DE60038775D1 - Flow control by means of a liquid displacement pump - Google Patents

Flow control by means of a liquid displacement pump

Info

Publication number
DE60038775D1
DE60038775D1 DE60038775T DE60038775T DE60038775D1 DE 60038775 D1 DE60038775 D1 DE 60038775D1 DE 60038775 T DE60038775 T DE 60038775T DE 60038775 T DE60038775 T DE 60038775T DE 60038775 D1 DE60038775 D1 DE 60038775D1
Authority
DE
Germany
Prior art keywords
flow control
displacement pump
liquid displacement
liquid
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60038775T
Other languages
German (de)
Inventor
Kuniaki Horie
Kiwamu Tsukamoto
Kenji Kamoda
Hirotake Yamagishi
Shinya Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/en
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60038775D1 publication Critical patent/DE60038775D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump
DE60038775T 1999-02-12 2000-12-04 Flow control by means of a liquid displacement pump Expired - Fee Related DE60038775D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (en) 1999-02-12 1999-02-12 Inspection apparatus and removing apparatus for substrate-adhering foreign matter and method and removing adhered foreign matter
JP2000217926A JP3844418B2 (en) 1999-02-12 2000-07-18 Positive displacement liquid feeder

Publications (1)

Publication Number Publication Date
DE60038775D1 true DE60038775D1 (en) 2008-06-19

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60038775T Expired - Fee Related DE60038775D1 (en) 1999-02-12 2000-12-04 Flow control by means of a liquid displacement pump

Country Status (5)

Country Link
EP (1) EP1106826B9 (en)
JP (1) JP3844418B2 (en)
KR (1) KR100710914B1 (en)
DE (1) DE60038775D1 (en)
TW (1) TW500822B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005077489A1 (en) * 2004-02-18 2005-08-25 Koganei Corporation Filter and chemical ejector
JP2007291857A (en) * 2006-04-20 2007-11-08 Nidec Sankyo Corp Metering pump device
CN101960144A (en) 2008-07-08 2011-01-26 松下电器产业株式会社 Fluid conveying device using electrically conductive polymer
CN102395794B (en) * 2009-02-13 2015-05-06 戴维水设备有限公司 Controller for a liquid supply pump
JP2015517679A (en) 2012-05-02 2015-06-22 エーエフエル・テレコミュニケーションズ・エルエルシー Circular and small-diameter optical cable with ribbon-type optical fiber structure
WO2014174957A1 (en) * 2013-04-24 2014-10-30 株式会社村田製作所 Cuff pressure control device
KR101879033B1 (en) * 2016-03-31 2018-08-20 주식회사 포스코 Apparatus for adjusting amount of fluid
RU2636948C1 (en) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Device for feeding, measuring, control quantity and flow rate of liquid
GB2575638A (en) * 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (en) 2021-07-30 2023-02-09 株式会社コガネイ Liquid supply device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
US6544357B1 (en) * 1994-08-01 2003-04-08 Franz Hehmann Selected processing for non-equilibrium light alloys and products
JPH10238470A (en) * 1997-02-24 1998-09-08 Ebara Corp Liquid feeder
DE19748449C1 (en) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Device for monitoring the metering of a diaphragm pump

Also Published As

Publication number Publication date
EP1106826B1 (en) 2008-05-07
JP2001221163A (en) 2001-08-17
EP1106826A3 (en) 2003-05-02
EP1106826A2 (en) 2001-06-13
JP3844418B2 (en) 2006-11-15
KR20010062048A (en) 2001-07-07
EP1106826B9 (en) 2008-12-24
TW500822B (en) 2002-09-01
KR100710914B1 (en) 2007-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee