TW373063B - Method of heat treating object and apparatus for the same - Google Patents
Method of heat treating object and apparatus for the sameInfo
- Publication number
- TW373063B TW373063B TW087112759A TW87112759A TW373063B TW 373063 B TW373063 B TW 373063B TW 087112759 A TW087112759 A TW 087112759A TW 87112759 A TW87112759 A TW 87112759A TW 373063 B TW373063 B TW 373063B
- Authority
- TW
- Taiwan
- Prior art keywords
- same
- heat treating
- treating object
- float
- heated
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
- F27B9/2476—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/10—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated by hot air or gas
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S29/00—Metal working
- Y10S29/081—Gas as a conveyor
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20882497 | 1997-08-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW373063B true TW373063B (en) | 1999-11-01 |
Family
ID=16562727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087112759A TW373063B (en) | 1997-08-04 | 1998-08-03 | Method of heat treating object and apparatus for the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US6091055A (zh) |
CN (1) | CN1122171C (zh) |
GB (1) | GB2328008B (zh) |
MY (1) | MY117325A (zh) |
SG (1) | SG73538A1 (zh) |
TW (1) | TW373063B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI498511B (zh) * | 2013-03-08 | 2015-09-01 | Ihi Corp | 連續加熱爐 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100551522B1 (ko) * | 2002-12-11 | 2006-02-13 | 파이오니아 가부시키가이샤 | 플라즈마 디스플레이 패널의 소성로 및 플라즈마디스플레이 패널의 제조 방법 |
WO2004076928A2 (en) | 2003-02-21 | 2004-09-10 | Middleby Corporation | Self-cleaning oven |
JP3718688B2 (ja) * | 2003-06-17 | 2005-11-24 | 東京エレクトロン株式会社 | 加熱装置 |
US7918939B2 (en) | 2004-01-30 | 2011-04-05 | Sharp Kabushiki Kaisha | Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same |
US8087407B2 (en) | 2004-03-23 | 2012-01-03 | Middleby Corporation | Conveyor oven apparatus and method |
US9585400B2 (en) | 2004-03-23 | 2017-03-07 | The Middleby Corporation | Conveyor oven apparatus and method |
US7828547B2 (en) * | 2004-12-10 | 2010-11-09 | Kodak Graphic Communications | Method and apparatus for rapidly heating printing plates |
US7514650B2 (en) * | 2005-12-08 | 2009-04-07 | Despatch Industries Limited Partnership | Continuous infrared furnace |
DE202008012597U1 (de) * | 2008-09-22 | 2009-01-15 | Extrutec Gmbh | Vorrichtung zur Erwärmung stangenartiger Werkstücke |
US8839714B2 (en) | 2009-08-28 | 2014-09-23 | The Middleby Corporation | Apparatus and method for controlling a conveyor oven |
US20110048244A1 (en) * | 2009-08-28 | 2011-03-03 | Wiker John H | Apparatus and method for controlling a combustion blower in a gas-fueled conveyor oven |
GB201317170D0 (en) * | 2013-09-27 | 2013-11-06 | Ebner Ind Ofenbau | Furnace with a convection and radiation heating |
CN206157224U (zh) * | 2016-11-24 | 2017-05-10 | 合肥京东方显示技术有限公司 | 一种真空加热装置 |
DE102017104909A1 (de) | 2017-03-08 | 2018-09-13 | Ebner Industrieofenbau Gmbh | Bandschwebeanlage mit einem Düsensystem |
US10900098B2 (en) * | 2017-07-04 | 2021-01-26 | Daido Steel Co., Ltd. | Thermal treatment furnace |
CN107966026B (zh) * | 2017-11-28 | 2020-09-29 | 乐山新天源太阳能科技有限公司 | 硅片烧结工艺 |
CN107966015B (zh) * | 2017-11-28 | 2020-09-29 | 乐山新天源太阳能科技有限公司 | 硅片可悬空烘干的烧结炉 |
CN113039294B (zh) | 2018-10-31 | 2023-06-02 | 杰富意钢铁株式会社 | 带状基材的非接触式传送中的蛇行矫正装置 |
DE102019105167B3 (de) * | 2019-02-28 | 2020-08-13 | Ebner Industrieofenbau Gmbh | Schwebebandofen |
CN110641757B (zh) * | 2019-10-14 | 2021-04-27 | 中山易裁剪网络科技有限公司 | 一种柔性布料裁剪半成品的打包设备 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1038088A (en) * | 1961-12-20 | 1966-08-03 | Ass Elect Ind | Improvements relating to the transport of sheet material |
GB1238455A (zh) * | 1967-11-03 | 1971-07-07 | ||
US3807943A (en) * | 1970-08-10 | 1974-04-30 | Anchor Hocking Corp | Muffle furnace for treatment of articles on conveyor |
FR2128930A5 (zh) * | 1971-03-09 | 1972-10-27 | Ceraver | |
US3752643A (en) * | 1971-12-27 | 1973-08-14 | W Robinson | Portable gas fired art pottery kiln and method |
US3820946A (en) * | 1973-05-29 | 1974-06-28 | Midland Ross Corp | Longitudinally fired walking beam furnace |
GB2020401B (en) * | 1978-05-05 | 1982-09-29 | British Steel Corp | Heat treatment of metal strip |
US4518848A (en) * | 1981-05-15 | 1985-05-21 | Gca Corporation | Apparatus for baking resist on semiconductor wafers |
US4501553A (en) * | 1981-06-29 | 1985-02-26 | Chugai Ro Co., Ltd. | Floating equipment and floating-type heat treating furnace for striplike works |
JPS58207217A (ja) * | 1982-05-28 | 1983-12-02 | Fujitsu Ltd | 真空中に於ける物体の移送方法 |
JPH0669027B2 (ja) * | 1983-02-21 | 1994-08-31 | 株式会社日立製作所 | 半導体ウエハの薄膜形成方法 |
NL8302163A (nl) * | 1983-06-16 | 1985-01-16 | Bok Edward | Verbeterde proces installatie met "floating" transport van substraten. |
IT1178520B (it) * | 1984-09-28 | 1987-09-09 | Alusuisse Italia Spa | Procedimento e forno a tunnel per la calcinazione di corpi carboniosi, in particolare di elettrodi |
JPS61187341A (ja) * | 1985-02-15 | 1986-08-21 | Sony Corp | 半導体基板の熱処理装置 |
JPS61267394A (ja) * | 1985-05-21 | 1986-11-26 | 富士通株式会社 | セラミツクプリント基板の搬送機構 |
JPS62180858A (ja) * | 1986-02-05 | 1987-08-08 | Somar Corp | 薄膜の剥離装置 |
JPH0717308B2 (ja) * | 1986-02-05 | 1995-03-01 | ソマ−ル株式会社 | 薄膜搬送装置 |
JPS6337352A (ja) * | 1986-07-31 | 1988-02-18 | Somar Corp | 薄膜剥離装置 |
US4770630A (en) * | 1986-08-23 | 1988-09-13 | Toray Industries, Inc. | Heat treatment apparatus |
JPH0821766B2 (ja) * | 1986-11-26 | 1996-03-04 | ソマール株式会社 | 薄膜剥離装置 |
JPH01173735A (ja) * | 1987-12-28 | 1989-07-10 | Matsushita Electric Ind Co Ltd | 搬送装置及び搬送方法 |
JPH01271356A (ja) * | 1988-04-25 | 1989-10-30 | Somar Corp | 薄膜剥離装置 |
JPH021867A (ja) * | 1988-06-10 | 1990-01-08 | Daiwa Giken Kk | フィルム剥離装置 |
JPH0270617A (ja) * | 1988-09-02 | 1990-03-09 | Fujitsu Ltd | ウエハ搬送装置 |
JPH0276242A (ja) * | 1988-09-12 | 1990-03-15 | Nippon Telegr & Teleph Corp <Ntt> | 基板搬送方法およびその装置 |
JP2805068B2 (ja) * | 1988-09-25 | 1998-09-30 | ソニー株式会社 | 基板搬送装置 |
JP2807905B2 (ja) * | 1989-09-14 | 1998-10-08 | 日立電子エンジニアリング株式会社 | 基板チャック機構 |
JPH0426118A (ja) * | 1990-05-22 | 1992-01-29 | Fujitsu Ltd | 基板処理装置及び塵埃除去装置 |
JPH04269143A (ja) * | 1991-02-21 | 1992-09-25 | Shinkusu Kk | 工作機械などのテーブル装置 |
GB9103962D0 (en) * | 1991-02-26 | 1991-04-10 | Cmb Foodcan Plc | An oven |
JPH0529238A (ja) * | 1991-07-24 | 1993-02-05 | Sharp Corp | ドーパント熱拡散装置 |
JP2919158B2 (ja) * | 1992-02-10 | 1999-07-12 | キヤノン株式会社 | 基板保持装置 |
DE4210492C1 (zh) * | 1992-03-31 | 1993-04-22 | Mercedes-Benz Aktiengesellschaft, 7000 Stuttgart, De | |
JP2856001B2 (ja) * | 1992-10-13 | 1999-02-10 | 富士通株式会社 | 基板搬送方法 |
US5320329A (en) * | 1993-02-16 | 1994-06-14 | Surface Combustion, Inc. | Pressure pad for stably floating thin strip |
JPH07115120A (ja) * | 1993-10-18 | 1995-05-02 | Hitachi Ltd | 基板搬送装置およびその方法 |
-
1998
- 1998-08-03 SG SG1998002738A patent/SG73538A1/en unknown
- 1998-08-03 US US09/127,825 patent/US6091055A/en not_active Expired - Fee Related
- 1998-08-03 MY MYPI98003547A patent/MY117325A/en unknown
- 1998-08-03 TW TW087112759A patent/TW373063B/zh active
- 1998-08-04 CN CN98116202.9A patent/CN1122171C/zh not_active Expired - Fee Related
- 1998-08-04 GB GB9816950A patent/GB2328008B/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI498511B (zh) * | 2013-03-08 | 2015-09-01 | Ihi Corp | 連續加熱爐 |
US9689613B2 (en) | 2013-03-08 | 2017-06-27 | Ihi Corporation | Continuous heating furnace |
Also Published As
Publication number | Publication date |
---|---|
CN1208168A (zh) | 1999-02-17 |
MY117325A (en) | 2004-06-30 |
SG73538A1 (en) | 2000-06-20 |
GB2328008B (en) | 2000-05-10 |
GB9816950D0 (en) | 1998-09-30 |
US6091055A (en) | 2000-07-18 |
CN1122171C (zh) | 2003-09-24 |
GB2328008A (en) | 1999-02-10 |
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