TW314661B - - Google Patents

Download PDF

Info

Publication number
TW314661B
TW314661B TW085101937A TW85101937A TW314661B TW 314661 B TW314661 B TW 314661B TW 085101937 A TW085101937 A TW 085101937A TW 85101937 A TW85101937 A TW 85101937A TW 314661 B TW314661 B TW 314661B
Authority
TW
Taiwan
Prior art keywords
switch
film
metal
electrode
array
Prior art date
Application number
TW085101937A
Other languages
English (en)
Chinese (zh)
Inventor
B Powers Billy Jr
M Rhoads Charles
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW314661B publication Critical patent/TW314661B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/18—Phase-shifters
    • H01P1/184—Strip line phase-shifters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P9/00—Delay lines of the waveguide type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036—Movable armature with higher resonant frequency for faster switching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Electronic Switches (AREA)
TW085101937A 1994-10-31 1996-02-16 TW314661B (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/332,282 US5619061A (en) 1993-07-27 1994-10-31 Micromechanical microwave switching

Publications (1)

Publication Number Publication Date
TW314661B true TW314661B (OSRAM) 1997-09-01

Family

ID=23297551

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085101937A TW314661B (OSRAM) 1994-10-31 1996-02-16

Country Status (5)

Country Link
US (1) US5619061A (OSRAM)
EP (1) EP0709911A3 (OSRAM)
JP (1) JPH08213803A (OSRAM)
KR (1) KR960015936A (OSRAM)
TW (1) TW314661B (OSRAM)

Families Citing this family (268)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE179548T1 (de) * 1995-11-14 1999-05-15 Smiths Industries Plc Schalter und schaltungssysteme
US5811961A (en) * 1996-08-01 1998-09-22 Lucent Technologies Inc. Amplitude and phase adjustment circuit
TW379346B (en) * 1996-08-27 2000-01-11 Omron Tateisi Electronics Co Micro-relay and the method of manufacturing thereof
EP1012888B1 (en) * 1996-10-17 2009-03-04 Avago Technologies Wireless IP (Singapore) Pte. Ltd. Method for fabricating fbars on glass substrates
US5757319A (en) * 1996-10-29 1998-05-26 Hughes Electronics Corporation Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components
US7471444B2 (en) * 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5808527A (en) * 1996-12-21 1998-09-15 Hughes Electronics Corporation Tunable microwave network using microelectromechanical switches
DE19701935C1 (de) * 1997-01-21 1997-12-11 Siemens Ag Verfahren zur Herstellung eines Siliziumkondensators
US5969929A (en) * 1997-04-16 1999-10-19 The Board Of Trustees Of The Leland Stanford Junior University Distributed ESD protection device for high speed integrated circuits
US5905241A (en) * 1997-05-30 1999-05-18 Hyundai Motor Company Threshold microswitch and a manufacturing method thereof
EP0887879A1 (en) * 1997-06-23 1998-12-30 Nec Corporation Phased-array antenna apparatus
EP0940050A1 (en) * 1997-06-27 1999-09-08 Koninklijke Philips Electronics N.V. Power supply switching in a radio communication device
US6127908A (en) 1997-11-17 2000-10-03 Massachusetts Institute Of Technology Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
FR2772512B1 (fr) * 1997-12-16 2004-04-16 Commissariat Energie Atomique Microsysteme a element deformable sous l'effet d'un actionneur thermique
US5959338A (en) * 1997-12-29 1999-09-28 Honeywell Inc. Micro electro-mechanical systems relay
WO1999039401A1 (en) * 1998-01-30 1999-08-05 Honeywell Inc. Time-delay device
JPH11274805A (ja) * 1998-03-20 1999-10-08 Ricoh Co Ltd 高周波スイッチ並びに製造方法、及び集積化高周波スイッチアレイ
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
FI108583B (fi) * 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
FI106894B (fi) 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita
US6020564A (en) * 1998-06-04 2000-02-01 Wang Electro-Opto Corporation Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications
EP1082740B1 (en) * 1998-06-04 2002-11-13 Cavendish Kinetics Limited Micro-mechanical elements
US6535722B1 (en) 1998-07-09 2003-03-18 Sarnoff Corporation Television tuner employing micro-electro-mechanically-switched tuning matrix
US5994796A (en) * 1998-08-04 1999-11-30 Hughes Electronics Corporation Single-pole single-throw microelectro mechanical switch with active off-state control
US6040611A (en) * 1998-09-10 2000-03-21 Hughes Electonics Corporation Microelectromechanical device
DE19919368B4 (de) * 1999-04-28 2004-03-18 Siemens Ag Mobilfunk-Endgerät und Verfahren zu dessen Betrieb
JP2002526969A (ja) 1998-09-25 2002-08-20 シーメンス アクチエンゲゼルシヤフト プログラム可能移動無線端末装置
JP3087741B2 (ja) 1998-11-04 2000-09-11 日本電気株式会社 マイクロマシンスイッチ
US6188301B1 (en) * 1998-11-13 2001-02-13 General Electric Company Switching structure and method of fabrication
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
JP2000188049A (ja) * 1998-12-22 2000-07-04 Nec Corp マイクロマシンスイッチおよびその製造方法
JP3119255B2 (ja) * 1998-12-22 2000-12-18 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
US6600252B2 (en) * 1999-01-14 2003-07-29 The Regents Of The University Of Michigan Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
US6424074B2 (en) 1999-01-14 2002-07-23 The Regents Of The University Of Michigan Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
US6593831B2 (en) 1999-01-14 2003-07-15 The Regents Of The University Of Michigan Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus
US6566786B2 (en) 1999-01-14 2003-05-20 The Regents Of The University Of Michigan Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
US6577040B2 (en) 1999-01-14 2003-06-10 The Regents Of The University Of Michigan Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
US6713938B2 (en) 1999-01-14 2004-03-30 The Regents Of The University Of Michigan Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
SE519587C2 (sv) * 1999-04-21 2003-03-18 Bofors Defence Ab Fördröjningskrets
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
