2006-09-26 | Energy Conversion Devices, Inc. | Increased data storage in optical data storage and retrieval systems using blue lasers and/or plasmon lenses |
US6545287B2 (en) * | 2001-09-07 | 2003-04-08 | Intel Corporation | Using selective deposition to form phase-change memory cells |
US6690026B2 (en) * | 2001-09-28 | 2004-02-10 | Intel Corporation | Method of fabricating a three-dimensional array of active media |
US6566700B2 (en) * | 2001-10-11 | 2003-05-20 | Ovonyx, Inc. | Carbon-containing interfacial layer for phase-change memory |
US6545907B1 (en) * | 2001-10-30 | 2003-04-08 | Ovonyx, Inc. | Technique and apparatus for performing write operations to a phase change material memory device |
US6576921B2 (en) * | 2001-11-08 | 2003-06-10 | Intel Corporation | Isolating phase change material memory cells |
US6512241B1 (en) * | 2001-12-31 | 2003-01-28 | Intel Corporation | Phase change material memory device |
US6671710B2 (en) * | 2002-05-10 | 2003-12-30 | Energy Conversion Devices, Inc. | Methods of computing with digital multistate phase change materials |
US6918382B2 (en) * | 2002-08-26 | 2005-07-19 | Energy Conversion Devices, Inc. | Hydrogen powered scooter |
-
2001
- 2001-12-20 US US10/022,722 patent/US6873538B2/en not_active Expired - Lifetime
-
2002
- 2002-12-16 KR KR1020047009746A patent/KR100626505B1/ko not_active IP Right Cessation
- 2002-12-16 AU AU2002364167A patent/AU2002364167A1/en not_active Abandoned
- 2002-12-16 AT AT09010432T patent/ATE551699T1/de active
- 2002-12-16 CN CNB028281470A patent/CN100538878C/zh not_active Expired - Fee Related
- 2002-12-16 WO PCT/US2002/040078 patent/WO2003054887A1/en active Application Filing
- 2002-12-16 DE DE60234273T patent/DE60234273D1/de not_active Expired - Fee Related
- 2002-12-16 EP EP02799242A patent/EP1456851B1/en not_active Expired - Lifetime
- 2002-12-16 CN CN2009101655847A patent/CN101615426B/zh not_active Expired - Fee Related
- 2002-12-16 JP JP2003555520A patent/JP4081011B2/ja not_active Expired - Fee Related
- 2002-12-16 EP EP09010432A patent/EP2112664B1/en not_active Expired - Lifetime
- 2002-12-16 AT AT02799242T patent/ATE447760T1/de not_active IP Right Cessation
- 2002-12-20 TW TW091136822A patent/TWI223278B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2112664B1 (en) | 2012-03-28 |
US20030117831A1 (en) | 2003-06-26 |
KR20040075022A (ko) | 2004-08-26 |
DE60234273D1 (de) | 2009-12-17 |
WO2003054887A1 (en) | 2003-07-03 |
US6873538B2 (en) | 2005-03-29 |
EP1456851A1 (en) | 2004-09-15 |
ATE447760T1 (de) | 2009-11-15 |
ATE551699T1 (de) | 2012-04-15 |
JP2005514719A (ja) | 2005-05-19 |
EP2112664A1 (en) | 2009-10-28 |
TW200304150A (en) | 2003-09-16 |
EP1456851B1 (en) | 2009-11-04 |
AU2002364167A1 (en) | 2003-07-09 |
KR100626505B1 (ko) | 2006-09-20 |
CN101615426A (zh) | 2009-12-30 |
CN101615426B (zh) | 2012-06-13 |
CN100538878C (zh) | 2009-09-09 |
JP4081011B2 (ja) | 2008-04-23 |
CN1620699A (zh) | 2005-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI223278B (en) | A programmable conductor random access memory and a method for writing thereto | |
TWI616009B (zh) | 具有本質電流控制的電阻性記憶體胞 | |
JP4619004B2 (ja) | プログラマブル導電ランダムアクセスメモリ及びその検知方法 | |
US9734906B2 (en) | Multi-function resistance change memory cells and apparatuses including the same | |
TWI597725B (zh) | 用於雙端點記憶體的選擇器裝置 | |
US6961277B2 (en) | Method of refreshing a PCRAM memory device | |
US8064248B2 (en) | 2T2R-1T1R mix mode phase change memory array | |
CN104036824B (zh) | 半导体装置和信息读取方法 | |
CN112602151A (zh) | 用于对存储器单元进行编程的技术 | |
Niu et al. | Design of cross-point metal-oxide ReRAM emphasizing reliability and cost | |
WO2010067768A1 (ja) | 半導体装置 | |
CN112309466B (zh) | 具有选择和控制晶体管的电阻式随机访问存储器和架构 | |
JP2009026382A (ja) | 半導体記憶装置 | |
US9019755B2 (en) | Memory unit and method of operating the same | |
US20100108975A1 (en) | Non-volatile memory cell formation | |
JP6865561B2 (ja) | 非確率論抵抗性スイッチングメモリデバイス及び製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |