TW565488B - Fixed abrasive articles - Google Patents

Fixed abrasive articles Download PDF

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Publication number
TW565488B
TW565488B TW091116153A TW91116153A TW565488B TW 565488 B TW565488 B TW 565488B TW 091116153 A TW091116153 A TW 091116153A TW 91116153 A TW91116153 A TW 91116153A TW 565488 B TW565488 B TW 565488B
Authority
TW
Taiwan
Prior art keywords
abrasive
shaped abrasive
shaped
wear indicator
wear
Prior art date
Application number
TW091116153A
Other languages
English (en)
Chinese (zh)
Inventor
James Victor Tietz
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of TW565488B publication Critical patent/TW565488B/zh

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/205Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW091116153A 2001-07-20 2002-07-19 Fixed abrasive articles TW565488B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/910,425 US20020077037A1 (en) 1999-05-03 2001-07-20 Fixed abrasive articles

Publications (1)

Publication Number Publication Date
TW565488B true TW565488B (en) 2003-12-11

Family

ID=25428766

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091116153A TW565488B (en) 2001-07-20 2002-07-19 Fixed abrasive articles

Country Status (7)

Country Link
US (1) US20020077037A1 (enExample)
EP (1) EP1409201A1 (enExample)
JP (1) JP2004535306A (enExample)
KR (1) KR20040017328A (enExample)
CN (1) CN1535197A (enExample)
TW (1) TW565488B (enExample)
WO (1) WO2003008151A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399260B (zh) * 2005-07-28 2013-06-21 3M Innovative Properties Co 自含式修整研磨物件,製造自含式修整研磨物件之方法及包含自含式修整研磨物件之拋光系統
TWI402136B (zh) * 2005-07-28 2013-07-21 3M Innovative Properties Co 研磨附聚物拋光方法
TWI784082B (zh) * 2017-11-16 2022-11-21 美商羅門哈斯電子材料Cmp控股公司 具有多用途複合窗口的拋光墊
TWI800557B (zh) * 2017-11-16 2023-05-01 美商羅門哈斯電子材料Cmp控股公司 具有墊磨損指示器的拋光墊

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CN107685288B (zh) * 2017-09-05 2019-05-10 南京航空航天大学 一种游离磨粒轨迹检测方法
CN108127582B (zh) * 2017-12-13 2019-12-31 湖北鼎汇微电子材料有限公司 一种制备抛光层的模具及制备方法
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399260B (zh) * 2005-07-28 2013-06-21 3M Innovative Properties Co 自含式修整研磨物件,製造自含式修整研磨物件之方法及包含自含式修整研磨物件之拋光系統
TWI402136B (zh) * 2005-07-28 2013-07-21 3M Innovative Properties Co 研磨附聚物拋光方法
TWI784082B (zh) * 2017-11-16 2022-11-21 美商羅門哈斯電子材料Cmp控股公司 具有多用途複合窗口的拋光墊
TWI800557B (zh) * 2017-11-16 2023-05-01 美商羅門哈斯電子材料Cmp控股公司 具有墊磨損指示器的拋光墊

Also Published As

Publication number Publication date
US20020077037A1 (en) 2002-06-20
JP2004535306A (ja) 2004-11-25
WO2003008151A1 (en) 2003-01-30
CN1535197A (zh) 2004-10-06
EP1409201A1 (en) 2004-04-21
KR20040017328A (ko) 2004-02-26

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