JP3844418B2 - 容積式送液装置 - Google Patents

容積式送液装置 Download PDF

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Publication number
JP3844418B2
JP3844418B2 JP2000217926A JP2000217926A JP3844418B2 JP 3844418 B2 JP3844418 B2 JP 3844418B2 JP 2000217926 A JP2000217926 A JP 2000217926A JP 2000217926 A JP2000217926 A JP 2000217926A JP 3844418 B2 JP3844418 B2 JP 3844418B2
Authority
JP
Japan
Prior art keywords
liquid
pressure
liquid feeding
diaphragm
positive displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000217926A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001221163A5 (https=
JP2001221163A (ja
Inventor
邦明 堀江
究 塚本
憲二 鴨田
博剛 山岸
真也 植村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2000217926A priority Critical patent/JP3844418B2/ja
Priority to TW089125285A priority patent/TW500822B/zh
Priority to KR1020000072337A priority patent/KR100710914B1/ko
Priority to EP00126636A priority patent/EP1106826B9/en
Priority to DE60038775T priority patent/DE60038775D1/de
Publication of JP2001221163A publication Critical patent/JP2001221163A/ja
Publication of JP2001221163A5 publication Critical patent/JP2001221163A5/ja
Publication of JP3844418B2 publication Critical patent/JP3844418B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Formation Of Insulating Films (AREA)
JP2000217926A 1999-02-12 2000-07-18 容積式送液装置 Expired - Fee Related JP3844418B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置
TW089125285A TW500822B (en) 1999-02-12 2000-11-29 Positive displacement type liquid-delivery apparatus
KR1020000072337A KR100710914B1 (ko) 1999-02-12 2000-12-01 용적식 송액장치
DE60038775T DE60038775D1 (de) 1999-02-12 2000-12-04 Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe
EP00126636A EP1106826B9 (en) 1999-02-12 2000-12-04 Flow rate control with a positive displacement liquid pump

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP11-343399 1999-12-02
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Publications (3)

Publication Number Publication Date
JP2001221163A JP2001221163A (ja) 2001-08-17
JP2001221163A5 JP2001221163A5 (https=) 2004-11-25
JP3844418B2 true JP3844418B2 (ja) 2006-11-15

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000217926A Expired - Fee Related JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Country Status (5)

Country Link
EP (1) EP1106826B9 (https=)
JP (1) JP3844418B2 (https=)
KR (1) KR100710914B1 (https=)
DE (1) DE60038775D1 (https=)
TW (1) TW500822B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2208180C2 (ru) * 2001-04-20 2003-07-10 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Дозировочный насос (варианты)
WO2005077489A1 (ja) * 2004-02-18 2005-08-25 Koganei Corporation フィルタおよび薬液吐出装置
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
WO2010004721A1 (ja) 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
AU2010213344B2 (en) * 2009-02-13 2014-07-24 Davey Water Products Pty Ltd Controller for a liquid supply pump
EP2845043A4 (en) 2012-05-02 2015-12-16 Fujikura Ltd ROUND OPTICAL CABLE WITH SMALL DIAMETER AND A BANDED FIBER OPTICAL STRUCTURE
WO2014174957A1 (ja) 2013-04-24 2014-10-30 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en) 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (ja) * 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置
KR102774533B1 (ko) * 2022-11-24 2025-03-04 세메스 주식회사 액 공급 장치 및 이를 포함하는 기판 처리 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
JPH10506150A (ja) * 1994-08-01 1998-06-16 フランツ ヘーマン、 非平衡軽量合金及び製品のために選択される処理
JPH10238470A (ja) * 1997-02-24 1998-09-08 Ebara Corp 送液装置
DE19748449C1 (de) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Einrichtung zur Dosierüberwachung einer Membranpumpe

Also Published As

Publication number Publication date
TW500822B (en) 2002-09-01
KR20010062048A (ko) 2001-07-07
DE60038775D1 (de) 2008-06-19
EP1106826B1 (en) 2008-05-07
EP1106826A2 (en) 2001-06-13
EP1106826B9 (en) 2008-12-24
JP2001221163A (ja) 2001-08-17
KR100710914B1 (ko) 2007-04-27
EP1106826A3 (en) 2003-05-02

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