US6218911B1 (en) 1999-07-13 2001-04-17 Trw Inc. Planar airbridge RF terminal MEMS switch
US6580337B1 (en) * 1999-07-19 2003-06-17 California Institute Of Technology MEMS switch
US6268635B1 (en) * 1999-08-04 2001-07-31 Jds Uniphase Inc. Dielectric links for microelectromechanical systems
US6307452B1 (en) 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
JP3374804B2 (ja) * 1999-09-30 2003-02-10 日本電気株式会社 移相器およびその製造方法
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6466102B1 (en) * 1999-10-05 2002-10-15 National Research Council Of Canada High isolation micro mechanical switch
US6504447B1 (en) * 1999-10-30 2003-01-07 Hrl Laboratories, Llc Microelectromechanical RF and microwave frequency power limiter and electrostatic device protection
US6290859B1 (en) 1999-11-12 2001-09-18 Sandia Corporation Tungsten coating for improved wear resistance and reliability of microelectromechanical devices
WO2001037303A1 (fr) * 1999-11-18 2001-05-25 Nec Corporation Commutateur de micromachine
US6359374B1 (en) 1999-11-23 2002-03-19 Mcnc Miniature electrical relays using a piezoelectric thin film as an actuating element
US6559737B1 (en) 1999-11-24 2003-05-06 The Regents Of The University Of California Phase shifters using transmission lines periodically loaded with barium strontium titanate (BST) capacitors
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6642593B2 (en) * 1999-12-27 2003-11-04 Texas Instruments Incorporated Microelectromechanical switch
US6355534B1 (en) 2000-01-26 2002-03-12 Intel Corporation Variable tunable range MEMS capacitor
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
DE10004393C1 (de) * 2000-02-02 2002-02-14 Infineon Technologies Ag Mikrorelais
DE10009453A1 (de) * 2000-02-29 2002-04-04 Daimler Chrysler Ag Phasenschieber und Anordnung aus mehreren Phasenschiebern
JP3538109B2 (ja) * 2000-03-16 2004-06-14 日本電気株式会社 マイクロマシンスイッチ
WO2001080258A2 (en) * 2000-04-18 2001-10-25 Standard Mems, Inc. A micro relay
JP4693959B2 (ja) * 2000-06-13 2011-06-01 Ｏｋｉセミコンダクタ株式会社 半導体装置の製造方法
US6452465B1 (en) 2000-06-27 2002-09-17 M-Squared Filters, Llc High quality-factor tunable resonator
US6741207B1 (en) * 2000-06-30 2004-05-25 Raytheon Company Multi-bit phase shifters using MEM RF switches
DE10037385A1 (de) * 2000-08-01 2002-02-14 Bosch Gmbh Robert Vorrichtung mit einem Kondensator
US6738600B1 (en) * 2000-08-04 2004-05-18 Harris Corporation Ceramic microelectromechanical structure
US6635919B1 (en) * 2000-08-17 2003-10-21 Texas Instruments Incorporated High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications
US6376787B1 (en) 2000-08-24 2002-04-23 Texas Instruments Incorporated Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US20040091203A1 (en) * 2000-09-07 2004-05-13 Teraop (Usa) Inc. Ultra-fast RF MEMS switch and method for fast switching of RFsignals
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6653985B2 (en) 2000-09-15 2003-11-25 Raytheon Company Microelectromechanical phased array antenna
DE10051311C1 (de) * 2000-10-17 2002-03-14 Bosch Gmbh Robert Vorrichtung mit einer Kondensatoranordnung
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
US6535091B2 (en) * 2000-11-07 2003-03-18 Sarnoff Corporation Microelectronic mechanical systems (MEMS) switch and method of fabrication
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
US6489857B2 (en) * 2000-11-30 2002-12-03 International Business Machines Corporation Multiposition micro electromechanical switch
DE10061205B4 (de) * 2000-12-08 2006-01-05 Eads Deutschland Gmbh Mikromechanischer Mikrowellenschalter
FR2818795B1 (fr) * 2000-12-27 2003-12-05 Commissariat Energie Atomique Micro-dispositif a actionneur thermique
DE10100296A1 (de) * 2001-01-04 2002-07-11 Bosch Gmbh Robert Vorrichtung mit einem Kondensator mit veränderbarer Kapazität, insbesondere Hochfrequenz-Mikroschalter
WO2002058089A1 (en) * 2001-01-19 2002-07-25 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications
US6440767B1 (en) * 2001-01-23 2002-08-27 Hrl Laboratories, Llc Monolithic single pole double throw RF MEMS switch
GB2373373A (en) * 2001-03-12 2002-09-18 Marconi Caswell Ltd Millimetre wave switch
US20020132642A1 (en) * 2001-03-16 2002-09-19 Hines John Ned Common module combiner/active array multicarrier approach without linearization loops
WO2002080207A1 (en) * 2001-03-30 2002-10-10 Arizona State University Micro-machined radio frequency switches and method of operating the same
