DE60038775D1 - Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe - Google Patents

Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe

Info

Publication number
DE60038775D1
DE60038775D1 DE60038775T DE60038775T DE60038775D1 DE 60038775 D1 DE60038775 D1 DE 60038775D1 DE 60038775 T DE60038775 T DE 60038775T DE 60038775 T DE60038775 T DE 60038775T DE 60038775 D1 DE60038775 D1 DE 60038775D1
Authority
DE
Germany
Prior art keywords
flow control
displacement pump
liquid displacement
liquid
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60038775T
Other languages
German (de)
English (en)
Inventor
Kuniaki Horie
Kiwamu Tsukamoto
Kenji Kamoda
Hirotake Yamagishi
Shinya Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60038775D1 publication Critical patent/DE60038775D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Formation Of Insulating Films (AREA)
DE60038775T 1999-02-12 2000-12-04 Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe Expired - Fee Related DE60038775D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Publications (1)

Publication Number Publication Date
DE60038775D1 true DE60038775D1 (de) 2008-06-19

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60038775T Expired - Fee Related DE60038775D1 (de) 1999-02-12 2000-12-04 Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe

Country Status (5)

Country Link
EP (1) EP1106826B9 (https=)
JP (1) JP3844418B2 (https=)
KR (1) KR100710914B1 (https=)
DE (1) DE60038775D1 (https=)
TW (1) TW500822B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2208180C2 (ru) * 2001-04-20 2003-07-10 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Дозировочный насос (варианты)
WO2005077489A1 (ja) * 2004-02-18 2005-08-25 Koganei Corporation フィルタおよび薬液吐出装置
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
WO2010004721A1 (ja) 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
AU2010213344B2 (en) * 2009-02-13 2014-07-24 Davey Water Products Pty Ltd Controller for a liquid supply pump
EP2845043A4 (en) 2012-05-02 2015-12-16 Fujikura Ltd ROUND OPTICAL CABLE WITH SMALL DIAMETER AND A BANDED FIBER OPTICAL STRUCTURE
WO2014174957A1 (ja) 2013-04-24 2014-10-30 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en) 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (ja) * 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置
KR102774533B1 (ko) * 2022-11-24 2025-03-04 세메스 주식회사 액 공급 장치 및 이를 포함하는 기판 처리 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
JPH10506150A (ja) * 1994-08-01 1998-06-16 フランツ ヘーマン、 非平衡軽量合金及び製品のために選択される処理
JPH10238470A (ja) * 1997-02-24 1998-09-08 Ebara Corp 送液装置
DE19748449C1 (de) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Einrichtung zur Dosierüberwachung einer Membranpumpe

Also Published As

Publication number Publication date
TW500822B (en) 2002-09-01
KR20010062048A (ko) 2001-07-07
EP1106826B1 (en) 2008-05-07
JP3844418B2 (ja) 2006-11-15
EP1106826A2 (en) 2001-06-13
EP1106826B9 (en) 2008-12-24
JP2001221163A (ja) 2001-08-17
KR100710914B1 (ko) 2007-04-27
EP1106826A3 (en) 2003-05-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee