TW434469B - A system and method for a digital mass flow controller - Google Patents
A system and method for a digital mass flow controller Download PDFInfo
- Publication number
- TW434469B TW434469B TW89113530A TW89113530A TW434469B TW 434469 B TW434469 B TW 434469B TW 89113530 A TW89113530 A TW 89113530A TW 89113530 A TW89113530 A TW 89113530A TW 434469 B TW434469 B TW 434469B
- Authority
- TW
- Taiwan
- Prior art keywords
- digital
- signal
- flow rate
- weighted
- derived result
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 70
- 230000001939 inductive effect Effects 0.000 claims description 34
- 238000009795 derivation Methods 0.000 claims description 18
- 238000001914 filtration Methods 0.000 claims description 18
- 238000004364 calculation method Methods 0.000 claims description 17
- 230000002079 cooperative effect Effects 0.000 claims description 7
- 230000001276 controlling effect Effects 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims description 5
- 238000004898 kneading Methods 0.000 claims 2
- 230000004931 aggregating effect Effects 0.000 claims 1
- 210000004556 brain Anatomy 0.000 claims 1
- 238000004891 communication Methods 0.000 claims 1
- 238000004590 computer program Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 239000008267 milk Substances 0.000 claims 1
- 210000004080 milk Anatomy 0.000 claims 1
- 235000013336 milk Nutrition 0.000 claims 1
- 230000004044 response Effects 0.000 description 10
- 230000008901 benefit Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Flow Control (AREA)
- Feedback Control In General (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Measuring Volume Flow (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/351,120 US6389364B1 (en) | 1999-07-10 | 1999-07-10 | System and method for a digital mass flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW434469B true TW434469B (en) | 2001-05-16 |
Family
ID=23379659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW89113530A TW434469B (en) | 1999-07-10 | 2000-07-10 | A system and method for a digital mass flow controller |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US6389364B1 (enExample) |
| EP (1) | EP1214635B9 (enExample) |
| JP (1) | JP2003504749A (enExample) |
| KR (1) | KR100684539B1 (enExample) |
| CN (1) | CN1223911C (enExample) |
| AT (1) | ATE236419T1 (enExample) |
| AU (1) | AU6405400A (enExample) |
| DE (1) | DE60001977T2 (enExample) |
| TW (1) | TW434469B (enExample) |
| WO (1) | WO2001004716A1 (enExample) |
Families Citing this family (85)
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|---|---|---|---|---|
| US6389364B1 (en) * | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
| EP1257790A1 (en) | 2000-02-14 | 2002-11-20 | Unit Instruments, Inc. | Method and apparatus for balancing resistance |
| IT1316202B1 (it) * | 2000-09-08 | 2003-04-03 | Brahma S P A | Elettrovalvola per erogazione a portata variabile di un fluido. |
| JP4864280B2 (ja) | 2001-04-24 | 2012-02-01 | ブルックス・インストルメント・エルエルシー | 質量流量コントローラのシステムおよび方法 |
| KR20040015132A (ko) * | 2001-04-27 | 2004-02-18 | 마이크롤리스 코포레이션 | 질량 유동 제어기와 질량 유동 계량기의 출력을 여과하는장치 및 방법 |
| US6752166B2 (en) * | 2001-05-24 | 2004-06-22 | Celerity Group, Inc. | Method and apparatus for providing a determined ratio of process fluids |
| US6766260B2 (en) * | 2002-01-04 | 2004-07-20 | Mks Instruments, Inc. | Mass flow ratio system and method |
