CN101960144A

CN101960144A - Fluid conveying device using electrically conductive polymer

Info

Publication number: CN101960144A
Application number: CN2009801069497A
Authority: CN
Inventors: 生岛君弥; 横山和夫
Original assignee: Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Holdings Corp
Priority date: 2008-07-08
Filing date: 2009-07-06
Publication date: 2011-01-26
Also published as: WO2010004721A1; JP2010138911A; US20100260623A1; JP4898928B2; JP4482617B2; US8062007B2; JPWO2010004721A1

Abstract

A fluid conveying device using an electrically conductive polymer is provided with pump chambers (107, 108) having a function of a pump for sucking and discharging fluid and allowing the inside thereof to be filled with the fluid, a housing section (102) forming a part of the wall surface of each of the pump chambers, diaphragms (103, 104) constructed from an electrically conductive polymer film performing electrolytic expansion and contraction and forming a part of the wall surface of each of the pump chambers, an electrolytic solution chamber (109) for allowing a part of an electrolytic solution contained therein to make contact with the diaphragms, an electric power source for applying a voltage to the diaphragms, and pressure maintaining sections (130, 131) for maintaining pressure to the diaphragms.

Description

Used the fluid delivery device of electroconductive polymer

Technical field

The use of suctions use, that carry out fluid such as the water-cooled circulation means that The present invention be more particularly directed to the supplier of the fuel such as methyl alcohol in fuel cell or be used for the electronic equipment that comprises CPU is cooled off and ejection the fluid delivery device of electroconductive polymer.

Background technique

To as the exploitation of pump of the device that transports water or other fluid in continuous progress, its exploitation purpose is, to be used for the cooling of heater elements such as CPU with the transporting of liquid, blood to blood test with the transporting of chip, to human body micro-medication, chemical experiment or the chemical operation miniaturization is integrated and Lab on a chip (chip lab) or fuel cell that carry out carry out the supply of fuel such as methyl alcohol.In these purposes, require miniaturization, lightweight, lower voltage, reach quietization etc.In order to respond this requirement, for example proposed to use the pump (for example patent documentation 1) of electroconductive polymer film.Used the actuator of electroconductive polymer film, it is characterized in that usually, amount is light and can carry out quiet action under low voltage.

Figure 22 A～Figure 22 C illustrates barrier film (diaphragm) the formula pump structure that proposes in the patent documentation 1.

The pump of Figure 22 A has the barrier film 403,404 by the electroconductive polymer film respectively in the inboard of framework 402.Barrier film 403 is defined as first barrier film, simultaneously barrier film 404 is defined as second barrier film.Framework 402 is a drum, and has the inner space.First and

second barrier film

403 and 404 is respectively discoideus conducting polymer film, and periphery separately is fixing respectively by framework 402 at standing

part

430 and 431 places.In addition, first and second barrier film 403,404 interconnects by connector element 406 at separately middle body.So, first and second barrier film 403,404 is provided in the state that applies tension force on the face direction respectively, becomes cone shape shape respectively.Now, the annulus portion 409 that is surrounded by first and second barrier film 403,404 and framework 402 is defined as electrolyte liquor chamber.Be full of electrolytic solution in the electrolyte liquor chamber 409.First and second barrier film 403,404 is connected with power supply 410c by

lead

410a, 410b respectively.Apply anti-phase voltage mutually to first and second barrier film 403,404 respectively, first and second barrier film 403,404 electroconductive polymer film separately carries out fore and aft motion thus.Now, will be called first pump chamber, will be called second pump chamber by second space segment 408 that the framework 402 and second barrier film 404 surround by first space segment 407 that the framework 402 and first barrier film 403 surround.For the state shown in Figure 22 A, be that first barrier film 403 stretches and the state of second barrier film, 404 contractions.Under this state, the liquid of the outside of first pump chamber 407 is drawn into the inside of first pump chamber 407 from the first suction port 411a that possesses first suction valve 412, the liquid of the inside of second pump chamber 408 is sprayed onto the outside of second pump chamber 408 from the second ejiction opening 413b that possesses the second ejection valve 424.In addition, on the contrary, shrink and under the state that second barrier film 404 stretches at first barrier film 403, the liquid of the outside of second pump chamber 408 is drawn into the inside of second pump chamber 408 from the second suction port 411b that possesses second suction valve 423, the liquid of the inside of first pump chamber 407 is sprayed onto the outside of first pump chamber 407 from the first ejiction opening 413a that possesses the first ejection valve 422.By carrying out the switching of these states continuously, carry out the increase and decrease of the volume of first pump chamber 407 and second pump chamber 408 repeatedly, corresponding suction and the ejection of carrying out the liquid of each pump chamber repeatedly.Thus, realize the function of pump.Under the lax state of first and second barrier film 403,404, the flexible power of the electrolysis of electroconductive polymer film can not pass to the fluid of pump chamber inside and cancellation, so the efficiency of movement of pump reduces.Therefore, be necessary first barrier film 403 and second barrier film 404 cannot be respectively laxly but nervous state, in the pump of Figure 22 A, the pressure of the electrolytic solution of the inside by reducing electrolyte liquor chamber 409 makes its pressure less than the fluid of the fluid of the first pump chamber inside and the second pump chamber inside, first barrier film 403 and second barrier film 404 cannot be respectively laxly but nervous state.

In addition, the pump of Figure 22 B is the formation roughly the same with the pump of Figure 22 A, but is different not having aspect the connector element 406.In this formation, by the electrolytic solution that is full of at space portion 409, first and

second barrier film

403 and 404 is subjected to the effect of power.Thus, carry out the action identical with Figure 22 A.In the pump of Figure 22 B, the pressure of the electrolytic solution of the inside by making electrolyte liquor chamber 409 is greater than or less than the pressure of the fluid of the fluid of the first pump chamber inside and the second pump chamber inside, can make the lax but nervous state of first barrier film 403 and second barrier film 404.

In addition, the pump of Figure 22 C only possesses 1 by the film formed barrier film 403 of electroconductive polymer in the inboard of framework 402.Framework 402 is a drum, and has the inner space.Barrier film 403 is discoideus electroconductive polymer films, and its periphery is fixed on framework 402 at standing part 430.In addition, barrier film 403 is connected by spring component 451 with framework 402.Barrier film 403 is provided in the state that applies tension force on the face direction, is cone shape shape.In Figure 22 C, will be positioned at the below of barrier film 403 and the space portion 409 that surrounded by barrier film 403 and framework 402 is defined as electrolyte liquor chamber.Be full of electrolytic solution in the electrolyte liquor chamber 409.Dispose electrode 450 with the bottom surface of barrier film 403 opposed frameworks 402.Barrier film 403 is connected with power supply 410c by

lead

410a, 410b respectively with electrode 450.To be defined as pump chamber by the space segment 407 that barrier film 403 and framework 402 surround.By applying anti-phase voltage mutually to barrier film 403 and electrode 450, the electroconductive polymer film of barrier film 403 carries out fore and aft motion.With regard to the state shown in Figure 22 C, the state after barrier film 403 stretches.Under this state, the liquid of the outside of pump chamber 407 is drawn into the inside of pump chamber 407 from the suction port 411 that possesses suction valve 412.In addition, on the contrary, under the state that barrier film 403 has shunk, the liquid of the inside of pump chamber 407 is sprayed onto the outside of pump chamber 407 from the ejiction opening 413 that possesses ejection valve 422.By carrying out the switching of these states continuously, the volume of pump chamber 407 increases and decreases repeatedly, corresponding suction and the ejection of carrying out liquid repeatedly.Thus, the function of performance pump.

Patent documentation 1: the spy opens the 2005-207406 communique

With the pump of aforementioned patent documentation 1 be representative use the pump of electroconductive polymer film, great changes will take place for the tension force by barrier film when the action of pump, the problem that exists the efficiency of movement of pump to reduce thus.Here, the variation of the tension force of barrier film has two following variations.At first, first variation is a tension variation of passing through the flexible barrier film that produces of periodicity electrolysis of electroconductive polymer film when pump moves.Second variation is because periodically the reason of electrolysis beyond flexible produced the tension variation that produces when flexible at the electroconductive polymer film.Next coming in order are described.

At first, to when pump moves, describing because of the tension variation of the flexible barrier film that produces of the periodicity electrolysis of electroconductive polymer film and the reduction of the pump efficiency of movement due to this variation.

Usually, the extending amount of electroconductive polymer film is roughly proportional with the amount of the electric charge of the electroconductive polymer film of coming in and going out.Now, its relation is, flows under the situation of first barrier film 403 at the electric charge of certain tittle, and the electric charge of same amount flows out from second barrier film 404.At this moment, first barrier film 403 stretches and 404 contractions of second barrier film, but according to aforesaid content, becomes the contour projector relation about equally of the span and second barrier film 404 of first barrier film 403 as can be known.That is, the variable quantity of the area of the variable quantity of the area of first barrier film 403 and second barrier film 404 becomes opposite in sign and absolute value relation about equally.Thus, the gross area of first barrier film 403 and second barrier film 404 roughly keeps constant.On the contrary, flow out from first barrier film 403 at the electric charge of certain tittle, electric charge flows under the situation of second barrier film 404, and same relation is set up.To sum up, when the pump action of Figure 22 B, the gross area of first barrier film 403 and second barrier film 404 roughly keeps constant.

When the action of the pump of Figure 22 B, be assumed to first barrier film 403 on the basis of lax but nervous state, the relation of the volume of the area of first barrier film 403 and first pump chamber is generally non-linear relation.That is,, become the shape of epirelief or protruding shape down usually about the plotted curve of the relation of the volume of the area of representing first barrier film 403 and first pump chamber 407.Figure 25 A illustrates the plotted curve about the relation of the volume of the area of first barrier film 403 and first pump chamber 407, and it is shaped as the example of the situation of epirelief.In addition, on the contrary, Figure 25 B illustrates the plotted curve about the relation of the volume of the area of first barrier film 403 and first pump chamber 407, and it is shaped as down the example of protruding situation.Here, the area of first barrier film 403 is S ₁, the volume of first pump chamber 407 at this moment is made as W ₁, the area of second barrier film 404 is S ₂, the volume of second pump chamber 408 at this moment is made as W ₂, separately area was made as S when the area of the area of first barrier film 403 and second barrier film 404 was equated ₀, the volume and second pump chamber 408 volume separately of first pump chamber 407 at this moment is made as W ₀

When the relation of Figure 25 C is set up, if supposition is first barrier film 403 and the lax but not nervous state of second barrier film 404 when the action of pump, the volume (W of the area of first barrier film 403 and first pump chamber 407 and second pump chamber 408 and their total part ₁+ W ₂) relation be shown among Figure 25 C.In addition, when the relation of Figure 25 B is set up, if supposition is first barrier film 403 and the lax but not nervous state of second barrier film 404 when the action of pump, the volume (W of the area of first barrier film 403 and first pump chamber 407 and second pump chamber 408 and their total part ₁+ W ₂) relation be shown among Figure 25 D.Their value is made as S when wherein, the area of the area of first barrier film 403 and second barrier film 404 being equated ₀In addition, when pump moves as previously mentioned, the variable quantity of the area of the variable quantity of the area of first barrier film 403 and second barrier film 404 is opposite in sign and absolute value relation about equally, so the total amount of the area of the area of first barrier film 403 and second barrier film 404 keeps constant.At this moment, there is S ₂-S ₀=S ₀-S ₁The situation of relation under, when the area of first barrier film 403 is S ₁The time, the area of second barrier film 404 becomes S ₂, on the contrary, when the area of second barrier film 404 is S ₁The time, the area of first barrier film 403 becomes S ₂Shown in Figure 25 D, the plotted curve of the relation of the total volume of the area of first barrier film 403 and first pump chamber 407 and second pump chamber 408 becomes with " expression (area of first barrier film)=S ₀The straight line of relation " be the symmetrical shape of symmetry axis.In addition, the total volume (W of first pump chamber 407 and second pump chamber 408 ₁+ W ₂) at the area=S of first barrier film 403 ₀The Shi Caiyong maximum value or minimum value.In Figure 25 C, at the area=S of first barrier film 403 ₀Shi Caiyong maximum is in Figure 25 D, at the area=S of first barrier film 403 ₀The Shi Caiyong minimum.Under any circumstance, along with the area change of first barrier film 403 and second barrier film 404, the total value of the volume of the volume of first pump chamber 407 and second pump chamber 408 does not become steady state value, but changes.

Now, as first barrier film 403 under certain state and the lax but not nervous pump of second barrier film 404, the situation of being out of shape, the total value (W of the volume of the volume of first pump chamber 407 and second pump chamber 408 have been carried out if consider thus with first barrier film 403 and the lax but nervous state of second barrier film 404 ₁+ W ₂) reduce or increase.If the volume of the inside of framework 402 is made as W _t, the volume of electrolyte liquor chamber 409 becomes from W _tDeduct the total volume (W of first pump chamber 407 and second pump chamber 408 ₁+ W ₂) value { W that obtains _t-(W ₁+ W ₂).Thus, corresponding to the total volume (W of first pump chamber 407 and second pump chamber 408 ₁+ W ₂) minimizing or increase, the volume of electrolyte liquor chamber 409 increases or reduces.Under the situation that the volume of electrolyte liquor chamber 409 increases, the electrolytic solution that is full of in electrolyte liquor chamber 409 is incompressible fluid, and the pressure of electrolytic solution sharply reduces.By this variation in pressure, the balance rapid change of the pressure of the fluid of the first pump chamber inside and the pressure of electrolytic solution, first barrier film 403 is being pushed by brute force on the direction of electrolyte liquor chamber 409 from first pump chamber 407.In addition, second barrier film 404 is being pushed by brute force on the direction of electrolyte liquor chamber 409 from second pump chamber 408.So the tension force of first barrier film 403 and second barrier film 404 becomes very big, the action of first barrier film 403 and second barrier film 404 is hindered.As a result of, the spray volume of pump and intake become very little value, and the efficiency of movement of pump reduces.

On the contrary, under the situation that the volume of electrolyte liquor chamber 409 reduces, the pressure of electrolytic solution sharply increases.As previously mentioned, in the pump of Figure 22 B,, be necessary to keep the relation of the pressure of so-called electrolytic solution less than the pressure of the fluid of pump chamber inside in order to keep the lax but not nervous state of barrier film.But, under the situation that the pressure of the electrolytic solution along with the minimizing of the volume of electrolyte liquor chamber 409 sharply increases, can't keep this relation, barrier film is lax.The barrier film 403,404 that Figure 24 B illustrates electroconductive polymer film in the pump shown in Figure 22 B is the state of lax (relaxing).The tension force of nervous state if the tension force of concern barrier film 403,404, the tension force of the state that barrier film 403,404 has relaxed do not relax less than barrier film 403,404.That is, in the pump of Figure 22 B, the pressure rapid change of electrolytic solution corresponding to the Volume Changes of electrolyte liquor chamber 409.Lax state of barrier film 403,404 or tension force take place and become very big and state that action is hindered in its result.Even if the pump of Figure 22 A also is the same, the volume of electrolyte liquor chamber 409 changes in its action, and is corresponding, the pressure rapid change of electrolytic solution.Lax state of barrier film 403,404 or tension force take place and become very big and state that action is hindered in its result.Need to prove, in Figure 25 C and Figure 25 D, when the area of first barrier film 403 is S0, the variation of the total volume of first pump chamber 407 and second pump chamber 408 is little, as long as be limited to this scope, it is moved with the lax but not nervous state of barrier film, and such scope is little, and the spray volume of pump and intake are constrained to less value.Its result, the efficiency of movement of pump reduces.

In addition, in the pump shown in Figure 22 C, increase and minimizing for the volume that produces space 407 need the volume minimizing/increase of space portion 409.Now, be full of electrolytic solution in the space portion 409, but because electrolytic solution is incompressible fluid, so that the volume of space portion 409 roughly keeps is constant.For this reason, the variation of the volume in space 407 also is limited in very little scope, so the amount of the ejection of the liquid in this pump and suction becomes very little value.Now, suppose when the pump shown in Figure 22 C moves, keep barrier film 403 unflagging states.At this moment, under the operating state that volume increases, liquid is sucked by pump chamber 407 of barrier film 403 stretching, extensions, pump chamber 407, the volume of electrolyte liquor chamber 409 reduces.But the electrolytic solution that is full of in the inside of electrolyte liquor chamber 409 is incompressible fluid, so the pressure of electrolytic solution sharply increases.Its result, barrier film 403 is being pushed by brute force on the direction of pump chamber 407 from electrolyte liquor chamber 409, and the tension force of barrier film 403 becomes very large value.The action of barrier film 403 is hindered thus.In addition, on the contrary, under the operating state that volume reduces, liquid is ejected from pump chamber 407 of barrier film 403 contractions, pump chamber 407, the volume of electrolyte liquor chamber 409 increases.But the electrolytic solution that is full of in the inside of electrolyte liquor chamber 409 is incompressible fluid, so the pressure of electrolytic solution sharply reduces.Its result, barrier film 403 is being pushed by brute force on the direction of electrolyte liquor chamber 409 from pump chamber 407, and the tension force of barrier film 403 becomes very large value.The action of barrier film 403 is hindered thus.

If above-mentioned situation is gathered, then in pump in the past, the tension force that barrier film takes place when pump moves reduces and the lax state of barrier film or the tension force of barrier film become very big and state that the action of barrier film is hindered.The barrier film that Figure 24 A～Figure 24 C is illustrated in electroconductive polymer film in the pump shown in Figure 22 A～Figure 22 C is the state of lax (relaxing).Under this state, even if the barrier film of electroconductive polymer film is flexible, power also can cancellation, and power can be efficiently to the liquid transfer of pump chamber, and the suction of liquid and the efficient of ejection significantly reduce.In addition, even if become very big and under the state that the action of barrier film is hindered, the spray volume of fluid and intake become very little value at the tension force of barrier film, the efficient of pump significantly reduces.

Then, the tension variation that the barrier film of electroconductive polymer film taken place take place when flexible and the reduction of the pump efficiency of movement due to this variation are described.

Figure 23 is illustrated in the electrolytic solution to set OBL electroconductive polymer film, apply alternating voltage and the schematic representation of the variation of deformation when making its electrolysis flexible, the electroconductive polymer film with the state that has applied certain constant tension force along long side direction.Wherein, L ₀The length that voltage applies the long limit of electroconductive polymer film is before carried out in expression, and Δ L represents to deduct L from the length on the long limit of each electroconductive polymer film constantly ₀The value that obtains.The longitudinal axis of Figure 23 illustrates with percentaeg (%) expression Δ L/L ₀The value that obtains.In such experiment, for example, in the chapter 2 of books " forefront of soft actuator exploitation～be intended to realize artificial-muscle～(NTS of Co., Ltd. issues in October, 2004) " etc., be documented.As shown in figure 23, when moving applying periodic voltage to the electric conductivity polymeric membrane, when voltage returned to primary voltage, the deformation of electroconductive polymer film did not recover fully, and deformation is accumulated on constant direction.In addition, even if do not applying under the voltage condition, can produce expansion because of electroconductive polymer film Electolyte-absorptive and wait distortion.In addition, can take place with the creep in the electroconductive polymer film is the non-reversible or reversible change in shape of representative.In addition, in the standing part of barrier film, can deform or dislocation etc.Need to prove that the standing part of barrier film is represented by 430 and 431 among Figure 22 A.In addition, can stretch by the electroconductive polymer film along with variation of temperature.For example, can when rising, temperature stretch because of thermal expansion electroconductive polymer film.In addition, have at the electroconductive polymer film under the situation of character of thermal shrinkage, when temperature reduced, the electroconductive polymer film stretched.If consider that the electroconductive polymer film is former thereby situation about stretching taken place because of these, the Young's modulus of electroconductive polymer film is big, the stretching, extension of the electroconductive polymer film due to these reasons can not be absorbed by elasticity, the state that the electroconductive polymer film has relaxed takes place.From above reason as can be known, even if constituted under the situation of pump with the state that the electroconductive polymer film has been applied suitable tension force during fabrication, can take place also subsequently that the electroconductive polymer film relaxes and the situation that do not apply desirable tension force to the electric conductivity polymeric membrane.Figure 24 A～Figure 24 C is illustrated in the state of lax (relaxing) of electroconductive polymer film in the pump shown in Figure 22 A～Figure 22 C.Under this state, even the electroconductive polymer film is flexible, power also can cancellation, and power can be not efficiently be transmitted to the fluid (for example liquid) of pump chamber, so the efficient of the suction of fluid and ejection significantly reduces.

In addition, on the contrary, can be along with variation of temperature etc. and the electroconductive polymer film shrinks.For example, can electroconductive polymer film generation thermal shrinkage when temperature rises.In addition, have at the electroconductive polymer film under the situation of character of thermal expansion, when temperature reduced, the electroconductive polymer film shrank.In addition, the thickness increase by Electolyte-absorptive of electroconductive polymer film is created in the power that stretches on the thickness direction, and by the distortion due to this power, the electroconductive polymer film can shrink on the face direction of barrier film face.If think that the electroconductive polymer film is owing to the situation of shrinking has taken place these reasons, the Young's modulus of electroconductive polymer film is big, the contraction of the electroconductive polymer film due to these reasons can't be absorbed by elasticity, so it is very big that the tension force of electroconductive polymer film becomes, the action of pump is hindered.

If above-mentioned situation is gathered, then in pump in the past, because the flexible reason in addition of periodicity electrolysis has taken place under the flexible situation tension variation to take place, the efficient that pump moves reduces at the electroconductive polymer film.Under the situation of tension force less than the value of regulation, the lax state of barrier film takes place particularly.Figure 24 A～Figure 24 C is illustrated in the state of lax (relaxing) of electroconductive polymer film in the pump shown in Figure 22 A～Figure 22 C.Under this state, even if the electroconductive polymer film is flexible, power also can cancellation, power can be not efficiently to the fluid transmission of pump chamber, so the efficient of the suction of fluid and ejection significantly reduces.

Summary of the invention

Relative therewith, the objective of the invention is to, provide a kind of have use the electroconductive polymer film carry out the pump of the suction of fluid and ejection function, can remain on by the pressure that will impose on the barrier film that constitutes by the electroconductive polymer film suitable scope carry out the suction of fluid and ejection efficient raising use the fluid delivery device of electroconductive polymer.

In order to realize aforementioned purpose, the following formation of the present invention.

According to first mode of the present invention, provide a kind of suck and the use of ejecting fluid the fluid delivery device of electroconductive polymer, it is characterized in that possessing:

Inside is full of the pump chamber of aforesaid fluid;

Form aforementioned pump chamber in inside and constitute the frame of a part of the wall of aforementioned pump chamber;

Barrier film, it is supported in the aforementioned frame and carries out the flexible electroconductive polymer film of electrolysis by a part or all parts and forms, and constitutes the wall of aforementioned pump chamber with aforementioned frame;

Be configured in aforementioned frame and be used for carrying out the opening portion of the ejection and the suction of aforesaid fluid at aforementioned pump chamber;

Surround and the inner part of electrolytic solution and this electrolytic solution and the electrolyte liquor chamber that aforementioned barrier film joins of containing by aforementioned frame and aforementioned barrier film;

Be used for applying the power supply of voltage to aforementioned electroconductive polymer film;

Wiring portion with aforementioned electroconductive polymer film and aforementioned power source electrical connection; With

The pressure that will maintain in the predetermined range by the pressure that indoor electrolytic solution of aforementioned electrolyte and the aforesaid fluid in the aforementioned pump chamber act on aforementioned barrier film is kept portion.

In the fluid delivery device that uses electroconductive polymer of the present invention, when distortion has taken place barrier film, have and maintain the pressure that will act on barrier film in the predetermined range by pressure and maintain function (pressure is kept function) in the suitable scope electrolytic solution.This state is held when fluid delivery device moves all the time, so the electroconductive polymer film stretches and the work when shrinking efficiently is used for the ejection and the suction of the fluid of pump chamber.That is, when the ratio that is used in the work of the ejection of fluid of pump chamber and suction from the electric energy that power supply applies is known as working efficiency, keeps function by aforesaid pressure and make the working efficiency of fluid delivery device be higher than pump in the past.

Description of drawings

About these and other purposes of the present invention and feature, the following record relevant by the preferred implementation of accompanying drawing is able to clearly.In the accompanying drawings,

The stereogram of the fluid delivery device of Fig. 1 is the use that relates to of first mode of execution of the present invention electroconductive polymer;

Fig. 2 is the pie graph of the fluid delivery device that relates to of first mode of execution of the present invention;

Fig. 3 is the pie graph of the fluid delivery device that relates to of first mode of execution of the present invention;

Fig. 4 is the sectional view of the fluid delivery device that relates to of first mode of execution of the present invention;

Fig. 5 is the figure of the example of the size of each several part in the fluid delivery device that relates to of expression first mode of execution of the present invention;

Fig. 6 A is the action diagram of the action of the pump when applying sine voltage periodically by power supply in the fluid delivery device that relates to of expression first mode of execution of the present invention;

Fig. 6 B is the action diagram of the action of the pump when applying sine voltage periodically by power supply in the fluid delivery device that relates to of expression first mode of execution of the present invention;

Fig. 6 C is the action diagram of the action of the pump when applying sine voltage periodically by power supply in the fluid delivery device that relates to of expression first mode of execution of the present invention;

Fig. 6 D is the action diagram of the action of the pump when applying by power supply that periodically sine voltage applies in the fluid delivery device that relates to of expression first mode of execution of the present invention;

Fig. 7 is the pie graph of the fluid delivery device that relates to of first mode of execution of the present invention;

Fig. 8 is the figure of example of the situation of keeping of the tension force that imposes on barrier film in the fluid delivery device that relates to of expression first mode of execution of the present invention pressure that barrier film has taken place to impose on when changing;

Fig. 9 is illustrated in the figure of example of the situation of keeping that the pressure of barrier film has taken place to impose on when changing the tension force that imposes on barrier film in the fluid delivery device that first mode of execution of the present invention relates to;

The sectional view of the fluid delivery device that first variation of Figure 10 first mode of execution of the present invention relates to;

Figure 11 A is the sectional view that is illustrated in the fluid delivery device under the state that the second variation medi-spring portion of first mode of execution of the present invention stretched;

Figure 11 B is the sectional view that is illustrated in the fluid delivery device under the state that the second variation medi-spring portion of first mode of execution of the present invention shunk;

Figure 12 is that the second variation medi-spring portion that is illustrated in first mode of execution of the present invention is made of but the sectional view of fluid delivery device when being made of gas helical spring;

The pie graph of the fluid delivery device of Figure 13 is the use that relates to of second mode of execution of the present invention electroconductive polymer;

Figure 14 is the figure of the situation of keeping that imposes on the pressure of barrier film in the fluid delivery device that relates to of expression second mode of execution of the present invention;

The pie graph of the fluid delivery device of Figure 15 is the use that relates to of the 3rd mode of execution of the present invention electroconductive polymer;

Figure 16 is the figure of situation of the action of the fluid delivery device that relates to of expression the 3rd mode of execution of the present invention;

Figure 17 is the figure of the situation of keeping that imposes on the pressure of barrier film in the fluid delivery device that relates to of expression the 3rd mode of execution of the present invention;

The pie graph of the fluid delivery device of Figure 18 is the use that relates to of expression the 4th mode of execution of the present invention electroconductive polymer;

Figure 19 is the figure that the shape of the barrier film of fluid delivery device that the 4th mode of execution of the present invention is related to describes;

The pie graph of the fluid delivery device of Figure 20 is the use that relates to of expression the 5th mode of execution of the present invention electroconductive polymer;

The pie graph of the fluid delivery device of Figure 21 is the use that relates to of expression the 6th mode of execution of the present invention electroconductive polymer;

Figure 22 A represents the figure of the pump structure of example in the past;

Figure 22 B represents the figure of the pump structure of example in the past;

Figure 22 C represents the figure of the pump structure of example in the past;

Figure 23 is the figure of variation of the deformation of the film of expression electroconductive polymer film when electrolysis is flexible;

Figure 24 A is the figure that is illustrated in the state that the electroconductive polymer film has relaxed in the pump of Figure 22 A;

Figure 24 B is the figure that is illustrated in the state that the electroconductive polymer film has relaxed in the pump of Figure 22 B;

Figure 24 C is the figure that is illustrated in the state that the electroconductive polymer film has relaxed in the pump of Figure 22 C;

Figure 25 A is the figure of the relation of the area of each one of expression pump and volume;

Figure 25 B is the figure of the relation of the area of each one of expression pump and volume;

Figure 25 C is the figure of the relation of the area of each one of expression pump and volume;

Figure 25 D is the figure of the relation of the area of each one of expression pump and volume;

Figure 26 is the figure that is used to illustrate the relation of the area of each one of pump and volume;

Figure 27 is the pie graph of the fluid delivery device that relates to of expression other mode of executions of the present invention;

Figure 28 is the fluid delivery device that expression other mode of execution of the present invention relates to, in the pump of Fig. 3 in the fluid delivery device that aforementioned first mode of execution relates to, the elasticity membranous part of the pressure of fluid that makes the pressure of electrolytic solution and pump chamber for the time and the pie graph of the situation of spring portion with value;

Figure 29 is the fluid delivery device that expression other mode of execution of the present invention relates to, in the pump of Figure 10 in the fluid delivery device that aforementioned first variation of aforementioned first mode of execution of the present invention relates to, make the pie graph of situation of the elasticity membranous part of pressure for the time of the fluid of the pressure of electrolytic solution and pump chamber with value;

Figure 30 is the fluid delivery device that expression other mode of execution of the present invention relates to, in the pump of Figure 13 in the fluid delivery device that second mode of execution of the present invention relates to, make the pie graph of situation of the elasticity membranous part of pressure for the time of the fluid of the pressure of electrolytic solution and pump chamber with value;

Figure 31 is the fluid delivery device that expression other mode of execution of the present invention relates to, in the pump of Figure 18 in the fluid delivery device that the 4th mode of execution of the present invention relates to, make the pie graph of size of the bubble portion of pressure for the time of the fluid of the pressure of electrolytic solution and pump chamber with value;

Figure 32 is the pie graph that the fluid delivery device that relates to of expression other mode of execution of the present invention uses the example of loose shape resilient member;

Figure 33 is that the fluid delivery device that expression other mode of execution of the present invention relates to only uses the pie graph of spring portion as the example of spring section.

Embodiment

Below describe embodiments of the present invention with reference to the accompanying drawings in detail.

Below, before the mode of execution that describes in detail with reference to the accompanying drawings among the present invention, variety of way of the present invention is described.

Inside is full of the pump chamber of aforesaid fluid;

According to second mode of the present invention, the use of in first mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned pressure portion of keeping possesses spring section, utilize the elastic force of aforementioned spring section that the interface of aforementioned electrolyte and aforementioned electrolyte part in addition will be deformed, the pressure that will act on aforementioned barrier film thus maintains in the aforementioned predetermined range.

According to Third Way of the present invention; The use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer; The elastomer that can stretch that the aforementioned elastic portion that aforementioned pressure is kept section is formed by the part at the wall of aforementioned electrolyte chamber and connect aforementioned elastomer and aforementioned frame between spring section consist of; The elastic force of aforementioned elastomeric elastic force or aforementioned spring section is had an effect as the aforementioned elastic force of aforementioned elastic portion; Produce thus aforementioned elastomer will be from the inboard of aforementioned electrolyte liquor chamber the power of Direction distortion laterally

Power by aforementioned generation, the pressure of aforementioned electrolyte is retained the value less than the pressure of the aforesaid fluid of aforementioned pump chamber, the tension force of the aforementioned barrier film that produces by the difference by the pressure of the aforesaid fluid of the pressure of aforementioned electrolyte and aforementioned pump chamber, aforementioned barrier film is retained from aforementioned pump chamber and protrudes such shape to the direction of aforementioned electrolyte liquor chamber.

According to cubic formula of the present invention, the use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned spring section that aforementioned pressure is kept portion is made of the elastomer that can stretch that the part at the wall of aforementioned electrolyte chamber forms, aforementioned elastomeric elastic force is played a role as the aforementioned elastic force of aforementioned spring section, producing aforementioned elastomer thus will be from the power of a little lateral direction distortion in the inboard of aforementioned electrolyte liquor chamber

According to the 5th mode of the present invention, the use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned spring section that aforementioned pressure is kept portion is made of spring portion, the elastic force that makes aforementioned spring portion plays a role as the aforementioned elastic force of aforementioned spring section, generation will make the power that the interface of aforementioned electrolyte and aforementioned electrolyte part in addition deforms thus

According to the 6th mode of the present invention; The use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer; The elastomer that can stretch that the aforementioned elastic portion that aforementioned pressure is kept section is formed by the part at the wall of aforementioned electrolyte chamber and connect aforementioned elastomer and aforementioned frame between spring section consist of; The elastic force that makes aforementioned elastomeric elastic force or aforementioned spring section plays a role as the aforementioned elastic force of aforementioned elastic portion; Produce thus aforementioned elastomer will be from the lateral of aforementioned electrolyte liquor chamber the power of inboard Direction distortion

Power by aforementioned generation, the pressure of aforementioned electrolyte is retained the value greater than the pressure of the aforesaid fluid of aforementioned pump chamber, the tension force of the aforementioned barrier film that produces by the difference by the pressure of the aforesaid fluid of the pressure of aforementioned electrolyte and aforementioned pump chamber, aforementioned barrier film is retained from aforementioned electrolyte liquor chamber and protrudes such shape to the direction of aforementioned pump chamber.

According to the 7th mode of the present invention, the use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned spring section that aforementioned pressure is kept portion is made of the elastomer that can stretch that the part at the wall of aforementioned electrolyte chamber forms, aforementioned elastomeric elastic force is played a role as the aforementioned elastic force of aforementioned spring section, producing aforementioned elastomer thus will be from the power of side direction distortion in the lateral of aforementioned electrolyte liquor chamber

Power by aforementioned generation, the pressure of aforementioned electrolyte is maintained in the value greater than the pressure of the aforesaid fluid of aforementioned pump chamber, the tension force of the aforementioned barrier film that produces by the difference by the pressure of the aforesaid fluid of the pressure of aforementioned electrolyte and aforementioned pump chamber, aforementioned barrier film is retained from aforementioned electrolyte liquor chamber and protrudes such shape to the direction of aforementioned pump chamber.

According to the 8th mode of the present invention, the use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned spring section that aforementioned pressure is kept portion is made of spring portion, the elastic force that makes aforementioned spring portion plays a role as the aforementioned elastic force of aforementioned spring section, generation will make the power that the interface of aforementioned electrolyte and aforementioned electrolyte part in addition deforms thus

According to the 9th mode of the present invention, the use of in second mode, putting down in writing in the fluid delivery device of electroconductive polymer, the aforementioned spring section that aforementioned pressure is kept portion is made of aforementioned electrolyte that is positioned at the aforementioned electrolyte chamber and the inner bubble portion of containing gas,

More than 10% of spray volume of the fluid delivery device the when volume of this bubble portion is flexible 1 time of an aforementioned barrier film.

According to the tenth mode of the present invention, the use of in the 9th mode, putting down in writing in the fluid delivery device of electroconductive polymer, the volume of aforementioned bubble portion is below 20% of volume of aforementioned electrolyte chamber.

Below, use accompanying drawing to describe, but the present invention is not limited to these mode of executions.

(first mode of execution)

The stereogram of the fluid delivery device of Fig. 1 is the use that relates to of first mode of execution of the present invention electroconductive polymer.

The fluid delivery device of Fig. 1 possesses: frame 102, as the elasticity membranous part 130 and fluid hose portion 200,201,202,203 each several parts of an example of spring section.

Frame 102 is roughly cylindrical shape.Be connected with 2 fluid hose portions 200,201 and fluid hose portion 202,203 respectively on the plane 210 of the circle of frame about in the of 102.Peristome portion in the outside of the through hole 102h of the sidewall 102s of frame 102 possesses circular elasticity membranous part 130.Now, for the explanation of back, the plane of the circle on frame 102 tops is defined as upper circular plane 210.As shown in Figure 1, straight line 100A-100B is the straight line that comprises a diameter on upper circular plane 210.In addition, straight line 100C-100D is the straight line that comprises a diameter on upper circular plane 210, with straight line 100A-100B quadrature.To comprise that straight line 100A-100B and the plane vertical with upper circular plane 210 are defined as plane 220 (with reference to Fig. 2).In addition, will comprise that straight line 100C-100D and the plane vertical with upper circular plane 210 are defined as plane 221 (with reference to Fig. 2).

Fig. 3 is the sectional view when cutting off the aforesaid fluid conveyor system of these first mode of executions with plane 220.

The fluid delivery device of Fig. 3 possesses: frame 102, first barrier film 103, second barrier film 104, first pump chamber 107, second pump chamber 108, electrolyte liquor chamber 109,110a of wiring portion and 110b, power supply 110c, first and

second suction port

111a and 111b, first and

second ejiction opening

113a and 113b, first and

second suction valve

121 and 123, first and

second sprays valve

122 and 124, spring portion 131 as an example of spring section, elasticity membranous part 130, with fluid hose portion 200,201,202,203.Spring portion 131 and elasticity membranous part 130 keeping portion's (particularly pressure is kept an example of the spring section of portion) as pressure like that and work as the following description.

First barrier film 103 is discoideus conducting polymer films, and its periphery is fixed on the periphery of the upper wall of frame 102.Second barrier film 104 is discoideus conducting polymer films, and its periphery is fixed on the periphery of the lower wall portion of frame 102.In order to make first barrier film 103 and second barrier film 104 can be because of frame 102 conductings, frame 102 be made of insulator self, or first barrier film 103 or second barrier film 104 or its both sides and frame 102 are fixed across insulator.In addition, about first barrier film 103 and second barrier film 104, below for for simplicity, abbreviate barrier film as.Below the shape or the action of each several part is elaborated.

Fig. 4 is the sectional view when cutting off the fluid delivery device of these first mode of executions with plane 221.In Fig. 4, the shape of spring portion 131 simply is shown, but, as the back is illustrated, considers with the straight line parallel to be the helical spring structure of axial screw shape with straight line 100A-100B as the example of structure of spring portion 131.

In this first mode of execution, first pump chamber 107 is surrounded by the upper wall of frame 102 and first barrier film 103 and constitutes, and is full of as the fluid that transports object.At the upper wall of the frame 102 of a part that constitutes first pump chamber 107, be formed with and be connected with fluid hose portion 200 and have the first suction port 111a of first suction valve 121 and and be connected and have first two opening portions of the first ejiction opening 113a that spray valve 122 with fluid hose portion 201.In addition, second pump chamber 108 is surrounded by the lower wall of frame 102 and second barrier film 104 and constitutes, and is full of as the fluid that transports object.The fluid of the fluid of first pump chamber 107 and second pump chamber 108 can be identical, also can be different.At the lower wall of the frame 102 of a part that constitutes second pump chamber 108, be formed with and be connected with fluid hose portion 203 and have the second suction port 111b of second suction valve 123 and and be connected and have second two opening portions of the second ejiction opening 113b that spray valve 124 with fluid hose portion 202.To be defined as electrolyte liquor chamber by the annulus portion 109 that first and second barrier film 103,104 and frame 102 surround.In this electrolyte liquor chamber 109, dispose aforementioned spring portion 131.

As the following description, carry out the suction and the ejection of fluid, carry out the action of pump thus as fluid delivery device by these opening portions that form at first and second pump chamber 107,108.About state shown in Figure 3, be the state that first barrier film 103 stretches, second barrier film 104 shrinks.Under this state, with the fluid of the outside of first pump chamber 107 for example liquid be drawn into the inside of first pump chamber 107 from the first suction port 111a that possesses the first opened suction valve 121, the fluid of the inside of second pump chamber 108 is sprayed onto the outside of second pump chamber 108 from the second ejiction opening 113b that possesses the second opened ejection valve 124.At this moment, the first ejiction opening 113a that possesses the first ejection valve 122 is closed by the first ejection valve 122, and the second suction port 111b that possesses second suction valve 123 is also closed by second suction valve 123.In addition, on the contrary, under the state that first barrier film 103 shrinks, second barrier film 104 stretches, with the fluid of the outside of second pump chamber 108 for example liquid be adsorbed onto the inside of second pump chamber 108 from the second suction port 111b that possesses the second opened suction valve 123, the fluid of the inside of first pump chamber 107 is sprayed onto the outside of first pump chamber 107 from the first ejiction opening 113a that possesses the first opened ejection valve 122.At this moment, the second ejiction opening 113b that possesses the second ejection valve 124 is closed by the second ejection valve 124, and the first suction port 111a that possesses first suction valve 121 is also closed by first suction valve 121.By carrying out the switching of these two states continuously, the volume of first pump chamber 107 and second pump chamber 108 increases and decreases repeatedly, corresponding suction and the ejection of carrying out liquid with respect to each pump chamber 107,108 repeatedly.Thus, can realize function as the pump of fluid delivery device.

Frame 102 has the space in inside, for example with respect to the shape cylindraceous of the scope of diameter 1cm～4cm, high 1cm～4cm, has the shape that particular places such as opening portion have through hole, the inner space cylindraceous that has the scope of diameter 0.8～3.8cm, high 0.8～3.8cm in the inside of frame 102.At this moment, the thickness of frame 102 is preferably about 0.2cm.With regard to the shape of the top and bottom surface of frame 102, from the tension force of so-called first and second barrier film 103, the 104 uniform viewpoint that becomes, respectively preferably than the circular little circle of the plectane of first and second barrier film 103,104, but also can be other shapes.The distance that the height of frame 102 preferably is designed to two barrier films 103 and 104 becomes the scope of following explanation.Under two barrier films 103 and 104 whens action, two barrier films 103 and 104 situations about being in contact with one another, think that mutual generation electrical short can regular event.In addition, first and second barrier film 103 and 104 action are restricted, and the suction of pump and the efficient of ejection reduce.From above viewpoint, the distance of preferred two barrier films 103 and 104 immediate part is that certain is more than the steady state value, so that two barrier films 103 and 104 can not be in contact with one another when two barrier films 103 and 104 actions.In addition, under the excessive situation of the distance of the immediate part of two barrier films 103 and 104, the influence that the voltage in the electrolytic solution that exists in the electrolyte liquor chamber 109 between two barrier films 103 and 104 descends increases, and consumes electric power and increases.In addition, under the excessive situation of the distance of the immediate part of two barrier films 103 and 104, be difficult to obtain the miniature fluid conveyor system.From above reason, the distance of two barrier films 103 and 104 immediate part is preferably certain below the steady state value.The preferred distance of considering the immediate part of above two barrier films 103 of aspect design and 104, and the height of frame 102.

Fig. 5 is the figure of object lesson of size of each several part of the fluid delivery device of this first mode of execution of expression.The inner space of frame 102 is divided into 3 spaces by two barrier films 103 and 104, forms first pump chamber 107, electrolyte liquor chamber 109 and second pump chamber 108 respectively.A barrier film 103 and a part of 104 or all parts are formed the circular plate shape of for example thick 5 μ m～30 μ m, about 1cm～4.5cm of diameter by polymer actuated modulator material.In this first mode of execution, barrier film 103 and 104 is as Fig. 3 and shown in Figure 5ly use deflecting under the state that protrudes shape, and under this state, barrier film 103 and 104 size are bigger than the bottom surface of the inner space of frame 102.In Fig. 5, the diameter of the first suction port 111a and the second suction port 111b and the first ejiction opening 113a and the second ejiction opening 113b is 3mm, the height of frame 102 is 10mm, is 30mm from the outside of the sidewall 102s of the frame 102 that is formed with elasticity membranous part 130 to the distance of frame 102 and the inner face opposed sidewall 102 of sidewall 102s total distance of the thickness of the sidewall 102s of the distance of the inner space of diametric, the frame 102 of the bottom surface of the inner space of frame 102 and frame 102 (in other words, along).

Constitute the polymer actuated modulator material of aforementioned first and

second barrier film

103 and 104, it is the material that carries out the flexible electroconductive polymer film of electrolysis, as concrete example, can enumerate polypyrrole and polypyrrole derivative, polyaniline and polyaniline derivative, polythiophene and polythiofuran derivative, reach by a kind or multiple (being total to) polymer that constitutes being selected from them.As polymer actuated modulator material, preferred especially polypyrrole, polythiophene, poly-N-methylpyrrole, poly-3 methyl thiophene, poly-3-methoxythiophene, poly-(3,4-ethylidene dioxy thiophene), and by a kind or 2 kinds that is selected from them (being total to) polymer that constitutes.In addition, the electroconductive polymer film that is made of these materials is preferably at for example phosphorus hexafluoride acid ion (PF that mixed ₆-), the state of p-phenolsulfonic acid ion (PPS), DBSA ion (DBS) or polystyrolsulfon acid ion negative ions such as (PSS) (anion) uses down.With regard to the state of doping like this, aforesaid electroconductive polymer film has electric conductivity, and performance is as the function of polymer actuator.These electroconductive polymer films utilize chemical polymerization or electrolysis polymerization synthetic after, carry out forming processes in the case of necessary, can make thus.

Then, the aforementioned barrier film 103 that is made of polymer actuated modulator material and 104 thickness are described.Under the thicker situation of the aforementioned barrier film that constitutes by polymer actuated modulator material, in the work flexible, can obtain bigger power based on the electrolysis of polymer actuator.In addition, under the thin situation of the aforementioned barrier film that is made of polymer actuated modulator material, ion carries out fast with respect to the discrepancy of polymer actuated modulator material, so can carry out the action of pump at a high speed.These aspects of preferred consideration design the thickness of the aforementioned barrier film that is made of polymer actuated modulator material.From aforementioned viewpoint, as an example, preferred

aforementioned barrier film

103 and 104 thickness separately is the scope of 0.1～1000 μ m, wherein preferred especially 1 μ m～100 μ m.

In addition, under the situation of the area that increases the aforementioned barrier film that constitutes by polymer actuated modulator material, might increase based on the flexible workload of the electrolysis of polymer actuator.In addition, under the situation of the area of the aforementioned barrier film that reduces to constitute, the volume of necessary framework can be reduced, the fluid delivery device miniaturization can be made by polymer actuated modulator material.These aspects of preferred consideration design the area of the aforementioned barrier film that is made of polymer actuated modulator material.From aforementioned viewpoint, as an example,

aforementioned barrier film

103 and 104 area 0.01cm separately ²～1000cm ², wherein preferred especially 0.1cm ²～100cm ²

Be full of electrolytic solution in the electrolyte liquor chamber 109.Here, the electrolyte of electrolytic solution express liquid shape for example, is thought to have ionic substance to be dissolved in the water isopolarity solvent and the solution with electric conductivity of preparation or the liquid (ionic liquid) that is made of ion etc.As the example of electrolytic solution, can utilize NaPF ₆, TBAPF ₆, electrolyte dissolution such as HCl or NaCl is in organic solvents such as water or propene carbonate and the liquid or the BMIPF that obtain ₆Plasma liquid.

Barrier film 103 is connected with the end of 110a of wiring portion and 110b respectively with 104.In addition, the other end of 110a of wiring portion and 110b is connected with power supply 110c.In first pump chamber 107 and second pump chamber 108, have as the pump suction of fluid delivery device and the fluid of ejection to enter.Pump sucks and the fluid of ejection considers for example to be water.Frame 102 forms by the material that has patience with respect to electrolytic solution, for example by the material that contains polycarbonate resin or acrylic resin or these materials have been implemented the material that surface cure handles constitute.

The first suction port 111a and the second suction port 111b have first suction valve 121 and second suction valve 123, become the structure that fluid only flows in the direction that is inhaled into respectively towards pump chamber 107,108 from the outside of pump chamber 107,108.The first ejiction opening 113a and the second ejiction opening 113b have the first ejection valve 122 and the second ejection valve 124, become the structure that fluid only flows in the direction that is ejected respectively towards the outside of pump chamber 107,108 from pump chamber 107,108.The shape of each suction port and each ejiction opening be pressure required when having considered suction and ejecting fluid or flow, and the viscosity of fluid etc. after design.

The voltage of power supply 110c with for example ± sine wave or the rectangular wave of 1.5V change.Thus, between

barrier film

103 and 104, apply periodically variable voltage.When the

barrier film

103 or 104 of Xiang Yifang applied positive voltage, the electroconductive polymer film that constitutes this

barrier film

103 or 104 was oxidized.In addition, corresponding, the variation that positive ion (cation) leaves the electroconductive polymer film of barrier film 103 that an aforementioned side's

barrier film

103 or 104 electroconductive polymer film or negative ion (anion) enter an aforementioned side or 104 takes place.Thus, in the electroconductive polymer film of an aforementioned side's

barrier film

103 or 104, shrink or stretch distortion such as (expansions).On the contrary, when the

barrier film

103 or 104 to an aforementioned side applied negative voltage, the electroconductive polymer film that constitutes this

barrier film

103 or 104 was reduced.In addition, corresponding, the variation that positive ion (cation) enters the electroconductive polymer film of barrier film 103 that an aforementioned side's

barrier film

103 or 104 electroconductive polymer film or negative ion (anion) leave an aforementioned side or 104 takes place.Thus, in the electroconductive polymer film of an aforementioned side's

barrier film

103 or 104, stretch distortion such as (expansion) or contraction.

The figure of the action of Fig. 6 A, Fig. 6 B, Fig. 6 C, Fig. 6 D pump when to be expression by power supply 110c applied sine voltage periodically.Now, the amplitude with sine voltage is made as V.In these Fig. 6 A～Fig. 6 D, the example of situation that main discrepancy by negative ion produces the distortion of the stretching, extension of barrier film 103,104 electroconductive polymer film separately and contraction is shown.Need to prove, in Fig. 6 A～Fig. 6 D, understand easily, amplify size and the diagram of negative ion 99 with respect to barrier film 103,104 in order to make.

In Fig. 6 A, the voltage of first barrier film 103 and second barrier film 104 is 0.That is, first barrier film 103 and second barrier film 104 are equipotential.

In Fig. 6 B, from power supply 110c to first barrier film 103 apply positive voltage (+V), apply negative voltage (V) from power supply 110c to second barrier film 104 simultaneously.

In Fig. 6 C, the voltage of first barrier film 103 and second barrier film 104 is 0.That is, first barrier film 103 and second barrier film 104 are equipotential.

In Fig. 6 D, from power supply 110c to first barrier film 103 apply negative voltage (V), simultaneously from power supply 110c to second barrier film 104 apply positive voltage (+V).

Now, as Fig. 6 A → Fig. 6 B → Fig. 6 C → Fig. 6 D → Fig. 6 A → Fig. 6 B → Fig. 6 C → Fig. 6 D → ... shown in, situation about changing with considering period of state.

In Fig. 6 A, first barrier film 103 and second barrier film 104 are equipotential, and negative ion 99 contained in the electrolytic solution in the electrolyte liquor chamber 109 roughly evenly distributes in electrolytic solution.But, the current potential of first barrier film 103 is increasing, so constitute the electroconductive polymer film generation oxidation of first barrier film 103.Promptly, for example, the current potential V (t) of first barrier film 103 during moment t is expressed as V * sin (ω t), at 0 o'clock constantly, if consider to become the situation of the state of Fig. 6 A, then as can be known under the state of Fig. 6 A, the current potential of first barrier film 103 is 0, the derivative of V (t) was V ω at 0 o'clock constantly, and current potential is increasing under the state of Fig. 6 A.Corresponding, negative ion (anion) 99 contained in the electrolytic solution is attracted by first barrier film 103, and in addition, the part of this negative ion (anion) 99 enters the inside of first barrier film 103.Its result, first barrier film 103 stretches.Along with the stretching, extension of first barrier film 103, the volume of first pump chamber 107 increases, so first suction valve 121 is opened, fluid flow in first pump chamber 107 from the outside of first pump chamber 107 through the first suction port 111a.In addition, the current potential of second barrier film 104 reduces when the current potential of aforementioned first barrier film 103 increases, and the reduction that constitutes the electroconductive polymer film of second barrier film 104 is carried out.Corresponding, negative ion (anion) 99 leaves the electroconductive polymer film that constitutes second barrier film 104 and enters electrolytic solution.Its result, second barrier film 104 shrinks.Along with the contraction of second barrier film 104, the volume of second pump chamber 108 reduces, so the second ejection valve 124 is opened, the fluid of the inside of second pump chamber 108 flows to the outside of second pump chamber 108 by the second ejiction opening 113b.Need to prove,, see electric capacity as from power supply 110c and work about the structure of fluid delivery device.Under the state of Fig. 6 A, first barrier film 103 is increasing with respect to the current potential of second barrier film 104, thus in aforementioned electric capacity, the electric current of direction of accumulating positive charge from outer flow to first barrier film 103.

Need to prove,, describe in detail in the back about the start of elasticity membranous part 130, spring portion 131.

Then, in Fig. 6 B, from power supply 110c to first barrier film 103 apply positive voltage (+V), apply negative voltage (V) from power supply 110c to second barrier film 104 simultaneously.Under this state, the electroconductive polymer film that constitutes first barrier film 103 is oxidized, corresponding, and negative ion (anion) 99 contained in the electrolytic solution is attracted by first barrier film 103.In addition, the part of negative ion (anion) 99 enters the inside of the electroconductive polymer film that constitutes first barrier film 103.Its result, first barrier film 103 stretches.In Fig. 6 B,, dot the position of first barrier film 103 among Fig. 6 A in order to compare.

Now, as the example that is used to illustrate, the current potential V (t) of first barrier film 103 during moment t is expressed as V * sin (ω t), considers at the state that constantly became Fig. 6 A at 0 o'clock, makes the situation of the state that becomes Fig. 6 B at moment π/(2 ω).At this moment, under the state of Fig. 6 B, the current potential of first barrier film 103 is maximum value V, accompanies therewith, and first barrier film 103 is states of maximum extension.In addition, the derivative of V (t) is 0 when moment π/(2 ω), and under the state of Fig. 6 B, current potential does not change, and accompanies therewith, and the speed of first barrier film 103 is 0, and fluid is 0 to the ejection of pump and the flow of suction.Wherein,, for for simplicity, consider to ignore the viscosity of ionic liquid or fluid etc. here, the situation of carrying out the stretching, extension of barrier film 103 and contraction synchronously, carrying out the ejection and the suction of fluid synchronously with the strain rate of barrier film 103 with the variation of voltage.

In addition, the electroconductive polymer film that constitutes second barrier film 104 is reduced, and is corresponding, and negative ion (anion) 99 leaves the electroconductive polymer film that constitutes second barrier film 104 and enters electrolytic solution.Its result, second barrier film 104 shrinks.In Fig. 6 B,, dot the position of second barrier film 104 among Fig. 6 A in order to compare.But, under this state, the variation of current potential is roughly 0, also is roughly 0 so the variation of the distribution of the shape of first and

second barrier film

103 and 104 or negative ion 99 also is roughly the discrepancy of the fluid in 0, the first pump chamber 107 and second pump chamber 108.In addition, first barrier film 103 is states of maximum extension, and second barrier film 104 is states of maximum collapse.

Considering under the situation of first and

second barrier film

103 and 104 span separately of the state of Fig. 6 A, under the state of Fig. 6 B, the stretching, extension of first barrier film 103 is measured on the occasion of, this value becomes maximum value in the cycle, negative value is measured in the stretching, extension of second barrier film 104, and this value becomes the minimum value in the cycle.In addition, the electric current that comes from power supply 110c stream is roughly 0.Under this state, flowing of fluid also is roughly 0.

In Fig. 6 C, first barrier film 103 and second barrier film 104 are equipotential, and negative ion 99 contained in the electrolytic solution roughly evenly distributes in electrolytic solution.But, the current potential of second barrier film 104 is increasing, so constitute the electroconductive polymer film generation oxidation of second barrier film 104.Corresponding, negative ion (anion) 99 contained in the electrolytic solution is attracted by second barrier film 104, and in addition, its part enters the inside of second barrier film 104.Its result, second barrier film 104 stretches.Along with the stretching, extension of second barrier film 104, the volume of second pump chamber 108 increases, so second suction valve 123 is opened, fluid flows in second pump chamber 108 from the outside of second pump chamber 108 through the second suction port 111b.In addition, the current potential of first barrier film 103 reduces so constitute the electroconductive polymer film of first barrier film 103 reducing.Corresponding, the electroconductive polymer film that negative ion (anion) 99 leaves first barrier film 103 enters electrolytic solution.Its result, first barrier film 103 shrinks.Along with the contraction of first barrier film 103, the volume of first pump chamber 107 reduces, so the first ejection valve 122 is opened, fluid flows to the outside of first pump chamber 107 in first pump chamber 107 by the first ejiction opening 113a.Need to prove,, see electric capacity as from power supply 110c and work about the structure of fluid delivery device.Under the state of Fig. 6 C, second barrier film 104 is increasing with respect to the current potential of first barrier film 103, thus in aforementioned electric capacity, the electric current of direction of accumulating positive charge from outer flow to first barrier film 104.In addition, the position of first and second barrier film 103,104 under the state of Fig. 6 C, roughly the same with the position of first and second barrier film 103,104 among Fig. 6 A.

In Fig. 6 D, from power supply 110c to second barrier film 104 apply positive voltage (+V), apply negative voltage (V) from power supply 110c to first barrier film 103 simultaneously.Under this state, the electroconductive polymer film that constitutes second barrier film 104 is oxidized, corresponding, and negative ion (anion) 99 contained in the electrolytic solution is attracted by second barrier film 104.In addition, the part of negative ion (anion) 99 enters the inside of the electroconductive polymer film that constitutes second barrier film 104.Its result, second barrier film 104 stretches.In Fig. 6 D,, dot the position of first and second barrier film 103,104 among Fig. 6 A in order to compare.In addition, the electroconductive polymer film that constitutes first barrier film 103 is reduced, and is corresponding, and negative ion (anion) 99 leaves the electroconductive polymer film that constitutes first barrier film 103 and enters electrolytic solution.Its result, first barrier film 103 shrinks.But, under this state, the variation of current potential is roughly 0, also is roughly 0 so the variation of the distribution of the shape of first and second barrier film 103,104 or negative ion 99 also is roughly the discrepancy of fluid in 0, the first pump chamber 107 and second pump chamber 108.In addition, first barrier film 103 is states of maximum collapse, and second barrier film 104 is states of maximum extension.

Considering under the situation of the span of first and second barrier film of the state of Fig. 6 A, under the state of Fig. 6 D, negative value is measured in the stretching, extension of first barrier film 103, and this value becomes the minimum value in the cycle, the stretching, extension of second barrier film 104 is measured on the occasion of, this value becomes maximum value in the cycle.In addition, the electric current that comes from power supply 110c stream is roughly 0.Under this state, flowing of fluid also is roughly 0.

By implementing above action repeatedly, carry out the suction and the ejection of fluid.Need to prove, deformation mechanism about the electroconductive polymer film, suppose to have that volume due to inserting based on ion increases, the reasons such as change in shape of the molecule due to the delocalization of the electrostatic repulsion of ion of the same race, pi-electron, but detailed content is not by sets forth in detail.

In aforesaid explanation, for simplicity, considered first and second barrier film 103,104 current potential, with the quantity of electric charge of in the structure of fluid delivery device, accumulating and first and second barrier film 103,104 span is with the situation of phase change, but in the action of reality, viscosity by fluid, or the resistance of wiring portion and power supply, or the resistance of the contact segment of electroconductive polymer film and wiring portion, or the internal drag of electroconductive polymer film, or electric charge moving resistance, or the impedance of the ionic diffusion in the electric conductivity polymeric membrane, or the influence of solution resistance etc., have at first and second barrier film 103,104 current potential and the quantity of electric charge and first and second barrier film 103 accumulated in the structure of fluid delivery device, produce the situation of phase difference between 104 the span.

Need to prove that in this first mode of execution, electrolyte liquor chamber 109 is full of electrolytic solution, electrolytic solution is incompressible fluid usually, so the volume of electrolyte liquor chamber 109 roughly keeps constant when pump moves.For this reason, shrink, protrude heaving under the situation about reducing of shape at a

side barrier film

103 or 104, in order to keep the volume constant of electrolyte liquor chamber 109, the opposing party's

barrier film

104 or 103 is stressed so that protrude the increase of heaving of shape.That is, two first and second barrier films 103,104 carry out the exchange of energy each other with the form of what is called work by electrolytic solution.

Then, the formation to elasticity membranous part 130, spring portion 131 describes.

Elasticity membranous part 130 is fixed with the form of the circular through hole 102h that the sidewall 102s that is blocked in frame 102 forms, is constituted circular membranaceous by rubber or synthetic resin rubber-like materials (elastic material) such as (plastics).As the elastic material that constitutes elasticity membranous part 130, for example consider silicone rubber etc.

Spring portion 131 for example becomes the shape that rubber-like metal or synthetic resin material webs curl are obtained, and has as helical spring function.In addition, the spiral-shaped axle of spring portion 131 is configured according to the mode of mounting on the straight line parallel with straight line 100A-100B shown in Figure 1.Spring portion 131 is under the state that shrinks from steady state, and two ends are to fix with elasticity membranous part 130 with the form that the sidewall 102s of elasticity membranous part 130 opposed frames 102 joins.Elasticity membranous part 130 is subjected to power outside frame 102 from spring portion 131, is deformed into the shape of protruding laterally.That is, in Fig. 3 etc., elasticity membranous part 130 is subjected to the right power from spring portion 131, is deformed into the shape of protruding to the right.The shape of elasticity membranous part 130 Fig. 1 wait shown in the shape of a part of approximate sphere, but under situations such as the thickness of elasticity membranous part 130 is little, the situation of other shapes such as shape that become approximate circular cone is arranged also.

Under the original state of fluid delivery device, the pressure of the electrolytic solution that is full of according to the inside of electrolyte liquor chamber 109 is that the mode of following scope constitutes fluid delivery device.That is, suppose the pressure that when pump moves, imposes on first pump chamber 107 and second pump chamber 108, constitute fluid delivery device less than the mode of this pressure according to the pressure of the electrolytic solution that makes original state.Thus, first pump chamber 107 and second pump chamber 108 are being applied under the situation of assumed stress, first and second barrier film 103 and 104 is retained as shown in Figure 3 to be regarded as on the direction of electrolyte liquor chamber 109 as protruding the state of shape.Under original state, pressure as the electrolytic solution that is used to make electrolyte liquor chamber 109 inside to be full of is the method for aforementioned range, for example consider method as described below, promptly, when being full of electrolytic solution when the each several part of assembling fluid delivery device and in inside, have little through hole 102g at the sidewall 102s of frame 102, utensils such as use injector are extracted a part of electrolytic solution out from this little through hole 102g, subsequently, by seal aforementioned little through hole 102g with sealing component 102f such as rubber bolt, the pressure that makes electrolytic solution is the method for the pressure of regulation (that is first pump chamber 107 when, the pressure of the electrolytic solution of original state being moved less than pump and the pressure of second pump chamber 108).In addition, as additive method, also consider method as described below, promptly, when being full of electrolytic solution when the each several part of assembling fluid delivery device and in inside, part between frame 102 and elasticity membranous part 130 leaves the gap, under this state, push elasticity membranous part 130, extract the part of electrolytic solution out, seal clearance part subsequently, remove the power of pressing elasticity membranous part 130, will return to the power of original form by elasticity membranous part 130 and spring portion 131 by their elastic force, and reduce the pressure of electrolytic solution, the pressure that makes electrolytic solution for the pressure of regulation (that is, the pressure of electrolytic solution that makes original state when imposing on the pump action first pump chamber 107 and the pressure of second pump chamber 108) method.Need to prove, drive the air hole of inner air in the time of also can being provided in injecting the electrolyte into electrolyte liquor chamber 109 out of, injecting sealing air hole, end back.

In the fluid delivery device that has used such barrier film 103,104, when becoming the lax state of barrier film 103,104, the power after the electroconductive polymer film is flexible can be not efficiently to the fluid transmission of pump chamber, power generation cancellation.So it is very important keeping the lax but not nervous state of barrier film 103,104 when the action of pump.In the fluid delivery device that aforementioned first mode of execution of the present invention relates to, when the pressure that under original state, makes electrolytic solution during less than the pressure of the fluid of the inside of first and second pump chamber 107,108, by the elasticity membranous part 130 that illustrates later and the effect of spring portion 131, when the action of pump, also can keep the pressure of the pressure of electrolytic solution less than the fluid of the inside of first and second pump chamber 107,108.Thus, when the action of pump, in first and second barrier film 103,104, apply power, can keep the lax but not nervous state of first and second barrier film 103,104 by this power from first and second pump chamber 107,108 directions to electrolyte liquor chamber 109.Thus, the flexible power of the electrolysis of electroconductive polymer film is by efficiently to the fluid transmission of the inside of first and second pump chamber 107,108, so can keep the high efficiency of the ejection and the suction of fluid.

Then, the action to elasticity membranous part 130 and spring portion 131 describes.As following detailed description, elasticity membranous part 130 and spring portion 131 have the effect of the tension force of first and second barrier film 103 of suitable maintenance and 104.Thus, can improve the efficiency of movement of pump.

Such as previously described, in the pump of conventional art, thus, there is the problem points of the efficiency of movement reduction of pump in the tension force of barrier film because bigger variation takes place two following mechanism.In the pump of conventional art, first mechanism that the tension force of barrier film changes is, due to the periodicity electrolysis of electroconductive polymer film is stretched when being moved by pump.In the pump of conventional art, second mechanism that the tension force of barrier film changes is, due to the flexible reason in addition of the periodicity electrolysis of electroconductive polymer film.In first mode of execution of the present invention, the periodicity electrolysis of the electroconductive polymer film that carries out when pump moves is flexible to be made under the situation that the tension force of first and second barrier film 103,104 changes, or under the situation that the tension force of first and second barrier film 103,104 is changed, can suitably keep the tension force of barrier film 103,104.

At first, to when pump moves, when the electrolysis of electroconductive polymer film periodicity is flexible, suitably keeping the effect of the tension force of first and

second barrier films

103 and 104 to describe by elasticity membranous part 130 and spring portion 131.

Now, pay close attention to the inner space of frame 102.Here, the inner space of frame 102 is meant the space cylindraceous that forms in the inside of frame 102.As shown in Figure 7, with regard to the inner space of frame 102, will be defined as part 190 in the electrolyte liquor chamber framework except the part the part of the part of first pump chamber 107, second pump chamber 108.That is, part 190 is by the space segment of first and

second barrier film

103 and 104 clampings in the inner space of frame 102 in the electrolyte liquor chamber framework.In addition, will be arranged in the part of through hole 102h of sidewall 102s of frame 102 and the space segment of representing with reference marks 191 at Fig. 7, be defined as open space part 191.In addition, will be positioned at the outside of frame 102 of part of through hole 102h and the space segment that surrounds by elasticity membranous part 130, be defined as elastic membrane inner space part 192.At this moment, the volume of electrolyte liquor chamber 109 by the volume of the volume of the volume of part 190 in the electrolyte liquor chamber framework, open space part 191 and elastic membrane inner space part 192 and define.

As described above, if in the action of pump, become the lax state of first and second barrier film 103,104, even if the electroconductive polymer film of first and second barrier film 103,104 is flexible, power also can cancellation and can be not efficiently to the fluid of pump chamber 107,108 liquid transfer power for example, so the efficient of the suction of fluid and ejection significantly reduces.That is,, need in action, remain the lax but not nervous state of first and second barrier film 103,104 in order to improve the efficiency of movement of pump.

When remaining the lax but nervous state of first and second barrier film 103,104 in the action at pump, the same with the explanation of using Figure 25 C and Figure 25 D to carry out, even if first mode of execution, total value about the volume of the volume of first pump chamber 107 and second pump chamber 108 becomes " (area of first barrier film 103)=S to be shown ₀The straight line of relation " be the symmetrical shape of symmetry axis, at the area=S of first barrier film 103 ₀In, get maximum value or minimum value.Their value is made as S when wherein, the area of the area of first barrier film 103 and second barrier film 104 being equated ₀By these plotted curves as can be known, as long as the area of first barrier film 103 changes, then the total value of the volume of the volume of first pump chamber 107 and second pump chamber 108 changes.Now, be made as W at volume with the inside of frame 102 _tSituation under, the volume of part 190 becomes from W in the electrolyte liquor chamber framework _tDeduct the value that the total volume of first pump chamber and second pump chamber obtains.Thus, corresponding to the total volume variation of first pump chamber 107 and second pump chamber 108, the volume of part 190 also changes in the electrolyte liquor chamber framework.Corresponding, the shape of elasticity membranous part 130 changes according to the mode of the volume constant that keeps electrolyte liquor chamber 109.Now, under the situation that the volume of part 190 increases in the electrolyte liquor chamber framework, the pressure of corresponding electrolytic solution reduces, so the balance between the pressure of the outside atmosphere of the pressure of the elastic force of the elastic force of the elasticity membranous part 130 in the elasticity membranous part 130 and spring portion 131 and electrolytic solution and frame 102 changes.Its result, the heaving of protrusion shape of elasticity membranous part 130 reduces, and the volume of elastic membrane inner space part 192 reduces.Its result, the volume of electrolyte liquor chamber 109 keeps constant.In addition, on the contrary, under the situation that the volume of part 190 reduces in the electrolyte liquor chamber framework, the pressure of corresponding electrolytic solution increases, so the balance between the pressure of the pressure of the elastic force of the elastic force of the elasticity membranous part 130 in the elasticity membranous part 130 and spring portion 131 and electrolytic solution and outside atmosphere changes.Its result, the protrusion shape of elasticity membranous part 130 heave increase, the volume of elastic membrane inner space part 192 increases.Its result, the volume of electrolyte liquor chamber 109 keeps constant.As above-mentioned result, the volume of the electrolyte liquor chamber 109 that the inside of electrolyte liquor chamber 109 is full of also is constant, and the pressure of electrolytic solution also keeps constant.

In the fluid delivery device that aforementioned first mode of execution of the present invention relates to, if the pressure of electrolytic solution is set as the suitable value less than the pressure of the fluid of the inside of first and second pump chamber 107,108 under original state, action that can be by elasticity membranous part 130 and spring portion 131 remains on the pressure of electrolytic solution in certain constant scope.Here, when aforementioned " under the original state pressure of electrolytic solution being set as suitable value " less than the pressure of the fluid of the inside of first and second pump chamber 107,108, the pressure of the fluid under original state is under the situation of 0.101MPa (1atm), and the pressure of the electrolytic solution under the original state (initial pressure of electrolytic solution) preferably (is set in the scope of 0.9atm～0.999atm) at about 0.091MPa～0.101MPa.Wherein (set in the scope of 0.99atm～0.999atm) particularly preferably in about 0.100MPa～0.101MPa.This is because under the situation of initial pressure less than aforementioned range of electrolytic solution, the pressure difference that so-called fluid and electrolytic solution can take place is excessive and problem that start barrier film is hindered.In addition, also because under the situation of initial pressure greater than aforementioned range of electrolytic solution, might take place in the action of pump that so-called barrier film relaxes and problem that the efficient of pump action reduces.In addition, so-called aforementioned " pressure of electrolytic solution also remains in certain constant scope " is meant that suitable pressure with the electrolytic solution in the action of pump remains on for example about 0.051MPa～0.101MPa (in the scope of 0.5atm～0.999atm).This is because under the situation of the pressure of the electrolytic solution in the action of pump less than aforementioned range, the pressure difference that so-called fluid and electrolytic solution can take place is excessive and problem that start barrier film is hindered.In addition, also because under the situation of pressure greater than aforementioned range of electrolytic solution, the pressure difference that so-called fluid and electrolytic solution might take place becomes too small and barrier film relaxes and problem that the efficient of pump action reduces.As previously mentioned, by the action of elasticity membranous part 130 and spring portion 131, the pressure of electrolytic solution also remains in certain constant scope, so the pressure of electrolytic solution can be remained the pressure less than the fluid of the inside of first and second pump chamber 107,108 all the time.Its result, direction from first and second pump chamber 107,108 along electrolyte liquor chamber 109 applies the power of certain constant scope to first and second barrier film 103,104, first and second barrier film 103,104 cannot not be held in laxly by this power but nervous state, and the tension force of first and second barrier film 103,104 is held suitable value.Here, the desired value of the tension force of barrier film 103,104 for example is the scope of 0.101MPa～10.1MPa (about 1atm～about 100atm).Under the situation of tension force greater than aforementioned range of barrier film 103,104, can produce the problem that the start of so-called barrier film 103,104 is hindered.In addition, under the situation of tension force less than aforementioned range of barrier film 103,104, might produce that so-called barrier film 103,104 relaxes and problem that the efficient of pump action reduces.First and second barrier film 103 like this, 104 tension force is retained suitable value, so in the action of pump, all the time be that first and second barrier film 103 and 104 becomes and looks up in the side of electrolyte liquor chamber 109 to protrude the state of warpage, maintenance has applied the state of the stress (tractive force) of draw direction to first and second barrier film 103 and 104 with the size in the constant scope, by the electrolytic solution in the electrolyte liquor chamber 109 and first and second pump chamber 107, fluid in 108 maintains the pressure that acts on first and second barrier film 103 and 104 in the scope (constant scope) of regulation.Here, act on the scope of the pressure of first and second barrier film 103 and 104 as the difference of the pressure of pressure in the action of pump, by the electrolytic solution in the electrolyte liquor chamber 109 and first and second pump chamber 107,108 inner fluids, for example preferred 0.0101MPa～0.000101MPa (scope of 0.1atm～0.001atm).This be because, impose under the situation of pressure greater than aforementioned range of barrier film 103 and 104 in the difference of the pressure of pressure by electrolytic solution and fluid, can produce the problem that the start of so-called barrier film 103 and 104 is hindered.In addition, also because impose under the situation of pressure less than aforementioned range of barrier film 103 and 104, might produce that so-called barrier film 103 and 104 relaxes and problem that the efficient of pump action reduces in the difference of the pressure of pressure by electrolytic solution and fluid.

Because so when pump moves, remain the state in the scope (constant scope) that the pressure that acts on

barrier film

103 and 104 is maintained at regulation, so the work when first and second barrier film 103,104 electroconductive polymer film separately stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.That is, can increase working efficiency in the action of pump.Here, the working efficiency of pump is defined by in imposing on the electric energy of pump pump for the suction of fluid and ejection and the ratio of the work of carrying out.

Then carry out the following effects explanation, promptly, former beyond flexible thereby impose under the situation that the tension force of first and

second barrier film

103 and 104 changes with the periodicity electrolysis of the electroconductive polymer film of first and

second barrier film

103 and 104, the effects that suitably keep the tension force of first and

second barrier films

103 and 104 by elasticity membranous part 130 and spring portion 131.

Usually, with regard to the diaphragm type pump that has used the electroconductive polymer film, when the electroconductive polymer film periodically being applied voltage move,

(i) accumulate deformation on the constant direction, or

(ii) by distortion such as electroconductive polymer film Electolyte-absorptive expand, or

(iii) occurring with the creep in the electroconductive polymer film is the non-reversible or reversible change in shape of representative, or

The distortion of fixing part of electroconductive polymer film or dislocation etc. (iv) take place.For this reason, the area of barrier film or shape or configuration can change.At this moment, in the pump shown in the example in the past, as previously mentioned, when pump is made, the electroconductive polymer film is set, nonetheless, the situation of required tension force (stress of draw direction) can takes place also not apply to barrier film with the state that applies tension force.

But, in this first mode of execution, so barrier film not being applied the tension variation of required tension force by the distortion absorption of elasticity membranous part 130 and spring portion 131 is so-called, can keep in the constant scope so impose on the tension force of barrier film.

About this point, below specify.Fig. 8 and Fig. 9 are illustrated in the state in the scope that the pressure that imposes on first and second barrier film 103,104 when the tension force that in this first mode of execution first and second barrier film 103,104 is applied changes is maintained at regulation.Pressure when Fig. 8 illustrates first and second barrier film 103 and 104 and stretches with aforesaid reason generation tension variation, that impose on first and second barrier film 103,104 is maintained at the situation in the scope of regulation.In Fig. 8, the position of first and second barrier film 103,104 under the state of dotted line presentation graphs 3.In this Fig. 8, first and second barrier film 103 and 104 is compared on direction of extension with Fig. 3 and to be out of shape, and thus, temporarily the volume of electrolyte liquor chamber 109 reduces, the pressure of electrolytic solution increases.So, the elastic force of elastic force in the elasticity membranous part 130, elasticity membranous part 130 and spring portion 131 and the pressure of electrolytic solution and the pressure disequilibrium of outside atmosphere.Its result, by the elasticity of elasticity membranous part 130 and spring portion 131, according to spring portion 131 stretch, the mode of heaving increase to frame 102 outside of the protrusion shape of elasticity membranous part 130 deforms.Accompany therewith, the part of the electrolytic solution in the electrolyte liquor chamber 109 of the inside of frame 102 is sucked out (promptly along the direction of elasticity membranous part 130, be sucked in the elastic membrane inner space part 192 by open space part 191), the volume of electrolyte liquor chamber 109 roughly returns to the value of original state.So the pressure of electrolytic solution roughly returns to the value of original state.

In addition, on the contrary, pressure after Fig. 9 illustrates first and

second barrier film

103 and 104 reason beyond flexible is shunk with the periodicity electrolysis, that impose on first and

second barrier film

103 and 104 is maintained at the situation in the scope of regulation.In Fig. 9, first and second barrier film 103 under the state of dotted

line presentation graphs

3 and 104 position.At this moment, by the elasticity of elasticity membranous part 130 and spring portion 131, according to spring portion 131 shrink, the mode that reduces of heaving of the protrusion shape of elasticity membranous part 130 deforms.So the pressure of electrolytic solution roughly remains the value of original state.

From above effect, in the fluid delivery device that aforementioned first mode of execution of the present invention relates to, under original state, when the pressure of electrolytic solution is set as the little suitable value of pressure than the fluid of pump chamber inside, even if because flexible former thereby first and second barrier film 103,104 in addition of the periodicity electrolysis of first and second barrier film 103,104 has carried out under the flexible situation, by the action of elasticity membranous part 130 and spring portion 131, the pressure of electrolytic solution also can keep in certain constant scope.Its result can remain the pressure of electrolytic solution the little suitable value of pressure than the fluid of the inside of first and second pump chamber 107,108 all the time.So, to the direction of electrolyte liquor chamber 109 first and second barrier film 103,104 is applied the power of certain constant scope from first and second pump chamber 107,108, so by this power, first and second barrier film 103,104 cannot not be retained laxly but nervous state, and the tension force of first and second barrier film 103,104 is retained as suitable value.So, in the action of pump, first and second barrier film 103 and 104 becomes all the time in the direction of electrolyte liquor chamber 109 sees the state that protrudes shape that is deformed into, remain the state that first and second barrier film 103 and 104 has been applied the stress (tractive force) of draw direction with the size in the constant scope, by the fluid in the electrolytic solution in the electrolyte liquor chamber 109 and first and second pump chamber 107,108, the pressure that acts on first and second barrier film 103 and 104 is maintained in the scope of regulation.This state is held when pump moves all the time, so the work when first and second barrier film 103,104 stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.That is, can increase working efficiency in the action of pump.Here, the working efficiency of so-called pump is defined as the ratio that pump in the electric energy that imposes on pump is used for the work of the suction of fluid and ejection.

So, in the pump that aforementioned first mode of execution of the present invention relates to, in pump when action, remain on the stress (tractive force) of the draw direction of first and

second barrier film

103 and 104 in the suitable scope all the time, by the fluid in the electrolytic solution in the electrolyte liquor chamber 109 and first and second pump chamber 107,108, the pressure that acts on first and

second barrier film

103 and 104 is kept within the limits prescribed, so the work when first and

second barrier film

103 and 104 stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.

Need to prove, in aforesaid explanation, the formation that the convection cell conveyor system has valve describes, under the situation of the ejection of the fluid that carries out constant basis continuously and suction, also can each one of the opening portion that does not have valve be set respectively, to suck repeatedly respectively and the form that sprays is used from their opening portion respectively at each first and second pump chamber 107,108.At this moment, in each pump chamber, 1 opening portion has the effect of ejiction opening and suction port concurrently.

As each barrier film 103,104, show the example that constitutes by polymer actuated modulator material, also can be the stepped construction overlapping with other films.For example, the influence that descends for the voltage that reduces polymer actuated modulator material also can the material that electric conductivity is big be formed at all parts or the part on the surface of polymer actuated modulator material.In these cases, in order not hinder the action of polymer actuator material, preferred other materials is formed by the little material of rigidity, or is processed into the shape of easy deformation.

In addition, also can form the part of each barrier film 103,104 by the material beyond the polymer actuated modulator material.Particularly under the situation of a part that has formed each barrier film 103,104 by elastic membrane, make the tension force that imposes on polymer actuated modulator material more even, have the effects such as action of carrying out pump smoothly.

By aforesaid formation, can constitute flow is that about 10～100ml/ minute scope, the pressure maximum of ejecting fluid are the fluid delivery device of the scope of about 1～10kPa.But, be not limited to aforementioned embodiments, usually can be corresponding to the flow and the pressure of necessity, the shape or the size of design fluid delivery device.

In the structure shown in routine in the past Figure 22 A, two barrier films are fixed to each other in 1 point of central authorities, so fold respectively takes place two barrier films easily.That is, under the rigidity or shape situation devious of the film of barrier film, concentration of tension forces is connected and fixed a little and many line segments and the part on every side thereof of periphery in barrier film.So, barrier film generation fold, the flexible work of the electrolysis of barrier film efficiently is not used for the suction and the ejection of pump.

Relative therewith, in this first mode of execution, it is the structure that the middle body of first and second barrier film 103,104 does not have immovable point, by the pressure difference between first and second pump chamber 107,108 and the electrolyte liquor chamber 109, it is lax and first and second barrier film 103,104 is the state that protrudes shape with suitable tension force tensioning to be held in first and second barrier film 103,104.So in first and second barrier film 103,104 of this first mode of execution, tension force can not concentrate on many line segments and the part on every side thereof of being connected and fixed a little of barrier film and periphery as example in the past.Its result prevents that first and second barrier film 103,104 from fold taking place, and the flexible work of the electrolysis of first and second barrier film 103,104 efficiently is used for the suction and the ejection of pump.

In addition, as previously mentioned, with in the past the example Figure 22 B shown in structure compare, the fluid delivery device of this first mode of execution remains suitable value with the tension force of first and second barrier film 103,104, so can improve the efficient of the ejection and the suction of fluid.

To sum up, in the fluid delivery device of this first mode of execution, elasticity membranous part 130 and spring portion 131 have the pressure that will impose on first and second barrier film 103,104 and maintain function (pressure is kept function) in the suitable scope.In this manual, having the part that the pressure that imposes on first and second barrier film 103,104 is kept function within the limits prescribed is called pressure and keeps portion.That is, in this first mode of execution, elasticity membranous part 130 and spring portion 131 constitute pressure and keep portion.First and second barrier film 103,104 stretch, first and second barrier film 103, the stress of 104 draw direction (tension force) reduces and first and second barrier film 103,104 when relaxing (relaxing) (in other words, first and second pump chamber 107, when the pressure of 108 inner fluids is reduced to outside the predetermined range), deform on the direction of elasticity membranous part 130 and spring portion 131 electrolytic solution in sucking-off frame 102, first and second barrier film 103,104 stress (tension force) is maintained at (in other words, first and second pump chamber 107 in the constant scope, the pressure of 108 inner fluids is maintained at the scope of regulation).In addition, first and second barrier film 103,104 shrink, first and second barrier film 103, when the stress of 104 draw direction (tension force) increases (in other words, first and second pump chamber 107, when the pressure of 108 inner fluids increases to outside the predetermined range,), elasticity membranous part 130 and spring portion 131 are out of shape on the direction of the electrolytic solution in the electrolyte liquor chamber 109 of pushing frame 102 outside frame 102, so first and second barrier film 103,104 stress (tension force) is maintained at constant scope (in other words, first and second pump chamber 107, the pressure of 108 inner fluids is maintained at predetermined range).Promptly, variation corresponding to the stress (tension force) due to the distortion of first and second barrier film 103,104, elasticity membranous part 130 as the part of the wall of electrolyte liquor chamber 109 deforms, the stress (tension force) of first and second barrier film 103,104 is maintained at constant scope (in other words, the pressure of first and second pump chamber 107,108 inner fluids is maintained at predetermined range) thus.

And then, the fluid delivery device of this first mode of execution does not have the structure of immovable point for the middle body of first and second barrier film 103,104, by the pressure difference between first and second pump chamber 107,108 and the electrolyte liquor chamber 109, keep first and second barrier film 103,104 can not relax and serve as the state that protrudes shape with suitable tension force tensioning, the stress (tension force) of first and second barrier film 103,104 is retained as roughly value (in other words, the pressure of first and second pump chamber 107,108 inner fluids is maintained at predetermined range) uniformly on whole.This state is held when pump moves all the time, so the work when the electroconductive polymer film stretches and shrinks efficiently is used for the ejection and the suction of the fluid of pump chamber 107,108.

Based on above-mentioned, the fluid delivery device of this first mode of execution, will be from the electric energy that power supply 110c applies the ejection of the fluid of pump chamber 107,108 and the employed ratio of work of suction be called working efficiency, keep function by aforesaid pressure, the working efficiency of pump is compared raising with pump in the past.

Having the part that the pressure that will impose on first and second barrier film 103,104 keeps function within the limits prescribed is that pressure is kept portion, as previously mentioned, the volume of the electrolyte liquor chamber 109 of electrolyte liquor chamber inside is remained suitable value, the pressure of electrolytic solution is maintained suitable value.Thus, the stress (tension force) of first and second barrier film 103,104 can remain suitable value (in other words, the pressure of first and second pump chamber 107,108 inner fluids can be kept within the limits prescribed).Particularly shown in this first mode of execution, form at least a portion of the wall of electrolyte liquor chamber 109 by elastomer (for example elasticity membranous part) 130, so long as elastomer 130 carries out deformed configurations corresponding to the electrolyte liquor chamber pressure inside, just can adjust the internal pressure of electrolyte liquor chamber 109 and the stress (tension force) of first and second barrier film 103,104 (in other words, the pressure of the internal pressure of electrolyte liquor chamber 109 and first and second pump chamber 107,108 inner fluids can be kept respectively within the limits prescribed) automatically.

In addition, in the structure that two first and second barrier film 103,104 mutual antiphases shown in this first mode of execution stretch and shrink, the work that two first and second barrier films 103,104 carry out is used to the ejection and the suction of fluid, so the workload that can increase ejection and suck.

Then, Figure 10 illustrates first variation of first mode of execution of the present invention.In Fig. 3 of aforementioned first mode of execution, peristome portion in the outside of the through hole 102h of the sidewall 102s of frame 102 is fixed with circular elasticity membranous part 130, but in this first variation, circular elasticity membranous part 130A is fixed on the peristome portion of inboard of through hole 102h of the sidewall 102s of frame 102, and, (in other words elasticity membranous part 130A becomes the protrusion shape in electrolyte liquor chamber 109, outside with respect to frame 102 becomes recessed shape), elasticity membranous part 130A works as the pressure portion of keeping.In this first variation, the internal pressure of electrolyte liquor chamber 109 is retained the pressure of the fluid of the external pressure that is lower than frame 102 and first and second pump chamber 107,108.Change corresponding to electrolyte liquor chamber 109 pressure inside, the heaving because of elasticity of protrusion shape of elasticity membranous part 130A changes, so the volume and the pressure of electrolyte liquor chamber 109 can be remained on suitable scope, as a result of, the stress (tension force) of first and second barrier film 103,104 can be held in suitable value (in other words, the pressure of first and second pump chamber 107,108 inner fluids can be kept within the limits prescribed).For example, under the situation that first and second barrier film 103,104 has stretched, the volume of electrolyte liquor chamber 109 reduces, and the pressure of electrolytic solution increases, so the heaving of protrusion shape of elasticity membranous part 130A reduces.Thus, the volume of electrolyte liquor chamber 109 and pressure are maintained in the scope of constant.As a result of, the stress of first and second barrier film 103,104 is maintained in the suitable scope (in other words, the pressure of first and second pump chamber 107,108 inner fluids can be kept within the limits prescribed).

In Fig. 1～Figure 10, omit for simple statement, but the mode that can for example not buckle according to spring portion 131 is provided with suitable mechanism components.Promptly, in Fig. 1～Figure 10,, omit the diagram of such mechanism components for the essence part to invention describes, but in other embodiments, can carrying out smoothly according to each several part, the mode of machinery action be provided with for example suitable mechanism components such as guiding element.Below, about having the example of guiding element, describe as second variation of first mode of execution.

Figure 11 A, Figure 11 B, Figure 12 illustrate second variation of first mode of execution.In second variation of this first mode of execution, between spring portion 131 and elasticity membranous part 130, be inserted with the linking department 133 of rod member.Linking department 133 links spring portion 131 and elasticity membranous part 130, and between carries out the transmission of power.In addition, around spring portion 131, be formed with guide portion 132 cylindraceous, have the helical spring effect of buckling that prevents to constitute spring portion 131.The front end 133a of linking department 133 constitutes piston-like, and front end 133a is fixed by an end of spring portion 131, and, can in guide portion 132, move smoothly.Space by the front end 133a of guide portion 132 and linking department 133 surrounds can be sealed, also can be not airtight and electrolytic solution is entered wherein.

Need to prove that Figure 11 A illustrates the state after spring portion 131 stretches, Figure 11 B illustrates the state after spring portion 131 shrinks.

In addition, in this second variation, wait under the airtight situation that becomes to slide of sealing component 133b by the O ring in the space that the front end 133a by guide portion 132 and linking department 133 surrounds, also can play the effect of spring portion 131 by the elasticity of this confined space gas inside 131G.Airtight gas 131G in guide portion 132 cylindraceous is as other example performance functions of spring section.To use the example of the situation of this gas 131G to be shown in Figure 12.As spring portion 131, utilize the elasticity of gas 131G to replace helical spring here.In addition, when between guide portion 132 and linking department 133, having under the situation of friction portion,, has the effect that reduces this friction by using the high ionic liquid of lubricity as electrolytic solution.

Figure 19 illustrates the 3rd variation of first mode of execution, that is, use other springs to replace the example of helical spring as spring portion 131.In the 3rd variation, replace the helical spring of spring portion 131, at the fixing leaf spring 134 of one end (for example lower end) of for example downside of the inner peripheral surface of the through hole 102h of the sidewall 102s of frame 102.At the other end (for example upper end) the fixed contact 134a of leaf spring 134, by the elastic force of leaf spring 134, contacting part 134a is contact resilient membranous part 130 often.So, by using leaf spring 134, can constitute small-sized pressure and keep portion.

In addition, in order to prevent between first and

second barrier film

103 and 104 electrical short to take place, spring portion 131 or guide portion 132 and linking department 133 and leaf spring 134 preferably are made of the insulated plastic material respectively.In addition, these spring portions 131, guide portion 132 and linking department 133 and leaf spring 134 use the material that employed electrolytic solution is had patience respectively.

(second mode of execution)

The sectional view of the fluid delivery device of Figure 13 is the use that relates to of second mode of execution of the present invention electroconductive polymer.

The fluid delivery device of Figure 13 possesses: frame 102, first barrier film 103, second barrier film 104, first pump chamber 107, second pump chamber 108, electrolyte liquor chamber 109, the 110a of wiring portion and 110b, first and

second suction port

111a and 111b, first and

second ejiction opening

113a and 113b, first and

second suction valve

121 and 123, first and

second sprays valve

122 and 124, spring portion 131 and elasticity membranous part 130.Spring portion 131 and elasticity membranous part 130 work as the pressure portion of keeping as described below like that.In addition, about first barrier film 103 and second barrier film 104, below abbreviate barrier film for simplicity as.

In this second mode of execution, be formed with the first suction port 111a and two opening portions of the first ejiction opening 113a at first pump chamber 107.In addition, be formed with the second suction port 111b and two opening portions of the second ejiction opening 113b at second pump chamber 108.These opening

portions

111a, 113a, 111b, 113b by forming at first and second pump chamber 107,108 carry out the suction and the ejection of fluid respectively, carry out the action of pump thus.The formation of each several part and effect and first mode of execution are roughly the same.

But, in the first embodiment, first and

second barrier film

103 and 104 is remaining recessed shape respectively from electrolyte liquor chamber 109 when first and second pump chamber 107,108 is seen, in this second mode of execution, the state that first and

second barrier film

103 and 104 is heaved at the protrusion direction that remaining along respectively when first and second pump chamber 107,108 is seen from electrolyte liquor chamber 109.

In addition, in the first embodiment, spring portion 131 is fixing under the state that shrinks from steady state, but at this second mode of execution, spring portion 131 is fixing under the state that stretches from steady state.

In addition, in the first embodiment, for example as shown in Figure 3, elasticity membranous part 130 is subjected to power to the right and is deformed into the protrusion shape to the right from spring portion 131, in this second mode of execution, for example as shown in figure 13, elasticity membranous part 130 is subjected to power left and is deformed into the protrusion shape left from spring portion 131.

In addition, in the first embodiment, the mode that imposes on the pressure of first pump chamber 107 and second pump chamber 108 when moving less than pump according to the pressure that makes electrolytic solution has constituted fluid delivery device, in this second mode of execution, the mode that imposes on the pressure of first pump chamber 107 and second pump chamber 108 when moving greater than pump according to the pressure that makes electrolytic solution has constituted fluid delivery device.

Under the original state of the fluid delivery device of second mode of execution, impose on the method for the pressure of first pump chamber 107 and second pump chamber 108 when moving greater than pump as the pressure of the electrolytic solution that is used to make electrolyte liquor chamber 109 inside to be full of, for example consider following method, when promptly being full of electrolytic solution at the each several part of assembling fluid delivery device and in inside, have little through hole 102g at the sidewall 102s of frame 102, utensils such as use injector inject electrolytic solution from this through hole 102g in electrolyte liquor chamber 109, subsequently, with sealing component 102f sealing through hole 102g, make the pressure of the pressure of electrolytic solution thus for regulation.In addition, as additive method, also consider following method, promptly after the each several part of assembling fluid delivery device and before being full of electrolytic solution, on the direction of tractive laterally, apply power to elasticity membranous part 130, under this state, inside at electrolyte liquor chamber 109 is full of electrolytic solution, subsequently, hermetic electrolyte liquid chamber 109, remove the power of tractive elasticity membranous part 130 laterally, to become the power of original form by their elastic return by elasticity membranous part 130 and spring portion 131, the pressure of electrolytic solution is increased, with the pressure of pressure for stipulating of electrolytic solution, that is impose on the pressure of first pump chamber 107 and second pump chamber 108 when, the pressure of the electrolytic solution that electrolyte liquor chamber 109 inside are full of being moved greater than pump.Need to prove, in the time of in injecting the electrolyte into electrolyte liquor chamber 109, be provided for driving out of the air hole of inner air, injecting sealing air hole, end back.

The same with first mode of execution, with for example ± when the sine wave of 1.5V or rectangular wave change the voltage of power supply 110c, the electroconductive polymer film that constitutes first and

second barrier film

103 and 104 respectively carries out electrolysis and stretches, so suck fluid respectively from first and

second suction port

111a and 111b, spray respectively from first and

second ejiction opening

113a and 113b, carry out the action of pump.

Need to prove that in this second mode of execution, electrolyte liquor chamber 109 is full of the electrolytic solution that is full of of incompressible fluid, the volume of electrolyte liquor chamber 109 roughly keeps constant during the pump action.For this reason, barrier film 103 or 104 a side shrinks, from heaving under the situation about reducing of the protrusion shape of electrolyte liquor chamber 109 side's when first and second pump chamber 107,108 is seen

barrier film

103 or 104, owing to keep the volume constant of electrolyte liquor chamber 109, so when from electrolyte liquor chamber 109 when first and second pump chamber 107,108 is seen, the opposing party's

barrier film

104 or 103 is according to making the mode of heaving increase of protruding shape stressed.That is, two first and second barrier films 103,104 by electrolytic solution in the exchange of carrying out energy each other with the form of what is called work.

Then, the action to elasticity membranous part 130 and spring portion 131 describes.As the following detailed description, the same with first mode of execution, elasticity membranous part 130 and spring portion 131 have the effect that suitably keeps the tension force of first and

second barrier film

103 and 104 when first and

second barrier film

103 and 104 stretches.

At first, following effect is described, promptly when the pump start because of flexible first and second barrier film 103 of the electrolysis of electroconductive polymer film and 104 when flexible, the effects that suitably keep the tension force of first and

second barrier films

103 and 104 by elasticity membranous part 130 and spring portion 131.

Now, pay close attention to the inner space of frame 102.Here, the inner space of frame 102 is meant the space cylindraceous that forms in the inside of frame 102.Under the situation of consideration with regard to the inner space of frame 102 by the space segment of first and second barrier film 103 and 104 clampings, when pump moved, in this process, delicate variation took place in the volume of aforesaid space part.At this moment, the shape of elasticity membranous part 130 changes according to the mode of the volume constant that keeps electrolyte liquor chamber 109.Now, under situation about with regard to the inner space of frame 102, increasing by the volume of the space segment of first and second barrier film 103 and 104 clampings, the protrusion shape of elasticity membranous part 130 heave increase, the volume of electrolyte liquor chamber 109 is held constant.In addition, on the contrary, under situation about being reduced by the volume of the space segment of first and second barrier film 103 and 104 clampings with regard to the inner space of frame 102, the heaving of protrusion shape of elasticity membranous part 130 reduces, and the volume of electrolyte liquor chamber 109 is held constant.As above result, the volume that inside is full of the electrolyte liquor chamber 109 of electrolytic solution also is roughly constant, and the pressure of electrolytic solution also is roughly constant.So, in the action of pump, all the time first and second barrier film 103 and 104 becomes respectively to look up in the side of first pump chamber 107 and second pump chamber 108 and is deformed into the state that protrudes shape, is retained as the state that has applied the stress (tractive force) of draw direction with the size in the constant scope to first and second barrier film 103 and 104.This state is held when pump moves all the time, so the work when the electroconductive polymer film stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.But, electrolyte liquor chamber 109 becomes by first and second barrier film 130 and 104 and the wall of frame 102 and the space segment that elasticity membranous part 130 surrounds.

Need to prove that electrolytic solution roughly can be regarded as incompressible fluid, so when the volume of electrolyte liquor chamber 109 changed, bigger variation took place the pressure of electrolytic solution, the tension force of first and

second barrier film

103 and 104 can't be remained suitable value.In this second mode of execution, elasticity membranous part 130 and spring portion 131 deform by the elasticity that they had so that the volume of the inside of electrolyte liquor chamber 109 keeps constant.Thus, the volume of the electrolyte liquor chamber 109 that exists in the inside of electrolyte liquor chamber 109 is held constant, and the pressure of electrolytic solution also is maintained in certain constant scope.Its result, the tension force that can keep first and

second barrier film

103 and 104 is suitable value, the working efficiency in the action of increase pump.Here, the working efficiency of so-called pump is defined as imposing on the ratio of the work of the suction that is used for the pump fluid in the electric energy of pump and ejection.

Then, to because former beyond flexible of the periodicity electrolysis of electroconductive polymer film thereby impose under the situation that the tension force of first and

second barrier film

103 and 104 changes suitably keeps the effect of the tension force of first and

second barrier films

Such as already explained, usually in the diaphragm type pump that has used the electroconductive polymer film, deformation is accumulated on constant direction or is that the fixing part of the non-reversible or reversible change in shape of representative or electroconductive polymer film deforms or reason such as dislocation by taking place with the creep in distortion such as electroconductive polymer film Electolyte-absorptive expands or the electroconductive polymer film owing to applying periodic voltage to the electric conductivity polymeric membrane and move, and first and

second barrier film

103 and 104 area or shape or configuration can change.At this moment, in the pump shown in the example in the past, as previously mentioned,, also can produce the situation that does not apply required tension force (stress of draw direction) to barrier film even if when making fluid delivery device, be provided with under the situation of electroconductive polymer film with the state that applies tension force.

In this second mode of execution,, be maintained in the constant scope so impose on the tension force of electroconductive polymer film owing to absorb the variation of this tension force by the distortion of elasticity membranous part 130 and spring portion 131.

Figure 14 is illustrated in this second mode of execution the figure of example of the situation of keeping that the pressure of first and second barrier film 103,104 has taken place to impose on when changing when the tension force that imposes on first and second barrier film 103,104.Particularly, Figure 14 illustrate under the situation after first and second barrier film 103 and 104 is stretched by previous reasons, by first and second barrier film 103 and 104 and the change in shape of elasticity membranous part 130 and spring portion 131 due to the situation of keeping of the pressure that imposes on first and second barrier film 103,104.In this Figure 14, first and second barrier film 103 deforms comparing on the direction of extension with Figure 13 respectively with 104, thus, the volume of electrolyte liquor chamber 109 temporarily increases, the pressure of electrolytic solution temporarily reduces, so, shrink, deform from the outside elasticity membranous part 130 of frame 102 the mode of heaving increase with respect to the protrusion shape in the electrolyte liquor chamber 109 according to spring portion 131 by the elasticity of elasticity membranous part 130 and spring portion 131.Its result, the volume of electrolyte liquor chamber 109 roughly returns to the value of original state.So, the pressure of electrolytic solution roughly returns to the value of original state, and first and second barrier film 103 and 104 is retained as from electrolyte liquor chamber 109 and sees the state that protrudes shape, applied the stress (tractive force) of draw direction with the size in the OK range that is deformed into to the direction of first pump chamber 107 and second pump chamber 108.

In addition, on the contrary, under the situation after first and

second barrier film

103 and 104 shrinks because of previous reasons, by the elasticity of elasticity membranous part 130 and spring portion 131, stretch, deform from the outside elasticity membranous part 130 of frame 102 the mode that reduces of heaving with respect to the protrusion shape in the electrolyte liquor chamber 109 according to spring portion 131.So, the pressure of electrolytic solution roughly is retained as the value of original state, and first and

second barrier film

103 and 104 is retained as the state that looks up and be deformed into the protrusion shape, applied the stress (tractive force) of draw direction with the size in the OK range in the side of first pump chamber 107 and second pump chamber 108.

So, owing to all the time the stress (tractive force) of the draw direction of first and

second barrier film

103 and 104 is remained in the pump action in the suitable scope (in other words, the pressure of the internal pressure of electrolyte liquor chamber 109 and first and second pump chamber 107,108 inner fluids can be kept in the scope of regulation respectively), so the work when the electroconductive polymer film stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.

To sum up, the same with first mode of execution, in this second mode of execution, elasticity membranous part 130 and spring portion 131 have pressure with first and second barrier film 103,104 and maintain function (pressure is kept function) in the suitable scope.In this manual, having part that the pressure that will impose on first and second barrier film 103,104 maintains the function in the predetermined range is called as pressure and keeps portion.That is, in this second mode of execution, elasticity membranous part 130 and spring portion 131 constitute pressure and keep portion.For example stretch and the stress (tension force) of the draw direction of the opposing party's barrier film 104 or 103 when relaxing at a side barrier film 103 or 104, on the direction of first and second barrier film 103,104, extrude electrolytic solution owing on the direction that spring portion 131 shrinks, be out of shape, so the stress (tension force) of first and second barrier film 103,104 is maintained at constant scope (in other words, the pressure of first and second pump chamber 107,108 inner fluids is maintained at predetermined range).Promptly, variation corresponding to the stress (tension force) due to the distortion of first and second barrier film 103,104, elasticity membranous part 130 as the part of the wall of electrolyte liquor chamber 109 deforms, the stress (tension force) of first and second barrier film 103,104 is maintained at constant scope (in other words, the pressure of the internal pressure of electrolyte liquor chamber 109 and first and second pump chamber 107,108 inner fluids is maintained at predetermined range respectively) thus.In addition, it is the structure that the middle body of first and second barrier film 103,104 does not have immovable point, by the pressure difference between first and second pump chamber 107,108 and the electrolyte liquor chamber 109, it is lax and serve as the state that protrudes shape with suitable tension force tensioning to remain first and second barrier film 103,104, the stress (tension force) of first and second barrier film 103,104 remains roughly value (in other words, the pressure of first and second pump chamber 107,108 inner fluids can be kept) uniformly in predetermined range on whole.This state is held when pump moves all the time, so the work when first and second barrier film 103,104 of electroconductive polymer film stretches and shrinks efficiently is used for the ejection and the suction of the fluid of first and second pump chamber 107,108.That is, when the ratio of the work of the ejection of the fluid that will be used for first and second pump chamber 107,108 from the electric energy that power supply 110c applies and suction is called working efficiency, keep function by aforesaid pressure, the working efficiency of pump is compared raising with pump in the past.

(the 3rd mode of execution)

The sectional view of the fluid delivery device of Figure 15 is the use that relates to of the 3rd mode of execution of the present invention electroconductive polymer.

The 3rd mode of execution possesses: frame 102, first barrier film 103, pump chamber 107, electrolyte liquor chamber 109, the 110a of wiring portion and 110b, suction port 111a, ejiction opening 113a, suction valve 121, ejection valve 122, as spring portion 131, elasticity membranous part 130, the second elasticity membranous part 170 and the opposite electrode portion 180 of an example of spring section.The spring portion 131 and the second elasticity membranous part 170 work as the pressure portion of keeping shown in as the following description.

The second elasticity membranous part 170 is fixed on the peristome portion in the through hole 102i outside of the downside bottom surface that is formed at frame 102, airtight frame 102 inside.

The helical spring two ends that constitute spring portion 131 are connected with first barrier film 103 with the central part of the upper wall 102u of frame 102 respectively, and spring portion 131 is arranged to compare with steady state the state that contraction has taken place.Part or all of first barrier film 103 is made of the electroconductive polymer film, is full of electrolytic solution in the electrolyte liquor chamber 109.Between electroconductive polymer film that constitutes first barrier film 103 and opposite electrode portion 180, apply voltage from power supply 110c, the electroconductive polymer film that constitutes first barrier film 103 thus carries out electrolysis and stretches, thus, and in Figure 15, first barrier film 103 moves up and down, and carries out the suction and the ejection of fluid.Opposite electrode portion 180 is for example formed by platinum guaze etc., becomes the structure that electrolytic solution can be done to its two sidesway.

Need to prove that by forming platinum guaze the surface area of platinum is increased, the capacity of the electric double layer capacitor that forms at the interface of platinum and electrolytic solution increases.Its result, the potential difference between platinum and the electrolytic solution reduces, and it is flexible efficiently to carry out the electrolysis of barrier film with little supply voltage.

Under the state of Figure 15, first barrier film 103 stretches by electrolysis, and under the state of Figure 16, first barrier film 103 shrinks by electrolysis is flexible.Thus, the volume of pump chamber 107 increases and decreases, so carry out the suction and the ejection of fluid.Under the state of Figure 15, suck fluid from suction port 111a, under the state of Figure 16, from ejiction opening 113a ejecting fluid.Because the electrolytic solution that is full of in the electrolyte liquor chamber 107 roughly is looked at as incompressible fluid, so that its volume roughly keeps is constant.So along with moving up and down of first barrier film 103 among Figure 15, the second elasticity membranous part 170 also moves up and down, it is constant that the volume of electrolyte liquor chamber 109 roughly keeps.In Figure 15, from electrolyte liquor chamber 109 when the outside of frame 102 is seen, the protrusion shape of the second elasticity membranous part 170 heave increase, in Figure 16, when the outside of frame 102 was seen, the heaving of protrusion shape of the second elasticity membranous part 170 reduced from electrolyte liquor chamber 109.

Keep constituting of portion or action or effect about the pressure that constitutes by the second elasticity membranous part 170 and spring portion 131, roughly the same with the elasticity membranous part 130 and the spring portion 131 of second mode of execution.That is, corresponding to the variation of the volume of pump chamber 107, the volume of electrolyte liquor chamber 109 also changes.Corresponding, the shape of the second elasticity membranous part 170 roughly keeps constant mode to change according to the volume of electrolyte liquor chamber 109.Now, as shown in figure 17, under the situation that the volume of electrolyte liquor chamber 109 has increased, the pressure of corresponding electrolytic solution reduces, and the balance between the pressure of the pressure of the elastic force of the second elasticity membranous part 170 of the second elasticity membranous part 170 and the elastic force of spring portion 131 and electrolytic solution and the outside atmosphere of frame 102 changes.Its result, see to the direction of the outside of frame 102 from electrolyte liquor chamber 109 the second elasticity membranous part 170 the protrusion shape heave increase.Its result, the volume of electrolyte liquor chamber 109 is held constant.In addition, on the contrary, as shown in figure 16, under the situation that the volume of electrolyte liquor chamber 109 has reduced, the pressure of corresponding electrolytic solution increases, and the balance between the pressure of the elastic force of the second elasticity membranous part 170 of the second elasticity membranous part 170 and the elastic force of spring portion 131 and electrolytic solution and the pressure of outside atmosphere changes.Its result sees that to the direction of the outside of frame 102 the heaving of protrusion shape of the second elasticity membranous part 170 reduces from electrolyte liquor chamber 109.Its result, the volume of electrolyte liquor chamber 109 is held constant.As above result, the volume of the electrolyte liquor chamber 109 that electrolyte liquor chamber 109 inside are full of also is roughly constant, and the pressure of electrolytic solution also is roughly constant.

The suction of fluid and ejection action are as Figure 15 and shown in Figure 16.In the 3rd mode of execution, elasticity membranous part 170 carries out the effect that pressure is kept function as previously mentioned.Figure 17 illustrates because the state that stretches has taken place aforesaid former thereby barrier film 103.At this moment, the protrusion shape of elasticity membranous part 170 heave increase, so the volume of electrolyte liquor chamber 109 is held constant, the pressure of electrolytic solution also is maintained at suitable scope.First barrier film 103 is subjected to power to the below of Figure 17 all the time from spring portion 131, keeps suitable stress (tension force) all the time under unflagging situation.Relative therewith, under the situation that does not have elasticity membranous part 170, as long as first barrier film 103 is movable a little, very large variation just takes place in the pressure of electrolytic solution, so first the mobile of barrier film 103 hindered, first barrier film 103 almost can't move.In the 3rd mode of execution, because the stress (tension force) of first barrier film 103 is retained as suitable value (in other words, the pressure of pump chamber 107 inner fluids is maintained at the scope of regulation), so can effective action.

Need to prove, shown in the 3rd mode of execution, it is characterized in that a pump chamber 107 is arranged in its structure, simple in structure, so make easily or maintenance.

(the 4th mode of execution)

The formation of fluid delivery device of electroconductive polymer that Figure 18 has illustrated use that the 4th mode of execution of the present invention relates to.

