KR100684539B1 - 디지털 질량 유량 제어기내의 가스 유량을 제어하는 방법, 디지털 질량 유량 제어기, 디지털 인핸스트 플로우 레이트 신호를 발생시키는 시스템 및 방법 - Google Patents

디지털 질량 유량 제어기내의 가스 유량을 제어하는 방법, 디지털 질량 유량 제어기, 디지털 인핸스트 플로우 레이트 신호를 발생시키는 시스템 및 방법 Download PDF

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Publication number
KR100684539B1
KR100684539B1 KR1020027000234A KR20027000234A KR100684539B1 KR 100684539 B1 KR100684539 B1 KR 100684539B1 KR 1020027000234 A KR1020027000234 A KR 1020027000234A KR 20027000234 A KR20027000234 A KR 20027000234A KR 100684539 B1 KR100684539 B1 KR 100684539B1
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South Korea
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digital
derivative
flow rate
signal
weighted
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Expired - Fee Related
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KR1020027000234A
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English (en)
Korean (ko)
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KR20020039316A (ko
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바이어스에마누엘
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셀레리티, 아이엔씨
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Feedback Control In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
KR1020027000234A 1999-07-10 2000-06-20 디지털 질량 유량 제어기내의 가스 유량을 제어하는 방법, 디지털 질량 유량 제어기, 디지털 인핸스트 플로우 레이트 신호를 발생시키는 시스템 및 방법 Expired - Fee Related KR100684539B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/351,120 US6389364B1 (en) 1999-07-10 1999-07-10 System and method for a digital mass flow controller
US09/351,120 1999-07-10

Publications (2)

Publication Number Publication Date
KR20020039316A KR20020039316A (ko) 2002-05-25
KR100684539B1 true KR100684539B1 (ko) 2007-02-20

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KR1020027000234A Expired - Fee Related KR100684539B1 (ko) 1999-07-10 2000-06-20 디지털 질량 유량 제어기내의 가스 유량을 제어하는 방법, 디지털 질량 유량 제어기, 디지털 인핸스트 플로우 레이트 신호를 발생시키는 시스템 및 방법

Country Status (10)

Country Link
US (2) US6389364B1 (enExample)
EP (1) EP1214635B9 (enExample)
JP (1) JP2003504749A (enExample)
KR (1) KR100684539B1 (enExample)
CN (1) CN1223911C (enExample)
AT (1) ATE236419T1 (enExample)
AU (1) AU6405400A (enExample)
DE (1) DE60001977T2 (enExample)
TW (1) TW434469B (enExample)
WO (1) WO2001004716A1 (enExample)

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Also Published As

Publication number Publication date
TW434469B (en) 2001-05-16
KR20020039316A (ko) 2002-05-25
ATE236419T1 (de) 2003-04-15
EP1214635B9 (en) 2004-01-07
DE60001977D1 (de) 2003-05-08
US6714878B2 (en) 2004-03-30
US6389364B1 (en) 2002-05-14
DE60001977T2 (de) 2003-11-06
JP2003504749A (ja) 2003-02-04
US20020114732A1 (en) 2002-08-22
AU6405400A (en) 2001-01-30
WO2001004716A1 (en) 2001-01-18
EP1214635A1 (en) 2002-06-19
EP1214635B1 (en) 2003-04-02
CN1371491A (zh) 2002-09-25
CN1223911C (zh) 2005-10-19

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