TW285723B - - Google Patents
Info
- Publication number
- TW285723B TW285723B TW084112299A TW84112299A TW285723B TW 285723 B TW285723 B TW 285723B TW 084112299 A TW084112299 A TW 084112299A TW 84112299 A TW84112299 A TW 84112299A TW 285723 B TW285723 B TW 285723B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P11/00—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for
- B23P11/005—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for by expanding or crimping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0753—Control by change of position or inertia of system
- Y10T137/0898—By shifting of liquid level
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87338—Flow passage with bypass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87338—Flow passage with bypass
- Y10T137/87354—Including flowmeter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49405—Valve or choke making
- Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
- Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
- Y10T29/49423—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including metal deforming
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49405—Valve or choke making
- Y10T29/49426—Valve or choke making including metal shaping and diverse operation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Flow Control (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
- Valve Housings (AREA)
- Temperature-Responsive Valves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/365,861 US5660207A (en) | 1994-12-29 | 1994-12-29 | Flow controller, parts of flow controller, and related method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW285723B true TW285723B (en, 2012) | 1996-09-11 |
Family
ID=23440685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW084112299A TW285723B (en, 2012) | 1994-12-29 | 1995-11-20 |
Country Status (10)
| Country | Link |
|---|---|
| US (4) | US5660207A (en, 2012) |
| EP (4) | EP0800672B1 (en, 2012) |
| JP (1) | JP3717520B2 (en, 2012) |
| KR (1) | KR100323958B1 (en, 2012) |
| CN (2) | CN100334515C (en, 2012) |
| AU (1) | AU4242396A (en, 2012) |
| DE (3) | DE69517447T2 (en, 2012) |
| ES (1) | ES2148585T3 (en, 2012) |
| TW (1) | TW285723B (en, 2012) |
| WO (1) | WO1996021182A2 (en, 2012) |
Families Citing this family (94)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6078030A (en) * | 1998-09-09 | 2000-06-20 | Millipore Corporation | Component heater for use in semiconductor manufacturing equipment |
| US6202669B1 (en) * | 1998-12-29 | 2001-03-20 | Honeywell International Inc. | Self-aligning valve |
| DE50012876D1 (de) * | 1999-02-22 | 2006-07-20 | Hydraulik Ring Gmbh | Wegesitzventil |
| JP2000271471A (ja) | 1999-03-24 | 2000-10-03 | Nippon M K S Kk | 液体ソース供給システム及びその洗浄方法、気化器 |
| US6138990A (en) * | 1999-03-25 | 2000-10-31 | Dxl Usa Inc. | Flow control valve assembly for mass flow controller |
| US6449571B1 (en) | 1999-07-09 | 2002-09-10 | Mykrolis Corporation | System and method for sensor response linearization |
| US6575027B1 (en) | 1999-07-09 | 2003-06-10 | Mykrolis Corporation | Mass flow sensor interface circuit |
| US6343617B1 (en) | 1999-07-09 | 2002-02-05 | Millipore Corporation | System and method of operation of a digital mass flow controller |
| US6404612B1 (en) | 1999-07-10 | 2002-06-11 | Mykrolis Corporation | Method for system for driving a solenoid |
| US6389364B1 (en) | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
| US6445980B1 (en) | 1999-07-10 | 2002-09-03 | Mykrolis Corporation | System and method for a variable gain proportional-integral (PI) controller |
| AU2001238204A1 (en) | 2000-02-14 | 2001-08-27 | Unit Instruments, Inc. | Method and apparatus for balancing resistance |
| RU2185557C2 (ru) * | 2000-04-14 | 2002-07-20 | Федеральное государственное унитарное предприятие "Конструкторское бюро общего машиностроения им. В.П.Бармина" | Клапан высокого давления |
| AU2002224569A1 (en) * | 2000-07-08 | 2002-02-05 | Fugasity Corporation | Fluid mass flow control valve and method of operation |
| WO2002008845A1 (en) * | 2000-07-25 | 2002-01-31 | Fugasity Corporation | Small internal volume fluid mass flow control apparatus |
| US6679476B2 (en) | 2000-08-08 | 2004-01-20 | Puregress, Inc. | Control valves |
| US6539968B1 (en) | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
| CN1514960A (zh) * | 2001-04-24 | 2004-07-21 | �����ػ��������豸����˾ | 调整和配置质量流量控制器的系统和方法 |
| WO2003032101A1 (en) * | 2001-10-12 | 2003-04-17 | Fugasity Corporation | System and method for making and using a mass flow device |
| JP3960054B2 (ja) * | 2002-01-21 | 2007-08-15 | 松下電器産業株式会社 | 電子部品実装装置および電子部品の実装ヘッドユニット |
| US6986361B2 (en) | 2002-04-23 | 2006-01-17 | Mendoza Michael J | Compressed air flow controller |
| US7136767B2 (en) * | 2002-06-24 | 2006-11-14 | Mks Instruments, Inc. | Apparatus and method for calibration of mass flow controller |
| US7809473B2 (en) | 2002-06-24 | 2010-10-05 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
| US6948508B2 (en) | 2002-06-24 | 2005-09-27 | Mks Instruments, Inc. | Apparatus and method for self-calibration of mass flow controller |
| US7004191B2 (en) * | 2002-06-24 | 2006-02-28 | Mks Instruments, Inc. | Apparatus and method for mass flow controller with embedded web server |
| US7552015B2 (en) | 2002-06-24 | 2009-06-23 | Mks Instruments, Inc. | Apparatus and method for displaying mass flow controller pressure |
| US6810308B2 (en) | 2002-06-24 | 2004-10-26 | Mks Instruments, Inc. | Apparatus and method for mass flow controller with network access to diagnostics |
| US6712084B2 (en) | 2002-06-24 | 2004-03-30 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
| US6868862B2 (en) * | 2002-06-24 | 2005-03-22 | Mks Instruments, Inc. | Apparatus and method for mass flow controller with a plurality of closed loop control code sets |
| EP1523660A1 (en) | 2002-07-19 | 2005-04-20 | Celerity Group, Inc. | Variable resistance sensor with common reference leg |
| AU2003253991A1 (en) * | 2002-07-19 | 2004-02-09 | Celerity Group, Inc. | Methods and apparatus for pressure compensation in a mass flow controller |
| US6997403B2 (en) * | 2003-01-13 | 2006-02-14 | Micron Technology, Inc. | Liquid vaporizer with positive liquid shut-off |
| DE502004003689D1 (de) * | 2003-04-03 | 2007-06-14 | Parker Hannifin Gmbh | Anordnung zum Erfassen und Übertragung von Messdaten aus einem hochgespannten Fluid gefüllten Druckraum |
| US7180311B2 (en) * | 2004-05-31 | 2007-02-20 | Yamaha Hatsudoki Kabushiki Kaisha | Physical quantity sensing device with bridge circuit and zero point adjusting method |
| US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
| FI116580B (fi) * | 2004-07-23 | 2005-12-30 | Kytoelae Instrumenttitehdas | Virtaussäädin |
| US7299112B2 (en) * | 2004-11-03 | 2007-11-20 | Activeshock, Inc. | Electrically controlled pressure relief valve and system and method for controlling same |
| DE102005017698B4 (de) * | 2005-04-07 | 2007-02-08 | Festo Ag & Co. | Sensorvorrichtung mit einem Durchflusssensor und einem Schaltausgang |