In aforesaid explanation, mainly the situation that electrolyte liquor chamber 109 only is full of electrolytic solution is illustrated, but the part of electrolyte liquor chamber 109 can gassy.At this moment, also the elasticity of using gases can be kept within the limits prescribed first and second barrier film 103,104 applied pressures.In Figure 18, sneak into electrolytic solution and bubble in the inside of electrolyte liquor chamber 109.Bubble constitutes the bubble portion 212 that forms with the gases such as air of electrolytic solution generation chemical reaction by not.The elasticity of the bubble among Figure 18, elasticity membranous part 130 and spring portion 131 identical functions among performance and Fig. 3 can be kept the pressure that imposes on first and second barrier film 103,104 within the limits prescribed.Below this is illustrated.In Figure 18, the electrolyte pressure of the inside of electrolyte liquor chamber 109 is configured to the pressure less than the fluid of first and second pump chamber 107,108.By this pressure difference, first and second barrier film 103 and 104 remains the state that stress (tension force) has imposed on first and second barrier film 103 and 104.For example, equal under the atmospheric situation at the pressure of the fluid of first and second pump chamber 107,108, electrolytic solution and bubble portion 212 be placed in barometric pressure under situation specific pressure is little mutually, so bubble portion 212 expands.But, because electrolytic solution is roughly incompressible fluid, so the degrees of expansion of bubble portion 212 is minimum.Under the situation that has taken place from this state to stretch at for example first and second barrier film 103,104, the volume of electrolyte liquor chamber 109 reduces, so the pressure of electrolytic solution and bubble portion 212 increases respectively.In electrolyte liquor chamber 109, only have electrolytic solution situation under, because electrolytic solution is roughly incompressible fluid, so the pressure of electrolytic solution sharply increases, therefore the pressure difference of the electrolytic solution of the fluid of first and second pump chamber 107,108 inside and electrolyte liquor chamber 109 inside becomes very little, the stress (tension force) of first and second barrier film 103,104 reduces, become the lax state of first and second barrier film 103,104, the action of pump is hindered.Relative therewith, in the formation of Figure 18, the Young's modulus of the bubble portion 212 of electrolyte liquor chamber 109 is little, so even if its volume changes, the variation of pressure is also little.That is, bubble portion 212 has the effect that electrolyte liquor chamber 109 pressure inside due to the Volume Changes of Electolyte-absorptive chamber 109 change, and the electrolytic solution of electrolyte liquor chamber 109 inside and the pressure of bubble portion 212 are retained as suitable value.For this reason, the pressure difference of the electrolytic solution of the fluid of first and second pump chamber 107,108 inside and electrolyte liquor chamber 109 inside also is maintained in the constant scope, so the stress (tension force) of first and second barrier film 103,104 is retained suitable value (in other words, the pressure of first and second pump chamber 107,108 inner fluids is maintained in the predetermined range).That is, the pressure of bubble portion 212 with first and second barrier film 103,104 is kept function.So, keep the situation of function with the pressure that does not have first and second barrier film 103,104 and compare, even if when distortion etc. has taken place first and second barrier film 103,104, the pressure that imposes on barrier film also is maintained at suitable scope, the efficiency of movement of pump improves.Under the situation of having used bubble portion 212, can maintain automatically in the OK range of regulation with the pressure that easy structure will impose on first and second barrier film 103,104.

Now, with first and second barrier film 103,104 flexible when once flexible the spray volume and the intake of pump be made as V respectively ₀At this moment, the volume that is blended into the gas of electrolyte liquor chamber 109 is preferably the spray volume or the intake V of pump ₀More than 10%.This for example can understand by following example.

Pump with Figure 22 B is that example describes.As shown in figure 26, pay close attention to second barrier film 404 now.In addition, the bottom surface 490 of framework 402 is circular.The area of second barrier film 404 is made as S _dIn addition, the volume with second pump chamber 408 is made as V _pThe distance of the bottom surface of the central part of second barrier film 404 and framework 402 is made as h.The radius of bottom surface 490 is made as r.For simplicity, carry out following hypothesis here.The size of h in the time of will carrying out maximum collapse when 404 electrolysis of second barrier film are flexible is made as 0.In addition, as shown in figure 19, the shape of second barrier film 404 comprises the periphery of bottom surface 490 all the time, is assumed to be the part (spherical crown) of sphere.In Figure 19, show the example of second barrier film 404 for the situation of the part of the sphere of radius R 0.Aforementioned hypothesis is the hypothesis of the shape of the shape approximation spherical crown of second barrier film 404 when making the lax but nervous state of second barrier film 404.

At this moment, the volume V of second pump chamber 408 _pSatisfy following (relation 1).

V _p=π * h/6 * (3 * r ²+ h ²) ... (relation 1)

In addition, the area S of second barrier film 404 _dSatisfy following (relation 2).

S _d=π * (r ²+ h ²) ... (relation 2)

Be V now _i=2/3 * π * r ³In addition, be Si=π * r ²Here, π is a Ratio of the circumference of a circle to its diameter.Usually, the flexible size of the periodicity electrolysis of the area of second barrier film 404 of electroconductive polymer film in the pump is below 10% of area of second barrier film 404 of original state.Under aforesaid hypothesis, the area of second barrier film 404 of original state is designated as S _i, usually, the area of second barrier film 404 changes in following scope when pump moves.

S _i≤ (area of second barrier film 404)≤S _i* 1.1

Area at second barrier film 404 is (S _i* 1.1) under the situation, have according to aforementioned (relation 2)

Relation.At this moment, the volume of second pump chamber 408 has according to aforementioned (relation 1)

Relation.From above investigation as can be known, in the pump shown in Figure 22 B, carry out under the flexible situation of periodically electrolysis at the electroconductive polymer film that constitutes second barrier film 404, carry out once electrolytic when flexible, the volume V of the fluid that sucks from the volume of the fluid of second pump chamber, 408 ejections and by second pump chamber 408 ₀Be (0.2 * V _i) following value.

On the other hand, carry out under the flexible situation of periodically electrolysis, as previous use Figure 23 explanation, have second barrier film 404 and stretch and the situation of the slow conversion of periodically variable center meeting at the electroconductive polymer film.Think that its reason is the distortion due to the viscoelasticity of electroconductive polymer film for example.Usually, the size of the area change of second barrier film 404 when pump is moved for a long time becomes about value more than 0.1% of area of second barrier film 404 of original state.Now, at the area S of second barrier film 404 _dBe S _d=0.001 * S _iSituation under, under aforesaid hypothesis according to (relation 2) be

At this moment, the volume of second pump chamber 408 according to aforementioned (relation 1) is

Therefore, consider since the distortion due to the viscoelasticity of electroconductive polymer film etc. are former thus the area of second barrier film 404 from the S of original state _iBe changed to 0.001 * S _iSituation the time, the volume V of second pump chamber 408 _pBe changed to 0.02 * V from being roughly 0 _iThat is the volume V of second pump chamber 408, _pOnly increase by 0.02 * V _iIn the pump of Figure 22 B, the constant volume of framework inside is so if the volume of first pump chamber 407 does not change at this moment, the volume of electrolyte liquor chamber 409 only reduces by 0.02 * V _iAccording to aforementioned investigation, because under the situation that the distortion etc. due to the viscoelasticity of electroconductive polymer film is former thereby the area of second barrier film 404 increases, the volume of electrolyte liquor chamber 409 reduces, this reduction is 0.02 * V usually _iAbove value.Because electrolytic solution is incompressible fluid, so when only there was electrolytic solution the inside at electrolyte liquor chamber 409, it is constant that the volume of electrolyte liquor chamber 409 keeps.Therefore, work as under this situation owing under the situation that the distortion due to the viscoelasticity of electroconductive polymer film etc. are former thereby the area of second barrier film 404 increases,, then shown in Figure 24 B, become the lax state of second barrier film 404 if do not satisfy aforementioned hypothesis.If become the lax state of second barrier film 404, the flexible power of the electrolysis of electroconductive polymer film can not transmitted and cancellation to the ejection and the suction of fluid, and the efficient of pump reduces, so not preferred.

Relative therewith, according to the 4th mode of execution, constitute and sneak into electrolytic solution gas and form bubble portion 212, also because bubble portion 212 gases can carry out Volume Changes, so the Volume Changes that can come Electolyte-absorptive chamber 109 by the Volume Changes of bubble portion 212 gases for example can prevent that second barrier film 104 is lax.

As previously mentioned, usually because under the situation that the distortion due to the viscoelasticity of electroconductive polymer film etc. are former thereby the area of barrier film increases, the volume of electrolyte liquor chamber reduces, but the reduction of the volume of the electrolyte liquor chamber when pump is moved for a long time becomes (0.02 * V _i) above value.Therefore, because the Volume Changes of the gas by sneaking into electrolyte liquor chamber absorbs this Volume Changes, be (0.02 * V so be necessary to make the volume of the gas in the original state _i) more than.

On the other hand, as above-mentioned explanation, in the pump shown in Figure 22 B, carry out under the flexible situation of periodically electrolysis at the electroconductive polymer film that constitutes barrier film, the volume that carries out the fluid that once electrolytic sucks to the volume of the fluid of ejection and by pump chamber from pump chamber when flexible is (0.2 * V _i) following value.

Thus, because under the situation that the distortion etc. due to the viscoelasticity of electroconductive polymer film is former thereby the areas of first or

second barrier film

103 or 104 increase, because it is lax that the Volume Changes of the gas by sneaking into electrolyte liquor chamber 109 comes the Volume Changes of Electolyte-absorptive chamber 109 to prevent that first or

second barrier film

103 or 104 from taking place, so the volume of gas is necessary for spray volume and intake V that first or

second barrier film

103 or 104 carries out once fluid delivery device when flexible ₀More than 10%.The spray volume and the intake of pump are made as V when now, first or

second barrier film

103 or 104 being carried out once stretch ₀Owing to aforesaid reason, so in order to improve the efficiency of movement of pump, the volume of sneaking into the gas of electrolyte liquor chamber 109 is preferably V ₀More than 10%.

Need to prove, in aforesaid example, the size of h when supposing when 104 electrolysis of second barrier film are flexible maximum collapse to take place is 0, but in the pump of reality, if second barrier film 104 then can take place and be attached to the problems such as action that also hinder second barrier film 104 owing to the surface tension of fluid on the frame 102 in h=0.But, as long as the fixed-site 189 of second barrier film 104 and frame 102 does not stagger to the upper side of Figure 18, just foregoing problems can not take place, the discussion that this moment can application of aforementioned.

In aforesaid explanation, address because under the situation that the distortion etc. due to the viscoelasticity of electroconductive polymer film is former thereby the areas of first or second barrier film 103 or 104 increase, because the Volume Changes of the gas by sneaking into electrolyte liquor chamber 109 comes the Volume Changes of Electolyte-absorptive chamber 109 to prevent first or second barrier film 103 or 104 lax, so the volume of gas is necessary for spray volume and intake V that first or second barrier film 103 or 104 carries out once pump when flexible ₀More than 10%, but this is a necessary condition, for example at V ₀Less than 0.2 * V _iSituation under, or since the viscoelastic deformations of electroconductive polymer film etc. are former thus the volume reduction of the electrolyte liquor chamber 109 of the areas of first or second barrier film 103 or 104 when increasing greater than 0.02 * V _iSituation under, in order to prevent the lax of first or second barrier film 103 or 104, the volume that is necessary to make gas is for greater than V ₀10% value.In addition, even if all deform and under the situation that their area increases at two first and second barrier films 103 and 104, in order to prevent the lax of first and second barrier film 103 and 104, the volume that is necessary to make gas is for greater than V ₀10% value.

Need to prove, also can and use the pressure that constitutes by aforesaid elasticity membranous part 130 and spring portion 131 etc. to keep function etc. and keep function based on the flexible pressure of aforementioned gas.

Under the volume of the gas of sneaking into electrolyte liquor chamber 109 20% situation greater than the volume of electrolyte liquor chamber 109, the state that gas contacts first and second barrier film 103,104 takes place, and produces so-called the come in and go out unfavorable condition of first and second barrier film 103,104 of ion that hinders.Therefore, the volume of sneaking into the gas of electrolyte liquor chamber 109 is preferably the size below 20% of the volume of electrolyte liquor chamber 109.

Need to prove that the volume of sneaking into the gas of electrolyte liquor chamber 109 in aforesaid explanation is meant the gas volume under the state that uses fluid delivery device.

(the 5th mode of execution)

The sectional view of the fluid delivery device of Figure 20 is the use that relates to of the 5th mode of execution of the present invention electroconductive polymer illustrates respectively the example of situation that is made of the part of first and second barrier film 103,104 elastic membrane 204.That is, in Figure 20,

barrier film

103 and 104 peripheral part are formed by barrier film elastic membrane 204.

In the 5th mode of execution, constitute the part of first and second barrier film 103,104 respectively by elastic membrane 204, the part of first and second barrier film 103,104 can also can be kept the pressure that imposes on first and second barrier film 103,104 thus along the face direction generation resiliently deformable of first and second barrier film 103,104.

According to the 5th mode of execution, the effect of the elastic membrane 204 of a part that can be by constituting first and second barrier film 103,104 respectively makes the stress (tension force) that applies to the electroconductive polymer film that constitutes first and second barrier film 103,104 more even in the face of first and second barrier film 103,104.In addition, constituting first and second barrier film 103 by elastic membrane 204, under the situation of a part of 104, elastic membrane 204 can be deformed into to first or

second pump chamber

107 or 108 or the protrusion shape heaved of the direction of electrolyte liquor chamber 109, this protrusion shape changes, the volume of electrolyte liquor chamber 109 can keep constant thus, the pressure of electrolytic solution is maintained at suitable scope, so can will impose on first and second barrier film 103,104 pressure remains on suitable scope (in other words, the pressure of first and

second pump chamber

107 and 108 inner fluids can be maintained the scope of regulation).

In order to make pump as much as possible little, preferably make two barrier films 103,104 approaching as far as possible configuration in discontiguous scope.So, preferably reduce the area of through hole 102h.Corresponding, the area of preferred elastomeric film 204 is less than the area of barrier film 103,104.

But, shown in above-mentioned explanation, when the area of barrier film 103,104 changes because of stretching of electroconductive polymer film, distortion that can be by elastic membrane 204 is maintained in suitable value with the tension force of barrier film 103,104, so need utilize the Volume Changes of elastic membrane inner space part 192 to absorb the Volume Changes of part 190 in the electrolyte liquor chamber framework due to electroconductive polymer film flexible.

If consider above-mentioned situation, when the area of barrier film 103,104 changed because of stretching of electroconductive polymer film, the area change of the elastic membrane that preferably accompanies with it was greater than the area change of barrier film 103,104.Therefore, the Young's modulus of preferred barrier film 103,104 is less than the Young's modulus of electroconductive polymer film.Usually, the Young's modulus value of electroconductive polymer film is the above value of 1GPa roughly, so the Young's modulus of preferred elastomeric film is the value less than 1GPa.

(the 6th mode of execution)

The sectional view of the fluid delivery device of Figure 21 is the use that relates to of the 6th mode of execution of the present invention electroconductive polymer, in the formation of Figure 21, first barrier film 103 of the fluid delivery device that relates to the 3rd mode of execution of Figure 15 is the same with spring portion 131, dispose barrier film 103 and spring portion 131, and be formed with electrolytic solution storing section 206 at the sidepiece of electrolyte liquor chamber 109.Promptly, be provided with the conduit part 207 of a part that connects sidewall 102s at the sidewall 102s of the frame 102 that constitutes electrolyte liquor chamber 109, link the electrolyte liquor chamber 109 of frames 102 inside and the inside of electrolytic solution storing section 206 by this conduit part 207, become the structure that electrolytic solution can dealing.The top of electrolytic solution storing section 206 is opened and is become barometric pressure, so it is constant that the volume of electrolyte liquor chamber 109 and pressure roughly keep.As a result of, barrier film 103 be subjected to from the pressure of electrolytic solution also constant, the pressure that can impose on barrier film 103 keeps constant.The degassing film etc. of can be by seeing through gas but not seeing through liquid constitute electrolytic solution storing section 206 above, thus, can prevent that also electrolytic solution from draining to the outside.Need to prove, in the formation of Figure 21, the liquid level of electrolytic solution moves up and down in the inside of electrolytic solution storing section 206, transmit the weight of electrolytic solution thus, its result, the pressure that imposes on barrier film changes a little, but the variation in pressure due to the Volume Changes of the size that should change electrolyte liquor chamber 109 during in most of the cases than airtight electrolyte liquor chamber 109 is little.

(other mode of executions)

Prepare the fluid delivery device of arbitrary or a plurality of mode of executions in many aforementioned first～the 6th mode of executions, they are arranged in parallel and respectively its inflow side and outflow side are interconnected, can obtain big carry traffic thus.

In addition, in arbitrary or a plurality of mode of execution of aforementioned first～the 6th mode of execution,, prepare many small-sized aforesaid fluid conveyor systems and they are arranged in parallel with structure as hereinbefore, respectively its inflow side and outflow side are interconnected, can obtain big carry traffic thus.At this moment, first and second barrier film 103,104 in each fluid delivery device or the heaving of protrusion shape of barrier film 103 reduce, so integral body can miniaturization.

Under situation about as previously mentioned many fluid delivery devices being arranged in parallel, also can in identical faces, arrange a plurality of barrier film 103d respectively, 104d replaces each a slice barrier film 103,10 (Figure 27 reference).In Figure 27, first wall part 193 and second wall part 194 are formed by metals such as platinum, are the writing board shapes with a plurality of opening portion 193a.In addition, first wall part 193 and second wall part 194 are configured in the frame 102 in the mode that is parallel to each other.In addition, dispose the first barrier film 103d respectively, and dispose the second barrier film 104d respectively at a plurality of opening portion 194a of second wall part 194 at a plurality of opening portion 193a of first wall part 193.In addition, first pump chamber 107 is separated with electrolyte liquor chamber 109 with a plurality of first barrier films 103 by first wall part 193.In addition, second pump chamber 107 is separated with electrolyte liquor chamber portion 109 with a plurality of second barrier films 104 by second wall part 194.A plurality of first barrier film 103d connect by metal first wall part 193 each other, so keep same potential each other.In addition, a plurality of second barrier film 104d connect by metal second wall part 194, so keep same potential each other.In addition, the first barrier film 103d and the second barrier film 104d do not conduct.In this structure, by changing the current potential between the first barrier film 103d and the second barrier film 104d, a plurality of first barrier film 103d and a plurality of second barrier film 104d is the same with aforementioned embodiments respectively stretches are so can carry out the action of pump.

In addition, also can on the direction of overlapping barrier film, arrange the structure of fluid delivery device.That is the structure that can arrange fluid delivery device with the relation of position arbitrarily.

Several other mode of executions in addition of the present invention below are described.

As previously mentioned, barrier film 103,104 has suitable tension force and barrier film 103,104 is remained from the direction protrusion such shape of pump chamber 107,108 to electrolyte liquor chamber 109, so the pressure of electrolytic solution need be held in the hydrodynamic pressure less than pump chamber inside.For this reason, in other mode of execution of the present invention, form the part of the wall of electrolyte liquor chamber 109 by elastomer (for example elasticity membranous part 130 of Fig. 3), by the elastic force of this elastomeric elastic force or the spring (for example spring portion 131 of Fig. 3) that is connected with elastomer, the elastomer that produces a part that makes the wall that forms electrolyte liquor chamber 109 will be from the power of the inboard direction distortion laterally of electrolyte liquor chamber 109.By this power, the pressure of electrolytic solution is held in hydrodynamic pressure less than pump chamber inside.

