TW500822B - Positive displacement type liquid-delivery apparatus - Google Patents
Positive displacement type liquid-delivery apparatus Download PDFInfo
- Publication number
- TW500822B TW500822B TW089125285A TW89125285A TW500822B TW 500822 B TW500822 B TW 500822B TW 089125285 A TW089125285 A TW 089125285A TW 89125285 A TW89125285 A TW 89125285A TW 500822 B TW500822 B TW 500822B
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid
- pressure
- positive
- diaphragm
- chamber
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 95
- 238000012384 transportation and delivery Methods 0.000 title claims abstract description 39
- 239000012530 fluid Substances 0.000 claims abstract description 54
- 238000005086 pumping Methods 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims description 177
- 238000012545 processing Methods 0.000 claims description 34
- 230000008859 change Effects 0.000 claims description 17
- 230000002079 cooperative effect Effects 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 11
- 239000006200 vaporizer Substances 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 8
- 230000001276 controlling effect Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 7
- 230000000968 intestinal effect Effects 0.000 claims description 6
- 230000008016 vaporization Effects 0.000 claims 2
- 238000009825 accumulation Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 37
- 239000000463 material Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 101100289061 Drosophila melanogaster lili gene Proteins 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 241001268782 Paspalum dilatatum Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- XBYNNYGGLWJASC-UHFFFAOYSA-N barium titanium Chemical compound [Ti].[Ba] XBYNNYGGLWJASC-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/07—Pressure difference over the pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11034399A JP2000230910A (ja) | 1999-02-12 | 1999-02-12 | 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法 |
| JP2000217926A JP3844418B2 (ja) | 1999-02-12 | 2000-07-18 | 容積式送液装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW500822B true TW500822B (en) | 2002-09-01 |
Family
ID=82943391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW089125285A TW500822B (en) | 1999-02-12 | 2000-11-29 | Positive displacement type liquid-delivery apparatus |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1106826B9 (https=) |
| JP (1) | JP3844418B2 (https=) |
| KR (1) | KR100710914B1 (https=) |
| DE (1) | DE60038775D1 (https=) |
| TW (1) | TW500822B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112424447A (zh) * | 2018-07-16 | 2021-02-26 | 韦尔矿物荷兰有限公司 | 泵送系统 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2208180C2 (ru) * | 2001-04-20 | 2003-07-10 | Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики | Дозировочный насос (варианты) |
| WO2005077489A1 (ja) * | 2004-02-18 | 2005-08-25 | Koganei Corporation | フィルタおよび薬液吐出装置 |
| JP2007291857A (ja) * | 2006-04-20 | 2007-11-08 | Nidec Sankyo Corp | 定量ポンプ装置 |
| WO2010004721A1 (ja) | 2008-07-08 | 2010-01-14 | パナソニック株式会社 | 導電性高分子を用いた流体搬送装置 |
| AU2010213344B2 (en) * | 2009-02-13 | 2014-07-24 | Davey Water Products Pty Ltd | Controller for a liquid supply pump |
| EP2845043A4 (en) | 2012-05-02 | 2015-12-16 | Fujikura Ltd | ROUND OPTICAL CABLE WITH SMALL DIAMETER AND A BANDED FIBER OPTICAL STRUCTURE |
| WO2014174957A1 (ja) | 2013-04-24 | 2014-10-30 | 株式会社村田製作所 | カフ圧制御装置 |
| KR101879033B1 (ko) * | 2016-03-31 | 2018-08-20 | 주식회사 포스코 | 유체량 조절장치 |
| RU2636948C1 (ru) * | 2016-11-30 | 2017-11-29 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) | Устройство подачи, измерения, регулирования количества и расхода жидкости |
| JP2023020185A (ja) * | 2021-07-30 | 2023-02-09 | 株式会社コガネイ | 液体供給装置 |
| KR102774533B1 (ko) * | 2022-11-24 | 2025-03-04 | 세메스 주식회사 | 액 공급 장치 및 이를 포함하는 기판 처리 장치 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5371828A (en) * | 1991-08-28 | 1994-12-06 | Mks Instruments, Inc. | System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure |
| JPH10506150A (ja) * | 1994-08-01 | 1998-06-16 | フランツ ヘーマン、 | 非平衡軽量合金及び製品のために選択される処理 |
| JPH10238470A (ja) * | 1997-02-24 | 1998-09-08 | Ebara Corp | 送液装置 |
| DE19748449C1 (de) * | 1997-11-03 | 1999-06-24 | Lang Apparatebau Gmbh | Einrichtung zur Dosierüberwachung einer Membranpumpe |
-
2000
- 2000-07-18 JP JP2000217926A patent/JP3844418B2/ja not_active Expired - Fee Related
- 2000-11-29 TW TW089125285A patent/TW500822B/zh not_active IP Right Cessation
- 2000-12-01 KR KR1020000072337A patent/KR100710914B1/ko not_active Expired - Fee Related
- 2000-12-04 EP EP00126636A patent/EP1106826B9/en not_active Expired - Lifetime
- 2000-12-04 DE DE60038775T patent/DE60038775D1/de not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112424447A (zh) * | 2018-07-16 | 2021-02-26 | 韦尔矿物荷兰有限公司 | 泵送系统 |
| CN112424447B (zh) * | 2018-07-16 | 2023-04-07 | 韦尔矿物荷兰有限公司 | 泵送系统 |
| US12152608B2 (en) | 2018-07-16 | 2024-11-26 | Weir Minerals Netherlands B.V. | Pumping system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010062048A (ko) | 2001-07-07 |
| DE60038775D1 (de) | 2008-06-19 |
| EP1106826B1 (en) | 2008-05-07 |
| JP3844418B2 (ja) | 2006-11-15 |
| EP1106826A2 (en) | 2001-06-13 |
| EP1106826B9 (en) | 2008-12-24 |
| JP2001221163A (ja) | 2001-08-17 |
| KR100710914B1 (ko) | 2007-04-27 |
| EP1106826A3 (en) | 2003-05-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |