DE60001977T2 - Verfahren und vorrichtung für einen digitalen massendurchflussregler - Google Patents

Verfahren und vorrichtung für einen digitalen massendurchflussregler

Info

Publication number
DE60001977T2
DE60001977T2 DE60001977T DE60001977T DE60001977T2 DE 60001977 T2 DE60001977 T2 DE 60001977T2 DE 60001977 T DE60001977 T DE 60001977T DE 60001977 T DE60001977 T DE 60001977T DE 60001977 T2 DE60001977 T2 DE 60001977T2
Authority
DE
Germany
Prior art keywords
derivative
digital
flow rate
signal
weighted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60001977T
Other languages
German (de)
English (en)
Other versions
DE60001977D1 (de
Inventor
Emmanuel Vyers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Application granted granted Critical
Publication of DE60001977D1 publication Critical patent/DE60001977D1/de
Publication of DE60001977T2 publication Critical patent/DE60001977T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Feedback Control In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
DE60001977T 1999-07-10 2000-06-20 Verfahren und vorrichtung für einen digitalen massendurchflussregler Expired - Fee Related DE60001977T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/351,120 US6389364B1 (en) 1999-07-10 1999-07-10 System and method for a digital mass flow controller
PCT/US2000/040251 WO2001004716A1 (en) 1999-07-10 2000-06-20 A system and method for a digital mass flow controller

Publications (2)

Publication Number Publication Date
DE60001977D1 DE60001977D1 (de) 2003-05-08
DE60001977T2 true DE60001977T2 (de) 2003-11-06

Family

ID=23379659

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60001977T Expired - Fee Related DE60001977T2 (de) 1999-07-10 2000-06-20 Verfahren und vorrichtung für einen digitalen massendurchflussregler

Country Status (10)

Country Link
US (2) US6389364B1 (enExample)
EP (1) EP1214635B9 (enExample)
JP (1) JP2003504749A (enExample)
KR (1) KR100684539B1 (enExample)
CN (1) CN1223911C (enExample)
AT (1) ATE236419T1 (enExample)
AU (1) AU6405400A (enExample)
DE (1) DE60001977T2 (enExample)
TW (1) TW434469B (enExample)
WO (1) WO2001004716A1 (enExample)

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JP5803552B2 (ja) * 2011-10-14 2015-11-04 東京エレクトロン株式会社 処理装置
JP6563656B2 (ja) * 2012-03-07 2019-08-21 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器の制御を改善するためのモデルを用いるためのシステムおよび方法
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Also Published As

Publication number Publication date
KR20020039316A (ko) 2002-05-25
CN1371491A (zh) 2002-09-25
TW434469B (en) 2001-05-16
EP1214635B9 (en) 2004-01-07
CN1223911C (zh) 2005-10-19
EP1214635A1 (en) 2002-06-19
US6389364B1 (en) 2002-05-14
DE60001977D1 (de) 2003-05-08
ATE236419T1 (de) 2003-04-15
US6714878B2 (en) 2004-03-30
JP2003504749A (ja) 2003-02-04
KR100684539B1 (ko) 2007-02-20
US20020114732A1 (en) 2002-08-22
AU6405400A (en) 2001-01-30
EP1214635B1 (en) 2003-04-02
WO2001004716A1 (en) 2001-01-18

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS,INC. (N.D.GES.D.STAATES DELAWARE), BILLER

8339 Ceased/non-payment of the annual fee