TWD196950S - 基板處理裝置用電氣爐之部分 - Google Patents
基板處理裝置用電氣爐之部分Info
- Publication number
- TWD196950S TWD196950S TW107302982F TW107302982F TWD196950S TW D196950 S TWD196950 S TW D196950S TW 107302982 F TW107302982 F TW 107302982F TW 107302982 F TW107302982 F TW 107302982F TW D196950 S TWD196950 S TW D196950S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- electric furnace
- substrate processing
- processing equipment
- article
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000001816 cooling Methods 0.000 abstract 2
- 239000003245 coal Substances 0.000 abstract 1
- 239000003507 refrigerant Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-4005F JP1620676S (cs) | 2018-02-27 | 2018-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD196950S true TWD196950S (zh) | 2019-04-11 |
Family
ID=64650736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107302982F TWD196950S (zh) | 2018-02-27 | 2018-05-28 | 基板處理裝置用電氣爐之部分 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD860419S1 (cs) |
| JP (1) | JP1620676S (cs) |
| TW (1) | TWD196950S (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD237448S (zh) | 2024-09-26 | 2025-04-01 | 鼎洲科技股份有限公司 桃園市蘆竹區南山路二段205巷22弄36號 (中華民國) | 承載裝置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1731672S (cs) * | 2022-03-15 | 2022-12-08 | ||
| JP1731671S (cs) * | 2022-03-15 | 2022-12-08 | ||
| USD1058783S1 (en) | 2024-08-02 | 2025-01-21 | Shanghai Qidian Industry and Trade Co., Ltd. | Melting furnace |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD383525S (en) * | 1995-11-21 | 1997-09-09 | Purcell Steven J | Insulated water heater for hydrotherapy baths, spas, and skid packs |
| US20130192522A1 (en) * | 2010-12-30 | 2013-08-01 | Poole Ventura, Inc. | Thermal diffusion chamber with convection compressor |
| US20110249960A1 (en) * | 2011-01-28 | 2011-10-13 | Poole Ventura, Inc. | Heat Source Door For A Thermal Diffusion Chamber |
| JP5702657B2 (ja) * | 2011-04-18 | 2015-04-15 | 東京エレクトロン株式会社 | 熱処理装置 |
| US9171746B2 (en) * | 2011-09-06 | 2015-10-27 | Arsalan Emami | Heater elements with enhanced cooling |
| US9167630B2 (en) * | 2011-10-17 | 2015-10-20 | David E. Seitz | Tankless water heater |
| WO2014098943A1 (en) * | 2012-12-21 | 2014-06-26 | Eemax, Inc. | Next generation bare wire water heater |
| US10132525B2 (en) * | 2013-03-15 | 2018-11-20 | Peter Klein | High thermal transfer flow-through heat exchanger |
| USD754066S1 (en) * | 2014-03-12 | 2016-04-19 | Mitsubishi Electric Corporation | Turbine generator |
| USD753590S1 (en) * | 2014-03-12 | 2016-04-12 | Mitsubishi Electric Corporation | Turbine generator |
| USD790048S1 (en) * | 2015-05-15 | 2017-06-20 | Arsalan Emami | Industrial heater |
| JP1568552S (cs) * | 2016-02-12 | 2017-02-06 | ||
| JP1568553S (cs) * | 2016-02-12 | 2017-02-06 | ||
| WO2017218550A2 (en) * | 2016-06-13 | 2017-12-21 | Warren Engine Company, Inc. | Energy recovery system |
| WO2018027208A1 (en) * | 2016-08-05 | 2018-02-08 | Sandvik Thermal Process Inc. | Thermal process device with non-uniform insulation |
| JP1582475S (cs) | 2016-10-14 | 2017-07-31 | ||
| CN110709974B (zh) * | 2017-05-19 | 2023-08-01 | 应用材料公司 | 用于将液体和固体流出物收集并随后反应成气体流出物的设备 |
-
2018
- 2018-02-27 JP JPD2018-4005F patent/JP1620676S/ja active Active
- 2018-05-28 TW TW107302982F patent/TWD196950S/zh unknown
- 2018-07-12 US US29/656,364 patent/USD860419S1/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD237448S (zh) | 2024-09-26 | 2025-04-01 | 鼎洲科技股份有限公司 桃園市蘆竹區南山路二段205巷22弄36號 (中華民國) | 承載裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1620676S (cs) | 2018-12-17 |
| USD860419S1 (en) | 2019-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWD196950S (zh) | 基板處理裝置用電氣爐之部分 | |
| MX2018008881A (es) | Aparato de disipacion de calor y metodos para fotorreactores led uv. | |
| TWD189312S (zh) | Sealing material for semiconductor manufacturing equipment | |
| WO2019036145A3 (en) | HIGH PRESSURE AND HIGH TEMPERATURE RECOVERY CHAMBER | |
| IN2012DN01366A (cs) | ||
| WO2016196929A3 (en) | Micro-hoses for integrated circuit and device level cooling | |
| TWD177997S (zh) | 基板處理裝置用隔熱具 | |
| WO2015112215A3 (en) | Cooled fuel injector system for a gas turbine engine | |
| TWD200031S (zh) | 基板處理裝置用電氣爐 | |
| WO2012087002A3 (ko) | 화학 기상 증착 장치 및 이를 사용한 발광소자 제조방법 | |
| MY162252A (en) | Bonding Head with a Heatable and Coolable Suction Member | |
| TWD203444S (zh) | 基板處理裝置用氣體導入管 | |
| TW201612337A (en) | Device and method for creating a vapor for a CVD-or PVD-device | |
| TWD183009S (zh) | 基板處理裝置用加熱器之部分 | |
| TW201713201A (en) | Thermal dissipation module | |
| TWD177998S (zh) | 基板處理裝置用隔熱具 | |
| TWD183008S (zh) | 基板處理裝置用加熱器 | |
| TWD197467S (zh) | 基板處理裝置用氣體導入管 | |
| TWD183003S (zh) | 基板處理裝置用氣體供給噴嘴之部分 | |
| ITMI20050962A1 (it) | Dispositivo per introurre gas di reazione in una camera di reazione e reattore epitassiale che lo utilizza | |
| TWD225634S (zh) | 半導體製造裝置用隔熱組件外罩之部分 | |
| WO2009142911A3 (en) | Robust outlet plumbing for high power flow remote plasma source | |
| SG10201810902WA (en) | Dual auxiliary dopant inlets on epi chamber | |
| JP2015068517A5 (cs) | ||
| PH12016501775A1 (en) | Fluidized-bed type combustion equipment and method for supplying fluidized medium to fluidized-bed combustion furnace |