EP1106826A3 - Flow rate control with a positive displacement liquid pump - Google Patents

Flow rate control with a positive displacement liquid pump Download PDF

Info

Publication number
EP1106826A3
EP1106826A3 EP00126636A EP00126636A EP1106826A3 EP 1106826 A3 EP1106826 A3 EP 1106826A3 EP 00126636 A EP00126636 A EP 00126636A EP 00126636 A EP00126636 A EP 00126636A EP 1106826 A3 EP1106826 A3 EP 1106826A3
Authority
EP
European Patent Office
Prior art keywords
positive displacement
flow rate
rate control
diaphragm
liquid pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00126636A
Other languages
German (de)
French (fr)
Other versions
EP1106826A2 (en
EP1106826B9 (en
EP1106826B1 (en
Inventor
Kuniaki Horie
Kiwamu Tsukamoto
Kenji Kamoda
Hirotake Yamagishi
Shinya Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1106826A2 publication Critical patent/EP1106826A2/en
Publication of EP1106826A3 publication Critical patent/EP1106826A3/en
Application granted granted Critical
Publication of EP1106826B1 publication Critical patent/EP1106826B1/en
Publication of EP1106826B9 publication Critical patent/EP1106826B9/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

A positive displacement liquid-delivery apparatus comprising a positive displacement pump 10 and a differential pressure control unit 42. The positive displacement pump 10 includes a liquid-delivery chamber 28 having a housing 22 with one part formed of a flexible diaphragm 24; and a diaphragm driver 36 linked to the diaphragm 24 for deforming the same to discharge fluid from the liquid-delivery chamber 28. The differential pressure control unit 42 uniformly controls the differential pressure inside and outside the diaphragm 24 during the pumping process.
EP00126636A 1999-02-12 2000-12-04 Flow rate control with a positive displacement liquid pump Expired - Lifetime EP1106826B9 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (en) 1999-02-12 1999-02-12 Inspection apparatus and removing apparatus for substrate-adhering foreign matter and method and removing adhered foreign matter
JP343399 1999-12-02
JP2000217926A JP3844418B2 (en) 1999-02-12 2000-07-18 Positive displacement liquid feeder
JP2000217926 2000-07-18

Publications (4)

Publication Number Publication Date
EP1106826A2 EP1106826A2 (en) 2001-06-13
EP1106826A3 true EP1106826A3 (en) 2003-05-02
EP1106826B1 EP1106826B1 (en) 2008-05-07
EP1106826B9 EP1106826B9 (en) 2008-12-24

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00126636A Expired - Lifetime EP1106826B9 (en) 1999-02-12 2000-12-04 Flow rate control with a positive displacement liquid pump

Country Status (5)

Country Link
EP (1) EP1106826B9 (en)
JP (1) JP3844418B2 (en)
KR (1) KR100710914B1 (en)
DE (1) DE60038775D1 (en)
TW (1) TW500822B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005077489A1 (en) * 2004-02-18 2005-08-25 Koganei Corporation Filter and chemical ejector
JP2007291857A (en) * 2006-04-20 2007-11-08 Nidec Sankyo Corp Metering pump device
CN101960144A (en) 2008-07-08 2011-01-26 松下电器产业株式会社 Fluid conveying device using electrically conductive polymer
CN102395794B (en) * 2009-02-13 2015-05-06 戴维水设备有限公司 Controller for a liquid supply pump
WO2013165407A1 (en) 2012-05-02 2013-11-07 Cignarale Joseph Round and small diameter optical cables with a ribbon-like optical fiber structure
WO2014174957A1 (en) 2013-04-24 2014-10-30 株式会社村田製作所 Cuff pressure control device
KR101879033B1 (en) * 2016-03-31 2018-08-20 주식회사 포스코 Apparatus for adjusting amount of fluid
RU2636948C1 (en) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Device for feeding, measuring, control quantity and flow rate of liquid
GB2575638A (en) * 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (en) * 2021-07-30 2023-02-09 株式会社コガネイ Liquid supply device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529334A2 (en) * 1991-08-28 1993-03-03 Mks Instruments, Inc. Liquid delivery and vaporization system
WO1996004409A1 (en) * 1994-08-01 1996-02-15 Franz Hehmann Selected processing for non-equilibrium light alloys and products
EP0860608A2 (en) * 1997-02-24 1998-08-26 Ebara Corporation Diaphragm pump based liquid transport apparatus
WO1999023494A1 (en) * 1997-11-03 1999-05-14 Lang Apparatebau Gmbh Diaphragm pump dosage monitoring device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529334A2 (en) * 1991-08-28 1993-03-03 Mks Instruments, Inc. Liquid delivery and vaporization system
WO1996004409A1 (en) * 1994-08-01 1996-02-15 Franz Hehmann Selected processing for non-equilibrium light alloys and products
EP0860608A2 (en) * 1997-02-24 1998-08-26 Ebara Corporation Diaphragm pump based liquid transport apparatus
WO1999023494A1 (en) * 1997-11-03 1999-05-14 Lang Apparatebau Gmbh Diaphragm pump dosage monitoring device

Also Published As

Publication number Publication date
JP2001221163A (en) 2001-08-17
EP1106826A2 (en) 2001-06-13
KR20010062048A (en) 2001-07-07
EP1106826B9 (en) 2008-12-24
KR100710914B1 (en) 2007-04-27
TW500822B (en) 2002-09-01
JP3844418B2 (en) 2006-11-15
DE60038775D1 (en) 2008-06-19
EP1106826B1 (en) 2008-05-07

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