| JP4856905B2 (ja) * | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | 流量レンジ可変型流量制御装置 |
| US9921089B2 (en) | 2005-06-27 | 2018-03-20 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
| US9383758B2 (en) | 2005-06-27 | 2016-07-05 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
| JP2007034667A (ja) * | 2005-07-27 | 2007-02-08 | Surpass Kogyo Kk | 流量コントローラ、これに用いるレギュレータユニット、バルブユニット |
| CN100396820C (zh) * | 2006-05-25 | 2008-06-25 | 陕西科技大学 | Ti/磷灰石涂层材料金属间化合物过渡层的制备方法 |
| CN100432676C (zh) * | 2006-06-15 | 2008-11-12 | 王东升 | 流体传感器 |
| ITMO20060202A1 (it) * | 2006-06-21 | 2007-12-22 | Galliano Bentivoglio | Pistola per erogare combustibile liquido |
| FI119197B (fi) * | 2006-11-13 | 2008-08-29 | Polarteknik Pmc Oy Ab | Oskillointisylinterin ohjaukseen tarkoitettu väline |
| CN101398129A (zh) * | 2007-09-27 | 2009-04-01 | 谭仲禧 | 高精度流量自动平衡装置 |
| US7748268B2 (en) * | 2008-07-13 | 2010-07-06 | Brooks Instrument, Llc | Thermal flow meter |
| US8312705B2 (en) * | 2008-08-12 | 2012-11-20 | Honeywell International Inc. | Propellant gas control valve |
| JP5369887B2 (ja) * | 2008-10-24 | 2013-12-18 | セイコーエプソン株式会社 | 電子部品用パッケージ、圧電デバイスおよびその製造方法 |
| CH700417A1 (de) * | 2009-02-13 | 2010-08-13 | Leo Buehler | Verfahren, Steuerung, Ventilanordnung und Portioniereinrichtung zum Portionieren einer fliessfähigen, druckbeaufschlagten Masse. |
| US20100229657A1 (en) * | 2009-03-12 | 2010-09-16 | Weinstein Jason P | Sinter-bonded metal flow restrictor for regulating volumetric gas flow through an aerosol sampler inlet |
| BRPI1011037B1 (pt) * | 2009-05-19 | 2020-08-04 | Erick Girouard | Válvula com gatilho ativado por temperatura |
| US8123196B1 (en) * | 2009-10-07 | 2012-02-28 | Chernoff Larry J | Integrated valve system |
| WO2011053690A1 (en) * | 2009-10-30 | 2011-05-05 | The University Of North Carolina At Chapel Hill | Multipotent stem cells from the extrahepatic billary tree and methods of isolating same |
| WO2011085064A2 (en) * | 2010-01-08 | 2011-07-14 | Applied Materials, Inc. | N-channel flow ratio controller calibration |
| DE102010040895A1 (de) * | 2010-09-16 | 2012-03-22 | Consens Gmbh | Verfahren und Vorrichtung zur Messung von Fluidströmen |
| US9348339B2 (en) | 2010-09-29 | 2016-05-24 | Mks Instruments, Inc. | Method and apparatus for multiple-channel pulse gas delivery system |
| DE102010051743B4 (de) * | 2010-11-19 | 2022-09-01 | C. Miethke Gmbh & Co. Kg | Programmierbares Hydrocephalusventil |
| US10353408B2 (en) * | 2011-02-25 | 2019-07-16 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
| US10031531B2 (en) | 2011-02-25 | 2018-07-24 | Mks Instruments, Inc. | System for and method of multiple channel fast pulse gas delivery |
| US10126760B2 (en) | 2011-02-25 | 2018-11-13 | Mks Instruments, Inc. | System for and method of fast pulse gas delivery |
| CN102269330A (zh) * | 2011-04-28 | 2011-12-07 | 煤炭科学研究总院重庆研究院 | 煤层气集输管道压力调节控制器 |
| KR101308082B1 (ko) * | 2011-06-28 | 2013-09-12 | 엠케이프리시젼 주식회사 | 질량유량계 |
| US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
| US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| US9280161B2 (en) | 2012-03-12 | 2016-03-08 | Vistadeltek, Llc | Multiflex coupling |
| DE102012006378A1 (de) * | 2012-06-05 | 2013-12-05 | Winfried Schellbach | Sensoren mit Schnellsteckverbindersystem |
| WO2014040002A2 (en) | 2012-09-10 | 2014-03-13 | Mudd Daniel T | Pressure based mass flow controller |
| US9625048B2 (en) | 2013-09-04 | 2017-04-18 | Horiba Stec, Co., Ltd. | Interlace lifting mechanism |
| NL2011975C2 (nl) * | 2013-12-17 | 2015-06-18 | Berkin Bv | Stromingsmeetapparaat van het thermische type. |
| KR101865642B1 (ko) | 2014-03-12 | 2018-06-08 | 킴 엔곡 부 | 멀티플렉스 커플링 |
| WO2016081191A1 (en) | 2014-11-19 | 2016-05-26 | Vistadel Tek, Llc | Valve stroke amplification mechanism assembly |
| DE102015219501A1 (de) * | 2015-10-08 | 2017-04-13 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums |
| CN106369182A (zh) * | 2015-11-04 | 2017-02-01 | 衡阳中地装备探矿工程机械有限公司 | 一种整体式球阀导向套及其加工方法 |
| US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
| US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
| US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
| JP6818881B2 (ja) | 2016-10-20 | 2021-01-20 | エーエスエムエル ネザーランズ ビー.ブイ. | 圧力制御弁、リソグラフィ装置のための流体ハンドリング構造、及びリソグラフィ装置 |
| US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
| US11248708B2 (en) | 2017-06-05 | 2022-02-15 | Illinois Tool Works Inc. | Control plate for a high conductance valve |
| CN110709633B (zh) | 2017-06-05 | 2022-04-22 | 威斯塔德尔特有限责任公司 | 用于高传导性阀的控制板 |
| US10458553B1 (en) | 2017-06-05 | 2019-10-29 | Vistadeltek, Llc | Control plate for a high conductive valve |
| US10364897B2 (en) | 2017-06-05 | 2019-07-30 | Vistadeltek, Llc | Control plate for a high conductance valve |
| CN109238325B (zh) * | 2017-07-10 | 2023-10-03 | 研能科技股份有限公司 | 致动传感模块 |
| CN110968121B (zh) * | 2019-12-20 | 2023-06-20 | 西安文理学院 | 流量被动调节的中间装置 |
| CN111550598A (zh) * | 2020-05-25 | 2020-08-18 | 芜湖辉林奥远自动化科技有限公司 | 一种基于多点位管道阀门线性化采集装置及其控制系统 |
| DE102020114529B4 (de) | 2020-05-29 | 2022-03-31 | Alfmeier Präzision SE | Schaltungsanordnung zur Ansteuerung eines Systems für eine Sitzkomfortfunktion, Verfahren zur Ansteuerung einer Schaltungsanordnung und Sitz mit einem Sitzkomfortsystem |
| CN112374184B (zh) * | 2020-11-06 | 2022-02-01 | 重庆电子工程职业学院 | 一种物联网储料装置 |
| CN112816011B (zh) * | 2020-12-22 | 2023-05-23 | 北京七星华创流量计有限公司 | 一种流体测量传感器及质量流量控制器 |
| US11899477B2 (en) | 2021-03-03 | 2024-02-13 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
| DE102021106252A1 (de) * | 2021-03-15 | 2022-09-15 | Alfmeier Präzision SE | Schaltungsanordnung, Steuerverfahren, Ventil, Ventilanordnung und System für eine Sitzkomfortfunktion |
| DE102021106253A1 (de) * | 2021-03-15 | 2022-09-15 | Alfmeier Präzision SE | Ventil, Ventilanordnung und System für eine Sitzkomfortfunktion |
Family Cites Families (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1062138A (en) * | 1913-01-14 | 1913-05-20 | Robert N Baylis | Fluid-pressure regulator. |
| US1833983A (en) * | 1926-07-22 | 1931-12-01 | Edmund Rogers | Valve |
| US1819288A (en) * | 1930-12-20 | 1931-08-18 | Groble Gas Regulator Co | Fluid pressure regulator |
| US2069153A (en) * | 1934-10-05 | 1937-01-26 | Decker Screw Products Company | Method of making lubrication fittings |
| US2313128A (en) * | 1940-11-18 | 1943-03-09 | Strong Mfg Company | Fluid control valve |
| US2764996A (en) * | 1952-06-07 | 1956-10-02 | Hupp Corp | Multiple range pressure regulator |
| US2675508A (en) * | 1953-01-19 | 1954-04-13 | Gen Controls Co | Electromagnetically controlled operator |
| US2726559A (en) * | 1953-02-04 | 1955-12-13 | Giulio Mario Di | Template with drill bushing |
| US2790427A (en) * | 1955-09-23 | 1957-04-30 | Ex Cell O Corp | Flow control servo valve |
| US2902221A (en) * | 1956-06-22 | 1959-09-01 | Minnesota Mining & Mfg | Burner control system |
| FR1195631A (fr) * | 1958-05-05 | 1959-11-18 | Bague de siège pour vanne, et vanne ainsi obtenue | |
| US3533032A (en) * | 1968-09-23 | 1970-10-06 | Singer General Precision | Temperature compensated electric motor and pressure control servo valve |
| US3570807A (en) * | 1969-01-14 | 1971-03-16 | Bell Aerospace Corp | Electromechanical control valve |
| US3532121A (en) * | 1969-01-15 | 1970-10-06 | Bell Aerospace Corp | Latching valve |
| US3571769A (en) * | 1969-05-08 | 1971-03-23 | Bell Aerospace Corp | Electromagnetic force motor having adjustable magnetic saturation |
| US3840959A (en) * | 1971-06-10 | 1974-10-15 | Peter Paul Electronics | Compensating plunger for solenoid valve and method of making |
| DE2511152C2 (de) * | 1975-03-14 | 1987-01-29 | Daimler-Benz Ag, 7000 Stuttgart | Elektromagnetisches Steuerventil, insbesondere für selbsttätig schaltende Kraftfahrzeug-Getriebe |
| US4027689A (en) * | 1976-04-21 | 1977-06-07 | Robertshaw Controls Company | Explosion resistant electric heat motor gas valve |
| US4099703A (en) * | 1976-10-12 | 1978-07-11 | Ideal-Aerosmith, Inc. | Self-cleaning precision metering valve |
| US4252651A (en) * | 1979-08-29 | 1981-02-24 | Baxter Travenol Laboratories, Inc. | Negative pressure valving system and transmembrane pressure alarm system |
| US4362182A (en) * | 1981-01-14 | 1982-12-07 | Sundstrand Corporation | Nozzle force feedback for pilot stage flapper |
| US4527772A (en) * | 1982-11-22 | 1985-07-09 | International Telephone & Telegraph Corp. | Modulating control valve |
| DE3310497A1 (de) * | 1983-03-23 | 1984-09-27 | Motoren-Werke Mannheim AG vorm. Benz Abt. stationärer Motorenbau, 6800 Mannheim | Hubkolbenmotor |
| US4571801A (en) * | 1983-06-15 | 1986-02-25 | Mks Instruments, Inc. | Method of manufacturing a cartridge unit for establishing controlled laminar-flow conditions |
| US4522058A (en) * | 1983-06-15 | 1985-06-11 | Mks Instruments, Inc. | Laminar-flow channeling in thermal flowmeters and the like |
| US4524616A (en) * | 1983-09-02 | 1985-06-25 | Tylan Corporation | Adjustable laminar flow bypass |
| US4610425A (en) * | 1984-05-24 | 1986-09-09 | Robertshaw Controls Company | Fuel control valve construction, parts therefor and methods of making the same |
| US4695034A (en) * | 1984-11-27 | 1987-09-22 | Stec Inc. | Fluid control device |
| US4654052A (en) * | 1985-06-24 | 1987-03-31 | Daryl Sharp | Variable molecular separator |
| JPS6224088A (ja) * | 1985-07-23 | 1987-02-02 | Esutetsuku:Kk | 制御弁 |
| FR2610692B1 (fr) * | 1987-02-09 | 1989-06-09 | Air Liquide | Vanne de regulation pour gaz |
| US4800754A (en) * | 1987-10-07 | 1989-01-31 | Sierra Instruments, Inc. | Wide-range, adjustable flowmeter |
| IE61313B1 (en) * | 1988-06-30 | 1994-10-19 | Abx Sa | Switching microelectrovalve having a single diaphragm |
| IT1226080B (it) * | 1988-07-06 | 1990-12-10 | Sit La Precisa Spa | Gruppo valvola per la regolazione ed il controllo del flusso di gas in apparecchi a gas. |
| US4877051A (en) * | 1988-11-28 | 1989-10-31 | Mks Instruments, Inc. | Flow controller |
| US5040559A (en) * | 1989-02-06 | 1991-08-20 | Mks Instruments, Inc. | Modulating positive shutoff mechanism |
| US4959141A (en) * | 1989-08-14 | 1990-09-25 | Facet Quantek, Inc. | Fuel filter with positive water shutoff |
| US5086801A (en) * | 1989-11-06 | 1992-02-11 | Mks Instruments, Inc. | Vacuum processing system and method |
| US5044199A (en) * | 1989-11-13 | 1991-09-03 | Dxl International, Inc. | Flowmeter |
| JP3047184B2 (ja) * | 1989-11-27 | 2000-05-29 | 株式会社エステック | 質量流量計 |
| JPH04110617A (ja) * | 1990-08-31 | 1992-04-13 | Nippon Tairan Kk | マスフローコントローラーの分流構造 |
