JP5174032B2 - 質量流量コントローラのコントローラ利得スケジューリング - Google Patents
質量流量コントローラのコントローラ利得スケジューリング Download PDFInfo
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- JP5174032B2 JP5174032B2 JP2009540339A JP2009540339A JP5174032B2 JP 5174032 B2 JP5174032 B2 JP 5174032B2 JP 2009540339 A JP2009540339 A JP 2009540339A JP 2009540339 A JP2009540339 A JP 2009540339A JP 5174032 B2 JP5174032 B2 JP 5174032B2
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- mass flow
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- 239000012530 fluid Substances 0.000 claims description 34
- 238000012546 transfer Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 61
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- 238000000034 method Methods 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
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- 230000000694 effects Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Artificial Intelligence (AREA)
- Evolutionary Computation (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Health & Medical Sciences (AREA)
- Flow Control (AREA)
- Feedback Control In General (AREA)
Description
(2) K(s) = k・G(s)
ここで、kはコントローラ利得であり、G(s)は動作条件とは独立である、コントローラ動的伝達関数である。
Claims (3)
- フィードバック制御利得を有する質量流量コントローラであって、
コントローラを通過する流体の流れを検知するように構成されているセンサと、
前記コントローラを通過する流体の流れを調節するように配置されている弁と、
前記センサが検知する流体の流れの関数として、前記弁を制御するように構成されているプロセッサと、
を備えており、
前記センサおよび弁はフィードバック系内に配置され、前記プロセッサは、少なくとも1つの較正気体パラメータの少なくとも1つの動作気体パラメータに対する比に基づいて、前記フィードバック・コントローラ利得をリアル・タイムで更新し、
較正状態とは異なる動作状態において一定の制御挙動を有するように、前記フィードバック系の閉ループ伝達関数が、動作状態には関係なく、実質的に一定となるようにし、
前記少なくとも1つの較正気体パラメータおよび前記少なくとも1つの動作気体パラメータは、(i)入力気体の分子量M、(ii)入力気体の熱容量比γ、(iii)入力気体の温度T、および(iv)入力気体の圧力Pを含むとともに、(V)弁変位を含まず、
前記質量流量コントローラは、さらに、
前記入力気体温度Tを検知する温度センサと、
前記入力気体圧力Pを検知する圧力センサとを備え、
前記質量流量コントローラは、以下の式の関数として、前記コントローラ利得kをリアル・タイムで更新し、
ことを特徴とする質量流量コントローラ。 - 請求項1記載の質量流量コントローラにおいて、前記弁は常時閉鎖型であることを特徴とする質量流量コントローラ。
- 請求項1記載の質量流量コントローラにおいて、前記弁は常時開放型であることを特徴とする質量流量コントローラ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/635,726 | 2006-12-07 | ||
US11/635,726 US8079383B2 (en) | 2006-12-07 | 2006-12-07 | Controller gain scheduling for mass flow controllers |
PCT/US2007/073328 WO2008070213A1 (en) | 2006-12-07 | 2007-07-12 | Controller gain scheduling for mass flow controllers |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010512571A JP2010512571A (ja) | 2010-04-22 |
JP5174032B2 true JP5174032B2 (ja) | 2013-04-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009540339A Active JP5174032B2 (ja) | 2006-12-07 | 2007-07-12 | 質量流量コントローラのコントローラ利得スケジューリング |
Country Status (6)
Country | Link |
---|---|
US (1) | US8079383B2 (ja) |
EP (1) | EP2089679B1 (ja) |
JP (1) | JP5174032B2 (ja) |
KR (1) | KR101391198B1 (ja) |
CN (1) | CN101636641B (ja) |
WO (1) | WO2008070213A1 (ja) |
Families Citing this family (29)
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JP2008039513A (ja) * | 2006-08-03 | 2008-02-21 | Hitachi Metals Ltd | 質量流量制御装置の流量制御補正方法 |
US8079383B2 (en) * | 2006-12-07 | 2011-12-20 | Mks Instruments, Inc. | Controller gain scheduling for mass flow controllers |
CN101398129A (zh) * | 2007-09-27 | 2009-04-01 | 谭仲禧 | 高精度流量自动平衡装置 |
US8265794B2 (en) * | 2007-10-01 | 2012-09-11 | Westlock Controls Corporation | Knowledge based valve control method |
AT509641B1 (de) | 2011-06-24 | 2012-08-15 | Avl List Gmbh | Verfahren zur ermittlung des durchflusses von fluiden nach dem ultraschalllaufzeitverfahren |
US8915262B2 (en) * | 2011-08-09 | 2014-12-23 | Hitachi Metals, Ltd. | Mass flow controller algorithm with adaptive valve start position |
JP5809012B2 (ja) * | 2011-10-14 | 2015-11-10 | 株式会社堀場エステック | 流量制御装置、流量測定機構、又は、当該流量測定機構を備えた流量制御装置に用いられる診断装置及び診断用プログラム |
DE102012109206B4 (de) * | 2011-11-30 | 2019-05-02 | Hanon Systems | Ventil-Sensor-Anordnung |
JP5868796B2 (ja) * | 2012-07-03 | 2016-02-24 | 株式会社堀場エステック | 圧力制御装置、流量制御装置、及び、圧力制御装置用プログラム、流量制御装置用プログラム |
JP6027395B2 (ja) * | 2012-10-29 | 2016-11-16 | 株式会社堀場エステック | 流体制御装置 |
US9146563B2 (en) * | 2013-03-01 | 2015-09-29 | Hitachi Metals, Ltd. | Mass flow controller and method for improved performance across fluid types |
CN105102868B (zh) * | 2013-03-08 | 2017-05-24 | 株式会社富士金 | 流体控制装置以及流体控制装置上的热传感器设置结构 |
US10108205B2 (en) | 2013-06-28 | 2018-10-23 | Applied Materials, Inc. | Method and system for controlling a flow ratio controller using feed-forward adjustment |
US10114389B2 (en) * | 2013-06-28 | 2018-10-30 | Applied Materials, Inc. | Method and system for controlling a flow ratio controller using feedback |
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EP3356901A1 (en) * | 2015-09-28 | 2018-08-08 | Koninklijke Philips N.V. | Methods and systems for controlling gas flow using a proportional flow valve |
JP2019505922A (ja) * | 2016-01-22 | 2019-02-28 | イリノイ トゥール ワークス インコーポレイティド | 質量流量制御器上に記憶されるデータ値を動的に構成するシステム及び方法 |
JP6753791B2 (ja) * | 2017-02-07 | 2020-09-09 | アズビル株式会社 | メンテナンス時期予測装置、流量制御装置およびメンテナンス時期予測方法 |
CN109211336A (zh) * | 2017-06-30 | 2019-01-15 | 何巨堂 | 一种含固体液料的带行程调节器的流量计 |
JP7164938B2 (ja) * | 2017-07-31 | 2022-11-02 | 株式会社堀場エステック | 流量制御装置、流量制御方法、及び、流量制御装置用プログラム |
NL2021082B1 (en) * | 2018-06-08 | 2019-12-11 | Berkin Bv | Pressure-insensitive thermal type flow meter |
US10705543B2 (en) * | 2018-08-29 | 2020-07-07 | Illinois Tool Works, Inc. | Mass flow controller and controller algorithm |
US10969797B2 (en) * | 2018-08-29 | 2021-04-06 | Illinois Tool Works, Inc. | Mass flow valve controller and control method with set point filter and linearization system based on valve model |
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JP7531881B2 (ja) * | 2020-03-24 | 2024-08-13 | 株式会社フジキン | 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム |
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-
2006
- 2006-12-07 US US11/635,726 patent/US8079383B2/en active Active
-
2007
- 2007-07-12 EP EP07812844.4A patent/EP2089679B1/en active Active
- 2007-07-12 JP JP2009540339A patent/JP5174032B2/ja active Active
- 2007-07-12 WO PCT/US2007/073328 patent/WO2008070213A1/en active Application Filing
- 2007-07-12 KR KR1020097009550A patent/KR101391198B1/ko active IP Right Grant
- 2007-07-12 CN CN2007800448340A patent/CN101636641B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US8079383B2 (en) | 2011-12-20 |
WO2008070213A1 (en) | 2008-06-12 |
CN101636641B (zh) | 2013-07-10 |
JP2010512571A (ja) | 2010-04-22 |
CN101636641A (zh) | 2010-01-27 |
US20080140260A1 (en) | 2008-06-12 |
EP2089679A1 (en) | 2009-08-19 |
KR101391198B1 (ko) | 2014-05-07 |
EP2089679B1 (en) | 2018-09-05 |
KR20090096427A (ko) | 2009-09-10 |
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