EP1106826A3 - Régulation du débit avec une pompe volumétrique - Google Patents
Régulation du débit avec une pompe volumétrique Download PDFInfo
- Publication number
- EP1106826A3 EP1106826A3 EP00126636A EP00126636A EP1106826A3 EP 1106826 A3 EP1106826 A3 EP 1106826A3 EP 00126636 A EP00126636 A EP 00126636A EP 00126636 A EP00126636 A EP 00126636A EP 1106826 A3 EP1106826 A3 EP 1106826A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- positive displacement
- flow rate
- rate control
- diaphragm
- liquid pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/07—Pressure difference over the pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Formation Of Insulating Films (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11034399A JP2000230910A (ja) | 1999-02-12 | 1999-02-12 | 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法 |
JP343399 | 1999-12-02 | ||
JP2000217926A JP3844418B2 (ja) | 1999-02-12 | 2000-07-18 | 容積式送液装置 |
JP2000217926 | 2000-07-18 |
Publications (4)
Publication Number | Publication Date |
---|---|
EP1106826A2 EP1106826A2 (fr) | 2001-06-13 |
EP1106826A3 true EP1106826A3 (fr) | 2003-05-02 |
EP1106826B1 EP1106826B1 (fr) | 2008-05-07 |
EP1106826B9 EP1106826B9 (fr) | 2008-12-24 |
Family
ID=82943391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00126636A Expired - Lifetime EP1106826B9 (fr) | 1999-02-12 | 2000-12-04 | Régulation du débit avec une pompe volumétrique |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1106826B9 (fr) |
JP (1) | JP3844418B2 (fr) |
KR (1) | KR100710914B1 (fr) |
DE (1) | DE60038775D1 (fr) |
TW (1) | TW500822B (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005077489A1 (fr) * | 2004-02-18 | 2005-08-25 | Koganei Corporation | Filtre et éjecteur de produit chimique |
JP2007291857A (ja) * | 2006-04-20 | 2007-11-08 | Nidec Sankyo Corp | 定量ポンプ装置 |
US8062007B2 (en) | 2008-07-08 | 2011-11-22 | Panasonic Corporation | Fluid transporting device using conductive polymer |
AU2010213344B2 (en) * | 2009-02-13 | 2014-07-24 | Davey Water Products Pty Ltd | Controller for a liquid supply pump |
JP2015517679A (ja) | 2012-05-02 | 2015-06-22 | エーエフエル・テレコミュニケーションズ・エルエルシー | リボン型光ファイバー構造体を有する円形で小径の光ケーブル |
JP6119847B2 (ja) | 2013-04-24 | 2017-04-26 | 株式会社村田製作所 | カフ圧制御装置 |
KR101879033B1 (ko) * | 2016-03-31 | 2018-08-20 | 주식회사 포스코 | 유체량 조절장치 |
RU2636948C1 (ru) * | 2016-11-30 | 2017-11-29 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) | Устройство подачи, измерения, регулирования количества и расхода жидкости |
GB2575638A (en) * | 2018-07-16 | 2020-01-22 | Weir Minerals Netherlands Bv | Pumping system |
JP2023020185A (ja) * | 2021-07-30 | 2023-02-09 | 株式会社コガネイ | 液体供給装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0529334A2 (fr) * | 1991-08-28 | 1993-03-03 | Mks Instruments, Inc. | Système de distribution et d'évaporation de liquide |
WO1996004409A1 (fr) * | 1994-08-01 | 1996-02-15 | Franz Hehmann | Traitement selectionne d'alliages legers et de produits hors d'equilibre |
EP0860608A2 (fr) * | 1997-02-24 | 1998-08-26 | Ebara Corporation | Appareil de transport de liquides en forme de pompe à membrane |
WO1999023494A1 (fr) * | 1997-11-03 | 1999-05-14 | Lang Apparatebau Gmbh | Dispositif permettant de surveiller le dosage d'une pompe a membrane |
-
2000
- 2000-07-18 JP JP2000217926A patent/JP3844418B2/ja not_active Expired - Fee Related
- 2000-11-29 TW TW089125285A patent/TW500822B/zh not_active IP Right Cessation
- 2000-12-01 KR KR1020000072337A patent/KR100710914B1/ko not_active IP Right Cessation
- 2000-12-04 EP EP00126636A patent/EP1106826B9/fr not_active Expired - Lifetime
- 2000-12-04 DE DE60038775T patent/DE60038775D1/de not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0529334A2 (fr) * | 1991-08-28 | 1993-03-03 | Mks Instruments, Inc. | Système de distribution et d'évaporation de liquide |
WO1996004409A1 (fr) * | 1994-08-01 | 1996-02-15 | Franz Hehmann | Traitement selectionne d'alliages legers et de produits hors d'equilibre |
EP0860608A2 (fr) * | 1997-02-24 | 1998-08-26 | Ebara Corporation | Appareil de transport de liquides en forme de pompe à membrane |
WO1999023494A1 (fr) * | 1997-11-03 | 1999-05-14 | Lang Apparatebau Gmbh | Dispositif permettant de surveiller le dosage d'une pompe a membrane |
Also Published As
Publication number | Publication date |
---|---|
KR100710914B1 (ko) | 2007-04-27 |
KR20010062048A (ko) | 2001-07-07 |
JP3844418B2 (ja) | 2006-11-15 |
DE60038775D1 (de) | 2008-06-19 |
EP1106826B1 (fr) | 2008-05-07 |
TW500822B (en) | 2002-09-01 |
EP1106826A2 (fr) | 2001-06-13 |
EP1106826B9 (fr) | 2008-12-24 |
JP2001221163A (ja) | 2001-08-17 |
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