JP2003504749A - デジタルマスフローコントローラのためのシステムおよび方法 - Google Patents

デジタルマスフローコントローラのためのシステムおよび方法

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Publication number
JP2003504749A
JP2003504749A JP2001510060A JP2001510060A JP2003504749A JP 2003504749 A JP2003504749 A JP 2003504749A JP 2001510060 A JP2001510060 A JP 2001510060A JP 2001510060 A JP2001510060 A JP 2001510060A JP 2003504749 A JP2003504749 A JP 2003504749A
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JP
Japan
Prior art keywords
signal
digital
derivative
flow
weighted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001510060A
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English (en)
Japanese (ja)
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JP2003504749A5 (enExample
Inventor
エマニュエル ヴァイアーズ，
Original Assignee
ミリポール・コーポレイシヨン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by ミリポール・コーポレイシヨン filed Critical ミリポール・コーポレイシヨン
Publication of JP2003504749A publication Critical patent/JP2003504749A/ja
Publication of JP2003504749A5 publication Critical patent/JP2003504749A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Feedback Control In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
JP2001510060A 1999-07-10 2000-06-20 デジタルマスフローコントローラのためのシステムおよび方法 Withdrawn JP2003504749A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/351,120 US6389364B1 (en) 1999-07-10 1999-07-10 System and method for a digital mass flow controller
US09/351,120 1999-07-10
PCT/US2000/040251 WO2001004716A1 (en) 1999-07-10 2000-06-20 A system and method for a digital mass flow controller

Publications (2)

Publication Number Publication Date
JP2003504749A true JP2003504749A (ja) 2003-02-04
JP2003504749A5 JP2003504749A5 (enExample) 2009-01-08

Family

ID=23379659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001510060A Withdrawn JP2003504749A (ja) 1999-07-10 2000-06-20 デジタルマスフローコントローラのためのシステムおよび方法

Country Status (10)

Country Link
US (2) US6389364B1 (enExample)
EP (1) EP1214635B9 (enExample)
JP (1) JP2003504749A (enExample)
KR (1) KR100684539B1 (enExample)
CN (1) CN1223911C (enExample)
AT (1) ATE236419T1 (enExample)
AU (1) AU6405400A (enExample)
DE (1) DE60001977T2 (enExample)
TW (1) TW434469B (enExample)
WO (1) WO2001004716A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008502065A (ja) * 2004-06-07 2008-01-24 ビーピー　ケミカルズ　リミテッド プロセスの監視および制御方法
KR20160044996A (ko) * 2013-03-08 2016-04-26 히타치 긴조쿠 가부시키가이샤 질량 유동 제어기에서의 개선된 표시 유동을 위한 시스템 및 방법
JP2018526757A (ja) * 2015-08-31 2018-09-13 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 非臨界流れ状態での圧力式流量測定の方法および装置

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JP5803552B2 (ja) * 2011-10-14 2015-11-04 東京エレクトロン株式会社 処理装置
JP6563656B2 (ja) * 2012-03-07 2019-08-21 イリノイ トゥール ワークス インコーポレイティド 質量流量制御器の制御を改善するためのモデルを用いるためのシステムおよび方法
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008502065A (ja) * 2004-06-07 2008-01-24 ビーピー　ケミカルズ　リミテッド プロセスの監視および制御方法
KR20160044996A (ko) * 2013-03-08 2016-04-26 히타치 긴조쿠 가부시키가이샤 질량 유동 제어기에서의 개선된 표시 유동을 위한 시스템 및 방법
JP2016513828A (ja) * 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法
KR102090575B1 (ko) 2013-03-08 2020-03-18 히타치 긴조쿠 가부시키가이샤 질량 유동 제어기에서의 개선된 표시 유동을 위한 시스템 및 방법
JP2018526757A (ja) * 2015-08-31 2018-09-13 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 非臨界流れ状態での圧力式流量測定の方法および装置

Also Published As

Publication number Publication date
TW434469B (en) 2001-05-16
KR20020039316A (ko) 2002-05-25
KR100684539B1 (ko) 2007-02-20
ATE236419T1 (de) 2003-04-15
EP1214635B9 (en) 2004-01-07
DE60001977D1 (de) 2003-05-08
US6714878B2 (en) 2004-03-30
US6389364B1 (en) 2002-05-14
DE60001977T2 (de) 2003-11-06
US20020114732A1 (en) 2002-08-22
AU6405400A (en) 2001-01-30
WO2001004716A1 (en) 2001-01-18
EP1214635A1 (en) 2002-06-19
EP1214635B1 (en) 2003-04-02
CN1371491A (zh) 2002-09-25
CN1223911C (zh) 2005-10-19

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