EP1106826A3 - Régulation du débit avec une pompe volumétrique - Google Patents

Régulation du débit avec une pompe volumétrique Download PDF

Info

Publication number
EP1106826A3
EP1106826A3 EP00126636A EP00126636A EP1106826A3 EP 1106826 A3 EP1106826 A3 EP 1106826A3 EP 00126636 A EP00126636 A EP 00126636A EP 00126636 A EP00126636 A EP 00126636A EP 1106826 A3 EP1106826 A3 EP 1106826A3
Authority
EP
European Patent Office
Prior art keywords
positive displacement
flow rate
rate control
diaphragm
liquid pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00126636A
Other languages
German (de)
English (en)
Other versions
EP1106826A2 (fr
EP1106826B1 (fr
EP1106826B9 (fr
Inventor
Kuniaki Horie
Kiwamu Tsukamoto
Kenji Kamoda
Hirotake Yamagishi
Shinya Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1106826A2 publication Critical patent/EP1106826A2/fr
Publication of EP1106826A3 publication Critical patent/EP1106826A3/fr
Publication of EP1106826B1 publication Critical patent/EP1106826B1/fr
Application granted granted Critical
Publication of EP1106826B9 publication Critical patent/EP1106826B9/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump
EP00126636A 1999-02-12 2000-12-04 Régulation du débit avec une pompe volumétrique Expired - Lifetime EP1106826B9 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP343399 1999-12-02
JP2000217926 2000-07-18
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Publications (4)

Publication Number Publication Date
EP1106826A2 EP1106826A2 (fr) 2001-06-13
EP1106826A3 true EP1106826A3 (fr) 2003-05-02
EP1106826B1 EP1106826B1 (fr) 2008-05-07
EP1106826B9 EP1106826B9 (fr) 2008-12-24

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00126636A Expired - Lifetime EP1106826B9 (fr) 1999-02-12 2000-12-04 Régulation du débit avec une pompe volumétrique

Country Status (5)

Country Link
EP (1) EP1106826B9 (fr)
JP (1) JP3844418B2 (fr)
KR (1) KR100710914B1 (fr)
DE (1) DE60038775D1 (fr)
TW (1) TW500822B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005077489A1 (fr) * 2004-02-18 2005-08-25 Koganei Corporation Filtre et éjecteur de produit chimique
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
US8062007B2 (en) 2008-07-08 2011-11-22 Panasonic Corporation Fluid transporting device using conductive polymer
EP2396554A4 (fr) * 2009-02-13 2017-05-24 Davey Water Products Pty Ltd Dispositif de commande pour une pompe d'alimentation en liquide
US20150234139A1 (en) 2012-05-02 2015-08-20 Fujikura Ltd. Round and small diameter optical cables with a ribbon-like optical fiber structure
JP6119847B2 (ja) * 2013-04-24 2017-04-26 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en) * 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (ja) * 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529334A2 (fr) * 1991-08-28 1993-03-03 Mks Instruments, Inc. Système de distribution et d'évaporation de liquide
WO1996004409A1 (fr) * 1994-08-01 1996-02-15 Franz Hehmann Traitement selectionne d'alliages legers et de produits hors d'equilibre
EP0860608A2 (fr) * 1997-02-24 1998-08-26 Ebara Corporation Appareil de transport de liquides en forme de pompe à membrane
WO1999023494A1 (fr) * 1997-11-03 1999-05-14 Lang Apparatebau Gmbh Dispositif permettant de surveiller le dosage d'une pompe a membrane

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529334A2 (fr) * 1991-08-28 1993-03-03 Mks Instruments, Inc. Système de distribution et d'évaporation de liquide
WO1996004409A1 (fr) * 1994-08-01 1996-02-15 Franz Hehmann Traitement selectionne d'alliages legers et de produits hors d'equilibre
EP0860608A2 (fr) * 1997-02-24 1998-08-26 Ebara Corporation Appareil de transport de liquides en forme de pompe à membrane
WO1999023494A1 (fr) * 1997-11-03 1999-05-14 Lang Apparatebau Gmbh Dispositif permettant de surveiller le dosage d'une pompe a membrane

Also Published As

Publication number Publication date
EP1106826A2 (fr) 2001-06-13
TW500822B (en) 2002-09-01
JP3844418B2 (ja) 2006-11-15
DE60038775D1 (de) 2008-06-19
EP1106826B1 (fr) 2008-05-07
KR100710914B1 (ko) 2007-04-27
EP1106826B9 (fr) 2008-12-24
KR20010062048A (ko) 2001-07-07
JP2001221163A (ja) 2001-08-17

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