| US6687635B2 (en) * | 2002-06-13 | 2004-02-03 | Mks Instruments, Inc. | Apparatus and method for compensated sensor output |
| US7004191B2 (en) * | 2002-06-24 | 2006-02-28 | Mks Instruments, Inc. | Apparatus and method for mass flow controller with embedded web server |
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| US10031531B2 (en) | 2011-02-25 | 2018-07-24 | Mks Instruments, Inc. | System for and method of multiple channel fast pulse gas delivery |
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| US10473500B2 (en) * | 2013-03-08 | 2019-11-12 | Hitachi Metals, Ltd. | System and method for improved indicated flow in mass flow controllers |
| US10108205B2 (en) | 2013-06-28 | 2018-10-23 | Applied Materials, Inc. | Method and system for controlling a flow ratio controller using feed-forward adjustment |
| US10114389B2 (en) * | 2013-06-28 | 2018-10-30 | Applied Materials, Inc. | Method and system for controlling a flow ratio controller using feedback |
| GB2519964A (en) * | 2013-11-01 | 2015-05-13 | Linde Aktiengesellshcaft | Apparatus and method for detecting health deterioration |
| SG11201607251XA (en) * | 2014-03-13 | 2016-09-29 | Mks Instr Inc | System for and method of fast pulse gas delivery |
| JP6508197B2 (ja) * | 2014-03-31 | 2019-05-08 | 日立金属株式会社 | 熱式質量流量測定方法、当該方法を使用する熱式質量流量計、及び当該熱式質量流量計を使用する熱式質量流量制御装置 |
| CN104076830B (zh) * | 2014-06-12 | 2018-05-01 | 北京七星华创电子股份有限公司 | 用于气体集成输送系统的质量流量控制装置、系统及方法 |
| JP6415889B2 (ja) * | 2014-08-01 | 2018-10-31 | 株式会社堀場エステック | 流量制御装置、流量制御装置用プログラム、及び、流量制御方法 |
| US20160202706A1 (en) * | 2015-01-14 | 2016-07-14 | MKS Instruments, Inc, | Digitalization of analog mfc control input |
| FR3035469B1 (fr) * | 2015-04-23 | 2017-05-12 | Snecma | Vanne et procede de commande |
| GB201514220D0 (en) | 2015-08-12 | 2015-09-23 | Norgren Ltd C A | Cascaded adaptive filters for attenuating noise in a feedback path of a flow controller |
| GB201514575D0 (en) * | 2015-08-17 | 2015-09-30 | Norgren Ltd C A | DC canceller adaptive filter for attenuating noise in a feedback path of a flow controller |
| EP3344953B1 (en) * | 2015-08-31 | 2021-07-28 | MKS Instruments, Inc. | Method and apparatus for pressure-based flow measurement in non-critical flow conditions |
| WO2017188129A1 (ja) * | 2016-04-28 | 2017-11-02 | 株式会社フジキン | 流体制御装置、流体制御装置の制御方法、および、流体制御システム |
| JP6458767B2 (ja) * | 2016-05-17 | 2019-01-30 | トヨタ自動車株式会社 | ソフトセンサ装置 |
| FR3068781A1 (fr) | 2017-07-06 | 2019-01-11 | Ateq | Procede de detection de fuite d'une piece creuse et installation pour la mise en œuvre d'un tel procede |
| DE102017115251A1 (de) * | 2017-07-07 | 2019-01-10 | Endress+Hauser Flowtec Ag | Die vorliegende Erfindung betrifft einen Messaufnehmer zum Bestimmen des Massedurchflusses einer Flüssigkeit |
| FR3073623B1 (fr) | 2017-11-16 | 2019-11-08 | Ateq | Installation et procede de detection et de localisation de fuite dans un circuit de transport d'un fluide, notamment d'un aeronef |
| US11209298B2 (en) * | 2018-04-27 | 2021-12-28 | Hitachi Metals, Ltd. | Thermal mass flow sensor with improved accuracy |
| US10969797B2 (en) * | 2018-08-29 | 2021-04-06 | Illinois Tool Works, Inc. | Mass flow valve controller and control method with set point filter and linearization system based on valve model |
| FR3092171B1 (fr) * | 2019-01-29 | 2021-04-30 | Ateq | Système de détection de fuite par gaz traceur et utilisation correspondante. |
