KR100710914B1 - 용적식 송액장치 - Google Patents

용적식 송액장치 Download PDF

Info

Publication number
KR100710914B1
KR100710914B1 KR1020000072337A KR20000072337A KR100710914B1 KR 100710914 B1 KR100710914 B1 KR 100710914B1 KR 1020000072337 A KR1020000072337 A KR 1020000072337A KR 20000072337 A KR20000072337 A KR 20000072337A KR 100710914 B1 KR100710914 B1 KR 100710914B1
Authority
KR
South Korea
Prior art keywords
pressure
liquid
liquid feeding
diaphragm
volumetric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020000072337A
Other languages
English (en)
Korean (ko)
Other versions
KR20010062048A (ko
Inventor
호리에구니아키
츠카모토기와무
가모다겐지
야마기시히로타케
우에무라신야
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja
Application filed by 가부시키가이샤 에바라 세이사꾸쇼 filed Critical 가부시키가이샤 에바라 세이사꾸쇼
Publication of KR20010062048A publication Critical patent/KR20010062048A/ko
Application granted granted Critical
Publication of KR100710914B1 publication Critical patent/KR100710914B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/07—Pressure difference over the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Formation Of Insulating Films (AREA)
KR1020000072337A 1999-02-12 2000-12-01 용적식 송액장치 Expired - Fee Related KR100710914B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11034399A JP2000230910A (ja) 1999-02-12 1999-02-12 基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP11-343399 1999-12-02
JP2000-217926 2000-07-18
JP2000217926A JP3844418B2 (ja) 1999-02-12 2000-07-18 容積式送液装置

Publications (2)

Publication Number Publication Date
KR20010062048A KR20010062048A (ko) 2001-07-07
KR100710914B1 true KR100710914B1 (ko) 2007-04-27

Family

ID=82943391

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000072337A Expired - Fee Related KR100710914B1 (ko) 1999-02-12 2000-12-01 용적식 송액장치

Country Status (5)

Country Link
EP (1) EP1106826B9 (https=)
JP (1) JP3844418B2 (https=)
KR (1) KR100710914B1 (https=)
DE (1) DE60038775D1 (https=)
TW (1) TW500822B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2208180C2 (ru) * 2001-04-20 2003-07-10 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Дозировочный насос (варианты)
WO2005077489A1 (ja) * 2004-02-18 2005-08-25 Koganei Corporation フィルタおよび薬液吐出装置
JP2007291857A (ja) * 2006-04-20 2007-11-08 Nidec Sankyo Corp 定量ポンプ装置
WO2010004721A1 (ja) 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
AU2010213344B2 (en) * 2009-02-13 2014-07-24 Davey Water Products Pty Ltd Controller for a liquid supply pump
EP2845043A4 (en) 2012-05-02 2015-12-16 Fujikura Ltd ROUND OPTICAL CABLE WITH SMALL DIAMETER AND A BANDED FIBER OPTICAL STRUCTURE
WO2014174957A1 (ja) 2013-04-24 2014-10-30 株式会社村田製作所 カフ圧制御装置
KR101879033B1 (ko) * 2016-03-31 2018-08-20 주식회사 포스코 유체량 조절장치
RU2636948C1 (ru) * 2016-11-30 2017-11-29 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ) Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en) 2018-07-16 2020-01-22 Weir Minerals Netherlands Bv Pumping system
JP2023020185A (ja) * 2021-07-30 2023-02-09 株式会社コガネイ 液体供給装置
KR102774533B1 (ko) * 2022-11-24 2025-03-04 세메스 주식회사 액 공급 장치 및 이를 포함하는 기판 처리 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980071597A (ko) * 1997-02-24 1998-10-26 마에다 시게루 액체 이송 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
JPH10506150A (ja) * 1994-08-01 1998-06-16 フランツ ヘーマン、 非平衡軽量合金及び製品のために選択される処理
DE19748449C1 (de) * 1997-11-03 1999-06-24 Lang Apparatebau Gmbh Einrichtung zur Dosierüberwachung einer Membranpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980071597A (ko) * 1997-02-24 1998-10-26 마에다 시게루 액체 이송 장치

Also Published As

Publication number Publication date
TW500822B (en) 2002-09-01
KR20010062048A (ko) 2001-07-07
DE60038775D1 (de) 2008-06-19
EP1106826B1 (en) 2008-05-07
JP3844418B2 (ja) 2006-11-15
EP1106826A2 (en) 2001-06-13
EP1106826B9 (en) 2008-12-24
JP2001221163A (ja) 2001-08-17
EP1106826A3 (en) 2003-05-02

Similar Documents

Publication Publication Date Title
US6419462B1 (en) Positive displacement type liquid-delivery apparatus
KR100710914B1 (ko) 용적식 송액장치
US8033801B2 (en) Liquid chemical supply system and liquid chemical supply control device
US6640840B1 (en) Delivery of liquid precursors to semiconductor processing reactors
US6742993B2 (en) Method and apparatus for dispensing fluids
CN101563541B (zh) 用于监测泵的操作的系统和方法
EP1960670B1 (en) System and method for operation of a pump
KR20050027250A (ko) 액체 유동 제어기와 정밀 분배 장치 및 시스템
KR20130105419A (ko) 필름 증착을 위한 액체 유동 제어
CN103843109A (zh) 用以在流体中检测空气的系统及方法
WO2006120881A1 (ja) 薬液供給システム及び薬液供給ポンプ
JP4708516B2 (ja) 半導体又は液晶製造用装置並びに液体材料ガスの気化方法
JP2001221163A5 (https=)
JP2013227072A (ja) 流量制御装置
CN111623855B (zh) 流量计算系统、存储介质、流量计算方法及流量计算装置
JP4328684B2 (ja) 処理液供給システム
CN114929371B (zh) 气体供给系统、机械发泡系统以及对气体进行供给的方法
WO2006062030A1 (ja) 気密式構造物の内圧制御装置及び方法
KR100485225B1 (ko) 액체이송장치
JP2656014B2 (ja) 自動調節式ダイコータ塗料供給装置
CN119665149A (zh) 一种流体缓存设备及流体的控制方法
JP5456513B2 (ja) 液体材料の気化方法
KR20070019101A (ko) 공정 챔버의 압력 측정 장치
JPH11238726A (ja) 液体原料供給装置

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20100418

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20100418

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000