KR100387239B1 (ko) * 2001-04-26 2003-06-12 삼성전자주식회사 Ｍｅｍｓ 릴레이 및 그 제조방법
US6657832B2 (en) 2001-04-26 2003-12-02 Texas Instruments Incorporated Mechanically assisted restoring force support for micromachined membranes
KR100519749B1 (ko) * 2001-05-10 2005-10-07 삼성전자주식회사 단일 앵커를 구비하는 마이크로 전자 기계시스템(ｍｅｍｓ) 스위치
US6472962B1 (en) 2001-05-17 2002-10-29 Institute Of Microelectronics Inductor-capacitor resonant RF switch
WO2002095784A1 (en) 2001-05-18 2002-11-28 Microlab, Inc. Microgagnetic latching switch packaging
US6803534B1 (en) 2001-05-25 2004-10-12 Raytheon Company Membrane for micro-electro-mechanical switch, and methods of making and using it
US6593666B1 (en) * 2001-06-20 2003-07-15 Ambient Systems, Inc. Energy conversion systems using nanometer scale assemblies and methods for using same
US6646215B1 (en) 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
US6707355B1 (en) 2001-06-29 2004-03-16 Teravicta Technologies, Inc. Gradually-actuating micromechanical device
JP3681658B2 (ja) * 2001-07-04 2005-08-10 Ｎｅｃ化合物デバイス株式会社 マトリックス・スイッチ装置
US6529093B2 (en) * 2001-07-06 2003-03-04 Intel Corporation Microelectromechanical (MEMS) switch using stepped actuation electrodes
US6509816B1 (en) * 2001-07-30 2003-01-21 Glimmerglass Networks, Inc. Electro ceramic MEMS structure with oversized electrodes
DE60212857T2 (de) 2001-08-20 2006-12-28 Honeywell International Inc. Thermischer schnappschalter
JP2003062798A (ja) * 2001-08-21 2003-03-05 Advantest Corp アクチュエータ及びスイッチ
US6698082B2 (en) * 2001-08-28 2004-03-02 Texas Instruments Incorporated Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode
US6639488B2 (en) * 2001-09-07 2003-10-28 Ibm Corporation MEMS RF switch with low actuation voltage
US6731492B2 (en) 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
US6633260B2 (en) 2001-10-05 2003-10-14 Ball Aerospace & Technologies Corp. Electromechanical switching for circuits constructed with flexible materials
US6787438B1 (en) * 2001-10-16 2004-09-07 Teravieta Technologies, Inc. Device having one or more contact structures interposed between a pair of electrodes
JP3775276B2 (ja) 2001-10-24 2006-05-17 株式会社デンソー 静電アクチュエータ
JP4045090B2 (ja) 2001-11-06 2008-02-13 オムロン株式会社 静電アクチュエータの調整方法
US6798315B2 (en) 2001-12-04 2004-09-28 Mayo Foundation For Medical Education And Research Lateral motion MEMS Switch
US6836194B2 (en) 2001-12-21 2004-12-28 Magfusion, Inc. Components implemented using latching micro-magnetic switches
US20030169135A1 (en) 2001-12-21 2003-09-11 Jun Shen Latching micro-magnetic switch array
US6917268B2 (en) 2001-12-31 2005-07-12 International Business Machines Corporation Lateral microelectromechanical system switch
US20030179057A1 (en) 2002-01-08 2003-09-25 Jun Shen Packaging of a micro-magnetic switch with a patterned permanent magnet
US20030137374A1 (en) 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US6608268B1 (en) 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
US7045459B2 (en) * 2002-02-19 2006-05-16 Northrop Grumman Corporation Thin film encapsulation of MEMS devices
US6750655B2 (en) * 2002-02-21 2004-06-15 Pts Corporation Methods for affirming switched status of MEMS-based devices
JP3818176B2 (ja) * 2002-03-06 2006-09-06 株式会社村田製作所 Ｒｆｍｅｍｓ素子
EP1343190A3 (en) * 2002-03-08 2005-04-20 Murata Manufacturing Co., Ltd. Variable capacitance element
US20030222740A1 (en) 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
US6714105B2 (en) * 2002-04-26 2004-03-30 Motorola, Inc. Micro electro-mechanical system method
US6791441B2 (en) 2002-05-07 2004-09-14 Raytheon Company Micro-electro-mechanical switch, and methods of making and using it
US6657525B1 (en) * 2002-05-31 2003-12-02 Northrop Grumman Corporation Microelectromechanical RF switch
JP3769701B2 (ja) * 2002-07-05 2006-04-26 日本電信電話株式会社 超音波センサ
JP2004103559A (ja) 2002-07-15 2004-04-02 Toshiba Corp Ｍｅｍｓ装置
KR100997929B1 (ko) * 2002-08-03 2010-12-02 시베르타 인코퍼레이티드 밀봉된 일체식 멤스 스위치
US7416281B2 (en) * 2002-08-06 2008-08-26 Ricoh Company, Ltd. Electrostatic actuator formed by a semiconductor manufacturing process
US7551048B2 (en) 2002-08-08 2009-06-23 Fujitsu Component Limited Micro-relay and method of fabricating the same
JP4804546B2 (ja) * 2002-08-08 2011-11-02 富士通コンポーネント株式会社 マイクロリレー
US7256670B2 (en) * 2002-08-26 2007-08-14 International Business Machines Corporation Diaphragm activated micro-electromechanical switch
US6998946B2 (en) * 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
CN100565740C (zh) 2002-09-18 2009-12-02 麦克弗森公司 层压机电系统
FR2845075B1 (fr) * 2002-09-27 2005-08-05 Thales Sa Microcommutateurs a actuation electrostatique a faible temps de reponse et commutation de puissance et procede de realisation associe
US20040121505A1 (en) 2002-09-30 2004-06-24 Magfusion, Inc. Method for fabricating a gold contact on a microswitch
KR100470634B1 (ko) * 2002-10-02 2005-03-10 한국전자통신연구원 축전식 미세전자기계적 스위치 및 그 제조 방법
KR100492004B1 (ko) * 2002-11-01 2005-05-30 한국전자통신연구원 미세전자기계적 시스템 기술을 이용한 고주파 소자
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
US6873223B2 (en) * 2002-12-16 2005-03-29 Northrop Grumman Corporation MEMS millimeter wave switches
US6940363B2 (en) * 2002-12-17 2005-09-06 Intel Corporation Switch architecture using MEMS switches and solid state switches in parallel
US6777765B2 (en) * 2002-12-19 2004-08-17 Northrop Grumman Corporation Capacitive type microelectromechanical RF switch
US6943448B2 (en) * 2003-01-23 2005-09-13 Akustica, Inc. Multi-metal layer MEMS structure and process for making the same
US7202765B2 (en) 2003-05-14 2007-04-10 Schneider Electric Industries Sas Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
US7095645B2 (en) * 2003-06-02 2006-08-22 Ambient Systems, Inc. Nanoelectromechanical memory cells and data storage devices
US7199498B2 (en) * 2003-06-02 2007-04-03 Ambient Systems, Inc. Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
US7148579B2 (en) 2003-06-02 2006-12-12 Ambient Systems, Inc. Energy conversion systems utilizing parallel array of automatic switches and generators
US20040238907A1 (en) * 2003-06-02 2004-12-02 Pinkerton Joseph F. Nanoelectromechanical transistors and switch systems
KR100513696B1 (ko) * 2003-06-10 2005-09-09 삼성전자주식회사 시이소오형 ｒｆ용 ｍｅｍｓ 스위치 및 그 제조방법
FR2857153B1 (fr) * 2003-07-01 2005-08-26 Commissariat Energie Atomique Micro-commutateur bistable a faible consommation.
US7215229B2 (en) 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
US7068220B2 (en) 2003-09-29 2006-06-27 Rockwell Scientific Licensing, Llc Low loss RF phase shifter with flip-chip mounted MEMS interconnection
US7183884B2 (en) 2003-10-15 2007-02-27 Schneider Electric Industries Sas Micro magnetic non-latching switches and methods of making same
US20050083157A1 (en) 2003-10-15 2005-04-21 Magfusion, Inc. Micro magnetic latching switches and methods of making same
US7577427B2 (en) * 2003-11-05 2009-08-18 At&T Intellectual Property I, L.P. System and method of transitioning between cellular and voice over internet protocol communication
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7265477B2 (en) * 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore
GB2410371B (en) * 2004-01-22 2007-04-04 Microsaic Systems Ltd Microengineered broadband electrical switches
JP4217899B2 (ja) * 2004-02-13 2009-02-04 日本電気株式会社 誘電体導波管スイッチ、及び、スイッチングモジュール
JP4541718B2 (ja) * 2004-02-16 2010-09-08 三菱電機株式会社 高周波集積回路とその製造方法
US20050225412A1 (en) * 2004-03-31 2005-10-13 Limcangco Naomi O Microelectromechanical switch with an arc reduction environment
US7342473B2 (en) 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
US7816999B2 (en) * 2004-04-12 2010-10-19 Siverta, Inc. Single-pole double-throw MEMS switch
US7005371B2 (en) 2004-04-29 2006-02-28 International Business Machines Corporation Method of forming suspended transmission line structures in back end of line processing
US7476327B2 (en) * 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
JP2005340536A (ja) * 2004-05-27 2005-12-08 Kyocera Corp 可変容量コンデンサ
WO2007024204A2 (en) 2004-07-19 2007-03-01 Ambient Systems, Inc. Nanometer-scale electrostatic and electromagnetic motors and generators
US7448412B2 (en) * 2004-07-23 2008-11-11 Afa Controls Llc Microvalve assemblies and related structures and related methods
US7310033B2 (en) * 2004-08-19 2007-12-18 Teravicta Technologies, Inc. MEMS switch electrode configuration to increase signal isolation
JP4494130B2 (ja) * 2004-08-26 2010-06-30 日本電信電話株式会社 静電駆動スイッチの製造方法
US7560299B2 (en) * 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7889163B2 (en) * 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) * 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7499208B2 (en) * 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7668505B2 (en) * 2004-09-10 2010-02-23 Honeywell International Inc. Radio having a MEMS preselect filter
US7724993B2 (en) * 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
CN100403476C (zh) * 2004-09-27 2008-07-16 东南大学 射频微电子机械单刀双掷膜开关及其制造方法
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7545550B2 (en) * 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7136213B2 (en) * 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7532195B2 (en) * 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
CN1755477B (zh) * 2004-09-27 2011-11-16 高通Mems科技公司 具有集成mems电开关的干涉式调制器阵列的显示装置及方法
US7843410B2 (en) * 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US20060066594A1 (en) * 2004-09-27 2006-03-30 Karen Tyger Systems and methods for driving a bi-stable display element
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
EP1800173A1 (en) * 2004-09-27 2007-06-27 Idc, Llc Method and device for multistate interferometric light modulation
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7230513B2 (en) * 2004-11-20 2007-06-12 Wireless Mems, Inc. Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch
US7162112B2 (en) * 2004-11-23 2007-01-09 Xerox Corporation Microfabrication process for control of waveguide gap size
JP2006165380A (ja) * 2004-12-09 2006-06-22 Kyocera Corp 可変容量コンデンサ
EP1722386A1 (en) 2005-05-10 2006-11-15 Interuniversitair Microelektronica Centrum Vzw Micro electromechanical device with reduced self-actuation
US20060138604A1 (en) * 2004-12-27 2006-06-29 Northrop Grumman Corporation Low charging dielectric for capacitive MEMS devices and method of making same
EP1675148B1 (en) * 2004-12-27 2009-12-02 Imec Method for designing a micro electromechanical device with reduced self-actuation
JPWO2006106567A1 (ja) * 2005-03-29 2008-09-11 三菱電機株式会社 スイッチ回路
KR20080027236A (ko) * 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7920136B2 (en) * 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
WO2006123788A1 (ja) * 2005-05-19 2006-11-23 Rohm Co., Ltd. Ｍｅｍｓ素子、ｍｅｍｓデバイス、およびｍｅｍｓ素子の製造方法
EP1910217A2 (en) * 2005-07-19 2008-04-16 PINKERTON, Joseph P. Heat activated nanometer-scale pump
US7355779B2 (en) * 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
EP1777721A1 (en) * 2005-10-18 2007-04-25 Seiko Epson Corporation Micro-electromechanical switch, method of manufacturing an integrated circuit including at least one such switch, and an integrated circuit
KR100713154B1 (ko) * 2005-12-15 2007-05-02 삼성전자주식회사 공압식 ｒｆ ｍｅｍｓ 스위치 및 그 제조 방법
US8391630B2 (en) * 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
JP4628275B2 (ja) * 2006-01-31 2011-02-09 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) * 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
EP1850360A1 (en) * 2006-04-26 2007-10-31 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion
FR2901781B1 (fr) * 2006-05-31 2008-07-04 Thales Sa Structure de micro-commutateurs radiofrequence ou hyperfrequence et procede de fabrication d'une telle structure
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP4842041B2 (ja) * 2006-07-27 2011-12-21 富士通株式会社 スイッチ
US8063456B2 (en) 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
US7684106B2 (en) * 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
JP4919819B2 (ja) * 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
US7583169B1 (en) 2007-03-22 2009-09-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS switches having non-metallic crossbeams
EP1976063B1 (en) 2007-03-30 2012-09-05 Sony Deutschland GmbH Broadband beam steering antenna
US7839028B2 (en) * 2007-04-03 2010-11-23 CJP IP Holding, Ltd. Nanoelectromechanical systems and methods for making the same
US8022896B2 (en) * 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
US20090066407A1 (en) * 2007-09-12 2009-03-12 Rochester Institute Of Technology Charge pump systems and methods thereof
US8461948B2 (en) 2007-09-25 2013-06-11 The United States Of America As Represented By The Secretary Of The Army Electronic ohmic shunt RF MEMS switch and method of manufacture
US20100263999A1 (en) * 2007-12-13 2010-10-21 Dimitrios Peroulis Low-cost process-independent rf mems switch
JP4962298B2 (ja) * 2007-12-19 2012-06-27 富士通株式会社 送受信機
US7692519B2 (en) * 2007-12-21 2010-04-06 General Electric Company MEMS switch with improved standoff voltage control
WO2009081179A1 (en) * 2007-12-21 2009-07-02 Bae Systems Plc Microwave coupler
