TW365028B - Improved polishing slurries and methods for their use - Google Patents

Improved polishing slurries and methods for their use

Info

Publication number
TW365028B
TW365028B TW084112260A TW84112260A TW365028B TW 365028 B TW365028 B TW 365028B TW 084112260 A TW084112260 A TW 084112260A TW 84112260 A TW84112260 A TW 84112260A TW 365028 B TW365028 B TW 365028B
Authority
TW
Taiwan
Prior art keywords
alumina
polishing
methods
polishing slurries
improved polishing
Prior art date
Application number
TW084112260A
Other languages
English (en)
Inventor
Jiun-Fang Wang
Huey-Ming Wang
Anantha Sethuraman
Lee Melbourne Cook
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodel Inc filed Critical Rodel Inc
Application granted granted Critical
Publication of TW365028B publication Critical patent/TW365028B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW084112260A 1995-10-10 1995-11-18 Improved polishing slurries and methods for their use TW365028B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/541,898 US5693239A (en) 1995-10-10 1995-10-10 Polishing slurries comprising two abrasive components and methods for their use

Publications (1)

Publication Number Publication Date
TW365028B true TW365028B (en) 1999-07-21

Family

ID=24161560

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112260A TW365028B (en) 1995-10-10 1995-11-18 Improved polishing slurries and methods for their use

Country Status (7)

Country Link
US (1) US5693239A (zh)
EP (1) EP0868543A4 (zh)
JP (1) JPH11511394A (zh)
KR (1) KR19990064098A (zh)
CN (1) CN1087870C (zh)
TW (1) TW365028B (zh)
WO (1) WO1997013889A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI673354B (zh) * 2016-09-23 2019-10-01 聖高拜陶器塑膠公司 化學機械平坦化漿液以及其形成方法

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6258137B1 (en) * 1992-02-05 2001-07-10 Saint-Gobain Industrial Ceramics, Inc. CMP products
JP3278532B2 (ja) 1994-07-08 2002-04-30 株式会社東芝 半導体装置の製造方法
US6046110A (en) * 1995-06-08 2000-04-04 Kabushiki Kaisha Toshiba Copper-based metal polishing solution and method for manufacturing a semiconductor device
JPH09139368A (ja) * 1995-11-14 1997-05-27 Sony Corp 化学的機械研磨方法
US6132637A (en) 1996-09-27 2000-10-17 Rodel Holdings, Inc. Composition and method for polishing a composite of silica and silicon nitride
US5738800A (en) * 1996-09-27 1998-04-14 Rodel, Inc. Composition and method for polishing a composite of silica and silicon nitride
US6602439B1 (en) * 1997-02-24 2003-08-05 Superior Micropowders, Llc Chemical-mechanical planarization slurries and powders and methods for using same
US6001269A (en) * 1997-05-20 1999-12-14 Rodel, Inc. Method for polishing a composite comprising an insulator, a metal, and titanium
US5934980A (en) * 1997-06-09 1999-08-10 Micron Technology, Inc. Method of chemical mechanical polishing
US20090255189A1 (en) * 1998-08-19 2009-10-15 Nanogram Corporation Aluminum oxide particles
US6045435A (en) * 1997-08-04 2000-04-04 Motorola, Inc. Low selectivity chemical mechanical polishing (CMP) process for use on integrated circuit metal interconnects
JPH1187287A (ja) * 1997-09-05 1999-03-30 Fujitsu Ltd 基板の平坦化研磨方法
US5989301A (en) * 1998-02-18 1999-11-23 Saint-Gobain Industrial Ceramics, Inc. Optical polishing formulation
TW419518B (en) * 1998-02-20 2001-01-21 Ind Tech Res Inst Non-Newtonian-fluid-behaviored formulation
JP4113282B2 (ja) * 1998-05-07 2008-07-09 スピードファム株式会社 研磨組成物及びそれを用いたエッジポリッシング方法
US5964953A (en) * 1998-05-26 1999-10-12 Memc Electronics Materials, Inc. Post-etching alkaline treatment process
JP2000080350A (ja) 1998-09-07 2000-03-21 Speedfam-Ipec Co Ltd 研磨用組成物及びそれによるポリッシング加工方法
US6572449B2 (en) 1998-10-06 2003-06-03 Rodel Holdings, Inc. Dewatered CMP polishing compositions and methods for using same
US6241586B1 (en) * 1998-10-06 2001-06-05 Rodel Holdings Inc. CMP polishing slurry dewatering and reconstitution
KR100324311B1 (ko) 1998-10-26 2002-05-13 김영환 반도체소자의화학기계연마공정용슬러리제조방법
JP4428473B2 (ja) * 1999-01-18 2010-03-10 株式会社東芝 気相法無機酸化物粒子の含水固体状物質及び研磨用スラリーの製造方法
JP3523107B2 (ja) 1999-03-17 2004-04-26 株式会社東芝 Ｃｍｐ用スラリおよびｃｍｐ法
US6238450B1 (en) 1999-06-16 2001-05-29 Saint-Gobain Industrial Ceramics, Inc. Ceria powder
WO2001019935A1 (en) * 1999-09-15 2001-03-22 Rodel Holdings, Inc. Slurry for forming insoluble silicate during chemical-mechanical polishing
BR0014755A (pt) * 1999-10-15 2002-09-24 Saint Gobain Ceramics E Plasti Produtos para cmp aperfeiçoados
KR20010046395A (ko) 1999-11-12 2001-06-15 안복현 연마용 조성물
US6319096B1 (en) * 1999-11-15 2001-11-20 Cabot Corporation Composition and method for planarizing surfaces
US6527817B1 (en) 1999-11-15 2003-03-04 Cabot Microelectronics Corporation Composition and method for planarizing surfaces
US6293848B1 (en) 1999-11-15 2001-09-25 Cabot Microelectronics Corporation Composition and method for planarizing surfaces
US6261476B1 (en) 2000-03-21 2001-07-17 Praxair S. T. Technology, Inc. Hybrid polishing slurry
US6447375B2 (en) 2000-04-19 2002-09-10 Rodel Holdings Inc. Polishing method using a reconstituted dry particulate polishing composition
TWI268286B (en) * 2000-04-28 2006-12-11 Kao Corp Roll-off reducing agent
US6443811B1 (en) 2000-06-20 2002-09-03 Infineon Technologies Ag Ceria slurry solution for improved defect control of silicon dioxide chemical-mechanical polishing
US6646348B1 (en) * 2000-07-05 2003-11-11 Cabot Microelectronics Corporation Silane containing polishing composition for CMP
CN1197930C (zh) * 2000-07-19 2005-04-20 花王株式会社 抛光液组合物
US6627546B2 (en) 2001-06-29 2003-09-30 Ashland Inc. Process for removing contaminant from a surface and composition useful therefor
CA2454068A1 (en) 2001-08-02 2003-02-13 3M Innovative Properties Company Al2o3-rare earth oxide-zro2/hfo2 materials, and methods of making and using the same
ATE378293T1 (de) 2001-08-02 2007-11-15 3M Innovative Properties Co Verfahren zur herstellung von gegenständen aus glas sowie so hergestellte glaskeramikgegenstände
AU2002319749A1 (en) * 2001-08-02 2003-02-17 3M Innovative Properties Company Ceramic materials, abrasive particles, abrasive articles, and methods of making and using the same
US7097541B2 (en) 2002-01-22 2006-08-29 Cabot Microelectronics Corporation CMP method for noble metals
US6527622B1 (en) * 2002-01-22 2003-03-04 Cabot Microelectronics Corporation CMP method for noble metals
US7316603B2 (en) * 2002-01-22 2008-01-08 Cabot Microelectronics Corporation Compositions and methods for tantalum CMP
US8056370B2 (en) 2002-08-02 2011-11-15 3M Innovative Properties Company Method of making amorphous and ceramics via melt spinning
JP2004193495A (ja) * 2002-12-13 2004-07-08 Toshiba Corp 化学的機械的研磨用スラリーおよびこれを用いた半導体装置の製造方法
US7811496B2 (en) 2003-02-05 2010-10-12 3M Innovative Properties Company Methods of making ceramic particles
US6984261B2 (en) * 2003-02-05 2006-01-10 3M Innovative Properties Company Use of ceramics in dental and orthodontic applications
US6896591B2 (en) * 2003-02-11 2005-05-24 Cabot Microelectronics Corporation Mixed-abrasive polishing composition and method for using the same
EP1594656B1 (en) 2003-02-18 2007-09-12 Parker-Hannifin Corporation Polishing article for electro-chemical mechanical polishing
US20040216388A1 (en) * 2003-03-17 2004-11-04 Sharad Mathur Slurry compositions for use in a chemical-mechanical planarization process
JP4202183B2 (ja) * 2003-05-09 2008-12-24 株式会社フジミインコーポレーテッド 研磨用組成物
JP4089509B2 (ja) * 2003-05-22 2008-05-28 日立化成工業株式会社 摩擦材組成物及び摩擦材組成物を用いた摩擦材
JP4339034B2 (ja) * 2003-07-01 2009-10-07 花王株式会社 研磨液組成物
US6869336B1 (en) * 2003-09-18 2005-03-22 Novellus Systems, Inc. Methods and compositions for chemical mechanical planarization of ruthenium
US20050109980A1 (en) * 2003-11-25 2005-05-26 Hongyu Wang Polishing composition for CMP having abrasive particles
JP3920263B2 (ja) * 2003-12-22 2007-05-30 インターナショナル・ビジネス・マシーンズ・コーポレーション 情報処理装置、制御方法、プログラム、及び記録媒体
US20050211950A1 (en) * 2004-03-24 2005-09-29 Cabot Microelectronics Corporation Chemical-mechanical polishing composition and method for using the same
US7332453B2 (en) 2004-07-29 2008-02-19 3M Innovative Properties Company Ceramics, and methods of making and using the same
TWI403574B (zh) * 2005-01-05 2013-08-01 Nitta Haas Inc Grinding slurry
US20060283093A1 (en) * 2005-06-15 2006-12-21 Ivan Petrovic Planarization composition
US7803203B2 (en) 2005-09-26 2010-09-28 Cabot Microelectronics Corporation Compositions and methods for CMP of semiconductor materials
US7955519B2 (en) * 2005-09-30 2011-06-07 Cabot Microelectronics Corporation Composition and method for planarizing surfaces
US8685123B2 (en) * 2005-10-14 2014-04-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
GB2433515B (en) * 2005-12-22 2011-05-04 Kao Corp Polishing composition for hard disk substrate
US7368066B2 (en) * 2006-05-31 2008-05-06 Cabot Microelectronics Corporation Gold CMP composition and method
US8226841B2 (en) 2009-02-03 2012-07-24 Cabot Microelectronics Corporation Polishing composition for nickel-phosphorous memory disks
US8197307B1 (en) * 2009-03-19 2012-06-12 Kenneth Luna Surface polishing system
US9039914B2 (en) 2012-05-23 2015-05-26 Cabot Microelectronics Corporation Polishing composition for nickel-phosphorous-coated memory disks
US8518135B1 (en) 2012-08-27 2013-08-27 Cabot Microelectronics Corporation Polishing composition containing hybrid abrasive for nickel-phosphorous coated memory disks
CN104191340B (zh) * 2014-08-29 2017-01-11 浙江工业大学 非牛顿流体剪切增稠与电解复合效应的超精密加工装置
US11117239B2 (en) 2017-09-29 2021-09-14 Taiwan Semiconductor Manufacturing Company, Ltd. Chemical mechanical polishing composition and method
JP7431038B2 (ja) * 2019-12-27 2024-02-14 ニッタ・デュポン株式会社 研磨用スラリー
CN116023907A (zh) * 2023-02-16 2023-04-28 西南交通大学 一种用于铜/镍微结构平坦化的抛光液及其应用

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE252091C (de) * 1911-09-02 1912-10-15 Anlassvorrichtung für Explosionsmotoren.
SU969707A1 (ru) * 1981-01-28 1982-10-30 Кироваканский Ордена Трудового Красного Знамени Химический Завод Им.А.Ф.Мясникяна Абразивный состав
US4944836A (en) * 1985-10-28 1990-07-31 International Business Machines Corporation Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
US4645561A (en) * 1986-01-06 1987-02-24 Ampex Corporation Metal-polishing composition and process
US4855264A (en) * 1986-11-20 1989-08-08 Minnesota Mining And Manufacturing Company Aluminum oxide/aluminum oxynitride/group IVB metal nitride abrasive particles derived from a sol-gel process
US4956313A (en) * 1987-08-17 1990-09-11 International Business Machines Corporation Via-filling and planarization technique
JPH0682660B2 (ja) * 1987-08-17 1994-10-19 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 導電性スタツドを形成する方法
DE68927116T2 (de) * 1988-01-19 1997-02-06 Fujimi Inc Poliermasse
JPH0284485A (ja) * 1988-09-20 1990-03-26 Showa Denko Kk アルミニウム磁気ディスク研磨用組成物
JP2725192B2 (ja) * 1988-12-09 1998-03-09 株式会社フジミインコーポレーテッド 研磨剤組成物
US4959113C1 (en) * 1989-07-31 2001-03-13 Rodel Inc Method and composition for polishing metal surfaces
JP2850254B2 (ja) * 1989-09-27 1999-01-27 株式会社フジミインコーポレーテッド 研磨剤組成物
JPH0781132B2 (ja) * 1990-08-29 1995-08-30 株式会社フジミインコーポレーテッド 研磨剤組成物
CA2039998A1 (en) * 1990-10-09 1992-04-10 Donald C. Zipperian Mechanochemical polishing abrasive
FR2678922B1 (fr) * 1991-07-08 1994-03-25 Sumitomo Chemical Cy Ltd Poudre d'alumine theta, son procede de preparation et support d'enregistrement magnetique la contenant.
US5244534A (en) * 1992-01-24 1993-09-14 Micron Technology, Inc. Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs
AU650382B2 (en) * 1992-02-05 1994-06-16 Norton Company Nano-sized alpha alumina particles
US5209816A (en) * 1992-06-04 1993-05-11 Micron Technology, Inc. Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
US5389194A (en) * 1993-02-05 1995-02-14 Lsi Logic Corporation Methods of cleaning semiconductor substrates after polishing
US5391258A (en) * 1993-05-26 1995-02-21 Rodel, Inc. Compositions and methods for polishing
US5300130A (en) * 1993-07-26 1994-04-05 Saint Gobain/Norton Industrial Ceramics Corp. Polishing material
US5382272A (en) * 1993-09-03 1995-01-17 Rodel, Inc. Activated polishing compositions
US5340370A (en) * 1993-11-03 1994-08-23 Intel Corporation Slurries for chemical mechanical polishing
US5525191A (en) * 1994-07-25 1996-06-11 Motorola, Inc. Process for polishing a semiconductor substrate
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
KR960041316A (ko) * 1995-05-22 1996-12-19 고사이 아키오 연마용 입상체, 이의 제조방법 및 이의 용도
US6046110A (en) * 1995-06-08 2000-04-04 Kabushiki Kaisha Toshiba Copper-based metal polishing solution and method for manufacturing a semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI673354B (zh) * 2016-09-23 2019-10-01 聖高拜陶器塑膠公司 化學機械平坦化漿液以及其形成方法

Also Published As

Publication number Publication date
JPH11511394A (ja) 1999-10-05
CN1087870C (zh) 2002-07-17
EP0868543A4 (en) 1998-12-09
CN1199429A (zh) 1998-11-18
US5693239A (en) 1997-12-02
WO1997013889A1 (en) 1997-04-17
EP0868543A1 (en) 1998-10-07
KR19990064098A (ko) 1999-07-26

Similar Documents

Publication Publication Date Title
TW365028B (en) Improved polishing slurries and methods for their use
WO1997013889B1 (en) Improved polishing slurries and methods for their use
TW226403B (zh)
DE69317770D1 (de) Schleifmaterial
MY119075A (en) Colloidal silica slurry for nip plated disk polishing
ZA926548B (en) Process for making coated abrasives for grinding wheels.
AU3138597A (en) Fluoride additive containing chemical mechanical polishing slurry and method for use of same
CA2283131A1 (en) Abrasive jet stream polishing
MY115702A (en) Polishing composition for aluminum disk and polishing process therewith
TW366533B (en) A method of chemically mechanically polishing an electronic component
TW428225B (en) A method of polishing a surface of a substrate, a method of manufacturing semiconductor device, and an apparatus of manufacturing the same
EP0860238A3 (en) Polishing apparatus
TW364867B (en) Polishing method, abrasive material, and polishing apparatus
EP0987307A3 (en) Composition and method for reducing dishing in patterned metal during CMP process
GR880100599A (en) Abrading materials
MY121269A (en) Abrasive composition for disc substrate, and process for polishing disc substrate
DE69721094D1 (de) Beschichtete Schleifmittel für abrasive Werkzeuge
EP0739686A3 (en) Method and apparatus for polishing metal-soluble materials such as diamond
AU5344894A (en) Polishing method, apparatus for the same and buff polishing wheel
TW428023B (en) Polishing slurry
US5700303A (en) Chrome polish/exhaust pipe de-bluer
EP1103344A3 (de) Verfahren zum Bearbeiten von Oberflächen, insbesondere von Zylinderlaufflächen an Brennkraftmaschinen
US5577949A (en) Buffing method
Jennings Diamond polishes Burlington Slate
Gagliardi et al. Recent Advances in Coated Abrasive Structure