TWD169005S - 反應管之部分 - Google Patents

反應管之部分

Info

Publication number
TWD169005S
TWD169005S TW103305359D01F TW103305359D01F TWD169005S TW D169005 S TWD169005 S TW D169005S TW 103305359D01 F TW103305359D01 F TW 103305359D01F TW 103305359D01 F TW103305359D01 F TW 103305359D01F TW D169005 S TWD169005 S TW D169005S
Authority
TW
Taiwan
Prior art keywords
design
case
article
gas supply
substrate
Prior art date
Application number
TW103305359D01F
Other languages
English (en)
Inventor
Kosuke Takagi
Satoshi Okada
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD169005S publication Critical patent/TWD169005S/zh

Links

Abstract

【物品用途】;本設計的物品是反應管，為一種在將基板排列成複數段來進行處理的基板處理裝置中，用來將基板收容在本物品的內部的反應管。;【設計說明】;在本物品的內側，設置具有複數個氣體供給口的氣體供給部，將從氣體供給口所導入的氣體，形成對於基板呈水平，且從上部至下部均勻的流動，並從氣體排氣口被排氣；再者，外管上部的外壁，是保有比側壁更厚實膨凸形狀和構造強度。本衍生設計與原設計之外觀差異在於：如各圖所示，兩者反應管的頂部略有所不同，本案為向上隆起的圓拱狀，因此本案與原設計案之差異些微，不影響原設計與衍生設計之近似。;圖式所揭露之實線部分，為本案主張設計之部分；圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。本物品全體為透明。
TW103305359D01F 2014-03-12 2014-09-12 反應管之部分 TWD169005S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014005211 2014-03-12

Publications (1)

Publication Number Publication Date
TWD169005S true TWD169005S (zh) 2015-07-11

Family

ID=55175340

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103305359D01F TWD169005S (zh) 2014-03-12 2014-09-12 反應管之部分

Country Status (2)

Country Link
US (1) USD748594S1 (zh)
TW (1) TWD169005S (zh)

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USD1004112S1 (en) * 2021-01-19 2023-11-07 R2 Technologies, Inc. Treatment tip of a cooling treatment device
USD990630S1 (en) * 2021-05-28 2023-06-27 Charlotte Grace Sink cover

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Also Published As

Publication number Publication date
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