| US11435764B1 (en) | 2021-03-30 | 2022-09-06 | Hitachi Metals, Ltd. | Mass flow controller utilizing nonlinearity component functions |
| US11733081B2 (en) | 2021-04-13 | 2023-08-22 | Applied Materials, Inc. | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system |
| GB2618811A (en) * | 2022-05-18 | 2023-11-22 | Computionics Ltd | A Fire System |
| DE102023107126A1 (de) | 2023-03-21 | 2024-09-26 | Ias Gmbh | Verfahren und Vorrichtung zur Kalibrierung eines Gassensors |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4096746A (en) * | 1977-02-25 | 1978-06-27 | The Perkin-Elmer Corporation | Flow controller-flow sensor assembly for gas chromatographs and the like |
| DE3005414A1 (de) | 1980-02-14 | 1981-08-20 | Daimler-Benz Ag, 7000 Stuttgart | Verfahren zum einstellen einer schwenkbar angeordneten einspritzpumpe fuer eine luftverdichtende einspritzbrennkraftmaschine |
| US4543637A (en) * | 1982-07-16 | 1985-09-24 | Phillips Petroleum Company | Generation of a set point for process control |
| JPS60178915A (ja) | 1984-02-24 | 1985-09-12 | Honda Motor Co Ltd | ２サイクルエンジンの潤滑油供給制御装置 |
| US4674323A (en) * | 1985-07-31 | 1987-06-23 | The Dow Chemical Company | Self-diagnostic gel permeation/size exclusion chromatograph |
| US5660207A (en) | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| US5545252A (en) * | 1995-03-01 | 1996-08-13 | The Perkin-Elmer Corporation | Flow regulation in gas chromatograph |
| FR2747729B1 (fr) * | 1996-04-23 | 1998-07-03 | Elf Aquitaine | Methode d'identification automatique de la nature d'un puits de production d'hydrocarbures |
| US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
| US6389364B1 (en) * | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
| US6445980B1 (en) * | 1999-07-10 | 2002-09-03 | Mykrolis Corporation | System and method for a variable gain proportional-integral (PI) controller |
-
1999
- 1999-07-10 US US09/351,120 patent/US6389364B1/en not_active Expired - Lifetime
-
2000
- 2000-06-20 CN CNB008101841A patent/CN1223911C/zh not_active Expired - Fee Related
- 2000-06-20 JP JP2001510060A patent/JP2003504749A/ja not_active Withdrawn
- 2000-06-20 EP EP20000951066 patent/EP1214635B9/en not_active Expired - Lifetime
- 2000-06-20 WO PCT/US2000/040251 patent/WO2001004716A1/en not_active Ceased
- 2000-06-20 AU AU64054/00A patent/AU6405400A/en not_active Abandoned
- 2000-06-20 AT AT00951066T patent/ATE236419T1/de not_active IP Right Cessation
- 2000-06-20 DE DE60001977T patent/DE60001977T2/de not_active Expired - Fee Related
- 2000-06-20 KR KR1020027000234A patent/KR100684539B1/ko not_active Expired - Fee Related
- 2000-07-10 TW TW89113530A patent/TW434469B/zh not_active IP Right Cessation
-
2002
- 2002-01-31 US US10/062,080 patent/US6714878B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ATE236419T1 (de) | 2003-04-15 |
| DE60001977T2 (de) | 2003-11-06 |
| AU6405400A (en) | 2001-01-30 |
| EP1214635B9 (en) | 2004-01-07 |
| CN1223911C (zh) | 2005-10-19 |
| WO2001004716A1 (en) | 2001-01-18 |
| CN1371491A (zh) | 2002-09-25 |
| US20020114732A1 (en) | 2002-08-22 |
| EP1214635B1 (en) | 2003-04-02 |
| US6389364B1 (en) | 2002-05-14 |
| DE60001977D1 (de) | 2003-05-08 |
| KR100684539B1 (ko) | 2007-02-20 |
| JP2003504749A (ja) | 2003-02-04 |
| EP1214635A1 (en) | 2002-06-19 |
| KR20020039316A (ko) | 2002-05-25 |
| US6714878B2 (en) | 2004-03-30 |
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