The situation of elasticity membranous part 130 and spring portion 131 when Figure 28 is illustrated in the force value that makes electrolytic solution in the pump of the Fig. 3 in the fluid delivery device that first mode of execution relates to and equals the force value of fluid of pump chamber 107,108.Wherein, be shown in broken lines the position of elasticity membranous part 130 and spring portion 131 among Fig. 3.When the hydrodynamic pressure that under original state, the pressure of electrolytic solution is set as less than pump chamber 107,108, elasticity membranous part 130 is positioned at position shown in Figure 3, but makes elasticity membranous part 130 will return to the power (recuperability) of the state of Figure 28 by the elastic force generation of elasticity membranous part 130 and spring portion 131.This power takes place in the action of pump all the time, so the pressure of electrolytic solution is retained the little value of hydrodynamic pressure than pump chamber 107,108, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from pump chamber 107,108 to protrude such shape to the direction of electrolyte liquor chamber 109.Flexible at barrier film 103,104 and under the situation that volume electrolyte liquor chamber 109 increases or reduces, accompany therewith, the pressure of electrolytic solution reduces or increases, but corresponding, and elasticity membranous part 130 from electrolyte liquor chamber 109 to the inside or outside distortion.Thus, the volume of electrolyte liquor chamber 109 and pressure are retained as the value roughly the same with original state all the time.Its result, the pressure of electrolytic solution is retained the little value of pressure than the fluid of pump chamber 107,108 all the time in the action of pump, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from pump chamber 107,108 to protrude such shape to the direction of electrolyte liquor chamber 109.

In addition, as other mode of execution of the present invention, the situation of elasticity membranous part 130A when Figure 29 is illustrated in the force value that makes electrolytic solution in the pump of the Figure 10 in aforementioned first variation of aforementioned first mode of execution of the present invention and equals the force value of fluid of pump chamber 107,108.Wherein, be shown in broken lines the position of the elasticity membranous part 130A among Figure 10.Even if under the situation of Figure 10, also the situation with Fig. 3 is the same, and the elastic force by elasticity membranous part 130A produces and will make elasticity membranous part 130A return to the power (recuperability) of the state of Figure 29.This power takes place in the action of pump all the time, so the pressure of electrolytic solution is retained the little value of pressure than the fluid of pump chamber 107,108, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from pump chamber 107,108 to protrude such shape to the direction of electrolyte liquor chamber 109.Flexible at barrier film 103,104 and under the situation that volume electrolyte liquor chamber 109 increases or reduces, accompany therewith, the pressure of electrolytic solution reduces or increases, but corresponding, and elasticity membranous part 130A from electrolyte liquor chamber 109 to the inside or outside distortion.Thus, the volume of electrolyte liquor chamber 109 and pressure are retained as the value roughly the same with original state all the time.Its result, in the action of pump, the pressure of electrolytic solution is retained as the little value of pressure than the fluid of pump chamber 107,108 all the time, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can be from the direction protrusion such shape of pump chamber 107,108 to electrolyte liquor chamber 109 with keeping barrier film 103,104.

From aforesaid explanation as can be known, barrier film 103,104 has suitable tension force and barrier film 103,104 is remained from the direction protrusion such shape of pump chamber 107,108 to electrolyte liquor chamber 109, so position of the elasticity membranous part when the pressure that under original state, the pressure of electrolytic solution is set as less than the fluid of pump chamber 107,108, the position of the elasticity membranous part when being set as the pressure of the fluid that equals pump chamber 107,108 with pressure with electrolytic solution is compared, and staggering in the direction from the inboard, lateral of electrolyte liquor chamber 109 gets final product.Satisfying under the situation of this condition the shape protruded of direction laterally that the shape that can be the elasticity membranous part side direction protrudes in the lateral of electrolyte liquor chamber 109 also can be the elasticity membranous part from the inboard of electrolyte liquor chamber 109.In addition, can connect spring portion on the elasticity membranous part, also can not connect.

In addition, opposite with aforesaid explanation, barrier film 103,104 has suitable tension force and barrier film 103,104 is remained from the direction protrusion such shape of electrolyte liquor chamber 109 to pump chamber 107,108, so the pressure of electrolytic solution need be remained the hydrodynamic pressure greater than pump chamber inside.For this reason, in other mode of execution of the present invention, form the part of the wall of electrolyte liquor chamber 109 by elastomer (for example the elasticity membranous part 130), by the elastic force of this elastomeric elastic force or the spring (for example spring portion 131) that is connected with elastomer, the elastomer that produces a part that makes the wall that forms electrolyte liquor chamber 109 will be from the power of side direction distortion in the lateral of electrolyte liquor chamber 109.

The situation of elasticity membranous part 130 when Figure 30 is illustrated in the force value that makes electrolytic solution in the pump of Figure 13 and equals the force value of fluid of pump chamber 107,108.Wherein, be shown in broken lines the position of the elasticity membranous part 130 among Figure 13.Under the situation of Figure 13, by the elastic force of elasticity membranous part 130, generation makes elasticity membranous part 130 will return to the power (recuperability) of the state of Figure 30.This power takes place in the action of pump all the time, so the pressure of electrolytic solution is retained the big value of pressure than the fluid of pump chamber 107,108, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from electrolyte liquor chamber to protrude such shape to the direction of pump chamber 107,108.Flexible at barrier film 103,104 and under the situation that volume electrolyte liquor chamber 109 increases or reduces, accompany therewith, the pressure of electrolytic solution reduces or increases, but corresponding, and elasticity membranous part 130 from electrolyte liquor chamber 109 to the inside or outside distortion.Thus, the volume of electrolyte liquor chamber 109 and pressure are retained as the value roughly the same with original state all the time.Its result, in the action of pump, the pressure of electrolytic solution is retained as the big value of pressure than the fluid of pump chamber 107,108 all the time, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from electrolyte liquor chamber 109 to protrude such shape to the direction of pump chamber 107,108.

From aforesaid explanation as can be known, barrier film 103,104 has suitable tension force and barrier film 103,104 is remained from the direction protrusion such shape of electrolyte liquor chamber 109 to pump chamber 107,108, so position of elasticity membranous part 130 when the hydrodynamic pressure under original state, the pressure of electrolytic solution set for greater than pump chamber 107,108, the position of the elasticity membranous part 130 when pressure with electrolytic solution is set as the hydrodynamic pressure that equals pump chamber 107,108 is compared, and staggering in the inboard direction laterally from electrolyte liquor chamber 109 gets final product.Satisfying under the situation of this condition the shape protruded of direction laterally that the shape that can be elasticity membranous part 130 side direction protrudes in the lateral of electrolyte liquor chamber 109 can also be an elasticity membranous part 130 from the inboard of electrolyte liquor chamber 109.In addition, can connect spring portion 131 on the elasticity membranous part 130, also can not connect.

In addition, entrained gas in electrolytic solution by the elastic force of gas, also can play effect as hereinbefore.

Figure 31 is illustrated in the pump of Figure 18 the size of bubble portion 212 when the force value that makes electrolytic solution equals the force value of fluid of pump chamber 107,108.Wherein, be shown in broken lines the size of the bubble portion 212 among Figure 18.When the pressure that under original state, the pressure of electrolytic solution is set as less than the fluid of pump chamber 107,108, bubble portion 212 becomes size shown in Figure 180, but pass through the elastic force of the gas of bubble portion 212, generation will make the size of bubble portion 212 return to the power (recuperability) of the state of Figure 31.This power takes place in the action of pump all the time, so the pressure of electrolytic solution is retained the little value of pressure than the fluid of pump chamber 107,108, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from pump chamber 107,108 to protrude such shape to the direction of electrolyte liquor chamber 109.Flexible at barrier film 103,104 and under the situation that volume electrolyte liquor chamber 109 increases or reduces, accompany therewith, the pressure of electrolytic solution reduces or increases, but corresponding, and the size of bubble portion 212 increases or reduces.Thus, the volume of electrolytic solution and pressure are retained as the value roughly the same with original state all the time.Its result, the pressure of electrolytic solution is retained as the little value of pressure than the fluid of pump chamber 107,108 all the time in the action of pump, the difference of the pressure of the pressure by electrolytic solution and the fluid of pump chamber 107,108 and barrier film 103,104 has suitable tension force can remain barrier film 103,104 from pump chamber 107,108 to protrude such shape to the direction of electrolyte liquor chamber 109.

Need to prove, in Figure 28～Figure 31,, the variation of the size of the change in location of the elastic membrane 130 due to the variation in pressure of electrolytic solution or bubble portion 212 is shown significantly for easy explanation.In fact electrolytic solution is incompressible fluid, so the variation of the size of the change in location of the elastic membrane 130 due to the variation in pressure of electrolytic solution or bubble portion 212 is very little.

Need to prove,, can elastomer, spring portion or bubble portion be shown example as an example of aforementioned spring section.The elastic force that elastomer wherein is elastomeric surface by elastomer self is moved or deformable members, as an example, can enumerate elastic membrane or loose (bulk) shape resilient member.

Figure 32 is the pie graph that has used the example of loose shape resilient member in the fluid delivery device that relates to of expression other mode of execution of the present invention.In Figure 32, on 1 sidewall 102s of frame 102, form recess 102v, chimeric in this recess 102v have a loose shape resilient member 160.To be surperficial 160a be moved or deformable members by himself elastic force loose shape resilient member 160, the surperficial 160a of loose shape resilient member 160 moves by the elastic force advance and retreat of loose shape resilient member 160 self in recess 102v, the interface of electrolytic solution and electrolytic solution part is in addition deformed, the pressure that acts on barrier film 103,104 can be maintained in the predetermined range thus.Promptly, elastic force by making loose shape resilient member 160 plays a role as the aforementioned elastic force of aforementioned spring section, generation will direction distortion laterally from the inboard of electrolyte liquor chamber 109 power, power by aforementioned generation, the pressure of aforementioned electrolyte is retained than aforementioned pump chamber 107, the value that the pressure of 108 aforesaid fluid is little, by pressure and aforementioned pump chamber 107 by aforementioned electrolyte, the aforementioned barrier film 103 that the difference of the pressure of 108 aforesaid fluid produces, 104 tension force, aforementioned barrier film 103,104 are retained from aforementioned pump chamber 107,108 the such shapes of direction protrusion to aforementioned electrolyte liquor chamber 109.Perhaps, elastic force by making loose shape resilient member 160 plays a role as the aforementioned elastic force of aforementioned spring section, generation will be from the power of side direction distortion in the lateral of aforementioned electrolyte liquor chamber 109, power by aforementioned generation, the pressure of aforementioned electrolyte is retained than aforementioned pump chamber 107, the value that the pressure of 108 aforesaid fluid is big, by pressure and aforementioned pump chamber 107 by aforementioned electrolyte, the aforementioned barrier film 103 that the difference of the pressure of 108 aforesaid fluid produces, 104 tension force, aforementioned barrier film 103,104 are retained as from aforementioned electrolyte liquor chamber 109 to aforementioned pump chamber 107,108 direction is protruded such shape.Its result even if in the example of this Figure 32, also can bring into play the action effect the same with other mode of executions.Need to prove, in Figure 32,102x is the recess that forms in the bottom of recess 102v, self shown in the dotted line of Figure 32, carry out resiliently deformable so that the surface of loose shape resilient member 160 is moved or is out of shape when entering in the recess 102v at loose shape resilient member 160, by this recess 102x, guarantee the space that the part of loose shape resilient member 160 enters.

In addition, Figure 33 only uses the pie graph of spring portion as the example of spring section in the fluid delivery device that relates to of expression other mode of execution of the present invention.In Figure 33, form recess 102w at 1 sidewall 102s of frame 102, in this recess 102w, form transportable movable wall member 161 and give the spring portion 162 of elastic force to movable wall member 161.Movable wall member 161 elastic force advance and retreat by spring portion 162 in recess 102w move, and the interface of electrolytic solution and electrolytic solution part is in addition deformed, and the pressure that acts on barrier film 103,104 can be maintained in the predetermined range thus.Promptly, elastic force by making spring portion 162 plays a role as the aforementioned elastic force of aforementioned spring section, generation will direction distortion laterally from the inboard of electrolyte liquor chamber 109 power, power by aforementioned generation, the pressure of aforementioned electrolyte is retained than aforementioned pump chamber 107, the value that the pressure of 108 aforesaid fluid is little, by pressure and aforementioned pump chamber 107 by aforementioned electrolyte, the aforementioned barrier film 103 that the difference of the pressure of 108 aforesaid fluid produces, 104 tension force, aforementioned barrier film 103,104 are retained as from aforementioned pump chamber 107,108 the such shapes of direction protrusion to aforementioned electrolyte liquor chamber 109.Perhaps, elastic force by making spring portion 162 plays a role as the aforementioned elastic force of aforementioned spring section, generation will be from the power of side direction distortion in the lateral of aforementioned electrolyte liquor chamber 109, power by aforementioned generation, the pressure of aforementioned electrolyte is retained than aforementioned pump chamber 107, the value that the pressure of 108 aforesaid fluid is big, by pressure and aforementioned pump chamber 107 by aforementioned electrolyte, the aforementioned barrier film 103 that the difference of the pressure of 108 aforesaid fluid produces, 104 tension force, aforementioned barrier film 103,104 are retained as from aforementioned electrolyte liquor chamber 109 to aforementioned pump chamber 107,108 direction is protruded such shape.Its result even if in the example of this Figure 33, also can bring into play the action effect the same with other mode of executions.

Need to prove,, can bring into play the effect that has separately by any mode of execution or the variation in aforesaid various mode of executions of appropriate combination or the variation.

Industrial utilizability

Fluid delivery device of the present invention especially can be in fuel cell the supplier or be used for of fuel such as methyl alcohol water-cooled circulation means that the electronic equipment that contains CPU is cooled off etc. use, can be suitably as the fluid delivery device that efficiently carries out the suction and the ejection of fluid.

About the present invention, relevant preferred implementation has fully been put down in writing with reference to the accompanying drawing limit in the limit, but for the people who is familiar with this technology, can make various distortion or correction.Such distortion or correction just are construed as this distortion or correction and are contained among the scope of the present invention as long as do not exceed by the additional scope of the present invention that technological scheme limited.

Claims

One kind suck and the use of ejecting fluid the fluid delivery device of electroconductive polymer, possess:

Inside is full of the pump chamber of described fluid;

Frame is in the inner part that forms described pump chamber and constitute the wall of described pump chamber of this frame;

Barrier film, it is supported in the described frame and carries out the flexible electroconductive polymer film of electrolysis by a part or all parts and forms, and constitutes the wall of described pump chamber with described frame;

Be configured in described frame and be used for carrying out the opening portion of the ejection and the suction of described fluid at described pump chamber;

Surround and electrolytic solution is contained in inside by described frame and described barrier film, and the electrolyte liquor chamber that joins of the part of this electrolytic solution and described barrier film;

Be used for applying the power supply of voltage to described electroconductive polymer film;

Wiring portion with described electroconductive polymer film and the electrical connection of described power supply; With

To act on the pressure that the pressure of described barrier film maintains in the predetermined range by the described fluid in electrolytic solution in the described electrolyte liquor chamber and the described pump chamber and keep portion.
2. the fluid delivery device that uses electroconductive polymer as claimed in claim 1, wherein,

The described pressure portion of keeping possesses spring section, utilizes the elastic force of described spring section that the interface of the part beyond described electrolytic solution and the described electrolytic solution is deformed, and the pressure that will act on described barrier film thus maintains in the described predetermined range.
3. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The elastomer that can stretch that the described spring section that described pressure is kept portion is formed by the part at the wall of described electrolyte liquor chamber and connect described elastomer and described frame between spring portion constitute, the elastic force of described elastomeric elastic force or described spring portion is had an effect as the described elastic force of described spring section, produce the power that described elastomer will the direction distortion laterally from the inboard of described electrolyte liquor chamber thus

Power by described generation, make the pressure of described electrolytic solution remain value less than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described electrolyte liquor chamber from described pump chamber.
4. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The described spring section that described pressure is kept portion is made of the elastomer that can stretch that the part at the wall of described electrolyte liquor chamber forms, described elastomeric elastic force is played a role as the described elastic force of described spring section, produce the power that described elastomer will the direction distortion laterally from the inboard of described electrolyte liquor chamber thus

Power by described generation, make the pressure of described electrolytic solution remain value less than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described electrolyte liquor chamber from described pump chamber.
5. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The described spring section that described pressure is kept portion is made of spring portion, and the elastic force that makes described spring portion plays a role as the described elastic force of described spring section, produces the power that the interface that makes the part beyond described electrolytic solution and the described electrolytic solution will be out of shape thus,

Power by described generation, make the pressure of described electrolytic solution remain value less than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described electrolyte liquor chamber from described pump chamber.
6. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The elastomer that can stretch that the described spring section that described pressure is kept portion is formed by the part at the wall of described electrolyte liquor chamber and connect described elastomer and described frame between spring portion constitute, the elastic force that makes described elastomeric elastic force or described spring portion plays a role as the described elastic force of described spring section, producing described elastomer thus will be from the power of side direction distortion in the lateral of described electrolyte liquor chamber

Power by described generation, make the pressure of described electrolytic solution remain value greater than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described pump chamber from described electrolyte liquor chamber.
7. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The described spring section that described pressure is kept portion is made of the elastomer that can stretch that the part at the wall of described electrolyte liquor chamber forms, described elastomeric elastic force is played a role as the described elastic force of described spring section, producing described elastomer thus will be from the power of side direction distortion in the lateral of described electrolyte liquor chamber

Power by described generation, make the pressure of described electrolytic solution remain value greater than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described pump chamber from described electrolyte liquor chamber.
8. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The described spring section that described pressure is kept portion is made of spring portion, and the elastic force that makes described spring portion plays a role as the described elastic force of described spring section, produces the power that the interface that makes the part beyond described electrolytic solution and the described electrolytic solution will be out of shape thus,

Power by described generation, make the pressure of described electrolytic solution remain value greater than the pressure of the described fluid of described pump chamber, the tension force of the described barrier film that the difference of the pressure of the pressure by described electrolytic solution and the described fluid of described pump chamber produces is held in described barrier film the shape of protruding to the direction of described pump chamber from described electrolyte liquor chamber.
9. the fluid delivery device that uses electroconductive polymer as claimed in claim 2, wherein,

The described spring section that described pressure is kept portion is made of described electrolytic solution that is positioned at described electrolyte liquor chamber and the inner bubble portion of containing gas,

More than 10% of spray volume of the fluid delivery device the when volume of this bubble portion is flexible 1 time of a described barrier film.
10. the fluid delivery device that uses electroconductive polymer as claimed in claim 9, wherein,

The volume of described bubble portion is below 20% of volume of described electrolyte liquor chamber.