TWD169005S - 反應管之部分 - Google Patents

反應管之部分

Info

Publication number
TWD169005S
TWD169005S TW103305359D01F TW103305359D01F TWD169005S TW D169005 S TWD169005 S TW D169005S TW 103305359D01 F TW103305359D01 F TW 103305359D01F TW 103305359D01 F TW103305359D01 F TW 103305359D01F TW D169005 S TWD169005 S TW D169005S
Authority
TW
Taiwan
Prior art keywords
design
case
article
gas supply
substrate
Prior art date
Application number
TW103305359D01F
Other languages
English (en)
Inventor
Kosuke Takagi
Satoshi Okada
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD169005S publication Critical patent/TWD169005S/zh

Links

Abstract

【物品用途】;本設計的物品是反應管，為一種在將基板排列成複數段來進行處理的基板處理裝置中，用來將基板收容在本物品的內部的反應管。;【設計說明】;在本物品的內側，設置具有複數個氣體供給口的氣體供給部，將從氣體供給口所導入的氣體，形成對於基板呈水平，且從上部至下部均勻的流動，並從氣體排氣口被排氣；再者，外管上部的外壁，是保有比側壁更厚實膨凸形狀和構造強度。本衍生設計與原設計之外觀差異在於：如各圖所示，兩者反應管的頂部略有所不同，本案為向上隆起的圓拱狀，因此本案與原設計案之差異些微，不影響原設計與衍生設計之近似。;圖式所揭露之實線部分，為本案主張設計之部分；圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。本物品全體為透明。
TW103305359D01F 2014-03-12 2014-09-12 反應管之部分 TWD169005S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014005211 2014-03-12

Publications (1)

Publication Number Publication Date
TWD169005S true TWD169005S (zh) 2015-07-11

Family

ID=55175340

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103305359D01F TWD169005S (zh) 2014-03-12 2014-09-12 反應管之部分

Country Status (2)

Country Link
US (1) USD748594S1 (zh)
TW (1) TWD169005S (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1534829S (zh) * 2015-02-23 2015-10-13
USD813181S1 (en) * 2016-07-26 2018-03-20 Hitachi Kokusai Electric Inc. Cover of seal cap for reaction chamber of semiconductor
USD801176S1 (en) * 2016-08-16 2017-10-31 Partners in Packaging, LLC Container cover
USD820086S1 (en) * 2017-02-13 2018-06-12 Partners in Packaging, LLC Container cover
JP1620194S (zh) * 2018-01-22 2018-12-10
USD1004111S1 (en) * 2021-01-19 2023-11-07 R2 Technologies, Inc. Treatment tip of a cooling treatment device
USD1004112S1 (en) * 2021-01-19 2023-11-07 R2 Technologies, Inc. Treatment tip of a cooling treatment device
USD990630S1 (en) * 2021-05-28 2023-06-27 Charlotte Grace Sink cover

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD268394S (en) * 1979-08-03 1983-03-29 Phillips Petroleum Company Combined cap and extruding plunger for dispensing container
KR890008922A (ko) * 1987-11-21 1989-07-13 후세 노보루 열처리 장치
JP3024449B2 (ja) * 1993-07-24 2000-03-21 ヤマハ株式会社 縦型熱処理炉及び熱処理方法
JP3218164B2 (ja) * 1995-05-31 2001-10-15 東京エレクトロン株式会社 被処理体の支持ボート、熱処理装置及び熱処理方法
USD405429S (en) * 1997-01-31 1999-02-09 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD417438S (en) * 1997-01-31 1999-12-07 Tokyo Electron Limited Quartz outer tube
USD424024S (en) * 1997-01-31 2000-05-02 Tokyo Electron Limited Quartz process tube
USD423463S (en) * 1997-01-31 2000-04-25 Tokyo Electron Limited Quartz process tube
USD406113S (en) * 1997-01-31 1999-02-23 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD405431S (en) * 1997-08-20 1999-02-09 Tokyo Electron Ltd. Tube for use in a semiconductor wafer heat processing apparatus
USD404368S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Outer tube for use in a semiconductor wafer heat processing apparatus
USD405062S (en) * 1997-08-20 1999-02-02 Tokyo Electron Ltd. Processing tube for use in a semiconductor wafer heat processing apparatus
JP2000243747A (ja) * 1999-02-18 2000-09-08 Kokusai Electric Co Ltd 基板処理装置
USD443040S1 (en) * 2000-04-04 2001-05-29 American Standard International Inc. Cap
US20020102187A1 (en) * 2001-01-26 2002-08-01 Bellenger Denise Dicharry Sectioned fragrance candle
JP3985899B2 (ja) * 2002-03-28 2007-10-03 株式会社日立国際電気 基板処理装置
USD536614S1 (en) * 2005-12-01 2007-02-13 J.L. Clark, Inc. Container lid
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD586768S1 (en) * 2006-10-12 2009-02-17 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD619630S1 (en) * 2007-05-08 2010-07-13 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD564879S1 (en) * 2007-07-17 2008-03-25 Rieke Corporation Plastic plug with overcap
USD611013S1 (en) * 2008-03-28 2010-03-02 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD618638S1 (en) * 2008-05-09 2010-06-29 Hitachi Kokusai Electric, Inc. Reaction tube
USD610559S1 (en) * 2008-05-30 2010-02-23 Hitachi Kokusai Electric, Inc. Reaction tube
USD597840S1 (en) * 2008-12-24 2009-08-11 Drug Plastics & Glass Company, Inc. Bottle cap
USD657675S1 (en) * 2011-04-07 2012-04-17 Averill Walter J Reusable resilient bottle capsule
USD720308S1 (en) * 2011-11-18 2014-12-30 Tokyo Electron Limited Inner tube for process tube for manufacturing semiconductor wafers
USD720309S1 (en) * 2011-11-18 2014-12-30 Tokyo Electron Limited Inner tube for process tube for manufacturing semiconductor wafers
USD710196S1 (en) * 2012-09-11 2014-08-05 Becton Dickinson and Company Limited Soft cap for a connector
TWD167987S (zh) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 反應管之部分
TWD168774S (zh) * 2013-06-28 2015-07-01 日立國際電氣股份有限公司 反應管之部分

Also Published As

Publication number Publication date
USD748594S1 (en) 2016-02-02

Similar Documents

Publication Publication Date Title
TWD169005S (zh) 反應管之部分
TWD169004S (zh) 反應管之部分
USD804436S1 (en) Upper chamber for a plasma processing apparatus
TWD200073S (zh) 反應管
TWD180125S (zh) 反應管之部分
JP2015183224A5 (zh)
TWD182751S (zh) 半導體製造裝置用反應管
USD812731S1 (en) Exhaust tube holding member
TWD171729S (zh) 圖像顯示機
USD758937S1 (en) Exhaust pipe set for a minivan
TWD174920S (zh) 基板處理裝置用氣體供給噴嘴
TWD176440S (zh) 排氣處理裝置用內筒
PH12016502305A1 (en) Multistage steaming machine
TWD193049S (zh) Part of the reaction tube
TWD171078S (zh) 基板處理裝置用氣體供給噴嘴之部分
TWD169717S (zh) 機車用輪胎之部分
CN301851895S (zh) 电磁炉面板(rt2112)
TWD165984S (zh) 半導體製造裝置用氣體導入管之部分（三）
CN302104935S (zh) 电磁炉面板(ft0601)
CN301645635S (zh) 电磁炉面板(st2127x)
CN302392234S (zh) 装饰图板（微晶玻璃喷砂制图）
TWD176466S (zh) 商品陳列架用層板構件支承體之部分
CN302131882S (zh) 酒瓶(1)
CN302322152S (zh) 制冷机的第一级置换器
CN302567277S (zh) 燃气灶面板(12d-556)