| US5100100A (en) * | 1990-09-12 | 1992-03-31 | Mks Instruments, Inc. | Fluid control and shut off valve |
| US5253520A (en) * | 1990-12-07 | 1993-10-19 | Dxl International, Inc. | Flow sensor connector |
| US5165655A (en) * | 1991-07-12 | 1992-11-24 | Dxl Usa | Flow control valve assembly minimizing generation and entrapment of contaminants |
| US5371828A (en) * | 1991-08-28 | 1994-12-06 | Mks Instruments, Inc. | System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure |
| US5305638A (en) * | 1992-03-20 | 1994-04-26 | Dxl International, Inc. | Mass flowmeter having non-adjustable flow splitter |
| US5314164A (en) * | 1992-07-17 | 1994-05-24 | Mks Instruments, Inc. | Pivotal diaphragm, flow control valve |
| JP2838626B2 (ja) * | 1992-09-09 | 1998-12-16 | 日清紡績株式会社 | 電磁弁装置 |
| US5341566A (en) * | 1993-05-10 | 1994-08-30 | Eaton Corporation | Conduit attachment |
-
1994
- 1994-12-29 US US08/365,861 patent/US5660207A/en not_active Expired - Lifetime
-
1995
- 1995-11-20 EP EP95940785A patent/EP0800672B1/en not_active Expired - Lifetime
- 1995-11-20 EP EP99108927A patent/EP0940740A3/en not_active Ceased
- 1995-11-20 AU AU42423/96A patent/AU4242396A/en not_active Abandoned
- 1995-11-20 CN CNB2004100384474A patent/CN100334515C/zh not_active Expired - Fee Related
- 1995-11-20 DE DE69517447T patent/DE69517447T2/de not_active Expired - Fee Related
- 1995-11-20 JP JP52098096A patent/JP3717520B2/ja not_active Expired - Fee Related
- 1995-11-20 WO PCT/US1995/015157 patent/WO1996021182A2/en active IP Right Grant
- 1995-11-20 CN CNB951975684A patent/CN1155864C/zh not_active Expired - Fee Related
- 1995-11-20 ES ES95940785T patent/ES2148585T3/es not_active Expired - Lifetime
- 1995-11-20 EP EP99108929A patent/EP0940742B1/en not_active Expired - Lifetime
- 1995-11-20 DE DE69526378T patent/DE69526378T2/de not_active Expired - Fee Related
- 1995-11-20 DE DE69535683T patent/DE69535683T2/de not_active Expired - Fee Related
- 1995-11-20 US US08/860,343 patent/US5901741A/en not_active Expired - Lifetime
- 1995-11-20 EP EP99108928A patent/EP0940741B1/en not_active Expired - Lifetime
- 1995-11-20 KR KR1019970704536A patent/KR100323958B1/ko not_active Expired - Fee Related
- 1995-11-20 TW TW084112299A patent/TW285723B/zh active
-
1996
- 1996-07-23 US US08/685,260 patent/US5850850A/en not_active Expired - Lifetime
- 1996-07-23 US US08/685,322 patent/US5765283A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0940742A3 (en) | 2000-07-12 |
| EP0940740A3 (en) | 2000-07-12 |
| ES2148585T3 (es) | 2000-10-16 |
| DE69526378T2 (de) | 2002-11-14 |
| EP0940741A2 (en) | 1999-09-08 |
| JPH10512071A (ja) | 1998-11-17 |
| EP0940741A3 (en) | 2000-07-12 |
| DE69535683T2 (de) | 2009-01-08 |
| WO1996021182A3 (en) | 1996-09-06 |
| CN1155864C (zh) | 2004-06-30 |
| US5850850A (en) | 1998-12-22 |
| EP0940741B1 (en) | 2008-01-09 |
| US5765283A (en) | 1998-06-16 |
| KR100323958B1 (ko) | 2002-06-22 |
| CN1601420A (zh) | 2005-03-30 |
| WO1996021182A2 (en) | 1996-07-11 |
| US5660207A (en) | 1997-08-26 |
| CN1175310A (zh) | 1998-03-04 |
| DE69517447D1 (de) | 2000-07-13 |
| US5901741A (en) | 1999-05-11 |
| JP3717520B2 (ja) | 2005-11-16 |
| EP0940742A2 (en) | 1999-09-08 |
| DE69535683D1 (de) | 2008-02-21 |
| DE69526378D1 (de) | 2002-05-16 |
| EP0800672A2 (en) | 1997-10-15 |
| CN100334515C (zh) | 2007-08-29 |
| EP0800672B1 (en) | 2000-06-07 |
| EP0940740A2 (en) | 1999-09-08 |
| EP0940742B1 (en) | 2002-04-10 |
| DE69517447T2 (de) | 2001-01-11 |
| AU4242396A (en) | 1996-07-24 |