TW493071B - Substrate inspecting device - Google Patents
Substrate inspecting device Download PDFInfo
- Publication number
- TW493071B TW493071B TW090106381A TW90106381A TW493071B TW 493071 B TW493071 B TW 493071B TW 090106381 A TW090106381 A TW 090106381A TW 90106381 A TW90106381 A TW 90106381A TW 493071 B TW493071 B TW 493071B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- inspected
- light source
- aforementioned
- guide rails
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 155
- 238000007689 inspection Methods 0.000 claims abstract description 60
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 230000002950 deficient Effects 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000002079 cooperative effect Effects 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000013589 supplement Substances 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 32
- 238000005286 illumination Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 17
- 239000011521 glass Substances 0.000 description 15
- 239000010985 leather Substances 0.000 description 10
- 230000033001 locomotion Effects 0.000 description 10
- 229910001507 metal halide Inorganic materials 0.000 description 7
- 150000005309 metal halides Chemical class 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 241000283014 Dama Species 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- JNSGIVNNHKGGRU-JYRVWZFOSA-N diethoxyphosphinothioyl (2z)-2-(2-amino-1,3-thiazol-4-yl)-2-methoxyiminoacetate Chemical compound CCOP(=S)(OCC)OC(=O)C(=N/OC)\C1=CSC(N)=N1 JNSGIVNNHKGGRU-JYRVWZFOSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
- G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Nonlinear Science (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000268945A JP2002082067A (ja) | 2000-09-05 | 2000-09-05 | 基板検査装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW493071B true TW493071B (en) | 2002-07-01 |
Family
ID=18755644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090106381A TW493071B (en) | 2000-09-05 | 2001-03-19 | Substrate inspecting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2002082067A (enExample) |
| KR (1) | KR100885560B1 (enExample) |
| CN (2) | CN1179206C (enExample) |
| TW (1) | TW493071B (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100576030C (zh) * | 2002-02-26 | 2009-12-30 | 乐金显示有限公司 | 检查液晶板的设备和制作液晶显示器的方法 |
| KR100898781B1 (ko) * | 2002-06-14 | 2009-05-20 | 엘지디스플레이 주식회사 | 외관검사장치 및 이를 이용한 액정표시장치의 제조방법 |
| KR100853775B1 (ko) * | 2002-06-14 | 2008-08-25 | 엘지디스플레이 주식회사 | 테이블 손상 위치 검출 지그 |
| US7272254B2 (en) * | 2003-07-09 | 2007-09-18 | General Electric Company | System and method for analyzing and identifying flaws in a manufactured part |
| JP2006049384A (ja) * | 2004-07-30 | 2006-02-16 | Laserfront Technologies Inc | ガントリー型ｘｙステージ |
| KR100599060B1 (ko) * | 2004-08-31 | 2006-07-12 | 주식회사 디이엔티 | 평판 표시패널 검사용 광조사방법 및 광조사장치 |
| KR100596333B1 (ko) * | 2004-09-22 | 2006-07-06 | 주식회사 에이디피엔지니어링 | 기판 외관 검사 장치 |
| JP4653500B2 (ja) | 2005-01-18 | 2011-03-16 | オリンパス株式会社 | 座標検出装置及び被検体検査装置 |
| JP2006266748A (ja) * | 2005-03-22 | 2006-10-05 | Mitsutoyo Corp | 画像測定装置 |
| KR100688985B1 (ko) * | 2005-08-05 | 2007-03-08 | 삼성전자주식회사 | 기판검사장치 및 그의 제어방법 |
