KR100710914B1 - 용적식 송액장치 - Google Patents

용적식 송액장치 Download PDF

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Publication number
KR100710914B1
KR100710914B1 KR1020000072337A KR20000072337A KR100710914B1 KR 100710914 B1 KR100710914 B1 KR 100710914B1 KR 1020000072337 A KR1020000072337 A KR 1020000072337A KR 20000072337 A KR20000072337 A KR 20000072337A KR 100710914 B1 KR100710914 B1 KR 100710914B1
Authority
KR
South Korea
Prior art keywords
pressure
liquid
liquid feeding
diaphragm
volumetric
Prior art date
Application number
KR1020000072337A
Other languages
English (en)
Korean (ko)
Other versions
KR20010062048A (ko
Inventor
호리에구니아키
츠카모토기와무
가모다겐지
야마기시히로타케
우에무라신야
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20010062048A publication Critical patent/KR20010062048A/ko
Application granted granted Critical
Publication of KR100710914B1 publication Critical patent/KR100710914B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump
KR1020000072337A 1999-02-12 2000-12-01 용적식 송액장치 KR100710914B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP11-343399 1999-12-02
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置
JP2000-217926 2000-07-18

Publications (2)

Publication Number Publication Date
KR20010062048A KR20010062048A (ko) 2001-07-07
KR100710914B1 true KR100710914B1 (ko) 2007-04-27

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000072337A KR100710914B1 (ko) 1999-02-12 2000-12-01 용적식 송액장치

Country Status (5)

Country Link
EP (1) EP1106826B9 (fr)
JP (1) JP3844418B2 (fr)
KR (1) KR100710914B1 (fr)
DE (1) DE60038775D1 (fr)
TW (1) TW500822B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005077489A1 (fr) * 2004-02-18 2005-08-25 Koganei Corporation Filtre et éjecteur de produit chimique
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
US8062007B2 (en) 2008-07-08 2011-11-22 Panasonic Corporation Fluid transporting device using conductive polymer
CN102395794B (zh) * 2009-02-13 2015-05-06 戴维水设备有限公司 用于供液泵的控制器
EP2845043A4 (fr) 2012-05-02 2015-12-16 Fujikura Ltd Câbles optiques de petit diamètre et ronds ayant une structure de fibres optiques de type ruban
JP6119847B2 (ja) * 2013-04-24 2017-04-26 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en) * 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (ja) 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980071597A (ko) * 1997-02-24 1998-10-26 마에다 시게루 액체 이송 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
AU3708495A (en) * 1994-08-01 1996-03-04 Franz Hehmann Selected processing for non-equilibrium light alloys and products
DE19748449C1 (de) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Einrichtung zur Dosierüberwachung einer Membranpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980071597A (ko) * 1997-02-24 1998-10-26 마에다 시게루 액체 이송 장치

Also Published As

Publication number Publication date
TW500822B (en) 2002-09-01
DE60038775D1 (de) 2008-06-19
EP1106826B1 (fr) 2008-05-07
KR20010062048A (ko) 2001-07-07
JP2001221163A (ja) 2001-08-17
JP3844418B2 (ja) 2006-11-15
EP1106826A3 (fr) 2003-05-02
EP1106826A2 (fr) 2001-06-13
EP1106826B9 (fr) 2008-12-24

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