JP5060498B2 (ja) * 2008-02-22 2012-10-31 株式会社エヌ・ティ・ティ・ドコモ デュアルバンド帯域通過型共振器およびデュアルバンド帯域通過型フィルタ
US20100001355A1 (en) * 2008-07-07 2010-01-07 Honeywell International Inc. RF MEMS Switch
EP2344416B1 (en) * 2008-11-07 2020-08-05 Cavendish Kinetics, Inc. Plurality of smaller mems devices to replace a larger mems device
GB2467848B (en) * 2009-02-13 2011-01-12 Wolfson Microelectronics Plc MEMS device and process
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8054147B2 (en) * 2009-04-01 2011-11-08 General Electric Company High voltage switch and method of making
JP5428771B2 (ja) 2009-11-06 2014-02-26 富士通株式会社 可変分布定数線路、可変フィルタ、および通信モジュール
JP5531663B2 (ja) * 2010-02-17 2014-06-25 株式会社村田製作所 高周波スイッチモジュール
US8525185B2 (en) 2010-04-07 2013-09-03 Uchicago Argonne, Llc RF-MEMS capacitive switches with high reliability
JP2013524287A (ja) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 電気機械デバイスの機械層及びその形成方法
US8722445B2 (en) 2010-06-25 2014-05-13 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
CN102393512B (zh) * 2011-09-28 2013-01-23 中国电子科技集团公司第十研究所 单天线调频连续波雷达射频无源对消方法
DE202012005934U1 (de) * 2012-06-18 2012-07-10 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Schalter
JP2013033260A (ja) * 2012-08-29 2013-02-14 Qualcomm Mems Technologies Inc セットおよびラッチ電極を備えたｍｅｍｓスイッチ
FR3000049B1 (fr) * 2012-12-21 2016-01-15 Thales Sa Composant mems capacitif a ligne de transmission enterree
FR3027448B1 (fr) * 2014-10-21 2016-10-28 Airmems Commutateur microelectromecanique robuste
KR20160051280A (ko) * 2014-11-03 2016-05-11 삼성전기주식회사 Mems 스위치 및 이의 제조방법
FR3030476B1 (fr) 2014-12-23 2020-09-25 Thales Sa Mems rf capacitif destines a des applications de forte puissance
DE102015220806B4 (de) * 2015-10-23 2020-08-27 Ihp Gmbh - Innovations For High Performance Microelectronics/Leibniz-Institut Für Innovative Mikroelektronik Schaltelement zum Schalten von differentiellen Signalen und Schaltungsanordnung
JP2017103646A (ja) * 2015-12-02 2017-06-08 日本電信電話株式会社 光送信器
EP3188307B1 (en) * 2015-12-29 2024-12-18 Synergy Microwave Corporation High performance switch for microwave mems
EP3188308B1 (en) 2015-12-29 2019-05-01 Synergy Microwave Corporation Microwave mems phase shifter
FR3051784B1 (fr) * 2016-05-24 2018-05-25 Airmems Membrane mems a ligne de transmission integree
US10784066B2 (en) 2017-03-10 2020-09-22 Synergy Microwave Corporation Microelectromechanical switch with metamaterial contacts
US9793353B1 (en) 2017-03-21 2017-10-17 Northrop Gumman Systems Corporation Multiple layer quantum well FET with a side-gate
US9793350B1 (en) 2017-03-21 2017-10-17 Northrop Grumman Systems Corporation Multiple layer side-gate FET switch
US11078071B2 (en) 2018-10-19 2021-08-03 Encite Llc Haptic actuators fabricated by roll-to-roll processing
US11070300B2 (en) 2019-03-18 2021-07-20 Apple Inc. Test probes for phased antenna arrays
US11808843B2 (en) 2019-08-29 2023-11-07 Qualcomm Incorporated Radar repeaters for non-line-of-sight target detection
US11770160B2 (en) * 2020-03-09 2023-09-26 Intelligent Fusion Technology, Inc. Hidden chamber detector
EP3979291A1 (de) * 2020-09-30 2022-04-06 Siemens Aktiengesellschaft Elektronikmodul und anlage
CN112768941B (zh) * 2020-12-30 2022-07-26 京信通信技术(广州)有限公司 移相器、移相平衡装置及电调天线
CN113327924B (zh) * 2021-05-25 2024-04-12 北京京东方技术开发有限公司 半导体器件、显示基板及显示装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4405907A (en) * 1981-10-26 1983-09-20 Rca Corporation Controllable phase shifter comprising gyromagnetic and non-gyromagnetic sections
FR2539933A1 (fr) * 1983-01-25 1984-07-27 Thomson Csf Filtre commutable pour micro-ondes
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4779097A (en) * 1985-09-30 1988-10-18 The Boeing Company Segmented phased array antenna system with mechanically movable segments
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US5121089A (en) * 1990-11-01 1992-06-09 Hughes Aircraft Company Micro-machined switch and method of fabrication
US5175521A (en) * 1991-05-31 1992-12-29 Hughes Aircraft Company Miniature dynamically tunable microwave and millimeter wave device
US5164688A (en) * 1991-05-31 1992-11-17 Hughes Aircraft Company Miniature microwave and millimeter wave tuner
US5168249A (en) * 1991-06-07 1992-12-01 Hughes Aircraft Company Miniature microwave and millimeter wave tunable circuit
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay

Also Published As

Publication number Publication date
KR960015936A (ko) 1996-05-22
US5619061A (en) 1997-04-08
JPH08213803A (ja) 1996-08-20
EP0709911A3 (en) 1997-08-06
EP0709911A2 (en) 1996-05-01

Similar Documents

Publication Publication Date Title
TW314661B (OSRAM)
US5526172A (en) Microminiature, monolithic, variable electrical signal processor and apparatus including same
CN105308789B (zh) 相移器件
TWI672859B (zh) 具有分離的接地電極的可變介電常數天線
JP7025838B2 (ja) 移相器及びフェーズドアレイ
US6417807B1 (en) Optically controlled RF MEMS switch array for reconfigurable broadband reflective antennas
US6310526B1 (en) Double-throw miniature electromagnetic microwave (MEM) switches
Chakraborty et al. Paradigm phase shift: RF MEMS phase shifters: An overview
US7126447B2 (en) RF-mems switch
US11834327B2 (en) MEMS bridge devices and methods of manufacture thereof
CN103177904A (zh) 一种射频mems开关及其形成方法
US6016122A (en) Phased array antenna using piezoelectric actuators in variable capacitors to control phase shifters and method of manufacture thereof
US20110181376A1 (en) Waveguide structures and processes thereof
CN109792106A (zh) 用于波束控制天线的液晶可调谐超颖表面
US8120443B2 (en) Radiofrequency or hyperfrequency circulator
CN101197460B (zh) 基于平面型左手微带传输线的微波移相器
US6727778B2 (en) Transmission line structures for use as phase shifters and switches
Debogovic et al. MEMS‐Reconfigurable Metamaterials and Antenna Applications
Shafai et al. Microstrip phase shifter using ground-plane reconfiguration
CN114300821B (zh) 一种移相器、天线
CN104993193A (zh) 一种混合型mems移相器
CN108648963B (zh) 一种rf-mems单刀双掷开关及微带天线阵列
CN100566010C (zh) 低激励电压和精确控制相移特性的微机电系统毫米波移相器
CN115249601A (zh) 微型机电系统开关及微型机电系统开关的制备方法
Al-Dahleh Integrated mems-based phase shifters