| KR101166828B1 (ko) * | 2005-12-29 | 2012-07-19 | 엘지디스플레이 주식회사 | 평판표시장치용 검사장비 및 검사 방법 |
| CN1987436B (zh) * | 2006-12-27 | 2010-04-21 | 友达光电股份有限公司 | 基板检测设备及玻璃基板检测设备 |
| CN100480784C (zh) * | 2007-01-11 | 2009-04-22 | 友达光电股份有限公司 | 烧机测试装置 |
| TWI409499B (zh) * | 2007-10-19 | 2013-09-21 | Hon Hai Prec Ind Co Ltd | 顯微鏡用載物台 |
| KR101011721B1 (ko) * | 2008-07-25 | 2011-01-28 | 한국에너지기술연구원 | 집광용 반사판 시험장치 |
| KR200461270Y1 (ko) * | 2010-01-20 | 2012-07-03 | 한화폴리드리머 주식회사 | 스마트 윈도우용 검사장치 |
| JP5530984B2 (ja) * | 2010-07-26 | 2014-06-25 | 株式会社ジャパンディスプレイ | 検査装置及び検査方法 |
| CN102393576A (zh) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | 液晶显示器中玻璃基板的目视检查机及检查方法 |
| US8854616B2 (en) | 2011-08-03 | 2014-10-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof |
| WO2014023343A1 (de) * | 2012-08-07 | 2014-02-13 | Carl Zeiss Industrielle Messtechnik Gmbh | KOORDINATENMESSGERÄT MIT WEIßLICHTSENSOR |
| CN102997795B (zh) * | 2012-12-03 | 2015-10-21 | 京东方科技集团股份有限公司 | 一种摩擦装置和整机设备 |
| CN103604815B (zh) * | 2013-11-26 | 2016-01-13 | 上海海事大学 | 玻璃晶片检测装置与标定方法 |
| CN103837552A (zh) * | 2014-03-14 | 2014-06-04 | 苏州精创光学仪器有限公司 | 触摸屏保护玻璃外观缺陷检测系统 |
| CN104977306A (zh) * | 2014-04-08 | 2015-10-14 | 上海微电子装备有限公司 | 一种表面缺陷检测系统及方法 |
| CN104297259A (zh) * | 2014-11-04 | 2015-01-21 | 苏州精创光学仪器有限公司 | 触摸屏保护玻璃外观缺陷检测方法 |
| CN104765172A (zh) * | 2015-04-27 | 2015-07-08 | 京东方科技集团股份有限公司 | 一种检测液晶屏的设备和方法 |
| CN105783795A (zh) * | 2016-04-15 | 2016-07-20 | 中国科学院上海光学精密机械研究所 | 大型环抛机抛光胶盘平面度的测量装置及其测量方法 |
| CN107664646A (zh) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | 一种全自动外观缺陷检查装置及方法 |
| CN107064173A (zh) * | 2017-01-03 | 2017-08-18 | 中国科学院上海光学精密机械研究所 | 大型平面光学元件表面疵病的检测装置和检测方法 |
| CN106646957B (zh) | 2017-03-14 | 2018-07-20 | 惠科股份有限公司 | 一种显示单元制程控制方法及系统 |
| JP2019169608A (ja) * | 2018-03-23 | 2019-10-03 | 株式会社ディスコ | 研削装置 |
| CN111487035B (zh) * | 2019-01-25 | 2022-02-01 | 舜宇光学（浙江）研究院有限公司 | 一种用于近眼检测系统的对准方法及其系统 |
| CN112129775B (zh) * | 2020-09-23 | 2023-03-24 | 哈尔滨工业大学 | 一种匀光棒条形光源及基于该光源的光学元件损伤检测装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0715167A (ja) * | 1993-06-21 | 1995-01-17 | Sharp Corp | 挿入位置指示器 |
| JPH0735701A (ja) * | 1993-07-23 | 1995-02-07 | Sharp Corp | パターン目視検査装置 |
| JPH10325780A (ja) * | 1997-05-23 | 1998-12-08 | Matsushita Electric Ind Co Ltd | ディスプレイ画面検査装置 |
| KR19990025834A (ko) * | 1997-09-18 | 1999-04-06 | 윤종용 | 반도체 소자 검사 장치의 검사기판용 지지대 |
| JP4166340B2 (ja) * | 1997-09-24 | 2008-10-15 | オリンパス株式会社 | 基板検査装置 |
| JP4385419B2 (ja) * | 1998-11-30 | 2009-12-16 | 株式会社ニコン | 外観検査方法及び外観検査装置 |
-
2000
- 2000-09-05 JP JP2000268945A patent/JP2002082067A/ja active Pending
-
2001
- 2001-03-19 TW TW090106381A patent/TW493071B/zh not_active IP Right Cessation
- 2001-03-21 KR KR1020010014503A patent/KR100885560B1/ko not_active Expired - Fee Related
- 2001-03-26 CN CNB011120509A patent/CN1179206C/zh not_active Expired - Fee Related
- 2001-03-26 CN CN01208700U patent/CN2470821Y/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR100885560B1 (ko) | 2009-02-24 |
| CN1341853A (zh) | 2002-03-27 |
| JP2002082067A (ja) | 2002-03-22 |
| KR20020019376A (ko) | 2002-03-12 |
| CN2470821Y (zh) | 2002-01-09 |
| CN1179206C (zh) | 2004-12-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |