JP2001221163A5 - - Google Patents
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- Publication number
- JP2001221163A5 JP2001221163A5 JP2000217926A JP2000217926A JP2001221163A5 JP 2001221163 A5 JP2001221163 A5 JP 2001221163A5 JP 2000217926 A JP2000217926 A JP 2000217926A JP 2000217926 A JP2000217926 A JP 2000217926A JP 2001221163 A5 JP2001221163 A5 JP 2001221163A5
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- diaphragm
- positive displacement
- differential pressure
- feeding chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000217926A JP3844418B2 (ja) | 1999-02-12 | 2000-07-18 | 容積式送液装置 |
TW089125285A TW500822B (en) | 1999-02-12 | 2000-11-29 | Positive displacement type liquid-delivery apparatus |
KR1020000072337A KR100710914B1 (ko) | 1999-02-12 | 2000-12-01 | 용적식 송액장치 |
EP00126636A EP1106826B9 (fr) | 1999-02-12 | 2000-12-04 | Régulation du débit avec une pompe volumétrique |
DE60038775T DE60038775D1 (de) | 1999-02-12 | 2000-12-04 | Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11034399A JP2000230910A (ja) | 1999-02-12 | 1999-02-12 | 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法 |
JP11-343399 | 1999-12-02 | ||
JP2000217926A JP3844418B2 (ja) | 1999-02-12 | 2000-07-18 | 容積式送液装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001221163A JP2001221163A (ja) | 2001-08-17 |
JP2001221163A5 true JP2001221163A5 (fr) | 2004-11-25 |
JP3844418B2 JP3844418B2 (ja) | 2006-11-15 |
Family
ID=82943391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000217926A Expired - Fee Related JP3844418B2 (ja) | 1999-02-12 | 2000-07-18 | 容積式送液装置 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1106826B9 (fr) |
JP (1) | JP3844418B2 (fr) |
KR (1) | KR100710914B1 (fr) |
DE (1) | DE60038775D1 (fr) |
TW (1) | TW500822B (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005077489A1 (fr) * | 2004-02-18 | 2005-08-25 | Koganei Corporation | Filtre et éjecteur de produit chimique |
JP2007291857A (ja) * | 2006-04-20 | 2007-11-08 | Nidec Sankyo Corp | 定量ポンプ装置 |
CN101960144A (zh) | 2008-07-08 | 2011-01-26 | 松下电器产业株式会社 | 使用了导电性高分子的流体运送装置 |
AU2010213344B2 (en) * | 2009-02-13 | 2014-07-24 | Davey Water Products Pty Ltd | Controller for a liquid supply pump |
US20150234139A1 (en) | 2012-05-02 | 2015-08-20 | Fujikura Ltd. | Round and small diameter optical cables with a ribbon-like optical fiber structure |
JP6119847B2 (ja) * | 2013-04-24 | 2017-04-26 | 株式会社村田製作所 | カフ圧制御装置 |
KR101879033B1 (ko) * | 2016-03-31 | 2018-08-20 | 주식회사 포스코 | 유체량 조절장치 |
RU2636948C1 (ru) * | 2016-11-30 | 2017-11-29 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) | Устройство подачи, измерения, регулирования количества и расхода жидкости |
GB2575638A (en) * | 2018-07-16 | 2020-01-22 | Weir Minerals Netherlands Bv | Pumping system |
JP2023020185A (ja) | 2021-07-30 | 2023-02-09 | 株式会社コガネイ | 液体供給装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5371828A (en) * | 1991-08-28 | 1994-12-06 | Mks Instruments, Inc. | System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure |
AU3708495A (en) * | 1994-08-01 | 1996-03-04 | Franz Hehmann | Selected processing for non-equilibrium light alloys and products |
JPH10238470A (ja) * | 1997-02-24 | 1998-09-08 | Ebara Corp | 送液装置 |
DE19748449C1 (de) * | 1997-11-03 | 1999-06-24 | Lang Apparatebau Gmbh | Einrichtung zur Dosierüberwachung einer Membranpumpe |
-
2000
- 2000-07-18 JP JP2000217926A patent/JP3844418B2/ja not_active Expired - Fee Related
- 2000-11-29 TW TW089125285A patent/TW500822B/zh not_active IP Right Cessation
- 2000-12-01 KR KR1020000072337A patent/KR100710914B1/ko not_active IP Right Cessation
- 2000-12-04 EP EP00126636A patent/EP1106826B9/fr not_active Expired - Lifetime
- 2000-12-04 DE DE60038775T patent/DE60038775D1/de not_active Expired - Fee Related
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